液晶空间光调制器相位调制测量及波前校正

提供了一种简单且精度较好的测量液晶空间光调制器相位调制特性的方法,即相位与电压(灰度)之间的关系。采用数字波面移相干涉仪,由干涉仪直接给出不同灰度对应的相位差,从而得到液晶空间光调制器的相位调制曲线。利用液晶空间光调制器实现了波前校正。由干涉仪作波前测试,对待校正的畸变波前进行泽尼克多项式描述,根据液晶空间光调制器的相位与灰度的关系,产生相应的灰度图,获得畸变波前的共轭波前,从而完成静态波前的校正,使相关参数如PV值、RMS值和Strehl比值得到了改善。     

A single-shot pixellated phase-shifting interferometer utilizing a liquid-crystal spatial light modulator

We introduce a novel phase-shifting pixellated interferometer based on a liquid-crystal spatial light modulator and simulate the expected performance. The phase-shifted frames are captured simultaneously, which reduces problems arising from vibrations and air turbulence. The liquid-crystal spatial light modulator is flexible and can be configured to provide a large number of phase-shift levels and geometries to reduce measurement error.     

两步广义相移干涉术的光学实验验证

提出了一种基于两步广义相移干涉术的波前再现技术以及基于衍射场统计特性的未知相移值提取算法,并且进行了光学实验验证.该方法中可仅利用两幅干涉图及一次不需精确预设的未知相移,参照物光光强和参考光光强,即可通过计算提取真实的相移量,进而恢复出物波波前复振幅,而无需借助傅里叶谱分析或数字滤波等操作.在光学实验中,对借助于空间光调制器（SLM）的间接输入和三维漫反射物体直接输入两种情况进行了详细地研究,得到的光学实验结果验证了所提方案的有效性和可行性. 关键词： 信息光学 相移干涉术 波前再现 数字图像处理     

Experimental validation of closed-loop adaptive optics based on a self-referencing interferometer wavefront sensor and a liquid-crystal spatial light modulator

A closed-loop adaptive optics system based on a self-referencing interferometer wavefront sensor (SRI WFS) using phase-shifting point-diffraction technique and an electrically addressed phase-only liquid-crystal spatial light modulator (LC SLM) is built and validated experimentally. The wavefront aberration of incoming beam is directly measured by analyzing four frames phase-shifted interferograms captured by a single CCD camera in two camera shots, and then by loading the conjugate function onto the SLM the wavefront aberration is corrected. The proposed scheme does not rely on any complicated control algorithm or wavefront-reconstruction algorithm and can achieve high-resolution and high-accuracy correction. Closed-loop correction results of single order Zernike aberrations and a Kolmogorov turbulence phase screen show that considerable improvements in the Strehl ratio (of greater than 0.94) is achieved.     

Phase-Measuring Algorithms to Suppress Spatially Nonuniform Phase Modulation in a Two-Beam Interferometer

Phase modulation of presently used phase-shifting interferometers is assumed to be spatially uniform across the observing aperture. However, calibration errors or the configuration of an interferometer can cause a spatial nonuniformity in the phase modulation. Spatial nonuniformity causes a significant error in the measured phase when the phase modulator has nonlinear sensitivity. An even-order nonlinearity in the phase modulation in particular contributes to the errors. Lowest-order errors can be suppressed by adding a new symmetry to the sampling functions of the phase-shifting algorithm, however the algorithm suffers from large random noise. The random noise is shown to be decreased substantially by applying one more sampled frame to the algorithm. We derive new seven-sample and eight-sample algorithms that can compensate for a nonuniform phase shift and has much less random noise than the previous algorithm we proposed.     

Adaptive wave-front correction by means of all-optical feedback interferometry

A novel adaptive wave-front correction system based on an all-optical feedback interferometer is described. In this system the two-dimensional output fringe intensity from a Mach-Zehnder interferometer with large radial shear is optically fed back to an optically addressed phase-only liquid-crystal spatial light modulator. Consequently, without a separate aberration-free reference wave, the modulator phase approximates the conjugate of the interferometer phase that is directly related to the phase of the input aberrated wave front, so this system is applicable in adaptive optics. We successfully achieved real-time correction of aberrated wave fronts: A diffraction pattern that was seriously distorted because of aberrations was transformed into a diffraction-limited spot immediately after the feedback loop was closed.     

Phase measurements of a twisted nematic liquid crystal spatial light modulator with a common-path interferometer

We present a novel and high accuracy (±1°) technique for measuring the difference in phase delay between the positive and negative eigenvectors of a twisted nematic liquid crystal spatial light modulator (LCSLM) as a function of applied voltage. We show a new architecture for a common-path interferometer where we simultaneously generate both the positive and negative eigenvectors of the LCSLM. We use an electro-optic light modulator to provide a time varying phase shift between the two eigenvectors and measure the phase delay difference between the two eigenvectors. We compare the phase delay values with those obtained using a Mach–Zehnder interferometer and find good agreement.     

基于空间光调制器的非相干数字全息单次曝光研究

菲涅耳非相干相关全息术(Fresnel incoherent correlation holography,FINCH)利用在空间光调制器(spatial light modulator,SLM)上加载双透镜模式对同一物点光分束自相干,并通过改变加载的相位因子得到不同的相移全息图.本系统利用SLM可分区编码调制特性,将FINCH成像中SLM上分三次加载的0°,120°,240°相位双透镜掩模各提取1/3组成一幅复合相移模式加载,并研究了三种相位分布方式对FINCH成像质量的影响.结果表明:三个相位在SLM上分布间隔越大,再现像越清晰.在此基础上,提出了一种新的掩模加载方式,在SLM加载透镜阵列,每一个相位因子对应一个双透镜,具有一个光轴.实验表明,通过这种加载方式,通过SLM后形成的三个相移图能够一次在电荷耦合器上记录,并且三个相移图不重叠,然后通过MATLAB编程计算将不同相移角度的全息图分别提取出来,通过三步相移计算合成一幅包含有物光波的复值全息图,最后通过数值再现算法重建待测样品.此系统可用于对光源相干性较低的实时成像系统,也为微小形变测量、动态物体的观测提供了新方法,为非相干数字全息术的发展提供了新思路.     

菲索干涉仪中精确移相的实现

为了实现移相式菲索干涉仪对光学元件面形的高精度测量,建立了干涉仪同步采集移相系统,并对精确移相方法进行了研究。介绍了移相系统的构成和工作原理,计算了测量过程中移相器的速度。针对PZT移相器在移相过程中会引入离焦误差,并存在加速段和减速段的问题,详细设计了移相器的行进过程。最后,对移相器的性能进行了标定。在改造后的干涉仪上开展了重复性验证实验,结果表明：干涉仪可以获得λ/11 340的RMS测量重复性。对改造后干涉仪与Zygo公司生产的Verifire XP/D干涉仪的测量精度做了比对实验,结果显示：相同元件下两者测量结果的面形RMS之差约为0.9 nm,表明提出的移相系统及移相方法在重复性和准确度方面都能满足纳米级面形测量的要求,为研制高精度移相干涉仪奠定了基础。     

Selective edge enhancement in three-dimensional vortex imaging with incoherent light

We demonstrate a new imaging method enabling a selective edge contrast enhancement of three-dimensional amplitude objects with spatially incoherent light. The imaging process is achieved in a spiral modification of Fresnel incoherent correlation holography and uses a vortex impulse response function. The correlation recordings of the object are acquired in a one-way interferometer with the wavefront division carried out by a spatial light modulator. Two different methods based on applying a helical reference wave in the hologram recording and a digital spiral phase modulation in image reconstruction are proposed for edge enhancement of amplitude objects. Results of both isotropic and anisotropic spiral imaging are demonstrated in experiments using an LED as an incoherent source of light.     

Common-path phase-shifting lensless holographic microscopy

We present an approach capable of high-NA imaging in a lensless digital in-line holographic microscopy layout even outside the Gabor's regime. The method is based on spatial multiplexing at the sample plane, allowing a common-path interferometric architecture, where two interferometric beams are generated by a spatial light modulator (SLM) prior to illuminating the sample. The SLM allows phase-shifting interferometry by phase modulation of the SLM diffracted beam. After proper digital processing, the complex amplitude distribution of the diffracted object wavefront is recovered and numerically propagated to image the sample. Experimental results are reported that validate the proposed method.     

Active Phase-Shifting Interferometer Using Current Modulation of a Laser Diode

An active phase-shifting interferometer using current modulation of a laser diode is proposed. Fringe movement in the instrument is detected by a spatial filtering detector whose output is fed back to the injection current of the laser diode to lock the fringes and shift them correctly for phase shifting analysis. Frequency modulation characteristics of the laser diode and frequency response of the feedback system are first investigated. We constructed a portable interferometer head set apart from a mirror under test then measured the shape of a spherical mirror 130 mm in diameter, which was placed on a wooden table subject to vibration. Measurement repeatability of λ/35 was achieved.     

Improved phase-shifting diffraction interferometer for microsphere topography measurements

In this study, an improved phase-shifting diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate apparatus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer's specification value.     

基于菌紫质薄膜的相移器及其应用

设计了一种基于菌紫质光致各向异性的相移器,并把它用于相移干涉计量。取向随机分布的极性菌紫质分子对线偏振诱导光的选择性吸收导致分子取向分布不均匀,使其呈现宏观的各向异性,这种各向异性与诱导光的偏振特性密切相关,圆偏振光经过各向异性的菌紫质薄膜后,出射光的偏振特性完全由偏振诱导光决定。基于上述原理设计了一种新型的相移器,用琼斯矩阵法推导了基于相移器的相移干涉原理。该相移器在工作过程中不需要移动Mach-Zender干涉仪内部的任何器件,仅需要改变外部控制光路中诱导光的偏振取向就可以控制参考光的相位,有助于提高设备的抗振能力。用最小二乘法对相移干涉结果进行重建,得到了和实际相位一致的结果,验证了相移器的可行性。     

Phase-shifting interferometric profilometry with a wavelength-tunable diode source

A phase-shifting interferometer with a tunable external-cavity laser diode has been constructed for forming three-dimensional (3-D) phase profiles. The interference phase is shifted equally in four steps by varying the source wavelength. Profilometry is achieved by measuring the phase shifts that are extracted by the Carré algorithm. The linear regression of the distance measurement from 40 μm to 13mm has been experimentally demonstrated by phase-shifting interferometry. A laser-diode interferometer has been applied to 3-D profile measurement for a step-mirror object at a deep depth.     

Polarization phase-shifting Jamin shearing interferometer

The Jamin shearing interferometer is very useful in wavefront testing, especially for the low coherent light. Based on this interferometer, a polarization phase-shifting Jamin shearing interferometer is proposed to improve the performance. In the interferometer, two interference beams are linearly polarized and a polarization phase shifter is applied to realize the phase shifting. Different types of configurations of the interferometer are given. With phase-shifting interferograms, the precision of the interferometer can be improved. The interferometer is kept as an equal optical path system and its shearing amount remains changeable with simple structure and easy operation. In experiments, phase-shifting interferograms are obtained by rotating the analyzer. The usefulness of the interferometer is verified.     

空域移相偏振点衍射波前检测技术

点衍射干涉仪结构简单、共光路、测量精度高, 空域移相干涉仪抗振性能优越, 两者在波前检测领域获得了广泛的应用. 本文采用激光打孔技术, 通过在金属纳米线栅偏振片上制备小孔, 制作了偏振点衍射板; 结合分光结构的空域移相技术, 搭建了空域移相偏振点衍射干涉仪, 并对一焦距为550 mm, F_#10的平行光管准直物镜透射波前进行测量, 与法国Phasics公司生产的商业化波前传感器SID4的测量结果相比较, 两者峰谷值相差0.09λ, 均方根值相差0.012λ ; 利用35项Zernike多项式拟合两者的测量结果, 将拟合得到的系数在同一坐标轴下绘制成两条曲线, 两者基本重合, 从而验证了所搭建的空域移相偏振点衍射波前检测装置的测试精度. 从而在传统点衍射干涉仪的基础上引入了空域移相技术, 实现了波前的高分辨率、高精度、实时检测, 并且提高了对振动、气流等环境因素的抗干扰能力.     

一种基于确定性量子密钥分发误码判据的相位调制器半波电压的精确测定方法

基于相位编码的量子密钥分发系统需要对信息加载的相位调制器的半波电压进行精确的测定以减小量子密钥的误码率,相位调制器半波电压的测量精度直接影响到了量子密钥分发系统的最终误码.本文提出了一种基于确定性量子密钥分发误码率判据的相位调制器半波电压的精确测定方法,所采用相位调制器的半波电压的测量精度达到了2 mV,实验结果表明这种方法可以用于量子密钥分发实际应用系统中实时获得不同条件下的行波相位调制器的半波电压以最大程度地减小由于相位信息不准确加载而带来的系统误码. 关键词： 量子保密通信 相位编码 半波电压 误码率     

Self-mixing interferometer based on temporal-carrier phase-shifting technique for micro-displacement reconstruction

A novel self-mixing interferometer based on temporal-carrier phase-shifting technique is presented. The phase of the laser beam is modulated with a triangular wave by an electro-optic modulator (EOM) in the external cavity. Phase demodulation of the interference signal is achieved by five-step Schwider-Hariharan algorithm combined with a special sampling technique. Theoretical analysis and simulation results are presented. Some errors of the technique have been discussed. Experimentally, the new interferometer is applied to measure the displacement of a high precision commercial PZT and a displacement measurement accuracy of λ/60 can be obtained.     

High-speed horizontal-path atmospheric turbulence correction with a large-actuator-number microelectromechanical system spatial light modulator in an interferometric phase-conjugation engine

Results of atmospheric propagation for a high-speed, large-actuator-number adaptive optics system are presented. The system uses a microelectromechanical system- (MEMS-) based spatial light modulator correction device with 1024 actuators. Tests over a 1.35-km path achieved correction speeds in excess of 800 Hz and Strehl ratios close to 0.5. The wave-front sensor was based on a quadrature interferometer that directly measures phase. This technique does not require global wave-front reconstruction, making it relatively insensitive to scintillation and phase residues. The results demonstrate the potential of large-actuator-number MEMS-based spatial light modulators to replace conventional deformable mirrors.