Measurement of surface roughness properties using speckle patterns with non-gaussian statistics

The surface roughness properties (i.e. the rms surface roughness and the correlation length) of strong diffuse objects are investigated by using the speckle patterns which obeys the non-gaussian statistics. The intimate linear relation is found to exist between the rms surface roughness of objects and the maximum contrast obtained from the varying curves of the average image speckle contrast as a function of the point spread of an optical imaging system. The correlation length of surface roughness of objects is related to the averaged intensity distribution of speckle patterns produced at the far-field diffraction plane. It now becomes clear that the rms roughness and the correlation length of strong diffuse objects are determined, respectively, from the maximum speckle contrast at the image plane and the averaged speckle intensity distribution at the far-field diffraction plane.     

Effect of surface roughness on the statistical distribution of image speckle intensity

An experimental investigation is made of the effect of surface roughness on the statistical distribution of image speckle intensity. A speckle pattern is formed by spatially coherent light at the image plane of an object having some surface roughness and its statistical properties are investigated. It is found that the contrast of the speckle is related to the surface roughness. By this relation, a new technique for the measurement of surface roughness is proposed.     

Surface roughness measurement using spatial-average analysis of objective speckle pattern in specular direction

The speckle contrast method (SCM) and the light scattering method (LSM) are two of the most promising optical techniques for on-line surface roughness measurement of slightly-rough surface. However, due to the lack of capability in eliminating the influence from the diffuse component of scattered light, SCM and LSM are both sensitive to the variations of surface correlation length. Additionally, for LSM, the presence of speckle noise leads to fluctuations in the measuring results. To solve these problems, an approach based on the spatial-average analysis of the objective speckle pattern in the specular direction, simply called spatial-average method (SAM), is proposed. The SAM establishes the quantitative relationship between a new characteristic parameter extracted from the recorded speckle image and the rms surface roughness, eliminates to a large extent the influence of diffuse light component on the measuring results, and immunizes itself from the speckle noise. The theoretical foundation of SAM is given in details. A computer simulation is then performed to make comparisons among these three methods. Finally an experiment is presented.     

变孔径像面散斑平均光强标定随机表面的理论与实验

采用随机表面的高斯相关模型和统计光学原理,推导出弱散射体在4f系统中的像面上光强的表达式.在此基础上提出了均方偏差粗糙度和横向相关长度的标定方法,该方法用理论结果对实验测量的像面散斑平均光强随滤波孔半径的关系曲线进行拟合,同时测量出被测样品表面的两个统计量.实验上制作了高斯相关随机表面样品,对其表面参数进行了测量,与AFM所测结果符合得较好,这表明该方法具有较高的精度. 关键词： 弱散射体 像面散斑 平均光强     

Digital ultrasonic speckle phase-shifting method

The digital ultrasonic speckle phase-shifting method (USPM), which is introduced in this paper, can be applied to the measurement of small displacement that is smaller than speckle size at the test point compared to traditional ultrasonic speckle correlation method (USCM). Using USPM, a digital ultrasonic reference signal is introduced to interfere with the ultrasonic speckle signal, which is picked up at the test point on an object surface and is referred to as the object signal. As the phase of the reference signal is shifted several times using the software and then they superimpose with the object signal respectively, the phase of the object signal can be calculated according to the intensities of the superimposed signals. If the object surface moves a small distance, the phase variation of the object speckle can be detected by the same process. As a result, the displacement of the object surface can be measured. Based on the feature of ultrasonic speckles, inner surface displacement of an object can be measured using this proposed method. In this case, the effect of outer surface roughness to the measurement accuracy of USPM is examined experimentally. The experimental results show that the measurement is successful when the displacement is smaller than half of the speckle size at the test point and the roughness parameter R_a of the outer surface of the specimen is less than about 5.47 μm.     

地面对激光雷达信号散射的统计研究

从理论角度研究了利用高斯光束照射远场目标时,激光散斑的统计特性.导出了散射光场的自相关函数和光强度的二阶矩的解析表达式,计算了激光散斑的面积.研究表明:在接收面上,光强的分布与目标表面高度的相关长度和均方根高度密切相关,激光散斑面积和散斑光强的相关系数只与激光束腰的尺度有关,与目标的均方根高度和相关长度无关. 关键词： 激光散斑 自相关函数 高斯分布 协方差     

Measurement of surface roughness properties by means of laser speckle techniques

The statistical properties of speckle intensity variations produced by coherent light in the far-field diffraction plane of an iluminated area of an object are studied experimentally as a function of the radius of an illuminating beam over the object and are found to have a relation to its surface roughness and correlation lenght. Measurements of the surface roughness and the correlation lenght become possible by investigating the contrast variation of the speckle intensity as a function of the radius of the illuminating beam.     

Statistical Properties of Laser Speckles Generated from Far Rough Surfaces

The statistical properties of speckle patterns generated from far rough surfaces, under illumination of a Gaussian beam, are investigated. The surface roughness dependence of the first- and second-order moments of intensity is theoretically investigated, and their analytical expressions have been derived and presented. The analysis indicates that the mean intensity distribution on the receiver plane is closely related to the ratio of the lateral correlation length to the surface root mean square (rms) height. On the other hand, the speckle size and the correlation degree of the speckle intensities are found to be independent of the parameter characterizing the roughness of a surface, and are only determined by the laser beam waist.     

基于物体像的干涉条纹图像中散斑噪声的识别方法

散斑噪声是激光干涉时的普遍现象,其覆盖被测表面对应区域的形状信息,造成测量误差。针对斜入式激光干涉测量中散斑噪声的特点,提出一种基于物体像的散斑噪声的识别方法。该方法通过统计物体像中有效测量区域和背景区域内灰度分布的特点,自动计算出判定散斑噪声的上下阈值。基于物体像与干涉条纹图像间微米级的映射关系,得到干涉条纹图像中散斑噪声的位置。设计了相关实验,对干涉条纹图像中识别出的散斑噪声区域进行修补,消除了包裹相位图中一个条纹周期内相邻像素点间大于π的相位突变。     

Study on the reduction of speckle noise in the reconstructed image of digital hologram

As one of the most important 3-D display technique, reduction of speckle noise in the reconstructed image of digital holography should be grounded on the digital hologram itself. Based on the whole process of the recording and reconstruction of digital holography, the optical distributions of recorded object and reconstructed image of digital holography have been studied. It has been proposed that the root formation cause of speckle noise in its reconstructed image is the speckle noise formed on the recorded object surface when illuminated by coherent light because of its optical roughness. A novel approach has been presented to reduce speckle noise in digital holography by changing the interference structure of hologram itself. First, by reducing the speckle noise in the reconstructed image, the distribution of ideal reconstruction light with reduced speckle noise is acquired. Then in turn, taking the ideal reconstruction light with reduced speckle noise as ideal object light, a new hologram can be rebuilt, which can reconstruct the ideal object light. The experimental results are given to confirm the proposed method. Therefore, it offers a brand-new thought and practical way to reduce the speckle noise in the reconstructed image of digital holography.     

基于条纹等值线相关的散斑条纹图处理新方法

在数字散斑干涉术中,通常由物体变形前后得到的两幅原始散斑场用相减方法来得到条纹图,并由相移后的多幅(三幅以上)条纹图来求取相位场。介绍了一种基于条纹等值线相关的条纹图生成新方法,并在此基础上提出了基于单幅干涉条纹图的相位场提取新方法和基于条纹等值线相关的单步相移新方法。实验结果表明,该方法具有良好的结果和发展前景。     

Vibration analysis by laser speckle correlation

Time-averaged laser speckle correlation is used for flexural vibration-studies. The proposed method employs a diverging laser beam to illuminate the test object and records the object image at a defocused plane with a CCD camera. The speckle correlation coefficient is a function of the out-of-plane tilt of the object. The time-averaged speckle pattern recorded with the object vibrating at a natural mode is subtracted from the one recorded in a static condition. The anti-nodes of the vibrating object can then be identified easily on the subtracted image. A brief analysis of the technique and some experimental results on a cantilever beam and a vibrating plate are presented.     

基于激光散斑成像的零件表面粗糙度建模

表面粗糙度是衡量机械表面加工水平的重要参数. 通过构建一套激光散斑成像采集系统, 获取了不同表面加工类型和不同粗糙度值的零件表面激光散斑图像. 应用Tamura纹理特征理论提取图像的纹理粗糙度、对比度、方向度特征, 并分析了这三个特征与表面粗糙度的关系. 发现了纹理粗糙度特征与表面粗糙度的单调关系, 推导出平磨、外磨、研磨三种表面加工工艺的粗糙度值与图像纹理粗糙度特征的数学函数关系, 实现了表面粗糙度的测量. 同时, 利用Tamura纹理特征与加工工艺的依赖关系, 建立了基于贝叶斯网络的工艺识别推理模型, 推理出了零件表面加工工艺. 通过为多种加工类型表面建立粗糙度测量模型, 为粗糙度测量提供了新思路. 实验证明所提的粗糙度测量模型能以较高的准确率识别出零件表面加工类型并测量出其表面粗糙度值.     

Properties of light scattered by a diffuse object under dynamic speckle illumination and their application to the roughness distribution measurement

The properties of the scattered light which depends on the surface roughness of the diffuse object under a dynamic speckle illumination have been investigated. From these properties, a new method to measure the spatial roughness distribution by means of the dynamic speckle illumination is proposed.     

Measurement of surface roughness using dichromatic speckle

The dependence on the surface roughness of the structural difference of two normalized intensity distributions in a dichromatic speckle pattern is studied theoretically. It is shown that the difference of two speckle intensity distributions increases with increase of the object surface roughness. Using this proportional relationship, a new method for measuring surface roughness is proposed. The effective measuring range can be changed by varying the two wavelengths of the illuminating light. Some computer simulation studies are conducted to verify the theoretical results.     

Real-time anti-node visualization of vibrating distributed systems in noisy environments using defocused laser speckle contrast analysis

A simple optical technique is described that allows for the direct whole-field visualization of anti-nodal patterns in noisy environments. The technique involves the combination of defocused laser speckle imaging with the laser speckle contrast analysis (LASCA) algorithm to relate local contrast reduction of a laser speckle pattern to the magnitude of the gradient vectors that arise due to the tilt deflection of a vibrating surface. The method requires no reference beam and is tolerant of environmental noise. The sensitivity of the technique is a direct function of the degree of defocus of the speckle pattern and thus can be readily adjusted. By ratioing the instantaneous contrast to the reference image contrast, a simple method for thresholding the noise floor (noise at reference state) is attained, thus increasing the method's tolerance to ambient disturbances. Results from forced vibration via acoustic excitation of a square and rectangular membrane—with and without simultaneous white noise excitation—are shown. Results are compared to theoretical predictions for an ideal membrane, with good agreement.     

弱散射屏的像面散斑自相关函数特性的实验研究

在对随机弱散射屏进行表面参数的原子力显微镜测量和建立了门积分取样平均的随机光强自相关函数测量系统的基础上,对弱散射屏在严格像面和离焦像面上产生的散斑自相关函数进行了测量。发现在严格像面上,散斑平均颗粒的大小随表面粗糙度增加而减小,且光强自相关函数次极大的相关间隔宽度随粗糙度增加而减小;而次极大的超伏随粗糙度的增大而增大;在离焦像面上,离焦量的增加使光强的自相关函数下降变得平滑,并使极小值点和次极大点变得不明显或者消失。     

A contrast variation of image speckle intensity under illumination of partially coherent light

Speckle patterns are formed by completely and partially coherent light at the image plane of a diffusing object. The general formula is derived for the contrast variation of the image speckle intensity distribution as a function of the spatial coherence of the illuminating light, the amplitude point-spread function of the optical imaging system and the statistical characteristic of the diffusing object. The effect of spatial coherence of the illuminating light on the contrast variations of the image speckle intensity distribution is theoretically evaluated under various statistical conditions of the diffusing object. The theoretical results are confirmed experimentally.     

基于单幅数字散斑投影及图像相关的离面振动测量

采用单幅数字散斑图投影及高速数字图像采集技术,研究了动态离面位移的测量。采用商用液晶投影仪将计算机产生的模拟散斑图投影到待测动态变形物体表面,由高速数字图像采集设备摄取并保存变形散斑图,采用时间序列数字图像相关软件计算出物体表面各点随时间变化的离面位移。这种方法用于振动分析时不仅可以获得振型分布,而且还可以获得各点的振幅值。与现有的激光频闪照相测振及激光多普勒测振等方法相比,具有光学系统简单,可全场定量测量。悬臂梁振动实验结果证实了该方法的有效性。     

The autocorrelation of speckles in deep Fresnel diffraction region and characterizations of random self-affine fractal surfaces

This paper studies the correlation properties of the speckles in the deep Fresnel diffraction region produced by the scattering of rough self-affine fractal surfaces. The autocorrelation function of the speckle intensities is formulated by the combination of the light scattering theory of Kirchhoff approximation and the principles of speckle statistics. We propose a method for extracting the three surface parameters, i.e. the roughness w, the lateral correlation length ξ and the roughness exponent α, from the autocorrelation functions of speckles. This method is verified by simulating the speckle intensities and calculating the speckle autocorrelation function. We also find the phenomenon that for rough surfaces with α= 1, the structure of the speckles resembles that of the surface heights, which results from the effect of the peak and the valley parts of the surface, acting as micro-lenses converging and diverging the light waves.