常压氩/氮射频容性放电冷等离子体的发射光谱诊断

实验中在大气压下在射频(13.56 MHz)容性耦合的平板形金属电极的构型中实现了氩/氮射频α模式的辉光放电.首先,采用发射光谱的方法测量了氮分子(C 3Ⅱu)谱线随氮气含量的变化;其次,使用玻耳兹曼斜率法估算了OH谱带(A2∑+→X 2Ⅱ)的转动温度,并得到等离子体温度随输入功率的变化规律.最后,选取氮的第二正带(C...     

Breakdown mechanism of an atmospheric-pressure radio-frequency capacitive argon discharge in parallel-plate bare metal electrodes

The breakdown behavior of an atmospheric-pressure radio-frequency capacitively coupled argon plasma discharge at 13.56 MHz is investigated in order to produce a stable and homogeneous atmospheric-pressure argon glow discharge. It is found that the electrode separation distance plays a pivotal role in exciting argon discharge whether in mobility-controlled electric breakdown or in diffusion-controlled breakdown and the discharge mode (arc discharge, α-mode glow discharge, or γ-mode glow discharge) immediately following breakdown is closely related to the breakdown mechanism.     

Different modes of capacitively coupled radio-frequency discharge in methane

Two different modes of capacitively coupled radio-frequency (RF) discharge in methane at gas pressures between 0.01 and 1.00 Torr are examined by numerical simulation based on a combined approach. It is shown that transition between volume-dominated and active-sheath modes is caused by variation of discharge current or gas pressure. Hysteretic behavior is revealed as the discharge current density is varied along the growing-and falling-current branches of the current-density curve. A phase diagram representing the domains of different discharge modes is obtained in wide current and pressure ranges.     

Different modes of a capacitively coupled radio-frequency discharge in methane

The transition between different regimes of a capacitevely coupled radio-frequency gas discharge in methane is studied with a combined particle-in-cell Monte Carlo collision algorithm over a wide range of gas pressure P and discharge current j. The results of this study are compared with known experimental and numerical results and summarized on a P-j phase diagram, which constitutes the areas of existence of different discharge regimes.     

Collisionless bounce resonance heating in dual-frequency capacitively coupled plasmas

We present the experimental evidence of the collisionless electron bounce resonance heating (BRH) in low-pressure dual-frequency capacitively coupled plasmas. In capacitively coupled plasmas at low pressures when the discharge frequency and gap satisfy a certain resonant condition, the high energy beamlike electrons can be generated by fast sheath expansion, and heated by the two sheaths coherently, thus the BRH occurs. By using a combined measurement of a floating double probe and optical emission spectroscopy, we demonstrate the effect of BRH on plasma properties, such as plasma density and light emission, especially in dual-frequency discharges.     

Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C_2H_2 discharges

A self-consistent fluid model is employed to investigate the coagulation stage of nanoparticle formation, growth,charging, and transport in a radio-frequency capacitively coupled parallel-plate acetylene(C2H2) discharge. In our simulation, the distribution of neutral species across the electrode gap is determined by mass continuity, momentum balance, and energy balance equations. Since a thermal gradient in the gas temperature induced by the flow of the neutral gas, a careful study of the thermophoretic force on the spatial distribution of the nanoparticle density profiles is indispensable. In the present paper, we mainly focus on the influences of the gas flow rate, voltage, and gas pressure on the spatial distribution of the nanoparticle density. It appears that the resulting density profile of the 10-nm particles experiences a significant shift towards the upper showerhead electrode once the neutral equations are applied, and a serious shift is observed when increasing the gas flow rate. Thus, the flow of neutral gas can strongly influence the spatial distribution of the particles in the plasma.     

Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias

The inflexion point of electron density and effective electron temperature curves versus radio-frequency （RF） bias voltage is observed in the H mode of inductively coupled plasmas （ICPs）. The electron energy probability function （EEPF） evolves first from a Maxwellian to a Druyvesteyn-like distribution, and then to a Maxwellian distribution again as the RF bias voltage increases. This can be explained by the interaction of two distinct bias-induced mechanisms, that is： bias- induced electron heating and bias-induced ion acceleration loss and the decrease of the effective discharge volume due to the sheath expansion. Furthermore, the trend of electron density is verified by a fluid model combined with a sheath module.     

Non-linear lumped model circuit of capacitively coupled plasmas at the intermediate radio-frequencies

The discharge dynamics in geometrically asymmetric capacitively coupled plasmas are investigated via a lumped model circuit. A realistic reactor configuration is assumed. A single and two separate RF voltage sources are considered. One of the driven frequencies (the higher frequency) has been adjusted to excite a plasma series resonance, while the second frequency (the lower frequency) is in the range of the ion plasma frequency. Increasing the plasma pressure in the low pressure regime ($\le 100\text{mTorr}$) is found to diminish the amplitude of the self-excited harmonics of the discharge current, however, the net result is enhancing the plasma heating. The modulation of the ion density with the lower driving frequency affect the plasma heating considerably. The net effect depends on the amplitude and the phase of the ion modulation.     

Spectral characteristics of a 44-kHz arc discharge excited in an atmospheric-pressure argon flow

Results are presented from experimental studies of an ac (44-kHz) arc discharge excited in an atmospheric-pressure argon jet between two copper electrodes. The first (central) electrode is a water-cooled rod with an axial opening for argon injection, while the second electrode is a loop of a tube lying in a plane perpendicular to the axis of the central electrode. The argon radiation spectra are measured, and the characteristic intensity profiles of the spectral lines as functions of the distance from the end of the central electrode are determined. All the observed transitions in the 245-to 370-nm wavelength range are identified.     

气压对微束射频容性放电模式调制的研究

微束射频容性放电在纳米晶体颗粒等离子体增强气相合成有着潜在的应用前景.本论文利用ICCD、单反相机、高压探头和电流探头等对微束射频容性放电特性进行了实验诊断研究.结果发现:在纯氩气微束射频放电中,随着气压的增加,放电从辉光放电模式向多通道丝状放电模式转换;在99％氩/1％氢混合气体微束射频放电中,丝状放电模式消失,而是...     

Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C_2H_2 discharges

The role of pulse parameters on nanoparticle property is investigated self-consistently based on a couple of fluid model and aerosol dynamics model in a capacitively coupled parallel-plate acetylene(C2H2) discharge. In this model, the mass continuity equation, momentum balance equation, and energy balance equation for neutral gas are taken into account.Thus, the thermophoretic force arises when a gas temperature gradient exists. The typical results of this model are positive and negative ion densities, electron impact collisions rates, nanoparticle density, and charge distributions. The simulation is performed for duty ratio 0.4/0.7/1.0, as well as pulse modulation frequency from 40 k Hz to 2.7 MHz for pure C2H2 discharges at a pressure of 500 m Torr. We find that the pulse parameters, especially the duty ratio, have a great affect on the dissociative attachment coefficient and the negative density. More importantly, by decreasing the duty ratio, nanoparticles start to diffuse to the wall. Under the action of gas flow, nanoparticle density peak is created in front of the pulse electrode,where the gas temperature is smaller.     

Mode transition in magnetic pole enhanced inductively coupled argon plasmas

The electrical probe (Langmuir probe) diagnostics of different plasma parameters and operation regimes (E/H modes) of magnetic pole enhanced, inductively coupled (MaPE-ICP) argon plasmas are investigated. It is shown that uniform, high density (n _e ∼ 10¹² cm^-3) and low electron temperature (T _e ∼ 1.5 eV) plasma can be produced in low pressure argon discharges at a low power (100 W). It is found that an MaPE-ICP reactor operates in two different modes; capacitive (E mode) and inductive (H mode). No density jump or hysteresis are reported between these modes. The effect of pressure on transition power, where the mode changes from E to H mode at 20 sccm gas flow rate are studied and it is found that for all pressures tested (∼7.5 mTorr to 75 mTorr) the transition power remains same. In the inductive mode, the above plasma parameters show a smooth variation with increasing filling gas pressure at fixed power. The intensity of the emission line at 750.4 nm due to 2p ₁ → 1s ₂ (Paschen’s notation) transition, closely follows the variation of n _e with RF power and filling gas pressure. Measured electron energy probability function (EEPF) shows that electron occupation mostly changes in the high-energy tail, which enlightens close similarity of the 750.4 nm argon line to electron number density (n _e ). The behaviour of the electron energy probability function (EEPF) with regard to pressure and RF power in two operational modes is presented.     

Modeling of argon discharge characteristics of planar-type surface wave plasmas in an electron fluid model

The planar-type surface wave plasma (SWP) device permits the generation of high-density and uniform processing plasmas via 2.45-GHz microwave power without the application of an external magnetic field. In the present study, the discharge characteristics in the SWP device were analyzed using a two-dimensional numerical simulation code, and the results were compared with experimental observations. The simulation code is based on the finite-difference time-domain (FDTD) method for the microwave field and on the electron fluid model for the argon discharge plasma. Experimental measurements were performed, and they showed that the surface-wave discharge at a filling pressure of 10-100 mtorr has characteristic electron-density distributions that have a peak at approximately 2 cm from the surface. This characteristic of the electron density profiles, as well as the electron temperature profiles in the plasma, is reproduced by the simulation code, albeit with some discrepancies. In order to reduce the effects of these discrepancies, intentional changes in the electron heat conductivity were introduced, and the adiabatic assumption was found to result in a reasonable electron temperature profile. The effects of the alumina window thickness were also investigated in the simulation.     

Frequency effects in capacitively coupled radio-frequency glowdischarges: a comparison between a 2-D fluid model and experiments

The results of a 2-D fluid model for argon radiofrequency (RF) discharges in a closed cylindrical vacuum chamber are compared with experimental data from an amorphous silicon deposition reactor operated in argon. Good agreement is obtained for the relation between the DC autobias voltage and the dissipated power in the frequency range 40-100 MHz at pressures between 10 and 60 Pa. Scaling laws are presented for the dissipated power and for the ion fluxes toward the electrodes. These quantities are expressed in the DC bias voltage, the RF excitation frequency and the background pressure. Also the uniformity of the ion fluxes is studied. The model yields a linear relation between the applied RF voltage and the DC bias voltage. This relation depends only on the geometry of the discharge chamber and shows an offset     

Controllable wettability of poly(ethylene terephthlate) film modified by oxygen combined inductively and capacitively coupled radio-frequency plasma

Poly(ethylene terephthalate) (PET) film was modified by using oxygen combined inductively coupled radio-frequency plasma (ICP) and capacitively coupled radio-frequency plasma (CCP) at the radio-frequency (RF) power of 200 W and 100 W, respectively, for a treatment time up to 300 s. The RF plasma modification under the combined ICP and CCP mode with the controllable oxygen plasma density and oxygen ion-flux energy significantly improved the wettability of PET film, due to the creation of the polar functional groups containing oxygen, such as C-O and O-CO, and the increase of the surface roughness. At a low surface roughness, the polar functional groups on the PET film affected both the advancing contact angles and receding contact angles. When the surface roughness increased over a threshold, the advancing contact angles mainly depended on the polar functional groups, and the receding contact angles were particularly dependent on the surface roughness. Therefore, the controllable advancing contact angles and receding contact angles on the plasma-modified PET film were independently determined by plasma functionalization and plasma etching under the combined ICP and CCP mode.     

On the increase in the limiting current of an atmospheric-pressure glow discharge in an argon flow

The initiation of an atmospheric-pressure glow discharge (APGD) is studied in the multitip cathode-planar anode electrode system through which an argon flow passes. It is shown that sectioning of the cathode and ballast resistances present at corona tips make it possible to substantially expand the current region of the discharge and considerably raise the limiting current of the APGD. The shape of the coronafree electrode is found to influence the limiting discharge current.     

Collisional-radiative model for non-Maxwellian inductively coupled argon plasmas using detailed fine-structure relativistic distorted-wave cross sections

Our recently developed collisional-radiative model which included fine-structure cross sections calculated with a fully relativistic distorted-wave method [R.K. Gangwar, L. Sharma, R. Srivastava, A.D. Stauffer, J. Appl. Phys. 111, 053307 (2012)] has been extended to study non-Maxwellian inductively coupled argon plasmas. We have added more processes to our earlier collisional-radiative model by further incorporating relativistic distorted-wave electron impact cross sections from the 3p ⁵4sJ = 0, 2 metastable states, (1s ₃, 1s ₅ in Paschen’s notation) to the 3p ⁵5p (3p _i ) excited states. The population of various excited levels at different pressures in the range of 1–25 mTorr for an inductively coupled argon plasma have been calculated and compared with the recent optical absorption spectroscopy measurements as well as emission model results of Boffard et al. [Plasma Sources Sci. Technol. 19, 065001 (2010)]. We have also calculated the intensities of two emission lines, 420.1 nm (3p ₉ → 1s ₅) and 419.8 nm (3p ₅ → 1s ₄) and compared with measured intensities reported by Boffard et al. [J. Phys. D 45, 045201 (2012)]. Our results are in good agreement with the measurements.     

Two forms of attachment of an atmospheric-pressure direct-current arc in argon to a thermionic cathode

Comparative investigation of two forms of attachment of a dc (20 < I < 200 A) atmospheric-pressure arc in argon to a thermionic cathode made of pure tungsten is carried out. The current-voltage characteristics of the arc, axial distribution of the cathode rod surface temperature (except for the site of arc attachment), and plasma temperature axial distribution in the cathode region are measured, and the current density on the cathode surface is estimated. The measurements of current-voltage curves shows that the voltages of the arc with different forms of cathode attachment differ distinctly (but not too much) one from another, the curves for two modes iontersect. This confirms the results of theoretical analysis carried out earlier by M.S. Benilov who has showed that an existence of different forms of attachment is associated with the presence of branching points in a solution to the cathode heat balance problem. The point of intersection should be viewed as one such point. Optical measurements disclose that the temperature and its distribution over the cathode rod surface differ greatly for the two forms of attachment considered. The plasma temperature in the cathode region of the contracted attachment far exceeds that in the diffuse attachment, exceeding 3 eV in the immediate vicinity of the cathode surface. The maximal temperature of the plasma in the contracted attachment does not depend on the current. Analysis of erosion prints shows that the current density on the cathode does not depend on the current for both forms of cathodic attachment. For the contracted attachment, the current density is roughly four times higher (～10⁴ A/cm²) than for the diffuse form. The experimental data are in good agreement with present-day calculations of the cathode plasma parameters and temperature conditions.