二维表面浮雕结构的矢量衍射分析

利用等效介质理论,通过严格的耦合波理论计算和分析了二维表面浮雕结构的反射效率与各种因素的关系,给出了不同情况下的变化曲线;同时计算出了该结构在正入射情况下的等效折射率系数。明确提出：不管是对称的还是非对称的二维表面浮雕结构,方位角和极化角的变化对其反射率的影响都不明显;从而得出二维表了雕结构可以实现消偏振、减反的特性。分析了该结构的带宽限制,给出了在给定结构下受限的带宽;同时对浮雕高度加工误差对反射率的影响作了分析,对实际工作有一定的指导意义。     

硅表面抗反射纳米周期阵列结构的纳米压印制备与性能研究

硅表面固有的菲涅耳反射, 使得硅基半导体光电器件(如太阳能电池、红外探测器)表面有30%以上的入射光因反射而损失掉, 严重影响着器件的光电转换效率. 寻找一种方法降低硅基表面的反射率, 进而提高器件的效率成为近年来研究的重点.本文基于纳米压印光刻技术, 在2 英寸单晶硅表面制备出周期530 nm, 高240 nm的二维六角截顶抛面纳米柱阵列结构. 反射率的测试表明, 当入射光角度为8° 时, 有纳米结构的硅片相对于无纳米 结构的硅片来讲, 在400到2500 nm波长范围内的反射率有很明显的降低, 其中, 800到2000 nm波段的反射率都小于10%, 在波长1360 nm附近的反射率由31%降低为零. 结合等效介质理论和严格耦合波理论对结果进行了分析和验证. 关键词： 纳米压印 截顶抛物面阵列 抗反射 等效介质理论     

超陷光黑硅结构研究

研究了超陷光黑硅表面圆锥阵列结构的设计.将圆锥结构分为五层,利用等效媒质理论进行了参数设计.考虑了硅材料折射率随波长的变化,用严格耦合波理论对不同入射角,圆锥阵列结构高度以及占空比时的反射率进行了计算分析.发现,圆锥阵列超陷光结构的周期为135 nm,高度为480 nm时,在0°～60°入射角范围内,对波长为300～1...     

加入增益介质的表面等离子体激元耦合共振波导传输特性理论研究

将增益介质加入金属环构成的表面等离子体激元耦合共振波导,利用传输矩阵及时域有限差分方法研究了不同增益系数下该耦合共振波导的透射谱线、色散关系以及群折射率.结果表明,增益介质共振频率附近的反常色散及正常色散变化能有效影响由共振波导几何结构决定的色散关系曲线,且具有相反的效果,分别使其变得平坦和陡峭,从而放大和缩小由共振波导几何结构决定的群折射率.另外,增益系数随外加抽运光改变的特点使得加入增益介质的耦合共振波导具有传输性能可灵活调节特性.文章的研究对促进耦合共振波导在高密度光学集成中的广泛应用具有积极意义. 关键词： 增益介质 耦合共振波导 表面等离子体激元 群折射率     

相位修正的耦合模理论用于计算光纤Bragg光栅法布里-珀罗腔透射谱

基于光纤Bragg光栅(FBG)反射复振幅相移对FBG法布里-珀罗腔透射谱的影响,分析了传统耦合模理论计算均匀FBG反射复振幅相移产生误差的原因.引入折射率分布初始相位参数描述FBG折射率分布纵向的微小偏移,用真实的反透射系数代替简明形式的反透射系数,对传统耦合模理论进行了修正,增加了与折射率分布初始相位参数有关而与波长无关的相位因子.在此基础上进一步对计算非均匀FBG的传输矩阵法的相位进行了修正.修正后的快速计算结果用于FBG法布里-珀罗腔透射谱的计算,可反映折射率分布初始相位参数对透射峰波长位置的影响,与Rouard 算法及实验值均有较好的一致性. 关键词： 光纤Bragg 光栅 法布里-珀罗腔 耦合模理论     

正弦光栅标量衍射及等效介质理论有效性分析

利用严格傅里叶模式理论研究了不同基底折射率、入射角度、归一化周期、归一化沟槽深度对正弦型光栅微结构衍射效率的影响,并分析了该光栅的衍射特性.基于标量衍射理论和等效介质理论,分别计算了光栅周期远远大于和远远小于入射波长时,正弦型光栅的衍射效率,并与傅里叶模式理论的计算结果进行比较,分析标量衍射理论和等效介质理论的有效性.结果表明:在垂直入射条件下,当光栅基质材料折射率为1.5时,标量衍射理论在光栅归一化周期大于5时,能够准确计算光栅衍射效率,误差小于3%;当基底折射率增大到3.42时,只有在光栅归一化周期大于10时,标量衍射理论才有效,误差小于5%;当正弦型光栅透射光中只有0级衍射光传播时,等效介质理论能够准确计算其透射率;随着入射角度的增大,标量衍射理论和等效介质理论的有效性都不同程度地降低.     

MEH-PPV薄膜的光学参数计算

测量了由修正的Gilch方法制作的MEH-PPV薄膜的反射光谱, 对于玻璃基底对反射谱的影响做了修正. 利用了修正后的反射谱进行了kk变换, 获得了薄膜的折射率n. 再用计算所得的数据反算出薄膜的反射率与测量的反射谱是一致的, 获得的折射率随波长的变化与测量的吸收谱是相对应的, 对所得结果进行了误差分析.     

一维冷原子晶格中相干诱导三光子带隙

基于电磁感应透明技术,将相干耦合的Tripod型原子俘获在一维光晶格中并使其呈高斯型分布,由于介质的折射率被一维光晶格周期性调制,从而实现动态调控的三光子带隙结构.通过求解光场与原子相互作用密度矩阵方程以及光波在周期性介质中散射的传输矩阵方程,计算出探测场在相干驱动介质中的稳态反射谱和透射谱.计算结果表明:光子带隙的位置、宽度以及反射率可以通过改变两个耦合场的失谐、强度和几何布拉格失谐来调谐.     

金属/介质/金属光栅结构强化吸收特性

本文从电磁场理论出发,研究了单层光栅的金属/介质/金属结构的共振,利用严格耦合波方法计算了金属/介质/金属光栅结构表面的光谱特性,利用金属/介质/金属膜层结构的色散关系和等效LC回路模型两种理论对金属/介质/金属光栅结构表面的共振现象进行研究,讨论了几何参数对金属/介质/金属光栅结构共振的影响,结果表明单层光栅的金属/介质/金属结构的共振由金属/介质界面上的表面等离子极化之间的耦合产生。     

亚波长金属光栅结构的制备与矢量衍射理论分析

利用纳米压印结合溅射和反应离子刻蚀工艺制备了周期为1μm、占空比为0.2的亚波长金属光栅,利用紫外-可见-近红外光谱仪测量了光栅的0级反射光谱。在严格耦合波分析的基础上,把光栅区域电磁场的空间谐波通过勒让德多项式展开,使用多项式展开的谱分析法求解常微分方程,计算了该亚波长金属光栅的反射光谱及磁场分布。实验测量结果同矢量衍射理论计算结果都显示,该光栅在近红外、中红外波段具有表面等离子体共振现象。数值计算结果还表明,对于此类亚波长金属光栅,当光栅的深宽比增加时,其反射光谱中会出现更多的反射谷。     

Effective optical constants and effective optical properties of ultrathin trilayer structures

This work presents an extension of the characteristic effective medium approximation (CEMA) to ultrathin trilayer systems. The extension has been carried out analytically and is supported by corresponding calculations of the effective optical constants of Cu-Au-Cu and Ag-SiO-Ag trilayer systems using the CEMA approximation. This work is in essence a generalization of the characteristic effective medium approximation introduced earlier for ultrathin bilayer structures. This method is used to derive the effective optical constants of a trilayer system, consisting of three thin layers with each constituent layer of thickness much less than the wavelength of the incident radiation. Within this regime a trilayer system is viewed as one effective layer referred to as an effective stack (ES) with well defined effective optical constants, which can be used to calculate the optical properties of the trilayer stack within a specified wavelength range. The CEMA based calculations of the effective optical constants are applied to two trilayer systems with a total of five stacks. Three are Cu-Au-Cu and two are Ag-SiO-Ag stacks. The thicknesses of the parent layers in the Cu-Au-Cu stack range from 3 to 30 nm for Cu and 4 to 40 nm for Au; in the Ag-SiO-Ag stack the constituent layers are 6 nm for Ag, but range from 5 to 10 nm for SiO. This study is for normal or near normal incidence spectroscopy in a wavelength range that extends from visible to near infrared. The agreement between CEMA based ES stack results and those of the standard CMT technique is very satisfactory.     

多层膜体折射率弱不均匀度反演计算的近似模型及性能分析

实际应用中的薄膜或多或少存在体折射率不均匀缺陷,其准确表征对于镀膜工艺参数调校、低损耗薄膜设计与制备分析等具有影响。从Schr-der近似出发,推导了体折射率弱不均匀薄膜的膜系特征矩阵,通过特征矩阵法推广,建立了体折射率弱不均匀多层膜光谱特性计算的近似模型。利用基于有效介质理论的多层均匀膜近似方法,讨论了上述近似模型的有效性、计算精度和时间消耗特性。结果表明,上述模型矩阵计算中引入体折射不均匀度这一参数,为多层膜体折射率不均匀缺陷反演提供了一种有效的手段,为基于宽带光谱测量数据拟合的膜层缺陷数值反演应用奠定了基础。     

光脉冲传输模拟的快速数值差分递推算法及其应用研究

利用零邻域的马克劳林展开对归一化非线性薛定谔方程的频域差分形式进行分析，得出一个能够同时考虑光学媒质的色散作用以及非线性克尔作用的时域快速数值差分递推公式.选取若干算例，将运用该公式的数值计算结果与已知的解析结果和传统分步傅里叶方法所得的计算结果做了相应的比较，结果表明这种快速数值差分递推公式不但拥有相当快的计算速度，也有很高的计算精度，而且在物理上符合光脉冲在光学媒质中传输时色散和非线性作用同时施加影响的客观实际，这说明它是研究非线性光学媒质中光脉冲传输的一种科学、合理而快速有效的数值计算方法. 关键词： 快速数值差分递推公式 零邻域马克劳林展开 非线性薛定谔方程 光脉冲传输     

基于傅里叶变换红外反射谱的DRAM深沟槽结构测量系统研究

提出了一种基于傅里叶变换红外(FTIR)反射谱的动态随机存储器(DRAM)深沟槽结构测量方法与系统。给出了测量原理与方法,设计了测量系统光路。通过可变光阑调节探测光斑大小并选择合适的入射角,消除了背面杂散光反射干扰的影响,大大提高了信噪比。对DRAM深沟槽样品进行反射光谱图测试与实验研究,表明所述方法与系统能够提取出纳米级精度的深沟槽参数。该技术提供了一种无接触、非破坏、快速、低成本和高精度的深沟槽结构测量新途径,在集成电路制造过程中的在线监测与工艺控制方面具有广阔的应用前景。     

Optimal design of sub-wavelength metal rectangular gratings for polarizing beam splitter based on effective medium theory

A novel optimal design of sub-wavelength metal rectangular gratings for the polarizing beam splitter (PBS) is proposed. The method is based on effective medium theory and the method of designing single layer antireflection coating. The polarization performance of PBS is discussed by rigorous couple-wave analysis (RCWA) method at a wavelength of 1550~nm. The result shows that sub-wavelength metal rectangular grating is characterized by a high reflectivity, like metal films for TE polarization, and high transmissivity, like dielectric films for TM polarization. The optimal design accords well with the results simulated by RCWA method.     

Broadband dielectric spectroscopy of inhomogeneous and composite weak conductors

ABSTRACT

In this paper, we discuss broadband dielectric spectroscopy from mHz up to the infrared range mainly for materials with inhomogeneous weak conductivity, including conductor-dielectric nanocomposites. Our discussion is based on the effective medium approximation (EMA) and experiments modeled by this approach are reviewed. We discuss core–shell composites modeled by coated-spheres (Hashin–Shtrikman model) and normal composites with a possible percolation of the conductor component resulting in sharp or smeared percolation threshold of the DC conductivity and diverging static permittivity in the former case. The sharp percolation threshold is modeled by the Bruggeman EMA or by general EMA with arbitrary percolation threshold and arbitrary critical exponents of the DC conductivity and static permittivity. For the case of smeared percolation threshold in the case of complex topologies, we use the Lichtenecker model allowing for partial percolation of both the components. Finally, numerous papers reporting negative permittivity in weakly conducting materials are criticized and concluded to be due to spurious effects.     

Perturbation Expansion Method and Effective Medium Approximation for Effective Conductivity of Nonlinear Composite Media

In this paper, we establish an effective medium approximation (EMA) for effective conductivity of nonlinear composite media. As an example, we consider a two-dimensional composite medium with a cylindrical inclusion embedded in a homogeneous host, both the host and the inclusion having nonlinear current-voltage constitutive relations, and apply the perturbation expansion method to derive its analytic series solution. Using the nonlinear EMA we derive the formulae of the first, the third and the fifth-order effective conductivities, which are valid for nonlinear composite media with middle concentration of inclusion.     

Modeling elastic wave forward propagation and reflection using the complex screen method.

Formulation for calculating forward propagation and reflection in a 3D elastic structure based on the complex-screen method is given in this paper. The calculation of reflections is formulated based on the local Born approximation. When using a small angle approximation, the backscattering operator reduces to a screen operator which is similar to the forward screen propagator. Combining the forward propagator and backscattering operator together, the new method can properly handle the multiple forward scattering and single backscattering in a 3D heterogeneous model. Using a dual-domain technique, the new method is highly efficient in CPU time and memory savings. For models where reverberation and resonance scattering can be neglected, this method provides a fast and accurate algorithm. Synthetic seismograms for two-dimensional elastic models are calculated with this method and compared with those generated by the finite-difference method. The results show that the method works well for small to medium scattering angles and medium velocity contrasts.     

A study for sound wave scattering by corrugated ground with complex trench structures

Several trench structures in corrugated ground are investigated for the possibility of mitigating gun blast noise by numerical simulations. The blast noise usually includes large explosive energy with nonlinearity in the near field and exhibits a very low-frequency spectrum. In this study, the linearity approximation for the noise is taken because the nonlinearity of the wave reaching the scatterer is not serious for many proved guns and the low-frequency characteristic is concentrated. The structures are designed based on the surface impedance design approach proposed in our previous work and arbitrary three-dimensional (3D) geometries within a truncated ground are now assumed. The acoustic characteristic of the structures is evaluated by using a fast numerical solver. The solver employs the multilevel fast multipole algorithm (MLFMA) as an accelerator and can solve very large acoustic wave scattering problems with millions of unknowns on workstations within several days. This tool allows us to truncate the ground as large as needed for accurate modeling. Four structures are mainly considered in the design, namely, concentric trenches, sectorial trapezoidal trenches, interlaced arc trenches and parabolic reflectors. Some of them may have a sloped inner wall or tilted surface as a means of adjustment. Numerical simulations show that the concentric trench design has a very good mitigation behavior for linear and continuous noise sources and the structure is further studied for mitigating real-world gun blast noise.     

Ellipsometric characterization of nanocrystals in porous silicon

Porous silicon layers (PSLs) were prepared by electrochemical etching of p-type single-crystalline silicon (c-Si) wafers having different dopant concentrations to obtain systematically changing sizes of nanocrystals (walls). The microstructure of the porous material was characterized using spectroscopic ellipsometry with multi-layer effective medium approximation (EMA) models. The dielectric function of PSL is conventionally calculated using EMA mixtures of c-Si and voids. The porosity is described by the concentration of voids. Some PSL structures can be described only by adding fine-grained polycrystalline silicon (nc-Si) reference material to the EMA model. Modified model dielectric functions (MDF) of c-Si have been shown to fit composite materials containing nanocrystalline regions, either by fitting only the broadening parameter or also other parameters of the parametric oscillator in MDF. The broadening parameter correlates with the long-range order in the crystalline material, and, as a consequence, with the size of nanocrystals. EMA and MDF models were used to describe systematically changing nanostructure of PSLs. Volume fraction of nc-Si in EMA and broadening parameter in MDF provide information on the nanocrystal size. The longer-term goal of this work is to provide a method for the quantitative characterization of nanocrystal size using quick, sensitive and non-destructive optical techniques.