利用胶体小球掩蔽刻蚀技术制备的半导体纳米阵列的场电子发射特性

利用胶体小球掩蔽刻蚀技术,制备了单晶硅纳米阵列,利用原子力显微镜观察了硅阵列的表面形貌,实验结果表明,硅柱阵列具有高密度和较好的均匀性。同时研究了单晶硅纳米阵列的场电子发射特性。为了提高样品的场发射性能,在所制备的单晶硅有序纳米阵列上生长了一层非晶碳薄膜。与单晶纳米硅柱阵列相比,覆盖有非晶碳膜的样品的场电子发射特性有了明显的改善,表现在场发射的开启电场下降,同时场发射增强因子得到增加。结果表明非晶碳膜确实能够降低电子发射的表面有效势垒,从而增强了场电子发射特性。     

Co/AAO纳米有序阵列复合结构的光致发光和光吸收特性

以草酸电解液制备的高度有序的纳米级多孔阳极氧化铝(AAO)为模板,采用交流电化学沉积工艺合成了Co/AAO纳米有序阵列复合结构。分别研究了AAO模板和Co/AAO结构的光致发光和光吸收特性。结果表明,AAO模板在350～550nm范围内存在较强的光致发光带,其峰位在395nm处;Co/AAO纳米有序阵列复合结构的光致发射峰位亦在395nm处,且发光峰强度随Co沉积量的增加而迅速减弱。实验发现,Co/AAO纳米有序阵列复合结构的光吸收边从近紫外至近红外的波段范围内发生大幅度红移,最大红移量甚至超过380nm。文章定性分析并解释了Co/AAO纳米有序阵列复合结构吸收边大幅度红移及其光发射峰位不变、而峰强减弱的主要原因。     

一种可控纳米柱阵列的研制

在一次阳极氧化法制备多孔氧化铝(anodized aluminum oxide,AAO)的基础上,进行了二次、三次、四次氧化制备AAO,并对多次氧化制备多孔AAO的电流变化曲线和模板表面的形貌特点等进行了比较分析.二次、三次、四次氧化制备的AAO纳米孔孔径依次增大、孔间距减小,而模板表面的纳米孔有序性分布没有明显变化.控制一次氧化AAO模板的除膜时间,～10 min即可得到孔径规则、高度有序的AAO膜.最后,利用所制备的不同孔深和孔径的AAO为模板,通过热纳米压印复制技术制备了长度和直径等性质可控的PMMA纳米柱阵列. 关键词： 纳米柱阵列 聚甲基丙烯酸甲酯 多孔氧化铝模板 多次氧化法     

金属铜纳米孔洞阵列膜制备方法研究

以多孔阳极氧化铝膜(anodic aluminum oxide，AAO)为模板，用真空蒸镀法复制了金属铜的纳米孔洞阵列膜，SEM结果表明，制备得到的金属铜纳米孔洞阵列膜形貌与AAO膜一致.此方法简单易行，能大规模生产，为纳米膜的工业化复制提供了一种新的工艺，为纳米线、纳米管等纳米阵列材料的合成与组装提供了有利的条件. 关键词： AAO模板 真空蒸镀 金属铜纳米孔洞阵列膜 纳米复制     

催化剂对纳米非晶碳膜场发射性能的影响

利用微波等离子体增强化学气相沉积(MPECVD)法,在经处理的单晶硅衬底上沉积了纳米非晶碳薄膜.通过Raman、SEM、XRD表征,研究了催化剂对纳米非晶碳膜的生长速率及场发射性能的影响.结果表明,在制备纳米非晶碳膜时使用FeC13,作为催化剂可大幅提高其生长速率.在相同的制备条件下,与未加FeCl3催化剂制备的纳米非...     

Ni、Co/AAO纳米有序阵列复合结构光吸收特性的比较研究

在多孔阳极氧化铝(AAO)模板中分别沉积金属镍(Ni)、钴(Co),制备了Ni／AAO和Co／AAO纳米有序阵列复合结构,对其光吸收特性进行了比较研究。实验结果表明．相同结构参量的模板中,Ni、Co纳米粒子的表观形状随沉积时间的变化规律基本一致．但Co/AAO及Ni／AAO复合结构的光吸收特性却有较大差异。Ni／AAO复合结构表现出间接带隙半导体的光学特征．而Co／AAO复合结构具有直接带隙半导体的光学特征。同时,随金属沉积量的增加,Ni／AAO吸收边的红移量仅约为13nm．而Co/AAO复合结构的吸收边红移量却超过了80nm。用Maxwell-Garnett(M-G)理论分析了导致二者光吸收特性存在较大差异的主要原因。     

单根准直碳纳米纤维的场发射特性

采用等离子体增强热灯丝化学气相沉积方法，以甲烷和氢气为反应气体，在钨丝衬底上制备出准直的碳纳米纤维(CNFs)，其生长密度小于10.6cm-2，长度为6—30μm，直径为60—100nm.并采用自制的双探针扫描电子显微镜系统，对所生长的单根CNF作了场发射特性研究.结果表明，其场发射开启电压约为5V/μm，相应的发射电流达到20μA/cm2，同时，对不同长度的CNFs及单根CNF不同位置的场发射研究表明，场发射电流的大小不仅与材料本身的功函数、外电场场强、材料的微观结构以及宏观的几何结构有关，而且电子在输运过程中所受到的散射也是决定场发射电流大小的关键因素. 关键词： 碳纳米纤维 化学气相沉积 场发射 扫描电子显微镜     

多种金属/TiO2核壳纳米棒阵列的通用制备方法

使用了一种具有较大通用性的方法制备了金属/二氧化钛(TiO₂)核壳纳米结构. 采用电沉积方法在多孔氧化铝模板(AAO)孔洞中沉积壁厚均一的TiO₂纳米管,TiO₂纳米管的壁厚可以通过沉积时间来控制,而纳米管的直径和长度则由模板孔洞大小和模板厚度决定. 采用这种方法制备的TiO₂纳米管顶端是开放的,而底端连接在电沉积前溅射在AAO模板背面的金膜上. 这种TiO₂纳米管阵列结构适合进行二次电沉积,以它为模板将Pd、Cu、Fe等金属沉积到纳米管中形成核壳纳米棒结构. 这是一种可以用于制备多种金属/TiO₂核壳纳米结构的通用方法,采用这种方法制备的金属/TiO₂核壳纳米棒结构具有填充率高和取向性好的特点,而且它们的壁厚和长度可以通过分别改变两步电沉积的时间来控制.     

基于图形化生长纳米氧化锌场致发射阴极阵列的研究

采用光刻技术在覆盖有氧化锌(ZnO)薄膜的ITO玻璃片衬底上实现图形化生长,结合水热法在衬底上制备出结构完整、排列一致的ZnO矩形和圆环型单元阵列。在图形化的基础上二次生长ZnO纳米锥阵列,锥长度最大可达到10μm,远大于一次生长的长度,并且发现锥顶有很多精细的类似针状的纳米量级微细结构。分析了非图形化、图形化一次以及图形化二次生长的ZnO纳米锥阵列的场致发射性能。使用图形化二次生长的ZnO纳米锥阴极阵列制作了12.7cm(5inch)的场发射显示器(FED),能实现全屏发光。实验结果表明,图形化二次生长的ZnO纳米锥阵列发射电流密度为最大,可达0.6mA/cm2,其开启场强为2.5V/μm。图形化生长ZnO纳米锥的方法是一种能较好改善材料场发射性能的好方法,为寻求良好场发射性能材料的制备提供了一条有效的实验途径。     

类富勒烯纳米晶CNx薄膜及其场致电子发射特性

利用微波等离子体增强化学气相沉积技术制备出了CNx薄膜,并利用x射线光电子能谱、x射线衍射、扫描电子显微镜和Raman光谱等测试手段对所制备的CNx薄膜的微结构和成分进行了分析.研究了其场致电子发射特性.发现薄膜的结构和场发射特性与反应系中的甲烷、氮气及氢气的流量比有关,当甲烷、氢气及氮气流量比为8/50/50sccm时,制备的薄膜具有弯曲层状的纳米石墨晶体结构(类富勒烯结构)和很好的场发射特性.场发射阈值电场降低至1.1V/μm.当电场为5.9V/μm时,平均电流密度达70μA/cm2,发射点密度大于1×104cm-2.     

Nanoscale carbon tubules deposited in anodic aluminium oxide template： a study of soft x-ray transmission

Well-aligned, catalyst-free nanoscale carbon tubules array was prepared by organic compound vapour deposition method using anodic aluminium oxide (AAO) as a template. The experiment of soft x-ray channelling in such carbon tubules array deposited in AAO template was performed at Beijing Synchrotron Radiation Facility. The transmission of x-rays in carbon tubules array with AAO template support was found even higher than that in bare AAO template at high-energy part of energy spectrum though the porous area of the former was smaller than that of the latter. A qualitative explanation is presented to interpret our results.     

Preparation and modification of well-aligned CNTs grown on AAO template

Anodic aluminum oxide (AAO) template was prepared by a two-step anodization method and cobalt particles were carefully deposited at the bottom of pores of the template. CVD method was used to grow carbon nanotubes (CNTs) on the template with this cobalt as catalyst and C₂H₂ as carbon source. Well-aligned carbon nanotubes were obtained perpendicular to the substrate. To modify the CNTs, ultrasonic treatment of the samples in alcoholic (or water) was applied and the results showed that the length of CNTs became equalized and their tips were opened without catalyst particles due to ultrasonically cutting off CNTs for the upper parts out of AAO pores. The mechanism is also discussed.     

Carbon nanodot arrays grown as replicas of specially widened anodic aluminum oxide pore arrays

Via a specially widened anodic aluminum oxide (AAO) pore arrays, carbon nanodot arrays with uniform size and high density were obtained through filtered cathodic arc plasma (FCAP) technique. The AAO template was prepared in oxalic acid by multi-steps to get a specially enlarged opening which plays an important role in the deposition of nanodots. The morphology of the nanodots was studied by a field emission scanning electron microscopy (FESEM). The diameter of the as-prepared nanodot demonstrated here is about 100 nm at the bottom and less than 40 nm at the top, and the density was estimated to 10¹⁰ cm⁻². Field emission properties of the nanodot arrays were investigated and a low threshold field of 5.1 V/μm at 10 mA/cm² was obtained. In this paper, the carbon nanodot arrays grown as replicas of the specially widened AAO template may support a strategy to realize the fabrication of nanodot arrays with various materials.     

Simple fabrication of hexagonally well-ordered AAO template on silicon substrate in two dimensions

In this study, thin anodic aluminum oxide (AAO) templates both on silicon substrates (AAO template/SiO₂/Si) and Ti-coated silicon substrates (AAO template/Ti/SiO₂/Si) were developed for design of magnetic, electronic and optoelectronic devices, chemical sensors and chip-scale lithium-ion rechargeable microbatteries. Two types of AAO template were prepared by using a two-step anodization procedure. The templates were characterized by scanning electron microscopy and energy dispersive X-ray spectroscopy. The obtained thin AAO templates were approximately 50 nm in diameter and 700 nm in length with 80-nm interpore distances in a relatively large area of 6 cm². A barrier layer of the AAO templates was removed by a cathodic polarization method in KCl solution for several seconds. The current–time transient during removing the alumina barrier layer of the thin AAO template and the mechanism of electrochemical dissolution of the barrier layer are given in detail.     

AAO模板吸收光谱变化及红移现象研究

阳极氧化铝(AAO)模板作为一种制备表面增强拉曼散射光谱(SERS)基底的工具被广泛使用。为了制备SERS效果更好的基底, 研究AAO模板自身的属性显得极为重要。本文以0.4 mol/L的草酸为电解液制备出高度有序的AAO模板。发现其吸收光谱在203、250、275 nm处有三个吸收峰, 其中203和275 nm处的吸收峰, 分别由F心(带两个电子的氧空位)和F+心(带一个电子的氧空位)产生。而250 nm处的吸收峰, 由制备过程中引入的草酸根离子产生。并给出了随着退火温度升高250、275 nm的吸收峰消失的合理解释。通过对不同氧化时间、氧化电压下制备的AAO模板吸收光谱的研究, 发现延长氧化时间对AAO模板吸收带边的红移影响不大, 而升高氧化电压则使AAO模板的吸收带边出现了明显红移。表明氧化电压的升高对AAO模板的内部结构及缺陷的变化影响极大。     

Synthesis of ordered ZnO nanowire arrays from aqueous solution using AAO template

In this paper we report a simple method that enables the easy fabrication of ordered ZnO nanowire arrays using Anodic Aluminium Oxide (AAO) template. We have used a vacuum injection technique to fill solution into the pores of an AAO template. The AAO template has been fabricated by a two-step anodization process using 0.3 M oxalic acid (H₂C₂O₄) solution under a constant voltage of 40 V. The AAO template formed through this process has been detached from Al substrate via an anodic voltage pulse using perchloric acid (HClO₄) solution (70%). The nanowires of ZnO have been synthesized by injecting the saturated Zn(NO₃)₂ solution into the pores of the detached AAO template using a vacuum pump. The ZnO nanowires synthesized by this technique have been found dense & continuous with uniform diameter throughout the length of the wire. The structural characteristics of AAO template and ZnO nanowires have been studied by Field Emission Scanning Electron Microscope (FESEM), Atomic force microscope (AFM) and Transmission Electron Microscope (TEM).     

Template synthesis of well-aligned titanium dioxide nanotubes

TiO₂ nanotubes of the anatase form have been synthesized by sol-gel chemical method using anodic aluminum oxide (AAO) as a template. Transmission electron microscopy (TEM), scanning electron microscopy (SEM), and X-ray diffraction were used to investigate the structure and morphology of the TiO₂ nanotubes. The results showed that TiO₂ nanotubes obtained are highly ordered and uniform. The diameter and length of the obtained nanotubes were determined by the pore size and the thickness of AAO template. It was found that through control of immersion time of AAO membrane in sol, both tubules and fibrils can be prepared. PACS 61.46.+w     

钛酸锶钡纳米管的制备及其红外吸收性能研究

首次采用溶胶凝胶法结合通孔阳极氧化铝模板, 成功制备出了钛酸锶钡纳米管. 该制备工艺简单、易实现而且成本低. 首先制备通孔阳极氧化铝模板和钛酸锶钡溶胶, 然后通过浸渍加上匀胶的方法将钛酸锶钡溶胶引入到通孔阳极氧化铝模板的纳米孔洞中, 最后在650℃下煅烧1 h形成钛酸锶钡纳米管. X射线衍射(XRD)证明, 制得的钛酸锶钡纳米管为立方钙钛矿相, 主要沿(110)晶向生长. 扫描电子显微镜(SEM)显示, 钛酸锶钡纳米管外径、内径和管长分别为75 nm, 50 nm, 16 μm. 傅里叶变换显微红外光谱仪(FTIR)测试结果表明在波数为1350-1650 cm^-1红外波段, 阳极氧化铝/钛酸锶钡纳米管复合结构较钛酸锶钡薄膜有两处明显的吸收峰, 吸收峰位于1470和1550 cm^-1处, 与通孔阳极氧化铝模板相比其吸收峰强度高出一倍, 最后分析了出现这一现象的可能原因.