光子晶体垂直腔面发射激光器的电流分布研究

对氧化限制型外腔式光子晶体垂直腔面发射激光器注入到有源区的电流密度分布进行了分析研究.提出三维电流分布计算模型,研究了光子晶体结构对电流密度分布和器件串联电阻的影响.研究发现,光子晶体孔刻蚀深度越深,电流分布圆对称性越差,引起的串联电阻越大.不同光子晶体图案对电流分布的均匀性和圆对称性也有很大的影响.该模型对于研究、设计氧化限制型外腔式光子晶体垂直腔面发射激光器提供了一个有用的分析方法.     

多横模垂直腔面发射激光器及其波长特性

基于氧化限制型内腔接触垂直腔面发射激光器(VCSEL) 结构设计, 研究了VCSEL的多横模分布及其模式波长分裂特性与氧化孔径尺寸、形状的关系. 在实验基础上, 通过建立有效折射率模型, 并利用标量亥姆霍兹方程的迭代算法理论, 分别对椭圆形氧化孔径和圆形氧化孔径VCSEL的横向模式特性进行模拟研究, 计算得到不同形状孔径的多横模光场分布情况, 同时测量得到高阶横模多频输出光谱. 研究发现, 椭圆氧化孔形状不仅影响横模分布特性, 还会导致每个模式的波长产生分裂, 分裂值可达0.037 nm. 同时, 随着氧化孔径的增大, 波长分裂影响会逐渐减小, 直至趋近于圆形氧化孔径的分布特性. 研究结果为进一步实现氧化限制型VCSEL的多横模锁定提供了有益参考和借鉴.     

1.3μm GaAs基量子点垂直腔面发射激光器结构设计与分析

结合垂直腔面发射激光器（VCSEL）原理以及量子点增益特点，计算了不同结构VCSEL的腔内损耗和量子点的模式增益.分析了激光器阈值特性以及氧化限制层对光损耗的影响.设计了含 氧化限制层的13μm量子点VCSEL结构. 关键词： 量子点 垂直腔面发射激光器 增益     

光子晶体波导对垂直腔面发射激光器光束远场形貌的调控

研究了光子晶体波导对垂直腔面发射激光器(VCSEL)光束远场形貌的调控.采用三层对称平板波导模型分析了影响光子晶体VCSEL(PC-VCSEL)远场发散角的参数.研究表明,PC-VCSEL中光子晶体的填充比(空气孔直径和光子晶体周期的比值)以及空气孔的刻蚀深度控制了光束的发散角,低填充比和浅刻蚀的PC-VCSEL有利于获得低发散角的光束.设计并制作了两种不同结构参数的PC-VCSEL,这两种器件中光子晶体的填充比和空气孔的刻蚀深度不同.实验结果表明,低填充比和浅刻蚀的PC-VCSEL的发散角更低,与理论分析符合得很好.     

表面液晶-垂直腔面发射激光器阵列的热特性

液晶与垂直腔面发射半导体激光器(VCSELs)阵列结合可实现波长可调谐、偏振精确控制等,同时液晶的引入也会改变垂直腔面发射半导体激光器阵列的热特性,本文设计了表面液晶-垂直腔面发射激光器阵列结构,并开展了阵列的热特性实验研究.对比分析了向列相液晶层对VCSEL阵列热特性的影响,实验结果表明,1×1,2×2,3×3三种表面液晶-VCSEL阵列的阈值电流温度变化率最高可降低23.6%,热阻降低26.75%;同时,激光器阵列各发光单元之间的温度均匀性显著提高,出光孔与周围温差小于0.5℃.综上所述,VCSEL阵列中液晶层的引入不仅大大加速激光器阵列单元热量扩散,而且降低了有源区结温,提高了VCSELs激光器阵列热特性,为实现高光束质量的单偏振波长可控VCSEL激光器阵列打下了良好的理论和实验基础.     

940 nm垂直腔面发射激光器单管器件的设计与制备

计算了InGaAs/AlGaAs量子阱的激射波长与阱垒厚度的关系,并通过Rsoft软件计算了不同温度下的材料增益特性.计算并分析了渐变层厚度对分布布拉格反射镜(distributed Bragg reflectors,DBRs)势垒尖峰及反射谱的影响,通过传输矩阵理论得到P-DBR和N-DBR的反射谱和相位谱.模拟了垂直腔面发射激光器(vertical surface emitting lasers,VCSEL)结构整体的光场分布,驻波波峰与量子阱位置符合,基于有限元分析模拟了氧化层对电流限制的影响.通过计算光子晶体垂直腔面发射激光器(photonic crystal vertical cavity surface emitting lasers,PC-VCSEL)中不同的模式分布及其品质因子Q,证明该结构可以有效地实现基横模输出.通过光刻、刻蚀、沉积、剥离等半导体工艺成功制备出氧化孔径为22μm的VCSEL和PC-VCSEL,VCSEL的阈值电流为5.2 mA,斜率效率0.67 mW/mA,在不同电流光谱测试中均是明显的多横模输出;PC-VCSEL的阈值电流为6.5 mA,基横模输出...     

电流孔的尺寸对双氧化限制垂直腔面发射激光器阈值的影响

通过双氧化限制垂直腔面发射激光器中电场、载流子密度、光场和热场空间耦合方程自洽数值求解,研究了垂直腔面发射激光器中阈值特性.得到了氧化层及有源区附近的电势,模拟电流孔的边缘效应,给出了不同双氧化限制电流孔半径下阈值电流密度、载流子密度、基模光场和热场的空间分布.发现了实现最小阈值电流的最佳限制电流孔半径,进而设计了双氧化限制垂直腔面发射激光器的结构. 关键词： 双氧化限制垂直腔面发射激光器 自洽 阈值     

注入电流对垂直腔面发射激光器横模特性的影响

对980nm氧化限制型垂直腔面发射激光器横模进行测试和研究,理论上从时间、空间变量的速率方程出发,利用空间积分法分析了典型电注入参数对弱折射率导引垂直腔面发射激光器(VCSELs)横模行为的影响,通过实验测试,得到VCSELs的横模光场分布情况,并与理论分析进行对比,得出相应的实验结果,在氧化孔径不变的情况下,随着注入电流的增加,载流子分布从有源区中心向边缘移动,模式从低阶基模向高阶模转变,并发生了较强的模式竞争以及载流子空间烧孔效应,最终导致基模强度的降低.另一方面,通过比较不同注入孔径下高阶模的发生时 关键词： 横模 垂直腔面发射激光器 空间烧孔现象 模式竞争     

1.3μm量子点垂直腔面发射激光器高频响应的优化设计

结合垂直腔面发射激光器(VCSEL)原理以及量子点增益特点，计算了有源层p掺杂结构的量子点VCSEL的材料增益和3 dB带宽，发现p掺杂结构可以大大提高频率特性.结合VCSEL激射条件和阈值特性，分析了对VCSEL结构的要求；分析了分布参数对频率特性的影响，对其外部封装提出了要求.设计了高频率响应的含氧化限制层的1.3 μm量子点VCSEL结构. 关键词： 量子点 垂直腔面发射激光器 微分增益 3 dB带宽     

高速850 nm垂直腔面发射激光器的优化设计与外延生长

利用传输矩阵理论和TFCalc薄膜设计软件分析了分布布拉格反射镜和垂直腔面发射激光器(VCSEL)的反射率谱特性,对比了从谐振腔入射与从表面入射时反射率谱的差异,为白光反射谱表征VCSEL外延片提供了依据.利用Crosslight软件模拟了InGaAs/AlGaAs应变量子阱的增益谱随温度的变化特性及VCSEL器件内部温度分布,设计了增益-腔模调谐的VCSEL.采用金属有机物化学气相淀积设备外延生长了顶发射VCSEL,制作了氧化孔径为7.5μm的氧化限制型VCSEL器件,测试了器件的直流特性、光谱特性和眼图特性;6 mA,2.5 V偏置条件下输出光功率达5 mW,4级脉冲幅度调制传输速率达50 Gbit/s.     

Optimization of electro-optical characteristics of GaAs-based oxide confinement VCSEL

An experimental study has been presented of the oxide-confined vertical-cavity surface-emitting lasers (VCSEL) operating in the 850 nm region of the electromagnetic spectrum. In this regard, various relevant VCSEL samples with numerous oxide aperture sizes have been fabricated and characterized. Thorough investigations of the electrical as well as optical characteristics of the fabricated samples have been performed which includes the overall device performance as a function of the oxidize aperture sizes. It is reported that the VCSEL with oxide aperture size <10 μm require low threshold currents (<1 mA). Further, the differential quantum efficiencies up to 28% were measured for a number of these devices. It is found that devices employing oxide aperture of 10 to 15 μm shows promising electro-optical characteristics for 850 nm oxide VCSEL optimization.     

Scaling effects on the dynamic characteristics of long-wavelength vertical-cavity surface-emitting lasers (VCSELs)

The influence of the oxide aperture radius on the characteristics of a long-wavelength vertical-cavity surface-emitting laser (VCSEL) lasing at 1550 nm is presented in this paper. While previous works in the literature mostly investigate the scaling effects of short-wavelength VCSELs. The importance of studying the effects of long-wavelength operation should not be underestimated, as it could be used in fiber optics communication to mitigate dispersion and attenuation of the channel. Using the oxide-confined VCSEL model, the dynamic operations were examined taking into account the carrier-noise, photon-noise and phase-noise, including feedback of the external cavity. Our simulations show that by reducing the oxide aperture up to a given optimal radius, an improvement in the device's characteristics can be demonstrated. Below this value, performance degradation is expected due to increased diffraction losses, reduced confinement factor and enhanced spontaneous emission.     

Single transverse mode control of VCSEL by photonic crystal and trench patterning

Single transverse mode control is achieved for multimode GaAs-based VCSEL by utilizing photonic crystal design and etched trench structure. Theoretical analysis is initially performed for photonic crystal design with various lattice constants and air holes diameter. The fabricated photonic crystal VCSEL with etched trench structure exhibits single mode output power of 0.7 mW, threshold current of 3.5 mA, slope efficiency of 0.10 W/A, and continuous single mode output spectrum throughout a wide operating current range. Comparison of typical oxide VCSEL, trench oxide VCSEL, and photonic crystal oxide VCSEL employing trench structure is presented. By combining photonic crystal and trench structure, single transverse mode operation of photonic crystal VCSEL can be much more strictly controlled.     

Effect of oxide aperture on the performance of 850 nm vertical-cavity surface-emitting lasers

An experimental study has been presented of the oxide-confined vertical-cavity surface-emitting lasers (VCSELs) operating in the 850 nm region of the electromagnetic spectrum. In this regard, various relevant VCSEL samples with numerous oxide aperture sizes have been fabricated and characterized. Thorough investigations of the electrical as well as optical characteristics of the fabricated samples have been performed, which include the overall device performance as a function of the oxidize aperture sizes. It is reported that the VCSELs with oxide aperture size <10 μm require low threshold currents (<1 mA). Further, the differential quantum efficiencies up to 28% corresponding to wall-plug efficiencies of up to 15% were measured for a number of these devices.     

Vertical cavity surface emitting laser transverse mode and polarization control by elliptical holes photonic crystal

The polarization of traditional photonic crystal (PC) vertical cavity surface emitting laser (VCSEL) is uncontrollable, resulting in the bit error increasing easily. Elliptical hole photonic crystal can control the transverse mode and polarization of VCSEL efficiently. We analyze the far field divergence angle, and birefringence of elliptical hole PC VCSEL. When the ratio of minor axis to major axis b/a=0.7, the PC VCSEL can obtain single mode and polarization. According to the simulation results, we fabricate the device successfully. The output power is 1.7 mW, the far field divergence angle is less than 10°, and the side mode suppression ratio is over 30 dB. The output power in the Y direction is 20 times that in the X direction.     

Highly confined and continuous single-mode operation of self-align photonic crystal oxide VCSEL

In this letter, we report on single-mode operation of originally multi-mode oxide VCSEL by using etched photonic crystal air holes and unique trench structure. The device fabrication utilized conventional photolithography; with simplified lithography step of self-aligning the photonic crystal and trench structures to the laser aperture for efficient and vigorous device processing. The fabricated photonic crystal VCSEL with trench device exhibits a single-mode output power of 0.7 mW, threshold current of 3.5 mA, slope efficiency of 0.10 W/A, and continuous single-mode output spectra at wide operating current range. The results are compared with conventional multi-mode oxide VCSEL of similar device geometry. In addition, theoretical analysis is presented for developing further understanding of the photonic crystal VCSEL.     

Designing strategy to enhance mode selectivity of higher-output oxide-confined vertical-cavity surface-emitting lasers

Performance of modern oxide-confined (OC) vertical-cavity surface-emitting diode lasers (VCSEL s) is more sensitive to the construction details than in the case of other VCSEL s. In particular, a stable single-fundamental-mode operation is difficult to be achieved in these VCSEL s especially in higher-output large-size continuous-wave (cw) operating devices at higher temperatures. In the present paper, an operation of OC VCSEL s has been investigated with the aid of the comprehensive fully self-consistent model using the (GaIn)(NAs)/GaAs quantum-well VCSEL with two oxide apertures as a typical example. A new approach is proposed to enhance cw RT single-fundamental-mode low-threshold operation in higher-output OC VCSEL s. One of their oxide apertures should be shifted to the node position of the resonator standing wave where it is working as the electrical aperture only. Then diameters of both apertures may be changed independently giving an additional degree of freedom for VCSEL designing, which enables their optimisation. While the larger-diameter optical aperture placed in the anti-node position creates an efficient radial waveguiding effect, the smaller-diameter electrical aperture enhances a more uniform current injection into the VCSEL active region. Due to combining influence of both the apertures, the single-fundamental-mode operation is predicted in a large device with the 10-m-diameter active region even for 80 K active-region temperature increase over RT of the ambient. An impact of intentional detuning at room-temperature (RT) of VCSEL active-region gain spectrum towards shorter wavelengths with respect to the resonator mode improves mode selectivity is also analysed. PACS  42.55.Px; 02.60.Cb; 85.60.Bt