光电子技术与器件 光学传感、传感器

TP212．1 2005053728 波导型钯(Pd)膜氢传感器数值模拟及优化=Simulation and optimal design for a Pd-coated hydrogen sensor based on integrated optical waveguide[刊,中]／胡建东(浙江大学 光及电磁波研究中心,现代光学仪器国家重点实验室．浙 江,杭州(310027)),文泓桥…∥光子学报．-2005,34 (2)．-237-240 基于离子交换波导的集成型器件是氢敏传感器中很 有发展潜力的一种。传感区域由离子交换波导及其表面 的金属钯膜组成,通过有限差分法(FDM)计算了这种波导 结构中的导模及表面等离子模的模场分布,分析了其传播 特性与钯模光学常数的关系,并结合束传播方法(BPM)对 钯膜的厚度进行了优化,使其具有最高的灵敏度。图6参 16(王淑平)     

Au:TiO2和Au:Al2O3纳米颗粒复合膜的线性和非线性光学特性

主要从实验和理论两个方面,探讨了不同Au颗粒尺寸和不同基质对Au：TiO₂和Au：Al₂O₃复合膜线性和非线性光学性质的影响.用吸收光谱研究了Au颗粒尺寸和基质与Au复合膜表面等离子体共振带之间的关系;用皮秒Z扫描技术研究了共振和非共振情况下(激发光波长分别为532nm和1064nm),Au颗粒尺寸和基质与复合膜三阶非线性极化率的关系.基于表面等离子体共振理论和局域场增强理论对复合膜进行了分析,得到了不同Au颗粒大小和不同基质时Au复合膜的 关键词： 金属纳米颗粒 复合膜 三阶非线性 表面等离子体共振     

基于二硫化钨增敏的锥形光纤表面等离子体共振传感器（英文）

提出了一种具有增强灵敏度的锥形光纤二硫化钨(WS₂)-金(Au)表面等离子体共振(SPR)传感器。通过传输矩阵方法对传感器进行了理论模拟,评估了传感器的可行性。在锥形光纤上依次涂覆WS₂和溅射金膜进行传感实验,该传感器的实验折射率灵敏度可达 4 158.171 nm/RIU,比多模光纤SPR 传感器提高了 125.8%,比锥形光纤 Au-WS₂SPR 传感器提高了 50.1%。此外,该传感器中的 WS₂不易脱落,表现出良好的可靠性。该传感器结构简单、易于制造,具有高的折射率灵敏度,在生化传感领域具有良好的应用前景。     

基于金银合金薄膜的近红外表面等离子体共振传感器研究

利用淀积在玻璃衬底上的金银合金薄膜作为表面等离子体共振(SPR)芯片, 构建了Kretschmann结构的近红外波长检测型SPR传感器. 采用不同浓度的葡萄糖水溶液测试了金银合金薄膜SPR传感器的折射率灵敏度. 实验结果表明随着入射角从7.5°增大到 9.5°, SPR吸收峰的半高峰宽从292.8 nm 减小到 131.4 nm, 共振波长从 1215 nm蓝移到 767.7 nm, 折射率灵敏度从35648.3 nm/RIU 减小到 9363.6 nm/RIU.在相同的初始共振波长(λ_R)下获得的金银合金薄膜SPR折射率灵敏度高于纯金膜(纯金膜在λ_R=1215 nm下的折射率灵敏度为29793.9 nm/RIU). 利用1 μmol/L的牛血清蛋白(BSA)水溶液测试了传感器对蛋白质吸附的响应.结果表明, BSA分子吸附使得金银合金薄膜SPR吸收峰红移了12.1 nm而纯金膜SPR吸收峰仅红移了9.5 nm. 实验结果还表明, 在相同λ_R下, 金银合金薄膜SPR吸收峰的半高峰宽大于纯金膜的半高峰宽, 因此其光谱分辨率比纯金膜SPR传感器低. 关键词： 金银合金薄膜 表面等离子体共振 波长检测型 高灵敏度     

基于2S2G棱镜的新型反向表面等离子共振生物传感器

提出了一种基于反向表面等离子体共振原理,由Ge_(20)Ga_5Sb_(10)S_(65)-钯-石墨烯分子-生物分子四层结构构成的新型生物传感器。当生物分子之间发生相互作用时,引起生物分子层折射率的变化,从而导致反向表面等离子体共振角的偏移。在此基础上,根据传输矩阵法推导了传感器的输出光谱,重点讨论了本文提出的传感器与传统传感器相比,在灵敏度、分辨率、动态检测范围以及检测信号信噪比方面取得的进展。另外,通过对比研究,深入分析了辅助介质层石墨烯厚度对传感器性能的影响。最后,利用近红外光作为提出的传感器的入射光,分析了在近红外区域传感器性能的改善。研究结果表明:单层石墨烯分子使传感器性能达到最佳;反向表面等离子共振峰强度约为入射光强的80%~90%,使传感器的输出信号具有较大的信噪比;在可见光区域,当入射光波长为632.8nm时,提出的反向表面等离子共振生物传感器的分辨率是基于SiO_2棱镜耦合反向表面等离子共振生物传感器的1.9倍,是传统表面等离子共振生物传感器的3.5倍,提出的传感器的动态检测范围约是现有传感器的2倍;利用Ge_(20)Ga_5Sb_(10)S_(65)棱镜可使反向表面等离子共振生物传感器检测光波长由可见光区域扩展到近红外区域,当入射光为1 000nm时,传感器的分辨率是可见光区域的3~4倍。该研究对基于反向表面等离子体共振原理生物传感器的实现与发展具有重要意义。     

基于银/高纯铟复合膜的表面等离子体共振折射率传感器

为了解决单一金属膜结构的光纤表面等离子体共振（SPR）盐度传感器结构不稳定且灵敏度较低的问题,设计了一种高灵敏度的锥形三芯光纤结构的SPR盐度传感器。以银膜为激发表面等离子体共振的金属层,在其表面涂覆高纯铟以增强其稳定性。通过Kretschmann四层结构模型对传感器进行理论分析,结果表明,在光纤锥区纤芯模和包层模之间会出现强烈的模式耦合,在覆膜区会激发明显的等离子体共振。对涂覆银膜和高纯铟膜的SPR传感器进行折射率性能测试,在1.4%～3.6%的盐度变化范围内,涂覆银膜和高纯铟膜的SPR传感器灵敏度高达4989.34 nm/RIU,对应的盐度灵敏度为9.1 nm/%,比仅涂覆银膜的SPR传感器灵敏度提高了44%。     

Pd颗粒表面修饰ZnO纳米线阵列的制备及其气敏特性

采用化学气相沉积(CVD)方法在SiO_2/Si衬底生长了ZnO纳米线阵列,纳米线长约为15μm,直径为100~500 nm。通过改变溅射沉积时间(0~150 s),在ZnO纳米线表面包覆了不同厚度的Pd薄膜。在Ar气氛中,经800℃高温退火后,制备出Pd颗粒表面修饰的ZnO纳米线阵列并对其进行了气敏测试。对于乙醇而言,所有传感器最佳工作温度均为280℃。溅射时间的增加(3~10 s)导致ZnO纳米线表面Pd纳米颗粒数量及尺寸增加,传感器响应值由2.0增至3.6。过长的溅射时间(30~150 s)将导致Pd颗粒尺寸急剧增大甚至形成连续膜,传感器响应度显著降低。所有传感器对H2均表现出相对较好的选择性,传感器具有较好的响应-恢复特性和稳定性。最后,探讨了Pd颗粒表面修饰对ZnO纳米线阵列气敏传感器气敏特性的影响机制。     

基于表面等离子共振的光纤探针折射率传感器

基于表面等离子体共振效应,设计一种锥形光纤探针折射率传感器。通过锥形结构理论模型与SPR共振模型,利用MATLAB与FDTD Solutions软件进行理论计算与模拟仿真,分析锥形光纤锥度比、传感区长度和银膜厚度对传感器发生共振时的共振深度的影响。通过对比所镀膜层的结构与厚度,从灵敏度与品质因素角度对传感器性能进行优化。结果表明随着锥形光纤锥度比增大,共振深度出现极值;传感区长度越长,共振深度越深;银膜在50 nm处传感器性能较优,银/二氧化钛复合膜结构的传感器灵敏度与品质因素高于单层膜结构传感器。     

基于侧边抛磨光纤表面等离子体共振的折射率和温度传感研究

用轮式侧边抛磨法制作侧边抛磨光纤,通过磁控溅射法溅射金膜制成侧边抛磨光纤表面等离子体共振(SPR)传感器,并通过理论和实验对传感器的折射率灵敏度以及温度特性做了深入研究。结果表明表面等离子体共振波长随待测样品折射率的增大向长波长方向漂移,平均折射率灵敏度为4.1×103 nm/RIU(RIU为单位折射率),高于已报道的结果;共振波长随待测样品温度的升高向短波长方向漂移,平均温度灵敏度为0.36nm/℃,故该光纤SPR传感器具有更强抗温度漂移能力和更高的高折射率灵敏度,其在生物化学传感领域有重要的应用。     

V/Pd界面氢吸附扩散行为的第一性原理研究

采用钒/钯(V/Pd)金属复合膜渗氢是从混合气体中分离氢气的一种有效实用方法.为深入地了解催化Pd层与金属膜结合处的界面结构与吸氢/渗氢特性的关联性,进而提升合金膜提纯氢气的能力,本文采用基于密度泛函理论的第一性原理研究了V/Pd金属复合膜界面的氢吸附/扩散行为.研究结果表明:由于V/Pd界面的电荷密度随着V/Pd成键而增加,导致氢原子(H)溶解能随着接近界面而增大,在V/Pd界面附近具有最高的溶解能(0.567 eV).氢迁移能垒计算表明,与H沿V/Pd界面水平扩散的最大能垒(0.64 eV)相比,H垂直V/Pd界面能垒(0.56 eV)更小,因而H倾向于垂直V/Pd界面进行迁移,并由Pd层扩散到V基体一侧,因V/Pd界面处Pd层的氢溶解能(0.238 eV)高于V膜侧(-0.165 eV),H将在界面的V膜侧积累,易引起氢脆.V基体掺杂Pd/Fe的计算表明,与未掺杂的能垒(0.56 eV)相比,掺杂Pd/Fe可明显地降低界面扩散路径中的最大能垒(0.45 eV/0.54 eV),利于氢的渗透扩散,且掺杂界面能一定程度抑制V和催化Pd层的相互扩散,提高复合膜的结构稳定性.     

光纤SPR湿敏传感器及其共振光谱特性研究

提出并研制了基于光纤SPR传感探针的新型湿敏传感器。首先研究了光纤SPR传感探针对环境湿度变化的敏感特性,在此基础上提出在光纤SPR传感探针表面增覆不同厚度且具有水分子吸附功能的PVA薄膜来实现环境相对湿度的监测。研究结果表明,增覆双层PVA薄膜的光纤SPR传感探针在高湿区具有较好监测效果,其共振强度对应的相对湿度测量灵敏度达到1.59%/%RH,较光纤SPR探针呈现显著提高。而增覆单层PVA薄膜的光纤SPR传感探针在高湿区共振波长对应的相对湿度监测灵敏度达到2.411nm/%RH。此外所提出的新型光纤SPR湿敏探针在PVA薄膜失效后经过特殊工艺处理仍可重复镀膜使用。     

Temperature dependence of a nanoporous Pd film hydrogen sensor based on an AAO template on Si

In this study, hydrogen sensing properties of nanoporous Pd films based on Anodic Aluminium Oxide (AAO) templates grown on a silicon substrate have been investigated at various temperatures (25–100°C) and hydrogen concentrations (100–1000 ppm) to determine the temperature-sensitivity relationship. For this purpose, a hexagonally shaped AAO template of approximately 50 nm in diameter and 700 nm in length with 80 nm interpore distances was fabricated using two-step anodization of an Al film deposited on an n-type (100) oriented oxidized Si substrate. Then, the nanoporous surface of the AAO template was used as a substrate for supporting a nanoporous Pd film of an approximately thickness of 60 nm. The morphologies of the AAO template and Pd film coated on the AAO template were studied mainly by Scanning Electron Microscopy (SEM). Hydrogen sensing properties of the nanoporous Pd film were measured using a resistance transient method. It was found that the sensor response of the nanoporous Pd films on the AAO template was better than the traditional Pd thin film sensors, the sensitivity of the sensor was approximately 1.8% for 1000 ppm H₂, and the detection limit was lower than 100 ppm at room temperature. The highest sensitivity was measured at room temperature.     

Low-cost,high performance surface plasmon resonance-compatible films characterized by the surface plasmon resonance technique

A new analytical method based on the surface plasmon resonance (SPR) technique is presented, with which SPR curves for both wavelength and angular modulations can be obtained simultaneously via only a single scan of the incident angle. Using this method, the SPR responses of TiO2-coated Cu films are characterized in the wavelength range from 600 nm to 900 nm. For the first time, we determine the effective optical constants and the thicknesses of TiO2-coated Cu films using the SPR curves of wavelength modulation. The sensitivities of prism-based SPR refractive index sensors using TiO2-coated Cu films are investigated theoretically for both wavelength and angular modulations, the results show that in the case of sensitivity with wavelength modulation, TiO2-coated Cu films are not as good as the Au film, however, they are more suitable than the Au film for SPR refractive index sensors with angular modulation because a higher sensitivity can be achieved.     

表面等离子共振效应中传统近似理论与薄膜光学理论

指出Kretschmann模型的传统表面等离子共振公式在求解金属薄膜的参量时存在近似性,采用更为严密的薄膜光学理论,通过薄膜膜系的特征矩阵,得出表面等离子体共振衰减曲线.结果表明,表面等离子体共振近似理论与薄膜光学理论得到的共振角及反射率幅度存在差别;采用等高线图,给出了共振角差随着金属介电常量的变化规律.进一步的实验表明,薄膜光学理论所得模拟结果较表面等离子体共振近似理论与实验值吻合地更好,证明薄膜光学理论应用在表面等离子体共振效应要优于常用的近似理论.最后,采用两种理论对表面等离子体共振传感器进行优化设计,结果表明,两种理论所获得的高灵敏度分布区域差异较大,必须采用薄膜光学理论提供更精确的薄膜参量,来优化设计高灵敏度表面等离子体共振传感器.     

Performances of different metals in optical fibre-based surface plasmon resonance sensor

The capability of various metals used in optical fibre-based surface plasmon resonance (SPR) sensing is studied theoretically. Four metals, gold (Au), silver (Ag), copper (Cu) and aluminium (Al) are considered for the present study. The performance of the optical fibre-based SPR sensor with four different metals is obtained numerically and compared in detail. The performance of optical fibre-based SPR sensor has been analysed in terms of sensitivity, signal-to-noise (SNR) ratio and quality parameter. It is found that the performance of optical fibre-based SPR sensor with Au metal is better than that of the other three metals. The sensitivity of the optical fibre-based SPR sensor with 50 nm thick and 10 mm long Au metal film of exposed sensing region is 2.373 μm/RIU with good linearity, SNR is 0.724 and quality parameter is 48.281 RIU^− 1. The thickness of the metal film and the length of the exposed sensing region of the optical fibre-based SPR sensor for each metal are also optimized.     

基于光纤微结构加工和敏感材料物理融合的光纤传感技术

将功能敏感材料与光纤在物理层面进行有机融合,充分发挥光纤传感器在结构集成、材料集成等方面的优势,将有望发展新型的光纤传感器件和系统.本文综述了飞秒激光光纤微加工技术分别在标准的单模光纤和光纤光栅上制备微结构,再结合敏感材料制备技术,实现在物理层面上光纤传感器材料和结构的集成和融合,探索实现新型高性能的光纤传感新技术.     

Design of a highly sensitive surface plasmon resonance sensor using aluminum-based diffraction grating

A highly-sensitive grating-based surface plasmon resonance (SPR) sensor is proposed. The angular interrogation method has been used to study the performance of the sensor, and high sensitivity is obtained if the ?1st diffraction order is used to excite surface plasmon (SP). The sensitivity as well as the width of the SPR curves and reflective amplitude is considered for designing the sensor. Compared with the conventional gold (Au)-based or silver (Ag)-based SPR sensor, it is found that the aluminum (Al)-based sensor has the best performance. The oxidation problem of an Al-based SPR sensor has been addressed by coating it with an ultrathin gold film on the surface. Numerical simulations based on rigorous coupled wave analysis (RCWA) show that the sensitivity of the optimized sensor is 245°/RIU (degree per refractive index unit).     

Surface plasmon sensor with gold film deposited on a two-dimensional colloidal crystal

A sensor based on surface plasmon resonance (SPR) of plasmonic crystals fabricated via a colloidal-crystal-assisted templating method is studied. Plasmonic crystals are prepared by depositing a thin gold (Au) layer onto a two-dimensional array of polystyrene spheres self-assembled on a quartz substrate. The enhanced transmission as a result of the SPR of Au plasmonic crystals, which are immersed in different ambient liquids, are measured and compared with that of polystyrene (PS) microsphere templates of different sizes, both before and after removal of Au nanoprisms formed on the quartz substrate through pores among the spheres. It is found that the measured sensitivities exhibit a linear dependence on the refractive index of the surrounding medium and are linked to coupling effects between SPRs on the corrugated Au film and nanoislands. The feasibility of the SPR system in molecular monolayer detection is further demonstrated through a formation of alkanethiolate self-assembled monolayers on the Au film surface, which causes a 4 nm red-shift of the main SPR. PACS  07.07.Df; 73.20.Mf; 78.66.-w; 81.16.Dn     

Sensitivity enhancement of AZO-based ethanol sensor decorated by Au nano-islands

Detecting the hazardous gases for monitoring air pollution and medical diagnosis make highly sensitive gas sensors appeal to many researches. In this paper, benefiting from unique properties of noble metals, Al-doped ZnO based Ethanol sensors were fabricated and characterized in three structures including Al: ZnO thin film, Silver and Gold nano-islands on Al: ZnO thin film. The Silver and Gold thin films turn to nano-islands after a simple annealing process. The XRD analysis of the sputtered Al: ZnO layer indicates the wurtzite crystal structure of the layer with a peak at (002) plane. Moreover, the sensitivity study reveals that Nano-islands of noble metals substantially affects the sensitivity of the sensors. The decorated Gold nano-island Al: ZnO Ethanol sensor has the highest response showing an amount of 45. The response of Al: ZnO and Silver decorated Al: ZnO sensors are virtually identical to all concentrations of Ethanol, whereas the Al: ZnO gas sensor with Gold nano-islands has the substantial sensitivity for different concentrations. In addition, the response times of the sensors are 85, 70 and 90 s for Al: ZnO, Al: ZnO with Ag islands and Al: ZnO decorated by Au islands, respectively. The recovery time of Al: ZnO sensor decorated by Au islands is about 23s, while the recovery time of the Al: ZnO and Al: ZnO decorated by Silver islands are 360 and 370s, respectively. Hence, the simple annealing process on the sputtered gas sensor with a thin layer of Gold makes nano-islands on the sensor which elevates the performance of Ethanol sensing due to the high sensitivity and sensitivity of the sensor.