Two-dimensional lateral ordering of self-assembled Ge islands on patterned substrates

Stacks of Ge islands layers, separated by thin Si spacer layers, have been grown on prepatterned Si (0 0 1) substrates. The sample topography, obtained by atomic force microscopy, exhibits a regular two-dimensional island arrangement. The vertical alignment is confirmed in cross-sectional transmission electron microscopy images. X-ray diffraction reciprocal space maps around the (0 0 4) Bragg point reveal exceptional lateral and vertical ordering of the Ge islands. Photoluminescence spectra taken at 5 K show well-separated peaks of the no-phonon and the transverse-optical phonon replica of these ordered islands, which is achieved too, due to the excellent island size uniformity.     

Kinetic Monte Carlo simulations of three-dimensional self-assembled quantum dot islands

By three-dimensional kinetic Monte Carlo simulations, the effects of the temperature, the flux rate, the total coverage and the interruption time on the distribution and the number of self-assembled InAs/GaAs(001) quantum dot(QD) islands are studied, which shows that a higher temperature, a lower flux rate and a longer growth time correspond to a better island distribution. The relations between the number of islands and the temperature and the flux rate are also successfully simulated. It is observed that for the total coverage lower than 0.5 ML, the number of islands decreases with the temperature increasing and other growth parameters fixed and the number of islands increases with the flux rate increasing when the deposition is lower than 0.6 ML and the other parameters are fixed.     

Electromodulation of the interband and intraband absorption of Ge/Si self-assembled islands

We have investigated the interband and the intraband absorption properties of Ge/Si self-assembled islands. The investigated structure consists of a p–i–n junction containing Ge/Si self-assembled islands embedded in a Si_0.98Ge_0.02 waveguiding layer. The variation of transmission associated with carrier injection under forward bias is monitored both in the near-infrared and in the mid-infrared spectral ranges. We show that the carrier injection leads to an absorption resonant at 185 meV which is polarized along the growth axis of the islands. This transition corresponds to an intraband optical transition from the island ground states to the two-dimensional wetting layer states. This assignment is supported by a two-dimensional band structure calculation performed in a 14 band k·p formalism. Meanwhile, the carrier injection leads to a bleaching of the interband absorption. We show that this electroabsorption spectroscopy is a useful tool for the study of self-assembled islands that is complementary of standard photoluminescence, electroluminescence or absorption spectroscopies.     

Investigating the lateral motion of SiGe islands by selective chemical etching

SiGe islands grown by deposition of 10 monolayers of Ge on Si(0 0 1) at 740 °C were investigated by using a combination of selective wet chemical etching and atomic force microscopy. The used etchant, a solution consisting of ammonium hydroxide and hydrogen peroxide, shows a high selectivity of Ge over Si_xGe_1−x and is characterized by relatively slow etching rates for Si-rich alloys. By performing successive etching experiments on the same sample area, we are able to gain a deeper insight into the lateral displacement the islands undergo during post growth annealing.     

Si组分对SiGe量子点形状演化的影响

研究了自组织生长SiGe岛（量子点）中Si组分对形状演化的影响.采用UHV/CVD方法生长了 不同Si组分的SiGe岛，用AFM对其形状和尺寸分布进行了分析，实验结果表明SiGe岛从金字 塔形向圆顶形转变的临界体积随Si组分的增大而增大.通过对量子点能量的应变能项进行修正，解释了量子点中Si组分对形状演化的影响.在特定的工艺条件下得到了单模尺寸分布的 金字塔和圆顶形量子点.结果表明，通过调节SiGe岛中的Si组分，可以实现对SiGe岛形状和 尺寸的控制. 关键词： 自组织生长SiGe岛 Si组分 临界体积     

Probing the temperature profile of energy production in the sun

The particle kinetic energies of thermonuclear pp fusion in the Sun (Gamow energy) produce small changes in the energies of pp solar neutrinos relative to those due only to exothermal energetics. This effect may be observable via the unique tools of the LENS solar neutrino detector. The temperature profile of energy production in the Sun may thus be directly probed for the first time.     

Preferential ordering of self-assembled Ge islands on focused ion-beam patterned Si(100)

We report the growth of Ge islands on Si (001) substrates with lithographically defined two-dimensionally periodic pits using focused ion-beam patterning and molecular beam epitaxy. The formation of circularly ordered Ge islands has been achieved by means of nonuniform strain field around the periphery of the holes due to ion bombardment. Lateral ordering of the Ge islands have been controlled by both the pit size and pit separation. Preferential growth at the pit sites has also been achieved by using appropriate pattern shape and size.     

X-ray diffraction study of the composition and strain fields in buried SiGe islands

We report on studies of strain and composition of two-dimensionally ordered SiGe islands grown by molecular beam epitaxy using high resolution x-ray diffraction. To ensure a small size distribution of the islands, pit-patterned (001) Si wafers were used as substrates. The Si wafers were patterned by optical lithography and reactive ion etching. The pits for island growth are ordered in regular 2D arrays with periods ranging from 500 to 1000 nm along two orthogonal 〈110〉 directions. After the growth of a Si buffer layer, 5 to 9 monolayers of Ge are deposited, leading to the formation of islands with either dome- or barn shape, depending on the number of monolayers deposited. The Si capping of the islands is performed at low temperatures (300^○C) to avoid intermixing and thus strain relaxation. Information on the surface morphology obtained by atomic force microscopy (AFM) was used to set up models for three-dimensional Finite Element Method (FEM) simulations of the islands including the patterned Si substrate. In the model, special attention was given to the non uniform distribution of the Ge content within the islands. The FEM results served as an input for calculating the diffracted x-ray intensities using kinematical scattering theory. Reciprocal space maps around the vicinity of symmetric (004) and asymmetric (113) and (224) Bragg peaks were recorded in coplanar geometry. Simulating different germanium gradients leads to altered scattered intensity distribution and consequently information on this quantity is obtained for both dome- and barn-shaped islands as well as on the strain fields.     

Dislocation-induced composition profile in alloy semiconductors

We present a novel computational method by combining the finite element method and the method of moving asymptotes to study the dislocation-induced composition profile in alloy semiconductors. Segregated cylindrical nanoscale regions appear around the dislocation core. We find that the dominant driving force of non-uniform composition is strain contribution. Moreover, the method can be applied to the dislocated nanoscale heterostructures which are inaccessible by atomic treatment.     

Photoluminescence of GeSi/Si(0 0 1) self-assembled islands with dome and hut shape

The photoluminescence spectra of GeSi/Si (0 0 1) self-assembled islands produced by solid source molecular beam epitaxy in a wide range (460–700°C) of growth temperatures were investigated. The results showed a blue shift of the island-related photoluminescence peak with a growth temperature lowering from 600°C to 550°C. The observed blue shift of the island photoluminescence peak is associated with a sharp decrease in the average height of the island, which occurs through a change of its shape from dome to hut as the growth temperature lowers from 600°C to 550°C.     

Detection of lateral composition modulation by magnetoexciton spectroscopy

An experimental signature for detecting spontaneous lateral composition modulation in a (InAs) (GaAs) short period superlattice on a InP substrate based on magnetoexciton spectroscopy is described. We find by aligning the magnetic field in three crystallographic directions, one parallel to and the other two perpendicular to the composition modulation direction, that the magnetoexciton shifts are anisotropic and are a good indicator for the presence of composition modulation.     

Probing defect species on real surfaces from the analysis of the spectral profile of admolecules

The analysis of changes in the vibrational spectrum of infrared active molecules adsorbed on a ionic surface containing point or extended defects can be an efficient method to determine the nature and density of surface defects. We study the infrared response of ammonia molecules deposited on a ionic surface of MgO containing charge vacancies and dipolar defects in various concentrations and distributions and show significant changes assigned to the defects signature. A Monte Carlo approach is used to randomly deposit the probe molecules on the surface displaying random or regularly arranged defects at low temperature.     

Photoluminescence of Ge(Si)/Si(0 0 1) self-assembled islands in the near infra-red wavelength range

The dependence of photoluminescence spectra of structures with GeSi/Si(0 0 1) self-assembled nanoislands on growth temperature has been investigated. It was shown that the redshift of the island-related photoluminescence peak with a decrease of the growth temperature is associated with suppression of Si diffusion in the islands and an increase of Ge content in them. For the first time a photoluminescence signal from SiGe islands was observed at energies much lower than the Ge band gap. The energy position of the island-related photoluminescence peak is well described by the model of optical transition, which is indirect in real space. The photoluminescence signal at 1.55 μm from GeSi/Si(0 0 1) self-assembled islands was obtained up to room temperature.     

Influence of the germanium deposition rate on the growth and Photoluminescence of Ge(Si)/Si(001) self-assembled islands

The growth and photoluminescence of Ge(Si)/Si(001) self-assembled islands are investigated over a wide range of germanium deposition rates v_Ge = 0.1–0.75 Å/s at a constant growth temperature T _g = 600°C. Examination of the surface of the grown structures with an atomic force microscope revealed that, for all the germanium deposition rates used in the experiments, the dominant island species are dome islands. It is found that an increase in the deposition rate v_Ge leads to a decrease in the lateral size of the self-assembled islands and an increase in their surface density. The decrease in the lateral size is associated both with the increase in the germanium content in the self-assembled islands and with the increase in the fraction of the surface occupied by these islands. The observed shift in the position of the photoluminescence peak toward the low-energy range is also explained by the increase in the germanium content in the islands with an increase in the deposition rate v_Ge.     

Imaging the evolution of lateral composition modulation in strained alloy superlattices

Scanning tunneling microscopy is used to investigate the morphological evolution of GaAs/InAs short period superlattice structures. The layers of the superlattice, either grown in compression or tension, exhibit an island or trench morphology. With increasing film thickness, the islands or trenches grow in size and develop a characteristic spacing along [110] of approximately 150 A. This is the first experimental evidence to suggest that lateral composition modulation arises from both thickness variations of the layers and compositional nonuniformities within the atomic plane.     

Influence of a predeposited Si1−x Gex layer on the growth of self-assembled SiGe/Si(001) islands

The growth of self-assembled Ge(Si) islands on a strained Si_1?xGe_x layer (0% < x < 20%) is studied. The size and the surface density of islands are found to increase with Ge content in the Si_1?xGe_x layer. The increased surface density is related to augmentation of the surface roughness after deposition of the SiGe layer. The enlargement of islands is accounted for by the decrease of the wetting layer in thickness due to the additional elastic energy accumulated in the SiGe layer and to enhanced Si diffusion from the Si_1?xGe_x layer into the islands. The increase in the fraction of the surface occupied by islands leads to a greater order in the island arrangement.     

Single layer gold islands at the interface between a self-assembled monolayer and the Au(111) substrate: A high-resolution STM study

Physical vapor deposition of gold onto a self-assembled monolayer (SAM) of octanethiol on Au(111) has been studied at the molecular level in ultra-high vacuum (UHV) using atomic-resolution scanning tunneling microscopy (STM). A specially prepared SAM with not only the usual etch pits but also co-existing phases and domain boundaries is used for the purpose of studying details of the nucleation process. Etch pits are found to be filled by deposited Au atoms. At the same time, preferential nucleation and growth of gold islands at intersections of different domains, as well as inside the domains of the less dense striped phase, is observed. We find no gold islands within the densely-packed (√3 × √3)R30° phase. High-resolution STM imaging shows that the SAM over the newly formed gold islands adopts the same structure as that in the immediate surroundings.     

On the various impact of chemical composition and elastic strain in SiGe nanoscale islands to the diffuse X-ray scattering

High-resolution X-ray diffraction in combination with kinematical scattering simulations based on finite element calculations for the elastic strain field has been utilized to investigate the chemical composition of SiGe/Si(0 0 1) Stranski–Krastanov islands. Therefore, the intensity distribution in the vicinity of the symmetric (0 0 4) reflection has been three dimensionally measured and compared with respective simulations. Around an asymmetrical reflection, e.g. Si(1 1 3), the impact of lateral and vertical strain tensor components on the diffraction pattern decouples. This allows to distinguish between tetragonally distorted regions at the island bottom and elastically relaxed unit cells of cubic shape at the island apex in accordance with finite element calculations. Artificially switching off and on the various scattering abilities of silicon and germanium in otherwise equivalent simulations yields practically no difference in the resulting scattering. Thus, at X-ray energies far from absorption edges, the diffuse scattering is dominated by elastic strain which is caused by the chemical profile.