Transfer constant of a multilayer acoustic transducer at the direct and inverse transformation

The algorithms for calculating the direct and inverse transfer constants of an acoustic transducer with an arbitrary number of intermediate layers between the piezoelectric layer, the acoustic duct, and the rear acoustic load are described. The results of a numerical analysis are presented and discussed. As an illustration, a 100-MHz transducer formed by a (Y+36°)-cut LiNbO₃ plate fixed on a fused-quartz acoustic duct with the help of five metal layers is considered. The other side of the plate carries two metal layers and a rear load. The phase-frequency characteristics and the transformation loss as a function of frequency are analyzed for the cases of direct and inverse transformation under the assumption that the signal is supplied and retrieved by a two-wire line.     

Generation and reception of short acoustic pulses by multilayer piezoelectric transducers

By means of the Fourier transformation, a formula is obtained for calculating the pulse response of a transducer when a square pulse of a given duration is supplied to its input and the excited “sound” is reflected from the free flat end of the acoustic line and returns to the transducer. For a frequency of 100 MHz, real lithium niobate transducers that are connected through intermediate layers to the acoustic line made of fused quartz and to a rear load with a given acoustic impedance are considered. The pulse response is calculated for the transducers with different values of the sublayer thickness, rear acoustic load, transmission line impedance, and original pulse duration. The results of the calculations are compared with the experiment.     

采用Helmholtz共鸣器与悬臂梁压电换能器的声能采集器研究

针对环境中广泛存在的声能,提出了一种采用Helmholtz共鸣器和悬臂梁压电换能器的声能采集器。Helmholtz共鸣器对入射声压进行放大,放大后的声压引起共鸣器弹性薄壁振动,薄壁的振动传递到压电换能器产生电能输出。建立了带弹性壁的立方形共鸣器的等效集中参数理论模型,并与压电换能器的机电特性结合,分析了声能采集器的声-机-电转换原理,研究了声压、声波频率和负载阻抗对输出功率的影响,研究结果为此类声能采集器的优化设计及工程应用提供了一种可行的方法。实验中,声源通过声波导管输出声能,当共鸣器管口处的声压级为94 dB时,系统实测最大输出功率达240μW。该采集器不仅可作为声能自供能采集器,还可在较远距离为低能耗电子装置进行有源声供能。      

外接LC电路的可调压电换能器的频率特性

压电换能器往往因受到温度与负载的影响,导致其谐振频率、反谐振频率和机械品质因数等特征参数发生变化。通过在压电换能器中设计用于调节的压电陶瓷片,并在调节压电陶瓷片两端外接电负载,可以实现压电换能器的频率调节,修正由于温度和负载导致的频率漂移。基于压电换能器的Mason等效电路,建立外接LC调节电路的压电换能器的谐振频率、反谐振频率模型,分析LC调节电路中调节电感对频率调节特性的影响;通过实验研究外接LC调节电路对可调压电换能器机械品质因数的影响,并验证调节电感对频率调节特性的影响。理论分析和实验研究的结果表明:随着调节电感的增大,调节电容对频率的调节灵敏度提高,可调压电换能器的频率调节宽度拓宽,但也会使压电换能器的机械品质因数降低。合理选择调节电感和调节电容能兼顾频率调节宽度和机械品质因数的要求。此研究可为后续自适应压电换能器的频率调节系统设计提供指导。      

薄膜体声波谐振器的力敏特性研究

薄膜体声波谐振器(FBAR)力传感器作为一种新型的谐振式传感器,力敏特性是其设计原理。以FBAR微加速度计为例研究了工作在纵波模式,采用具有纤锌矿结构的AlN作为压电薄膜的FBAR,施加应力载荷后,其弹性常数改变导致FBAR谐振频率偏移的力敏特性。首先,采用有限元(FEA)静力学仿真,得到惯性力载荷作用下集成在硅微悬臂梁上的压电薄膜的应力分布;选取最大应力值作为载荷,基于第一性原理计算纤锌矿AlN的弹性系数与应力的关系式,预测惯性力载荷作用下AlN弹性系数的最大变化量。其次,采用谐响应分析,对比空载和不同惯性力载荷作用下FBAR微加速度计的谐振频率和偏移特性,预测FBAR微加速度计的加速度-谐振频率偏移特性。最后仿真分析得到:惯性力载荷作用下,FBAR微加速度计的谐振频率向高频偏移,灵敏度约为数kHz/g;其加速度增量-谐振频率偏移特性曲线具有良好的线性度。     

Load characteristics of high power sandwich piezoelectric ultrasonic transducers

Based on the equivalent circuit theory, the load characteristics of high power piezoelectric ultrasonic sandwich transducers are studied. Two types of loads are studied. One is liquid load as in ultrasonic cleaning, and the other is solid load as in ultrasonic drilling and machining. The effect of load and structure of the transducer on the resonance frequency of the transducer is analyzed. It is shown that the effect of load on the resonance frequency of sandwich transducers with different structures is different. For liquid load as in ultrasonic cleaning, the effect of the load on the resonance frequency of the sandwich transducer with symmetrical structure is the largest. It is the smallest for the transducer with its displacement node in the back metal cylinder. For solid load as in ultrasonic drilling and machining, the effect of the load on the resonance frequency of the sandwich transducer with its displacement node in the front metal cylinder is the largest. It is also the smallest for the transducer with its displacement node in the back metal cylinder. On the other hand, for some applications, such as ultrasonic drilling, when the lateral dimension of the tool is much less than that of the transducer, its effect on the resonance frequency of the transducer is small. The conclusions are useful in designing vibrating systems for different ultrasonic applications.     

Acoustic attenuation in the layers of a microwave transducer at the excitation of longitudinal and shear elastic waves by a piezoelectric of the 6<Emphasis Type="Italic">mm</Emphasis> symmetry class

An electroacoustic transducer in the form of a piezoelectric of the 6mm symmetry class with an arbitrary orientation of the sixfold axis and with two finite-thickness metal electrodes is considered taking into account the acoustic attenuation in the transducer layers. A system of equations is obtained to determine the impedance of the transducer, the radiation resistances for shear and longitudinal waves, the power ratio of these waves in the acoustic line, and the transformation factors for transverse and longitudinal waves. The effect of attenuation on the characteristics of a specific transducer operating in the 15-GHz frequency range is numerically analyzed.     

一种高灵敏压电平面水声换能器

设计并制作了一种高灵敏压电平面水声换能器。该换能器敏感元件是对1-3-2型压电复合材料结构的改进,即在带基底的压电陶瓷小柱阵列间不注入聚合物,并在其上表面直接覆盖金属板,构成“带基底的压电小柱阵列+金属盖板”结构敏感元件(称为“空气填充型”敏感元件)。对“空气填充型”敏感元件的谐振频率进行了理论计算和有限元仿真,与实测结果较吻合。为便于对比性能,同时制作了同尺寸“1-3-2型压电复合材料+金属盖板”结构敏感元件(称为“聚合物填充型”敏感元件)换能器。分别对“空气填充型”和“聚合物填充型”敏感元件换能器的有效机电耦合系数、发送电压响应和接收灵敏度进行有限元仿真和实测,结果均显示,“空气填充型”敏感元件换能器具有较高的接收灵敏度,相较于“聚合物填充型”敏感元件换能器可提高21 dB。该敏感元件换能器能有效提高灵敏度,可为研制高灵敏换能器提供参考。      

Interaction of light with acoustic waves excited by an inphase multielement transducer in the 1.0–2.5 GHz range

Interaction between a weakly divergent optical beam and an acoustic wave generated in the range 1.0–2.5 GHz by an inphase multielement electroacoustic piezoelectric transducer is analyzed. A piezoelectric (Y + 36°)-cut LiNbO₃ plate is fixed on the surface of an X-cut LiNbO₃ acoustic duct with the help of metallic sublayers (Cr, Cu, In, Cu, or Cr). The inphase structure of the transducer is formed by the upper electrodes inter-connected by short conductors. The signal is applied through a coaxial Chebyshev transformer. The efficiencies of electroacoustic conversion and acoustooptic interaction are calculated as functions of frequency. The experimental setup, method, and results are described.     

Cymbal piezoelectric composite underwater acoustic transducer

The working principle of Cymbal piezoelectric composite underwater acoustic transducer was studied in this paper. PZT-5A piezoelectric ceramic disk was used as piezoelectric phase and brass foil was used as end cap electrode of the Cymbal transducer. The silicon rubber was used as the insulated proof layer of the underwater acoustic transducer. The properties of this transducer used as hydrophone, such as operation frequency, free-field voltage receiving sensitivity and directivity, were investigated. Several kinds of prototype of this transducer were fabricated and the properties of this transducer used as hydrophone were tested. The results show that the properties of this transducer used as hydrophone depend on the dimensions of Cymbal transducer because the piezoelectric properties of this transducer are dependent on the dimensions of Cymbal transducer's end caps. The appropriate dimensions for getting higher free-field voltage receiving sensitivity with -184.7 dB were obtained.     

Modelling nonlinearity in piezoceramic transducers: From equations to nonlinear equivalent circuits

Quadratic nonlinear equations of a piezoelectric element under the assumptions of 1D vibration and weak nonlinearity are derived by the perturbation theory. It is shown that the nonlinear response can be represented by controlled sources that are added to the classical hexapole used to model piezoelectric ultrasonic transducers. As a consequence, equivalent electrical circuits can be used to predict the nonlinear response of a transducer taking into account the acoustic loads on the rear and front faces. A generalisation of nonlinear equivalent electrical circuits to cases including passive layers and propagation media is then proposed. Experimental results, in terms of second harmonic generation, on a coupled resonator are compared to theoretical calculations from the proposed model.     

圆环状复合材料高频宽带水声换能器

研制了一种圆环状高频宽带水声换能器。利用压电复合材料Q值低从而频带宽的特点,采用双环轴向堆叠产生双模态耦合的结构方式拓宽换能器的带宽。通过理论分析与仿真计算,确定敏感元件几何尺寸。用切割-浇注-被覆电极等工艺制备出压电复合材料圆环;再将制备出的外径相同,壁厚不等的压电复合材料圆环轴向叠堆制成叠堆敏感元件,最后灌注防水透声层制成换能器。对制得的换能器进行水下性能测试,测得该换能器谐振频率为410 kHz,最大发射电压响应为150 dB,-3 dB带宽达60 kHz,水平指向性开角(-5 dB)为360°,-3 dB垂直指向性开角约20°。结果表明将复合材料圆环轴向堆叠可显著拓展换能器的带宽,且实现声波的水平全向发射。      

Design of a self-calibrating simulated acoustic emission source

The use of conical piezoelectric transducers as point acoustic sources has been investigated. It has been shown that transducers based on a design originally developed at the National Institute for Standards and Technology in the USA can be used as point transmitters over the frequency range of interest in acoustic emission measurements (100 kHz to around 1 MHz). They should, therefore, be suitable for use in experiments to calibrate structures so that acoustic emission source strengths can be determined. It has also been shown that measurements of the response of the transmitting transducer backing can be used to assess the coupling efficiency, and hence to remove concerns about inconsistent coupling affecting the calibration measurements. The results indicate that the variation of the backing response with coupling is due to a shift in the resonance frequencies of the transducer with the mechanical load impedance. If other transducers can be shown to behave in a similar fashion this effect could be used to measure coupling in standard acoustic emission and ultrasonic transducers.     

Influence of acoustic impedance of multilayer acoustic systems on the transfer function of ultrasonic airborne transducers

In different solutions of ultrasonic transducers radiating acoustic energy into the air there occurs the problem of the proper selection of the acoustic impedance of one or more matching layers. The goal of this work was a computer analysis of the influence of acoustic impedance on the transfer function of piezoceramic transducers equipped with matching layers. Cases of resonance and non-resonance matching impedance in relation to the transfer function and the energy transmission coefficient for solid state-air systems were analysed. With stable thickness of matching layers the required shape of the transfer function can be obtained through proper choice of acoustic impedance were built (e.g. maximal flat function). The proper choice of acoustic impedance requires an elaboration of precise methods of synthesis of matching systems. Using the known matching criteria (Chebyshev's, DeSilets', Souquet's), the transfer function characteristics of transducers equipped with one, two, and three matching layers as well as the optimisation methods of the energy transmission coefficient were presented. The influence of the backside load of the transducer on the shape of transfer function was also analysed. The calculation results of this function for different loads of the transducer backside without and with the different matching layers were presented. The proper load selection allows us to obtain the desired shape of the transfer function, which determines the pulse shape generated by the transducer.     

Acousto-optic deflector based on a paratellurite crystal using broadband acoustic adhesive contact

A broadband acoustic matching of a piezoelectric transducer made of a lithium niobate crystal with an acousto-optic TeO₂ crystal has been studied. The transducer is acoustically attached to the crystal by the method of adhesive contact. The experimental method of creating a piezoelectric transducer with an acoustic matching layer from a tin film is developed. The conditions of the optimal technological regime when applying the matching layer are determined. The results of the research are used in creating a broadband high-performance deflector with a central ultrasound frequency of 37 MHz, with the frequency band scanning more than 30 MHz, and a diffraction efficiency of about 90% at a wavelength of 1.06 μm.     

Equivalent loads for two-dimensional distributed anisotropic piezoelectric transducers with arbitrary shapes attached to thin plate structures

When a voltage is applied across the electrodes of a flat piezoelectric transducer attached to a thin plate structure, the transducer acts as equivalent loads applied to the host plate structure. In this paper, analytical expressions of these equivalent loads are derived for the general case of an orthotropic piezoelectric actuator using Hamilton's principle and two different mathematical approaches leading to the same results: Green's theorem and derivation using the theory of distributions. The equivalent loads are a function of the material properties as well as the normal to the contour of the transducer. Examples of applications to simple geometric shapes (triangle, rectangle, and circle) are given.     

Acousto-optic interaction in a non-homogeneous acoustic field excited by a wedge-shaped transducer

The article is devoted to theoretical analysis of light diffraction in a non-homogeneous acoustic field created by a wedge-shaped piezoelectric transducer. Relationships describing electrical, acoustic and acousto-optic properties of the acousto-optic cell are derived in the approximation of a small thickness of the piezoelectric plate. Principal characteristics of acousto-optic interaction are examined such as dependences of the light diffraction efficiency on the phase mismatch and the acoustic wave amplitude. It is shown that the acoustic field has a complicated amplitude-phase structure changing with the acoustic frequency. It is demonstrated that the diffraction efficiency in the Bragg regime can approach 100% in spite of a noticeable phase mismatch. The appropriate optimal values of ultrasound power and incidence angles of light are found.     

Impulse characteristic as a response of a liquid sensor based on shear-horizontal surface acoustic waves

The feasibility of using the impulse response of a liquid sensor based on shear-horizontal surface acoustic waves to identify liquids is justified. Identification of some liquid analytes with a single-channel sensor is experimentally demonstrated. The sensor is built around a delay line based on shear-horizontal surface acoustic waves that are excited in a 36°YX LiTaO₃-Al film-SiO₂ film-molecularly imprinted polymer film layered structure. By way of example, the concentration of the morpholine impurity (molecules of which are used as a template in synthesis of this molecularly imprinted polymer) in the liquids is measured. Impulse characteristics are derived by applying the fast inverse Fourier transformation to the amplitude-frequency responses of the sensor taken in a 60-MHz wide band at a center frequency of 105 MHz. The reproducibility of results obtained using such a technique and its application are discussed.     

压电条SH声辐射场研究

具有一定宽度和厚度的无穷长压电条置于均匀各向同性半空间上, 压电条在电激励下产生机械振动从而在整个空间产生声场. 将压电条取为6mm晶系, 其对称主轴沿长度方向. 针对这 种压电换能器结构, 深入研究了SH波的激发和辐射特性. 首先将压电条中的声场展开为傅里 叶级数, 而将压电条下的无界半空间中的声场展开为傅里叶积分, 然后根据边界条件得到了 整个空间中声场的求解方案, 通过数值模拟计算了声场的分布特性, 并和传统方法进行了定 量的对比和分析. 最后采用最陡下降法(鞍点法)研究并得到了压电条声辐射场的远场近似表 达式, 分析了声场的指向性规律. 结果表明只有当频率f和压电条宽度a的乘积 fa<1 kHz·m 时, 传统方法得到的结果是可靠的，当频率升高时，压电条内应力和位移呈振荡式分布，频率愈高振荡愈激烈，且与传统方法的差异愈大.本文对声学微系统与声传感器件的研究具有 重要意义. 关键词： 压电条 6mm晶系 表面位移 指向性因子     

Application of piezoelectric transient response in transducer acoustic power measurement

To explore a more convenient method for measuring the focused ultrasound power,a piezoelectric ceramic plate was used to receive ultrasonic signal directly.Due to an acoustic force acts on the surface of piezoelectric ceramic plate,the piezoelectric response was obtained by means of electromechanical analogy,which was composed of voltage response caused by forced vibration and high frequency attenuation response caused by natural vibration.The conversion relationship between output signal of piezoelectric ceramic plate and acoustic power of transducer was analyzed.The envelope of output piezoelectric signal was extracted in twice,and a voltage amplitude curve with sinusoidal distribution that could describe the changes of acoustic power was obtained.Under different drive voltage of transducer,the maximum peak voltage of envelope curve was found respectively.Their squared values were made a linear fitting with acoustic power measured by acoustic power meter,and then the proportional coefficient of theoretical relational expression was calibrated.The experimental results are in good agreement with the theory.The relative error between calibrated theoretical acoustic power and that measured by acoustic power meter was less than 8.7%.The paper can provide a guideline for measuring acoustic power of transducer by using piezoelectric signal.