采用磁电换能器的振动能量采集器

采用磁致伸缩/压电层合磁电换能器设计了一个振动能量采集器,该能量采集器采用悬臂梁作为振动敏感机构,并用四个NdFeB磁铁组成磁路放在悬臂梁末端.该磁路在空气隙中产生梯度较大的非均匀磁场,使得磁电换能器在较小的振动下感应到较大的磁场变化量,输出较高的功率.利用等效磁荷理论,分析了空气隙磁场分布以及振动时磁路受到的磁力,并用林斯泰特-庞加莱法研究了能量采集器的非线性振动特性,同时将能量采集器的振动方程和换能器的磁电特性结合,分析了能量采集器谐振时的机-磁-电转换特性.通过实验表明：理论与实验符合得较好,且在加 关键词： 振动能量采集 磁致伸缩/压电层合材料 机磁电转换 非线性振动     

一种采用双换能器和摆式结构的宽频振动能量采集器

针对悬臂梁振动能量采集器在大振幅振动下梁容易断裂的缺点,本文提出了一种基于摆式结构的具有宽频和倍频特性的振动能量采集器,该采集器由两个Terfenol-D/PMN-PT/Terfenol-D磁电换能器和嵌有六个磁铁的旋转摆构成.文中建立了摆式结构的摆动方程,分析了采集器的频率响应特性以及谐振时的机-磁-电转换特性,并对采集器输出电压波形进行了频谱分析.理论和实验研究表明:该采集器具有宽频和倍频特性,采集器样机在1 g(1 g=9.8 m/s~2)有效值加速度振动下,向下扫频时的半功率带宽达到4.8 Hz,且能在f=16.9 Hz的振动下获得3.569 mW的负载功率.利用双换能器以及采集器的倍频和宽频特性,能有效地提高低频时采集器的输出功率.     

硅微ZnO压电薄膜传声器的研制

本文介绍了一种利用ZnO压电薄膜为换能器的硅微压电薄膜传声器的制备,并且对微机械加工工艺过程进行了较为详细的描述。本文对传声器的部分结构进行改进,与通常设计相比较大幅提高了传声器的性能,1000Hz基准频率的灵敏度达到-85dB(相对于1V/Pa),500Hz到10000Hz的频率响应的平坦度在±3dB范围内。     

基于ZnO压电薄膜的弯曲振动硅微压电超声换能器的研究

对所研制的硅微压电超声换能器（PMUT）的振动特性进行了研究分析。对硅微压电超声换能的振动膜薄板的厚度相对于薄板的尺度（边长）而言较薄的情况,理论分析与实验结果均表明残余应力对换能器的谐振频率影响较大:不考虑残余应力的理论分析得出的换能器谐振频率与器件的实验测量的结果相差较大,而考虑残余应力的分析给出的谐振频率结果与实验结果是符合的。本文还对所制作的硅微压电超声换能器的谐振频率及导纳进行测量,并给出其等效电路参数。其中振动膜边长为1mm的换能器的谐振频率为71.25 kHz。最后对其进行了简单接收发射实验,测得谐振频率处的接收灵敏度为-201.6 dB（ref 1 V/μPa）,发射电压响应约为137 dB（ref 1 μPa·m/V）。      

微米尺度结构最大抗扭强度的在线测试和研究

提出了一种新型的测试结构，对面积为微米量级下键合的最大抗扭强度进行了测试.实验设计一系列的单晶硅悬臂梁结构测试键合面积在微米量级时的最大剪切力，键合面为常用的矩形其边长从6μm到120μm，并根据实际移动距离计算得出的最大剪切力.并实验实际得出最大剪切扭矩和相应的键合面积的曲线，以及最大扭转剪切破坏应力与悬臂梁加载距离的关系，并针对60μm×60μm的矩形键合结构进行了加载和位移的重复性实验测量，两次测量结果符合较好.微电子机械系统(microelectromechanical system, MEMS)器件的设计人员可以根据结论曲线，针对所需的抗扭强度设计相应的键合面积，为MEMS器件工艺的在线定量测试与设计提供参考. 关键词： 阳极键合 硅深刻蚀 键合强度 最大抗扭强度     

悬臂梁压电振子宽带低频振动能量俘获的随机共振机理研究

研究了利用系统非线性来提高悬臂梁压电振子宽带低频振动能量俘获效率的随机共振机理,通过增加一对矩形永磁铁对传统线性悬臂梁压电振子结构进行了改进,结果揭示:在外部非线性磁力作用以及合适的磁铁间距条件下,这种外加磁力悬臂梁压电振子会构成一个双稳系统,在外部宽带低频随机振动源激励下发生随机共振现象,且发生随机共振时的输出电压明显增大,从而可以扩展悬臂梁压电振子的共振频率范围、提高低频振动能量的转化输出. 关键词： 压电悬臂粱 振动能量俘获 宽带低频 随机共振     

基于光学相干测振系统的微悬臂梁缺陷检测

提出了基于光学相干测振(optical coherence vibrometer,OCV)系统的微悬臂梁缺陷检测方法.自搭建的OCV系统最大振动位移量程、最大振动频率分别为2.574 mm和138.5 kHz,应用该系统对含缺陷微悬臂梁-附加质量块耦合结构进行振动测量获得其固有频率,并利用附加质量块对固有频率的影响特性...     

ZnO薄膜硅微压电矢量水听器

提出了一种基于ZnO压电薄膜的硅微压电矢量水听器,其核心部件是利用微电子机械系统(MEMS)技术制作的悬臂梁结构压电加速度计。由近似解析和有限元分析,得出加速度计的灵敏度和谐振频率,并在此基础上对其进行了优化设计。研制了MEMS压电加速度计,并装配后构成MEMS矢量水听器。测试结果表明:加速度灵敏度在20~1,200 Hz范围内约为0.83 mV/(m/s2)。经过液柱法测量,在1 kHz时,MEMS矢量水听器等效声压灵敏度为-229.5 dB (ref.1V/μPa),比同类型压阻式MEMS矢量水听器的灵敏度高17 dB以上。      

基于涡激振动的压电能量收集特性数值研究

本文设计了一种基于涡激振动的流体动能收集装置。该器件主要包括钝体和PVDF(Polyvinylidene Fluoride)压电悬臂梁,涡街的交替脱落引起梁发生振动,通过压电效应将振动能量转为电能.基于流固耦合计算对该结构压电能量收集特性,以及压电悬臂梁的升阻力系数、振幅和频率等特性进行了数值分析,并着重研究圆柱型钝体与PVDF压电悬臂梁的位置对装置发电效率的影响。结果表明,圆柱与悬臂梁直接相连(即L=0.5D)会得到较高电压输出,在雷诺数Re=6000时,振幅峰值为A=0.97D,输出电压峰值达到0.923V。     

基于磁化电流法的双稳压电悬臂梁磁力精确分析

双稳压电悬臂梁结构常常用于振动能量采集系统,其中的非线性磁力与系统势函数和动力学方程的建立紧密相关,非线性磁力的正确分析和精确计算对系统振动响应和能量采集效果的准确预测至关重要.本文采用形状函数分析方法,通过悬臂梁弯曲斜率的整体积分计算,得到了悬臂梁末端的运动轨迹及其末端磁铁精确的位置与姿态,并由此根据磁化电流理论建立了双稳压电悬臂梁能量采集系统的磁力计算模型,给出了末端磁铁受到的水平轴向磁力和竖直纵向磁力及其合磁力的变化规律.数值模拟发现,随着末端磁铁竖直纵向位移逐渐增大,磁铁受到的水平轴向磁力和竖直纵向磁力都会依次由排斥力转变为吸引力,从而导致磁力合力的方向会随磁铁位移发生跨越两个象限的大幅度变化.实验验证表明,磁力计算结果与实验测量结果符合良好,其精确度优于现有文献方法的精度,因此本文的方法可以准确预测双稳压电悬臂梁振动过程的磁力变化规律.     

Preparation and application of the 3C–SiC substrate to piezoelectric micro cantilever transducers

This study examines the fabrication process and mechanical properties of piezoelectric films with the substrate, which is made from silicon carbide. After depositing the PZT thick film on silicon carbide substrate and silicon substrate respectively, it was shown that silicon carbide substrate formed a stable interface with PZT thick film up to 950?°C, compared with silicon substrate. In addition, the dielectric constant of the PZT thick film sintered at 950?°C on a silicon carbide substrate was 843, and this value was about over 25 % improved value compared with that on a silicon substrate. A thick film piezoelectric micro transducer of a micro cantilever type was fabricated by using a multifunctional 3C–SiC substrate. The fabricated micro cantilever was a micro cantilever with multiple thin films on either silicon or silicon carbide substrate. The piezoelectric thick-film micro cantilever that was fabricated by using a SiC substrate showed excellent mechanical and thermal properties. The piezoelectric micro cantilever on the SiC substrate shows an excellent sensitivity towards the change of mass compared with the piezoelectric micro cantilever on the Si substrate.     

Electric power generation using vibration of a polyurea piezoelectric thin film

An energy harvesting system is proposed, in which mechanical energy is converted to electrical energy through the piezoelectric effect of a polymer polyurea film on the device. Electrical energy harvesting methods that use piezoelectric elements have been reported by several groups, and lead zirconate titanate (PZT) is predominantly employed as the piezoelectric material. An energy harvesting device with a polyurea thin film formed through vapor deposition polymerization with 4,4′-diphenylmethane diisocyanete (MDI) and 4,4′-diamino diphenyl ether (ODA). The conversion efficiency from mechanical to electrical energy was calculated using finite elemental analysis (FEA) of the cantilever configuration. Higher conversion efficiency was obtained using a thinner and shorter cantilever configuration with increased resonance frequency of the device. Experiments were conducted using an electric power generation device with a 3 μm thick polyurea thin film attached to a 0.1-mm-thick, 18-mm-long beryllium copper cantilever. Vibration in the vertical direction, which induces the bending vibration on the cantilever, was applied to the device and the output voltage was measured by connecting load resistances. The output power was measured with a change in the load resistance from 10 kΩ to 10 MΩ, and an optimum output was obtained at 1 MΩ, which corresponds to the value calculated using FEA. The conversion efficiency was improved by changing the cantilever length and an efficiency of 0.233% was obtained with a 4-mm-long cantilever.     

Performance of a cantilever piezoelectric energy harvester impacting a bump stop

Piezoelectric cantilever beam energy harvesters are commonly used to convert ambient vibration into electrical energy. In practical applications, energy harvesters are subjected to large shocks which can shorten the service life by causing mechanical failure. In this work, a bump stop is introduced into the design of a piezoelectric cantilever beam energy harvester to limit the maximum displacement of the cantilever and prevent excessively high bending stresses developing as a result of shocks. In addition to limiting the maximum displacement of the beam, it is inevitable that the deflected shape of the beam and the electrical output are modified. A theoretical model for a piezoelectric cantilever beam harvester impacting against a stop is derived, which aims to develop an understanding of the vibration characteristics of the cantilever and quantify how the electrical output of the harvester is affected by the stop. An experiment is set up to measure the dynamics and the electrical output of a bimorph energy harvester and to validate the theoretical model. Numerical simulation results are presented for energy harvesters with different initial gaps and different stop locations, and it is found that the reduction in maximum bending stress is at the expense of the electrical power of the harvester.     

Mechanics of flexible and stretchable piezoelectrics for energy harvesting

As rapid development in wearable/implantable electronic devices benefit human life in daily health monitoring and disease treatment medically, all kinds of flexible and/or stretchable electronic devices are booming, together with which is the demanding of energy supply with similar mechanical property. Due to its ability in converting mechanical energy lying in human body into electric energy, energy harvesters based on piezoelectric materials are promising for applications in wearable/implantable device's energy supply in a renewable, clean and life-long way. Here the mechanics of traditional piezoelectrics in energy harvesting is reviewed, including why piezoelectricity is the choice for minor energy harvesting to power the implantable/wearable electronics and how. Different kinds of up to date flexible piezoelectric devices for energy harvesting are introduced, such as nanogenerators based on Zn O and thin and conformal energy harvester based on PZT. A detailed theoretical model of the flexible thin film energy harvester based on PZT nanoribbons is summarized, together with the in vivo demonstration of energy harvesting by integrating it with swine heart. Then the initial researches on stretchable energy harvesters based on piezoelectric material in wavy or serpentine configuration are introduced as well.     

A simple, quick and reliable method for TEM cross-section preparation of ceramic oxide films on thin metal substrates

We present a preparation method of cross-sectional thin foils for transmission electron microscopy (TEM). Samples are 0.1-1 m thick ceramic oxide films (CeO2, CeO2-YBa2Cu3O7 and CeO2-ZrO2/YO2-YBa2Cu3O7) epitaxially grown on 30-100 m highly textured nickel substrates. This method includes gluing the sample between a copper oxide dummy and a silicon dummy, followed by mechanical polishing and conventional ion milling. TEM cross-sectional samples obtained with this selection of dummies are electron-transparent up to a few tens of m parallel to the film surface. Several layer structures were analyzed by TEM and the results are shown. The preparation technique described here can be applied to any type of oxide film deposited on thin metal substrates.     

Study of broad bandwidth vibrational energy harvesting system with optimum thickness of PET substrate

In this paper, we present the development of a flexible PET-based (polyethylene terephthalate; PET) vibrational energy harvesting system with broad bandwidth. This broad bandwidth harvesting system comprises of four units of individual ZnO (zinc oxide) piezoelectric harvester in the form of a cantilever structure connected in parallel, and rectifying circuit with storage module. This system has ability to convert mechanical energy into electrical energy from the varying ambient vibration. The design and simulation of a piezoelectric cantilever plate was described by using commercial software ANSYS FEA (Finite Element Analysis) to determine the optimum thickness of PET substrate, internal stress distribution, operation frequency and electric potential. With the optimum thickness predicted by developed accurate analytical formula analysis, the one-way mechanical strain that is efficient to enhance the induced electric potential can be controlled within the piezoelectric ZnO layer. In addition, the relationship among the model solution of piezoelectric cantilever plate equation, vibration-induced electric potential and electric power was realized. An individual piezoelectric harvester consists of flexible PET substrate, piezoelectric ZnO thin film with (002) c-axis preferred orientation, and selectively deposited UV-curable resin lump structure which is used to change the resonant frequency of the harvester. In combination with multi-harvesters and rectifying with storage module together, an energy harvesting system with broad bandwidth can be fabricated. One individual harvester achieves a maximum OCV (open-circuit voltage) up to 4 V with power density of 1.247 μW/cm³. So far, we succeeded in accomplishing a broad bandwidth system with operating frequency range within 100 Hz-450 Hz to enhance powering efficiency. When the DC voltage (direct current voltage) across a storage module is charged up to 1.55 V after rectification, a flash LED (light emitting diode) is driven.     

Potential of a piezoelectric energy harvester from sea waves

A sea wave energy harvester from the longitudinal wave motion of water particles is developed. The harvester consisting of a cantilever substrate attached by piezoelectric patches and a proof mass is used to collect electrical energy owing to the electromechanical coupling effect of the piezoelectric patches from the longitudinal wave motion. To describe the energy harvesting process, a mathematical model is developed to calculate the output charge and voltage from the piezoelectric patches according to the Airy linear wave theory and classical elastic beam model. Results show that the mean value of the generated power increases with the increase in the ratio of the width to the thickness of the cantilever, the wave height, the sea depth (which equals to the cantilever height in this study), the ratio of the proof mass to the cantilever mass, and the ratio of the sea depth to the wave length. A value of the power up to 55 W can be realized for a practical sea wave with the values of the sea depth, wave height and wave length to be 3 m, 2 m, and 15 m, respectively. The collected power harvesting with respect to different categories of the sea waves are provided. Our simulations also show the generated electric power can be further increased by an increase in dimensions of the harvester considering the scale effect. This research develops a new technique for energy harvesting from sea waves by piezoelectric energy harvesters.     

Characterisation of nickel silicide thin films by spectroscopy and microscopy techniques

This article discusses the formation and detailed materials characterisation of nickel silicide thin films. Nickel silicide thin films have been formed by thermally reacting electron beam evaporated thin films of nickel with silicon. The nickel silicide thin films have been analysed using Auger electron spectroscopy (AES) depth profiles, secondary ion mass spectrometry (SIMS), and Rutherford backscattering spectroscopy (RBS). The AES depth profile shows a uniform NiSi film, with a composition of 49-50% nickel and 51-50% silicon. No oxygen contamination either on the surface or at the silicide-silicon interface was observed. The SIMS depth profile confirms the existence of a uniform film, with no traces of oxygen contamination. RBS results indicate a nickel silicide layer of 114 nm, with the simulated spectra in close agreement with the experimental data. Atomic force microscopy and transmission electron microscopy have been used to study the morphology of the nickel silicide thin films. The average grain size and average surface roughness of these films was found to be 30-50 and 0.67 nm, respectively. The film surface has also been studied using Kikuchi patterns obtained by electron backscatter detection.     

纳米多晶硅薄膜电阻压力和加速度多功能传感器（英）

基于纳米多晶硅薄膜电阻的多功能传感器由压力传感器和加速度传感器构成。纳米多晶硅薄膜电阻构成的两个惠斯通电桥结构分别设计在方形硅膜表面和悬臂梁根部。采用MEMS技术和CMOS工艺在〈100〉晶向单晶硅片上实现压力/加速度传感器芯片制作,利用内引线技术将芯片封装在一个印刷电路板（PCB）上。在室温下,工作电压为5.0 V时,实验结果给出压力传感器灵敏度(a=0)为1.0 mV/kPa,加速度传感器灵敏度(p=0)为0.92 mV/g,可实现外加压力和加速度的测量,具有较好的灵敏度特性且交叉干扰较弱。