EXPERIMENTAL STUDY OF DIFFRACTIVE PROPERTIES OF WAVELENGTH-SIZED SINGLE GROOVE IN Si-Si3N4 SUBSTRATE

Experimental results are presented for the diffractive properties of wavelength-sized single groove in Si-Si₃N₄ substrate. The experimental results show that the diffraction of wavelength-sized single grooves in a non-perfectly conducting material is more complex than that of perfectly conducting material. The diffraction intensities change with the change of polarization angle of the incident light. The diffraction intensities for TM polarization light are larger as the groove width is larger. The diffraction intensities of TM polarization light decrease gradually and that of TE polarization light increase gradually when the groove width is close to the wavelength of the incident light. The variations of diffraction intensities are quite different not only for various grooves with different widths but also for different diffraction angles for the same groove. Although the intensity variation of each diffraction order has a very regular sinusoidal dependence on the polarization angles of the incident light, the variation phase of each diffraction order is not all the same.     

EXPERIMENTAL STUDY OF DIFFRACTIVE PROPERTIES OF WAVELENGTH-SIZED SINGLE GROOVES COATED WITH GOLD FILM

We have gained a very comprehensive set of results for infrared diffraction (10.6 μm wavelength) from fabricated single grooves of reflection with widths in the range of 5μm to 65μm. The experimental results show that the diffraction can still occur when the groove width becomes comparable to or less than the wavelength of the probing light. Variations of the diffraction intensities have a very regular sinusoidal relationship with the polarization angle of the incident light; and the diffraction intensities are the maximal when the incident light is TM polarized. However, the diffraction intensities will be a minimum when the incident light is TE polarized; and the bigger the diffraction angle, the higher the rate of change of the diffractive intensity with increasing polarization angle of the incident light.     

EFFECTS OF MICROSTRUCTURES WITH DIMENSIONS SMALLER THAN OPTICAL WAVELENGTH ON SINGLE GROOVE DIFFRACTION

The experimental results showed that the microstructures of defects on the edges and walls of the single groove with their dimensions smaller than the wavelength of the incident light can produce effects not only on the diffraction of different polarization light but also on the symmetry of both positive and negative diffraction orders. It is possible to cause the narrow peaks with opposite directions appearing at corresponding positions on the two diffraction intensity curves when the polarization directions of the incident light are perpendicular to each other, and to cause the diffraction peaks to be asymmetric when the incident light for the two curves is of the same polarization direction.     

Systematic study on visible light collimation by nanostructured slits in the metal surface

We present a systematic experimental investigation on visible light collimation by a nanostructured slit flanked with a pair of periodic array of grooves in gold thin film. A wide variety of aspects are considered, such as the polarization state, the transport path of incident light, the groove--groove spacing, the groove width and depth. Our results clearly show that the relationship between the collimation wavelength and the periodicity of the slit-groove structure accords well with the surface plasmon dispersion model proposed by previous researchers. Furthermore, the surface plasmon wave phase retardation effect induced by the surface structure is also verified via the measurement for samples with different groove widths and depths. These results indicate that the detailed geometry of the groove structure has obvious impacts on the collimation effect and the angular distribution of the diffraction light in the subwavelength plasmonic system.     

A detailed study of metallic surface-relief grating

This paper presents a more detailed interaction of an electromagnetics light with a metallic surface-relief subwavelength grating utilizing the rigorous coupled-wave analysis. The focus of this work is the accurate modeling of undetermined aspects of diffraction patterns produced by binary metallic grating structures, specially gold grating. First-order diffraction efficiency for rectangular-groove gold grating with equal groove and ridge widths are presented for various wavelengths as a function of period, groove depth, polarization and angle of incidence. We also studied diffraction efficiency of both of TE and TM polarization modes against increasing of incident angle as well as TE polarization against increment of grating period. As a result, very low reflectivity at zero-order was found out for TE and TM polarizations at the pitch of Λ = 2λ. Having been studied diffraction efficiency of metallic surface-relief gratings, we also examined polarization-dependent efficiency of diffraction orders, for different groove depths. Simulation results have been completely presented.     

波长尺寸表面浮雕光栅的严格理论计算和分析

本文采用麦克斯韦(Maxwell)方程微分积分方程对波长尺寸的梯形反射光栅在TE模式(横向电场)偏振状态入射下,进行严格理论的计算和分析.表面电场计算表明,光栅刻槽斜边边界对于金属材料金和铝光栅表面电场分布具有明显效应,对于入射波长为λ=1.0μm附近的红外区域,金材料具有强烈的金属特性,此时表面电场的斜边边界效应更加明显.表面电场及其远场衍射效率伴随刻槽深度变化,而振荡特性进一步阐明了此效应对近,远场的作用.该方程适用于任意形状光栅或单一散射体对任意入射方向,任意偏振态的衍射和散射问题.     

Polarization effect of femtosecond pulse breakdown in subwavelength antireflective relief grating

The transmittance property and the near-field distribution of subwavelength broadband antireflective grating directly patterned into the wide bandgap dielectric material as a function of the surface period and groove depth are performed by a rigorous Fourier modal method. It is found that the transmittivity is insensitive for TE and TM polarization, but the near-field distribution associated with laser damage resistance ability is strongly dependent on polarization state of incident light. What's more, the femtosecond pulse laser damage threshold of surface structure taking into account local maximum electric field enhancement was calculated numerically using a theoretical ionization mechanism model. The higher threshold on the surface period, pulse duration and incident wavelength for TM polarization than that for TE wave is demonstrated quantitatively.     

半圆形金属光栅的矢量模态理论

采用了Ｈａｎｓｅｎ矢量波函数理论研究半圆形金属光栅的衍射效率问题，该方法适用于任意入射方向，任意偏振态入射场衍射问题的研究，结果表明，当入射光为ｐ或ｓ型偏振光时，其结果与文献（１）的结果相同。     

Electromagnetic plane-wave scattering from a sectorial groove in a perfectly conducting plane

Scattering characteristics of plane waves by a sectorial groove in a perfectly conducting plane are investigated. Both the transverse magnetic (TM) and transverse electric (TE) polarizations of the incident wave are considered. Judicious use of the region-matching technique provides a rigorous series solution to the problem. The analyzed region is separated into two sub-regions by choosing a semi-circular auxiliary boundary. Thefield in each sub-region is expanded as a summationof proper wave functions with unknown coefficients. Enforcing the matching of conditions on the auxiliary boundary and of boundary condition on the circular-arc surface of the groove leads to a linear set of equations and the unknown coefficients are then determined. Numerical results demonstrate the influence of central angles of the sectorial groove on echo width, far-field pattern and near-field distribution. The presented geometry is easily applicable to the design and fabrication of a grating structure for optical switches and tunable filters.      

长柱状气溶胶粒子的光散射特性

以中纬度卷云中常见的长柱状冰晶为例,利用长柱状粒子光散射理论,探讨了入射光为线偏振时,电矢量平行和垂直于入射面情况下,单个长柱状粒子的散射光强度分布和偏振特性随入射角、尺度参数与偏振态的转化关系:随着入射角的增大,散射强度、偏振总体趋于对称且数值振荡频率降低,散射强度总体减小,偏振的改变程度总体增大;随着尺度参数的增大,散射强度、偏振的数值振荡频率增大,散射强度数值振荡峰的幅度整体减小,电矢量平行于粒子长轴时主偏振的数量、强度和位置皆有变迁,电矢量垂直于粒子长轴时前后主偏振位置相对固定;随着偏振度的减小,散射强度、偏振趋向于一致,两者的数值改变程度减小,当偏振度减小到0时,散射强度、偏振变得完全相同。选取火山尘埃和烟灰与冰晶对比,阐述了粒子散射光的强度分布和偏振特性随折射率的变化规律:折射率虚部不改变散射强度的整体趋势,但使散射强度和偏振的振荡峰幅度增大,当其数值较大时,使得偏振的数值振荡峰覆盖范围拓宽。     

Rigorous model of multiwave exposure in optical lithography

A theoretical model of contactless optical lithography with simultaneous participation of several different light waves one of which is incident along the normal to the exposure mask and the remaining are incident obliquely and symmetrically on both sides is considered. The model is based on rigorous solution of the problem of diffraction of a plane optical wave for a simplified 2D diffraction structure consisting of a perfectly conducting finite-thickness screen with a single slot (mask) and a semi-infinite absorbing dielectric located behind the screen (photoresist). The total diffraction field arising in this medium as a result of super-position of different diffraction fields generated by differently directed waves incident on the screen with a slot is analyzed. The quality of reproduction of the optical image of the slot is evaluated using several integrated parameters introduced by the authors earlier. An important case of nanolithography is considered, when the slot width, the screen thickness, and the distance to the medium are on the order of the illumination wavelength. It is found that the optimal value of the slot image quality in this case is attained for two-wave and three-wave regimes of exposure for identical initial phases of incident waves and for angles of incidence of lateral waves from 10° to 20°.     

矩形槽光栅矢量模式理论的数值计算

本文根据矩形槽光栅的矢量模式理论进行了数值计算。对于任意入射方向及任意偏振态的入射场，计算了其衍射效率和偏振特性变化，并详细研究了光栅结构参数（周期、槽宽、槽深等）对衍射场的影响。     

亚波长介质光栅的闪耀特性分析

采用严格耦合波理论与矩阵LU分解法,求解了亚波长矩形介质光栅的衍射场,给出了TE和TM偏振波的耦合波方程组及其矩阵形式.通过数值计算分析了TE和TM偏振波的入射角、刻槽深度、入射波长等参量对＋1级衍射波衍射效率的影响.结果表明,当Λ=0.5λ0,θ=55°,d=0.38λ0,λ=10.6 μm时可以实现对TE偏振波＋1级的闪耀,衍射效率达到近90%,同时具有较宽广的角度适应范围.     

透射型光折变体全息光栅对超短脉冲激光光束衍射的特性

在Kogelnik耦合波理论的基础上,考虑光栅记录介质的色散效应的影响,研究了光折变体全息光栅对不同偏振状态的超短脉冲激光光束衍射的性质,讨论了高斯型入射脉冲激光光束的谱宽与光栅的有效衍射谱宽之比不同时,衍射和透射光束的光谱宽度、时间宽度、波形和衍射效率的变化。结果表明,光栅的有效衍射谱宽受光栅参量及入射条件的影响,对衍射性质的影响很大,且在考虑光栅记录介质的色散效应时减小。当入射脉冲的偏振方向垂直于入射面时,光栅的有效衍射谱宽大于偏振方向平行于入射面的情形,衍射效率在入射脉冲宽度较大时小于偏振方向平行于入射面的情形;谱宽比较大时,衍射光束的时间分布曲线产生展宽和变形,且比偏振方向平行于入射面的情形展宽和变形得更加明显。     

光学薄膜诱导偏振像差对大数值孔径光学系统聚焦特性的影响

大数值孔径光学系统表面光线的入射角较大, 会导致薄膜的偏振分离, 诱发偏振像差, 影响光学系统的聚焦特性. 本文利用矢量光衍射理论, 建立了光学薄膜各参量与光学系统聚焦光场的模型. 利用该模型分析了线偏振光入射时, 光学薄膜对光学系统聚焦光斑的扰动. 在此基础上, 探讨了应用了不同约束条件下得到的光学薄膜对最终聚焦光场的影响, 确定了减小薄膜扰动光学系统光斑的设计方法, 即额外添加透射率差和位相差的约束条件, 并且适当增加位相差约束的权重. 利用该方法优化设计的薄膜, 相比于普通减反膜而言, 对系统聚焦光场中心强度的提升可达约12.5%.     

Femtosecond laser-induced blazed periodic grooves on metals

In this Letter, we generate laser-induced periodic surface structures (LIPSSs) on platinum following femtosecond laser pulse irradiation. For the first time to our knowledge, we study the morphological profile of LIPSSs over a broad incident angular range, and find that the morphological profile of LIPSSs depends significantly on the incident angle of the laser beam. We show that LIPSS grooves become more asymmetric at a larger incident angle, and the morphological profile of LIPSSs formed at an incident angle over 55° eventually resembles that of a blazed grating. Our study suggests that the formation of the blazed groove structures is attributed to the selective ablation of grooves through the asymmetric periodic surface heating following femtosecond pulse irradiation. The blazed grooves are useful for controlling the diffraction efficiency of LIPSSs.     

亚微米光栅零级衍射特性的数值研究

用耦合波理论分析了亚微米光栅对光波场的衍射作用,给出了在TE和TM偏振入射条件下矩阵形式的耦合波方程,研究了光栅在TE偏振入射条件下可见光波段内的反射和透射零级衍射特性。亚微米光栅零级衍射效率是波长、偏振和入射角的函数,在不同照明、观察和光栅参数条件下,光栅零级衍射具有非常复杂的光谱结构,经过适当的优化光栅参数,零级衍射具有许多独特的衍射特性,在许多应用领域具有广泛的应用前景。     

矩孔金属光栅矢量模式理论的数值计算

根据矩孔金属光栅的矢量模式理论，计算了不同入射方向，波长及偏振态情况下衍射场的分布，研究了不同光栅结构对衍射效率，偏振态变化的影响；同时，根据实际需要，加工制作了一批不同深度的矩孔光栅样品，进行了实验测量，并将计算值与实验值进行了比较，两者基本相符。     

Complex interaction of polarized light with three-dimensional opal-based photonic crystals: Diffraction and transmission studies

Polarization characteristics of light interaction with the photonic crystal of a-SiO₂ synthetic opals were studied under the conditions of low dielectric contrast. We analyzed 3D diffraction patterns of monochromatic light and calculated optical transmission spectra of oriented samples. The diffraction patterns are found to change with the polarization of incident light, indicating a strong polarization dependence of photonic stop bands in synthetic opals. It is shown theoretically there exists a critical angle, θ_c, of the p-polarized light incident on the (h k l) crystal plane, at which the resonance contribution to Bragg diffraction vanishes.     

Polarization-Independent Ultrasonic Modulation of Light in Gyrotropic Cubic Bismuth Germanate Crystals

An intermediate regime of light diffraction by ultrasound propagating along the [001] and [110] axes of a gyrotropic cubic bismuth germanate crystal is investigated. The possibility of polarization-independent light modulation in the intermediate regime of diffraction close to the Bragg regime is shown. The dependences of the diffraction efficiency on the incident light polarization azimuth at different ultrasonic wave intensities are given.