Producing binary diffraction gratings in the double-diffraction system

In this paper, a method — based on the diffraction of light — for producing binary diffraction gratings is presented. It is shown that using two master gratings of the Ronchi type and utilizing the results of the double diffraction system it is possible to produce binary gratings with an arbitrary opening ratio. The results have been extended for a two-dimensional case and it is shown that producing binary grid gratings with arbitrary opening ratios in both x and y directions is also possible.     

离焦量和非单色光对二元相位光栅泰伯像的影响

利用平面波衍射的角谱理论,分析计算了二元相位光栅衍射光场的空间分布,特别讨论了离焦量和非单色光对泰伯像的影响.随离焦量和带宽的增加,泰伯像的对比度和衍射效率减小,而压缩比增加.计算结果指出,在带宽<1000或离焦量<0.01时,其对比度和衍射效率减小不到10%,仍能成较高质量的泰伯像;当带宽>5000或离焦量>0.1时,成像质量显著下降.用薄膜沉积法制作了二元相位光栅,实验验证了理论结果.这些结果对泰伯成像和阵列照明器的设计有重要的参考价值.     

Genetic algorithm-based design method for multilevel anisotropic diffraction gratings

We developed a method for the design of multilevel anisotropic diffraction gratings based on a genetic algorithm. The method is used to design the multilevel anisotropic diffraction gratings based on input data that represent the output from the required grating. The validity of the proposed method was evaluated by designing a multilevel anisotropic diffraction grating using the outputs from an orthogonal circular polarization grating. The design results corresponded to the orthogonal circular polarization grating structures that were used to provide outputs to act as the input data for the process. Comparison with existing design methods shows that the proposed method can reduce the number of human processes that are required to design multilevel anisotropic diffraction gratings. Additionally, the method will be able to design complex structures without any requirement for subsequent examination by a human designer. The method can contribute to the development of optical elements by designing multilevel anisotropic diffraction gratings.     

共振域矩形介质光栅的逆向设计

采用模态法研究了共振域光栅分束器及闪耀光栅等光学器件的设计原理及逆向设计方法,给出了-1级非偏振闪耀光栅的典型设计示例。研究表明,自准直角入射时,光束在光栅内传输将激发产生离散模,通过调节离散模透过光栅传输时的累积相位差,可对衍射光进行调控,实现偏振(非偏振)分束、偏振(非偏振)闪耀等功能。采用严格耦合波法对基于模态法逆向设计的-1级非偏振石英闪耀光栅的几何参数进行验证,计算结果显示两者非常吻合,证明了该方法的正确性。     

Area-coded effective medium structures, a new type of grating design

We propose a new way to design gratings with desired diffraction properties by using subwavelength feature sizes perpendicular to the ordinary superwavelength grating period. This is different from well-known one-dimensional binary-blazed gratings that use a structuring along the grating period and thus opens new flexibility in generating arbitrary effective-index distributions in the direction of the grating period. Since the subwavelength features form contiguous areas, they are called area-coded effective medium structures (ACES). Compared with well-known binary subwavelength structures in two-dimensional arrangements consisting of pillars, ACES are more stable and have comparable efficiency properties. As an example we show how to design in principle a four-level area-coded effective medium grating, compare the efficiency of ACES with binary-blazed and échelette gratings, and optimize the subwavelength period of ACES.     

Diffraction of ultrashort optical pulses from circularly symmetric binary phase gratings

The complete spatiotemporal characterization of the diffracted field of ultrashort pulses after passing through circularly symmetric binary phase diffraction gratings is carried out. The complex field is registered at different planes behind the gratings with an ultrashort-pulse measurement technique called SEA TADPOLE. Numerical simulations based on scalar diffraction theory are compared with the measurements.     

Wide-field-angle behavior of blazed-binary gratings in the resonance domain

Blazed-binary gratings for which a blazed effect with binary etches is achieved under normal incidence offer first-order diffraction efficiencies larger than those of blazed-échelette gratings in the resonance domain [Opt. Lett. 23 1081 (1998)]. We provide further insight into the behavior of blazed-binary gratings and show that they operate efficiently under symmetrical mounting and over a wide field-angle interval. These properties are illustrated with theoretical and experimental results obtained for an approximately 1000-line/mm grating at 633 nm.     

Phase Modulation Characteristics Analysis of Optically-Addressed Parallel-Aligned Nematic Liquid Crystal Phase-Only Spatial Light Modulator Combined with a Liquid Crystal Display

An optically addressed parallel-aligned nematic-liquid-crystal spatial light modulator (PAL-SLM) has been studied as a dynamic phase-only light modulation device. The phase modulation characteristics of the PAL-SLM using a liquid crystal display (LCD) as an addressing mask were investigated by analyzing diffraction efficiencies resulting from binary gratings projected from the LCD. A more than 2π phase-only modulation depth was achieved. The highest first-order diffraction efficiency of approximately 38% was also obtained; this is close to the theoretical limit. The experimental results of diffraction efficiencies depending on the phase modulation depth are in good agreement with the simulation for the system operation.     

High efficiency binary lenses

We have produced computer generated off-axis binary lenses that have 94% first order diffraction efficiency as measured in the infrared (10.6 μm). The observed point spread functions of these lenses were diffraction limited. Our work uses three independent developments: (1) theories on straight-line binary diffraction gratings operating in the electromagnetic (EM) domain, (2) large-scale integration advances in pattern generation and substrate depositions, and (3) improvements in reactive sputtering techniques.     

高衍射效率亚波长结构Dammann光栅的设计

传统的Dammann光栅是基于标量衍射理论设计的二值相位等光强分束器件，其衍射效率的典型值为80%左右.基于严格耦合波分析理论和遗传算法，提出了一种设计亚波长结构Dammann光栅的新方法，且该新型二值相位光栅具有较高的衍射效率.同时利用自编的仿真程序包设计了多个光栅，并分析了制作误差对其衍射效率和光强均匀性的影响.仿真结果表明，用该方法所设计的Dammann光栅的衍射效率超过92%.     

计算凹面闪耀光栅衍射效率的通用方法

为使凹面光栅的衍射能量更多地集中在所需要的级次上,提出了利用机械刻划的方法在凹面基底上制作变刻槽角度的凹面闪耀光栅,并利用菲涅耳-基尔霍夫衍射公式推导了同时在主截面和非主截面内计算凹面闪耀光栅衍射效率的理论方法,弥补了以往只在主截面内考虑衍射效率的不足,最后利用Matlab仿真软件模拟了衍射效率随波长的变化曲线,并对比了在不同制作和使用参数下衍射效率峰值的变化规律,为今后凹面光栅的设计和制作提供了参考价值。     

连续面型高效率光栅分束器件的设计

阐述了用虚源法设计连续面型光栅分束器件的原理 ,提出了一种局部搜索遗传算法 ,并将其用于优化器件的性能。局部搜索遗传算法结合了局部搜索算法和遗传算法的优点 ,可以有效地克服遗传算法的“早熟收敛”现象 ,具有更强的全局收敛能力。用文中给出的方法可以得到具有较好均匀性的、高衍射效率的连续面型光栅分束器件。     

Polarizing beam splitter of two-layer dielectric rectangular transmission gratings in Littrow mounting

We theoretically investigated the design of polarizing beam splitters (PBS) of two-layer dielectric rectangular transmission gratings in Littrow mounting. The PBS grating is aimed to separate TE and TM polarized waves into two different transmitted orders, i.e. the 0th and −1st orders. The polarization-dependent diffraction process is analyzed by using a simplified modal method. The mode reflection and transmission at the interface of the two layers are illustrated. Design equations are given based on the average mode indices of the even and odd modes inside the grating region, which are verified by using rigorous coupled wave analysis. Moreover, with simulated annealing algorithm, two kinds of two-layer PBS gratings are optimized for operation over the C-band (1520-1570 nm). Compared with the single-layer transmission PBS gratings, such two-layer scheme exhibits a great flexibility of design. The PBSs of two-layer dielectric transmission gratings should be useful for practical applications.     

Apodization‐Assisted Subdiffraction Near‐Field Localization in 2D Phase Diffraction Grating

Conventional phase diffraction gratings can be used to localize the incoming optical radiation in the near‐field region. A new design of the binary phase diffraction grating is proposed with embedded pupil opaque mask inside each stripe. By means of numerical simulations, it is shown that with this masked phase grating the spatial resolution of the near‐field localization can be substantially improved and brought even beyond the solid immersion limit (λ/2n). Moreover, due to anomalous apodization effect, the subdiffraction field localization is accompanied by intensity enhancement as compared to the non‐masked design. The pupil mask rearranges the optical fluxes within the stripes and promotes the Fano resonances excitation in the periodic step lattice. This can be important for advancing the phase grating‐based super‐resolution technologies, including subdiffraction imaging, interferometry, and surface fabrication.     

台阶光栅衍射的傅里叶分析

提出了一种台阶光栅模型 ,并应用傅里叶光学方法推导出了反射式衍射光强的表达式。分析计算了衍射光强随台阶数、入射波长、衍射角和轮廓角 (闪耀角 )的变化关系。结果表明 ,台阶光栅能起到闪耀作用 ,台阶对衍射强度分布有影响 ,但不改变衍射光极大值的位置 ,随台阶数的增加 ,能量逐渐向闪耀方向集中。当台阶数等于 8时 ,其衍射效率可接近三角形闪耀光栅的衍射。台阶光栅衍射的傅里叶分析对光栅制作有一定的指导意义     

On the design of Dammann gratings

In recent years the design of Dammann gratings for the application as array illuminators has been widely discussed. Important progress has been made. However, some problems concerning the control of design algorithms remain to be solved. It is shown how design theory of diffractive elements can be used to avoid these difficulties and to formulate a straightforward design method to obtain Dammann gratings optimized in diffraction efficiency and uniformity.     

一种液晶相位调制特性的测量方法

提出一种基于衍射光栅的液晶相位调制特性测量方法.该方法利用液晶构建相位分别为0和φ的二值光栅,通过傅里叶光学的方法推导衍射光栅第0级衍射光斑光强和调制相位φ之间的关系,然后实测光强和液晶驱动电压之间的对应关系来得到相位和液晶驱动电压之间的对应关系,即液晶相位光栅的相位调制特性.最后利用测量相位调制特性结果构建液晶相控阵,用光束偏转误差验证调制特性测量结果,相位测量误差小于1×10~(-3)rad.     

Design of a circular Dammann grating

A novel circular Dammann grating is proposed to generate uniform-intensity impulse rings corresponding to different diffraction orders in the far field. The intensities of the rings are determined by the coefficients of the circular sine series decomposition of the grating function. The definition of diffraction efficiency and uniformity for this novel device are described. Numerical solutions of binary phase circular Dammann gratings are presented. A binary phase three-order circular Dammann grating of pi phase depth is fabricated by an e-beam direct writing technique and is experimentally demonstrated.     

Fabrication of high-efficiency diffraction gratings in glass

We investigated a microfabrication process for optical gratings with periods of micrometer order that use ultrafast laser pulses in semiconductor-doped glass. ZnS- or PbS-doped SiO2-A12O3-B2O3-CaO-ZnO-Na2O-K2O glass was prepared by a melting method. Glass transmission diffraction gratings with a high refractive-index difference were fabricated with femtosecond laser pulses. The first-order diffraction efficiencies of these gratings were approximately 80%, and the first-order diffraction angles of these gratings were 8 degrees at telecommunication wavelengths.     

基于亚波长偏振光栅的偏振光分束器设计

利用琼斯矩阵和矢量傅里叶系数方法分析了二元亚波长偏振光栅的偏振特性和衍射效率,并给出了相应的数学解析式.研究发现,通过入射光的偏振可以控制不同衍射输出级的偏振态,且0级输入偏振态与输出偏振态始终相同,而其它级次除线偏光外都与入射偏振态相反.当二元亚波长偏振光栅的位相延迟分别设置为0.62π和π时,可以将二元亚波长偏振光栅设计为1→3或1→2的偏振光分束器,且分束器具有衍射效率高、宽带宽、对入射角的变化不甚敏感的特点.