共查询到20条相似文献,搜索用时 15 毫秒
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研究了直拉硅片从不同的温度线性升温(Ramping)到750℃,然后在750℃退火64 h过程中的氧沉淀行为. 结果表明,Ramping对硅片中氧沉淀的形成有明显的促进作用,且起始温度越低促进作用越强. 这是因为在Ramping处理中,低温(450—650℃)热处理阶段氧的扩散速率显著增强,促进了氧沉淀核心的形成,且较低的Ramping升温速率有利于氧沉淀核心的稳定和继续长大. 进一步的实验结果还表明,低起始温度的Ramping处理可应用于硅片的内吸杂工艺,能促进氧沉淀的生成提高硅片的内吸杂能力,减少热预
关键词:
直拉硅
氧沉淀
退火 相似文献
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利用EAST装置单道远红外HCN激光干涉仪测量了等离子体中心道(R=1.82m)线平均电子密度。通过充气加料连续提升主等离子体密度,首次在EAST装置上观察到偏滤器等离子体的三种不同状态:低再循环(偏滤器靶板处等离子体温度较高,密度较低),高再循环(偏滤器靶板处等离子体温度较低,密度较高)和脱靶(偏滤器靶板处等离子体温度和密度都很低)等离子体状态。分析了EAST偏滤器在这三种不同状态下的物理现象。 相似文献
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The inductance of rf-wave-heated plasmas is derived. This inductance represents the inductance of fast electrons located in a plateau during their acceleration due to electric field or deceleration due to collisions and electric field. This inductance has been calculated for small electric fields from the two-dimensional Fokker-Planck equation as the flux crossing the surface of critical energy mv(2)(ph)/2 in the velocity space. The new expression may be important for radio-frequency current drive ramp-up, current drive efficiency, current profile control, and so on in tokamaks. This inductance may be incorporated into transport codes that study plasma heating by rf waves. 相似文献
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研究了直拉硅片从不同的温度线性升温(Ramping)到750℃,然后在750℃退火64 h过程中的氧沉淀行为. 结果表明,Ramping对硅片中氧沉淀的形成有明显的促进作用,且起始温度越低促进作用越强. 这是因为在Ramping处理中,低温(450—650℃)热处理阶段氧的扩散速率显著增强,促进了氧沉淀核心的形成,且较低的Ramping升温速率有利于氧沉淀核心的稳定和继续长大. 进一步的实验结果还表明,低起始温度的Ramping处理可应用于硅片的内吸杂工艺,能促进氧沉淀的生成提高硅片的内吸杂能力,减少热预 相似文献
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利用EAST装置单道远红外HCN激光干涉仪测量了等离子体中心道(R=1.82m)线平均电子密度。通过充气加料连续提升主等离子体密度,首次在EAST装置上观察到偏滤器等离子体的三种不同状态:低再循环(偏滤器靶板处等离子体温度较高,密度较低),高再循环(偏滤器靶板处等离子体温度较低,密度较高)和脱靶(偏滤器靶板处等离子体温度和密度都很低)等离子体状态。分析了EAST偏滤器在这三种不同状态下的物理现象。 相似文献
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线圈是由绝缘导线绕成的,必同时存在电感和电阻.线圈的电感问题很复杂,我们只讨论最简单的情况. 相似文献
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Journal of Visualization - In this paper, the wake modes behind a circular cylinder under streamwisely forcing oscillating motion are studied at Reynolds number Re = 360–460 which are... 相似文献
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Francisco J. Trujillo Sebastian Eberhardt Dirk Möller Jurg Dual Kai Knoerzer 《Ultrasonics sonochemistry》2013,20(2):655-666
A model was developed to determine the local changes of concentration of particles and the formations of bands induced by a standing acoustic wave field subjected to a sawtooth frequency ramping pattern. The mass transport equation was modified to incorporate the effect of acoustic forces on the concentration of particles. This was achieved by balancing the forces acting on particles. The frequency ramping was implemented as a parametric sweep for the time harmonic frequency response in time steps of 0.1 s. The physics phenomena of piezoelectricity, acoustic fields and diffusion of particles were coupled and solved in COMSOL Multiphysics? (COMSOL AB, Stockholm, Sweden) following a three step approach. The first step solves the governing partial differential equations describing the acoustic field by assuming that the pressure field achieves a pseudo steady state. In the second step, the acoustic radiation force is calculated from the pressure field. The final step allows calculating the locally changing concentration of particles as a function of time by solving the modified equation of particle transport. The diffusivity was calculated as function of concentration following the Garg and Ruthven [1] equation which describes the steep increase of diffusivity when the concentration approaches saturation. However, it was found that this steep increase creates numerical instabilities at high voltages (in the piezoelectricity equations) and high initial particle concentration. The model was simplified to a pseudo one-dimensional case due to computation power limitations. The predicted particle distribution calculated with the model is in good agreement with the experimental data as it follows accurately the movement of the bands in the centre of the chamber. 相似文献
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利用Φ=∫SB·dS=∮lA·dl,逐一讨论单匝线圈自感、两线圈的互感和实际螺线管的自感系数的一般式,并借助于MATLAB快速便利地计算有限长多层直螺线管的自感系数. 相似文献
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电感在现代电子电路中应用广泛,大量的存在于滤波、耦合、振荡等电路中,因此如果可以准确的测量电感的阻值具有重大的意义[1-2]。现今,电感的测量大部分是测用电桥法,高精度的电桥测试仪器是比较昂贵的。通过对电感的特点,以及现有的测量方式进行了研究,设计了一种高精度、低成本的电感测试仪。该仪器采用具有不同电流值的恒流源反复对电感进行正反向充电,然后根据检测的不同电流值下的放电时间求取电感值取其平均值,最后得出待测的电感值。本文完成了恒流源充放电电路、电源电路、开关充放电电路、检测电路以及控制电路的设计[3-4]。该装置的电感测量误差在±5%以内,具有灵敏度高,相应速度快、成本低等特点,具有广泛的应用意义。 相似文献
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Using the quantum theory for a
mesoscopic circuit based on the discretenes of electric charges,
the finite-difference Schrödinger equation of the non-dissipative mesoscopic inductance and capacity coupling circuit is achieved. The Coulomb blockade effect, which is caused
by the discreteness of electric charges, is studied. Appropriately
choose the components in the circuits, the finite-difference
Schrödinger equation can be divided into two Mathieu
equations in \hat p representation. With the WKBJ method, the
currents quantum fluctuations in the ground states of the two
circuits are calculated. The results show that the currents
quantum zero-point fluctuations of the two circuits are exist and
correlated. 相似文献