Quantitative Stereovision in a Scanning Electron Microscope

Accurate, 3D full-field measurements at the micron-level are of interest in a wide range of applications, including both facilitation of mechanical experiments at reduced length scales and accurate profiling of specimen surfaces. Scanning electron microscope systems (SEMs) are a natural platform for acquiring high magnification images for stereo-reconstruction. In this work, an integrated methodology for accurate three-dimensional metric reconstruction and deformation measurements using single column SEM imaging systems is described. In these studies, the specimen stage is rotated in order to obtain stereo views of the specimen as it undergoes mechanical or thermal loading. Simulations and preliminary experimental studies at 300× demonstrate that (a) spatially-varying image distortions can be removed from images using a non-parametric distortion model, (b) the system can be reliably calibrated using distortion-corrected images of a planar object and grid at various orientations and (c) specimen rotation variability during the measurement phase can be controlled so that baseline strain errors are within the range of ±150 με. Benchmark rigid body motion experiments using calibrated SEM views demonstrate that all components of strain in the reconstructed object have a mean value around O(10⁻⁴) and a random spatial distribution with standard deviation ≈ 300 micro-strain.     

Accurate measurement of three-dimensional deformations in deformable and rigid bodies using computer vision

Recently, digital-image-correlation techniques have been used to accurately determine two-dimensional in-plane displacements and strains. An extension of the two-dimensional method to the acquisition of accurate, three-dimensional surfacedisplacement data from a stereo pair of CCD cameras is presented in this paper. A pin-hole camera model is used to express the transformation relating three-dimensional world coordinates to two-dimensional computer-image coordinates by the use of camera extrinsic and intrinsic parameters. Accurate camera model parameters are obtained for each camera independently by (a) using several points which have three-dimensional world coordinates that are accurate within 0.001 mm and (b) using two-dimensional image-correlation methods that are accurate to within 0.05 pixels to obtain the computer-image coordinates of various object positions. A nonlinear, least-squares method is used to select the optimal camera parameters such that the deviations between the measured and estimated image positions are minimized. Using multiple orientations of the cameras, the accuracy of the methodology is tested by performing translation tests. Using theoretical error estimates, error analyses are presented. To verify the methodology for actual tests both the displacement field for a cantilever beam and also the surface, three-dimensional displacement and strain fields for a 304L stainless-steel compact-tension specimen were experimentally obtained using stereo vision. Results indicate that the three-dimensional measurement methodology, when combined with two-dimensional digital correlation for subpixel accuracy, is a viable tool for the accurate measurement of surface displacements and strains. Paper was presented at the 1989 SEM Spring Conference on Experimental Mechanics held in Cambridge, MA on May 29–June 1.     

Sensitivity of in-Plane Strain Measurement to Calibration Parameter for out-of-Plane Specimen Rotations

In practice, out-of-plane motions usually are not avoidable during experiments. Since 2D–DIC measurements are vulnerable to parasitic deformations due to out-of-plane specimen motions, three-dimensional digital image correlation (StereoDIC or 3D–DIC) oftentimes is employed. The StereoDIC method is known to be capable of accurate deformation measurements for specimens subjected to general three-dimensional motions, including out-of-plane rotations and displacements. As a result, there has been limited study of the deformation measurements obtained when using StereoDIC to measure the displacement and strain fields for a specimen subjected only to out-of-plane rotation. To assess the accuracy of strain measurements obtained using stereovision systems and StereoDIC when a specimen undergoes appreciable out of plane rotation, rigid body out-of-plane rotation experiments are performed in the range ?40⁰?≤?θ?≤?40⁰ using a two-camera stereovision system. Results indicate that (a) for what would normally be considered “small angle” calibration processes, the measured normal strain in the foreshortened specimen direction due to specimen rotation increases in a non-linear manner with rotation angle, with measurement errors exceeding ±1400με and (b) for what would normally be considered “large angle” calibration processes, the magnitude of the errors in the strain are reduced to ±300με. To theoretically assess the effect of calibration parameters on the measurements, two separate analyses are performed. First, theoretical strains due to out-of-plane rigid body rotation are determined using a pinhole camera model to project a series of three-dimensional object points into the image plane using large angle calibration parameters and then re-project the corresponding sensor plane coordinates back into the plane using small angle calibration parameters. Secondly, the entire imaging process is also simulated in order to remove experimental error sources and to further validate the theory. Results from both approaches confirmed the same strain error trends as the experimental strain measurements, providing confidence that the source of the errors is the calibration process. Finally, variance based sensitivity analyses show that inaccuracy in the calibrated stereo angle parameter is the most significant factor affecting the accuracy of the measured strain.     

基于三维DIC方法的高强钢拉伸力学性能测定

高强度钢在建筑等工程领域发挥着极为重要的作用,因此准确测定其力学性能具有至关重要的意义．鉴于传统机械引伸计在小尺寸试样变形测试中的不便性,利用三维数字图像相关(3D-DIC)方法,对8.8级螺栓和Q690钢这两类试样在单轴拉伸试验全过程中的变形进行了测试,分别得到了应力-应变曲线、弹性模量、屈服强度、强度极限、断后延伸率和断面收缩率,由于试样在屈服阶段应变增加而应力基本不变,因此同时研究了该阶段中试样从弹性变形演化到塑性变形的发展规律．实验结果表明三维DIC在小尺寸试样力学性能测试方面具有很强的优越性,可用来灵活地测量变形并研究变形的演化规律．     

A review of MEMS-based microscale and nanoscale tensile and bending testing

Thin films at the micrometer and submicrometer scales exhibit mechanical properties that are different than those of bulk polycrystals. Industrial application of these materials requires accurate mechanical characterization. Also, a fundamental understanding of the deformation processes at smaller length scales is required to exploit the size and interface effects to develop new and technologically attractive materials. Specimen fabrication, small-scale force and displacement generation, and high resolution in the measurements are generic challenges in microscale and nanoscale mechanical testing. In this paper, we review small-scale materials testing techniques with special focus on the application of microelectromechanical systems (MEMS). Small size and high force and displacement resolution make MEMS suitable for small-scale mechanical testing. We discuss the development of tensile and bending testing techniques using MEMS, along with the experimental results on nanoscale aluminum specimens.     

Full Field Strain Measurement in Compression and Tensile Split Hopkinson Bar Experiments

The 3D image correlation technique is used for full field measurement of strain (and strain rate) in compression and tensile split Hopkinson bar experiments using commercial image correlation software and two digital high-speed cameras that provide a synchronized stereo view of the specimen. Using an array of 128 × 80 (compression tests) and 258 × 48 (tensile tests) pixels, the cameras record about 110,000 frames per second. A random dot pattern is applied to the surface of the specimens. The image correlation algorithm uses the dot pattern to define a field of overlapping virtual gage boxes, and the 3-D coordinates of the center of each gage box are determined at each frame. The coordinates are then used for calculating the strains throughout the surface of the specimen. The strains determined with the image correlation method are compared with those determined from analyzing the elastic waves in the bars, and with strains measured with strain gages placed on the specimens. The system is used to study the response of OFE C10100 copper. In compression tests, the image correlation shows a nearly uniform deformation which agrees with the average strain that is determined from the waves in the bars and the strains measured with strain gages that are placed directly on the specimen. In tensile tests, the specimen geometry and properties affect the outcome from the experiment. The full field strain measurement provides means for examining the validity and accuracy of the tests. In tests where the deforming section of the specimen is well defined and the deformation is uniform, the strains measured with the image correlation technique agree with the average strain that is determined from the split Hopkinson bar wave records. If significant deformation is taking place outside the gage section, and when necking develops, the strains determined from the waves are not valid, but the image correlation method provides the accurate full field strain history.     

Sub-Grain Scale Digital Image Correlation by Electron Microscopy for Polycrystalline Materials during Elastic and Plastic Deformation

Damage during loading of polycrystalline metallic alloys is localized at or below the scale of individual grains. Quantitative assessment of the heterogeneous strain fields at the grain scale is necessary to understand the relationship between microstructure and elastic and plastic deformation. In the present study, digital image correlation (DIC) is used to measure the strains at the sub-grain level in a polycrystalline nickel-base superalloy where plasticity is localized into physical slip bands. Parameters to minimize noise given a set speckle pattern (introduced by chemical etching) when performing DIC in a scanning electron microscope (SEM) were adapted for measurements in both plastic and elastic regimes. A methodology for the optimization of the SEM and DIC parameters necessary for the minimization of the variability in strain measurements at high spatial resolutions is presented. The implications for detecting the early stages of damage development are discussed.     

基于FIB的微观变形载体制作技术研究及应用

变形载体包括光栅、散斑和标记点等,是光学变形测量时的重要载体,关系到测试的成败.基于聚焦离子束(FIB)微加工平台和技术,介绍了微观变形载体的设计、制作方法、程序等要点,并且利用FIB刻蚀微型孔、槽等实现材料表面微观残余应力的测量.分析和讨论了FIB制作变形载体对原有结构的影响和由此引起的残余应力测试误差.结果表明,FIB刻蚀作为一种新型的直写微纳米加工技术,结合高倍显微镜对视场的切换,可以在关键微区准确定位,并制作变形载体和实现变形测量,尤其对残余应力的测量特别有效.     

Leveraging Full-Field Measurement from 3D Digital Image Correlation for Structural Identification

Within the domain of structural health monitoring (SHM) measurement techniques have primarily relied on discrete sensing strategies using sensors physically attached to the structural system of interest. These sensors have proven effective in describing both global and local phenomena, but are limited to providing discrete response measurements of these systems. With the introduction of novel imaging tools and image analysis techniques, such as digital image correlation (DIC), the ability to measure the full-field response of these systems provides a novel approach to refining structural identification (St-ID) approaches used in SHM. This paper explores this proposed concept through a case study on a series of structural test specimens analyzed using 3D digital image correlation (3D-DIC) for St-ID. Finite element model updating (FEMU) was used as the technique for the structural identification. For the identification process, ABAQUS was interfaced with MATLAB to converge on the optimal unknown/uncertain system parameters of the experimental setup. 3D-DIC results provided a rich full-field dataset for the identification process, which was compared against measurements derived from traditional physical in-place sensors typically used in SHM. In this work a Hybrid Genetic Algorithm (HGA), which combines the genetic algorithm as a global optimization and a gradient-based method as a local optimization, was used for the FEMU based on 3D-DIC results of structural specimen subjected to variable loading. To minimize the error between the full field 3D-DIC measurements and FEA model updating results, an objective function was introduced that included the full-field contributions of strains and deformation response. The evolution of this objective function illustrated satisfactory convergence of the identified parameters and the excellent agreement of the experimental and numerical strain and displacement responses after the model updating process confirmed the success of the proposed approach. The results of this study highlight the advantage of this hybrid approach and provide the foundation for effective deployment of the proposed strategy for large-scale structural systems.     

Strain tensor for large three-dimensional surface deformation of sheet metal from an object grating

Grating techniques are used to determine the three-dimensional deformation and the tangential strain of sheet metal. A grating is fixed on the surface and taken by stereo CCD cameras in different deformation states. By suitable line-following software, the grating coordinates in the images are determined with subpixel accuracy. Using photogrammetric methods, the three-dimensional coordinates are calculated from the image coordinates. The strain usually is determined by means of a deformation gradient, which is calculated from every deformed triangle. In this paper, the gradient is determined in the center of four neighboring meshes using a polynomial approximation of the displacement function in a reference position. The influence of the nontangential deformation is considered. By simulation, a flat sheet metal is deformed to a rotational symmetric surface. The difference of the known exact strain is compared with the numerically derived strain with respect to different grating pitches. The proposed method yields good results even in the case of large spatial deformation. It is applied to the deformation of a hatlike test specimen.     

Particle imaging techniques for microfabricated fluidic systems

This paper presents the design and implementation of velocimetry techniques applicable to the analysis of microfluidic systems. The application of both micron-resolution particle image velocimetry (micro-PIV) and particle tracking velocimetry (PTV) to the measurement of velocity fields within micromachined fluidic channels is presented. The particle tracking system uses epifluorescent microscopy, CCD imaging, and specialized image interrogation algorithms to provide microscale velocity measurement resolution. The flow field in a straight channel section is measured using cross-correlation micro-PIV and compared to the analytical solution for a measured mass flow rate. Velocity field measurements of the flow at the intersection of a cross-channel are also presented and compared with simulations from a commercially available flow solver, CFD-ACE+. Discussions regarding flow seeding, imaging optics, and the flow setup for measuring flows in microfabricated fluidic devices are presented. A simple process for estimating measurement uncertainty of the in-plane velocity measurements caused by three-dimensional Brownian motion is described. A definition for the measurement depth for PTV measurements is proposed. The agreement between measured and predicted values lends further support to the argument that liquid microflows with characteristic dimensions of order 50-μm dimension channels follow macroscale flow theory.     

Hybrid experimental–numerical analysis of basic ductile fracture experiments for sheet metals

A basic ductile fracture testing program is carried out on specimens extracted from TRIP780 steel sheets including tensile specimens with a central hole and circular notches. In addition, equi-biaxial punch tests are performed. The surface strain fields are measured using two- and three-dimensional digital image correlation. Due to the localization of plastic deformation during the testing of the tensile specimens, finite element simulations are performed of each test to obtain the stress and strain histories at the material point where fracture initiates. Error estimates are made based on the differences between the predicted and measured local strains. The results from the testing of tensile specimens with a central hole as well as from punch tests show that equivalent strains of more than 0.8 can be achieved at approximately constant stress triaxialities to fracture of about 0.3 and 0.66, respectively. The error analysis demonstrates that both the equivalent plastic strain and the stress triaxiality are very sensitive to uncertainties in the experimental measurements and the numerical model assumptions. The results from computations with very fine solid element meshes agree well with the experiments when the strain hardening is identified from experiments up to very large strains.     

基于数字图像的分离式霍普金森压杆实验中试件应变及两端应力的同步测量法

本文提出一种基于高速摄像和数字图像相关方法(DIC)的分离式Hopkinson压杆(SHPB)测量技术,从而实现试件应变和两端应力的同步测量。即在与试件接触的输入输出杆两端制作散斑,通过高速摄像获取SHPB实验过程中的散斑变形图像,由DIC测得各时刻试件的应变、输入输出杆端的应变(可直接换算为试件两端的应力)。由于试件和杆端的应变都是从同一张高速摄影的图像上分析得到的,因此它们是同步的。应用该方法对钢纤维混凝土试件的SHPB试验进行了测量,测量结果与传统应变片测量结果吻合,验证了该方法的可行性。该技术不仅实现了SHPB实验中试件应变和应力的同步测量,还将有助于直接检验各材料在SHPB实验中试件两端的力在实验过程中是否平衡。     

Error Assessment in Stereo-based Deformation Measurements

Increasing interest in the use of digital image correlation (DIC) for full-field surface shape and deformation measurements has led to an on-going need for both the development of theoretical formulae capable of providing quantitative confidence margins and controlled experiments for validation of the theoretical predictions. In the enclosed work, a series of stereo vision experiments are performed in a manner that provides sufficient information for direct comparison with theoretical predictions using formulae developed in Part I. Specifically, experiments are performed to obtain appropriate optimal estimates and the uncertainty margins for the image locations/displacements, 3-D locations/displacements and strains when using the method of subset-based digital image correlation for image matching. The uncertainty of locating the 3-D space points using subset-based pattern matching is estimated by using theoretical formulae developed in Part I and the experimentally defined confidence margins for image locations. Finally, the uncertainty in strains is predicted using formulae that involves both the variance and covariance of intermediate variables during the strain calculation process. Results from both theoretical predictions and the experimental work show the feasibility and accuracy of the predictive formulae for estimating the uncertainty in the stereo-based deformation measurements.     

激光冲击喷丸与激光辐照LY12铝合金材料拉伸力学行为的实验研究

为了研究激光冲击喷丸与激光辐照处理后LY12铝合金材料的微尺度变形特点和失效机理,对经过不同激光功率密度处理后的LY12铝合金材料,在扫描电镜下进行了原位拉伸力学行为和失效机理研究。在扫描电子显微镜（SEM）下,得到各组试件的拉伸载荷曲线和不同载荷下的微观区域图像,并利用数字图像相关技术进行不同载荷下的微观区域全场变形分析,并对拉伸断口形貌也进行了分析。研究表明：激光处理的功率大小对LY12铝合金拉伸最大载荷有明显的影响,激光处理的交界处有较强的应变集中。     

In vivo whole-field blood velocity measurement techniques

In this article a number of whole-field blood velocity measurement techniques are concisely reviewed. We primarily focus on optical measurement techniques for in vivo applications, such as laser Doppler velocimetry (including time varying speckle), laser speckle contrast imaging and particle image velocimetry (including particle tracking). We also briefly describe nuclear magnetic resonance and ultrasound particle image velocimetry, two techniques that do not rely on optical access, but that are of importance to in vivo whole-field blood velocity measurement. Typical applications for whole-field methods are perfusion monitoring, the investigation of instantaneous blood flow patterns, the derivation of endothelial shear stress distributions from velocity fields, and the measurement of blood volume flow rates. These applications require individual treatment in terms of spatial and temporal resolution and number of measured velocity components. The requirements further differ for the investigation of macro-, meso-, and microscale blood flows. In this review we describe and classify those requirements and present techniques that satisfy them.     

THE RASTEGAEV UPSET TEST-A METHOD TO COMPRESS LARGE MATERIAL VOLUMES HOMOGENEOUSLY

The upset test according to Rastegaev enables homogeneous deformation for high strains. The homogeneity of deformation was proofed by hardness measurements and with the deformation pattern. By upsetting specimens with large dimensions it is possible to determine material properties after deformation. Rotation-bending specimens and notched-bar impact specimens were machined out of the homogeneously deformed material; a correlation to geometrical strain is stated. As shown, this testing method is not only interesting for fundamental investigations but also for practical applications. The Rastegaev test can be used for warm-forming as well as for coldforming. The true material properties, as functions of geometrical strain, investigated with machined-out specimens are free from effects of friction and geometry. This holds not only for the fracture behavior and fatigue, but also for corrosion, metallurgical properties, etc.     

Scanning-Digital Image Correlation for Moving and Temporally Deformed Surfaces in Scanning Imaging Mode

Background

Images from scanning electron microscopes, transmission electron microscopes and atomic force microscopes have been widely used in digital image correlation methods to obtain accurate full-field deformation profiles of tested objects and investigate the object’s deformation mechanism. However, because of the raster-scanning imaging mode used in microscopic observation equipment, the images obtained from these instruments can only be used for quasi-static displacement measurements; otherwise, spurious displacements and strains may be introduced into the deformation results if these scanning microscopic images are used directly in general digital image correlation calculations for moving and temporally deformed surfaces.

Objective

Realizing kinematic parameter and dynamic deformation measurements on a scanning electron microscope platform.

Methods

Establishing a scanning imaging model of moving and temporally deformed objects that contains motion and deformation equations, a scanning equation and an intensity invariance assumption for small deformations. Then proposing a scanning-digital image correlation (S-DIC) method based on combing the characteristics of the scanning imaging mode with digital image correlation.

Results

Quantitatively investigating the effects of the spurious displacements and strains introduced when using scanning images to represent moving and temporally deformed surfaces in the measurement results. Numerical simulations verify that the accuracy of the S-DIC method is 10^?2pix for the displacement, 10^?4 for the strain, 10^?4pix/s for the velocity and 10^?6s^?1 for the strain rate. Experiments also show that the proposed S-DIC method is effective. Conclusions: The results of this work demonstrate the utility of S-DIC on the field of microscopic dynamic measurement.

     

Analysis of elastic-plastic deformation in TiAl polycrystals

A computational model is described for analyzing stress variations within polycrystals of γ-TiAl, including the effect of anisotropic yielding and small-scale plastic flow. Interlamellar (soft mode) slip behavior is controlled by a separate collection of slip systems whose properties are derived from measurements on polysynthetically twinned (PST) specimens. When used to represent several hundred randomly oriented material grains, the model provides distributions and statistical data about the local stress, strain, and plastic deformation resulting from a prescribed macroscopic loading.     

A photoelastic fiber-optic strain gage

This paper reports on the development of a photoelastic fiber-optic strain gage sensitive to transverse strain. The sensing element is made from an epoxy resin which is stress frozen to passively achieve the quadrature condition. Light, emitted from an LED operating at 820 nm, is transmitted to and from the sensing element via multi-mode fibers and the signal is detected using a dual-channel operational photodiode/amplifier.This unique combination of optics and electronics produces a fiber-optic sensor having a high signal to noise ratio and a measurement system which is lead-in/out insensitive. Results show that strains on the order of 1 microstrain can be measured over an 800 microstrain range when a dummy gage is used for compensation.Paper was presented at the 1992 SEM Spring Conference on Experimental Mechanics held in Las Vegas, NV on June 8–11.