Excimer laser processing of ZnO thin films prepared by the sol-gel process

ZnO thin films were prepared on soda-lime glass from a single spin-coating deposition of a sol-gel prepared with anhydrous zinc acetate [Zn(C₂H₃O₂)₂], monoethanolamine [H₂NC₂H₄OH] and isopropanol. The deposited films were dried at 50 and 300 °C. X-ray analysis showed that the films were amorphous. Laser annealing was performed using an excimer laser. The laser pulse repetition rate was 25 Hz with a pulse energy of 5.9 mJ, giving a fluence of 225 mJ cm⁻² on the ZnO film. Typically, five laser pulses per unit area of the film were used. After laser processing, the hexagonal wurtzite phase of zinc oxide was observed from X-ray diffraction pattern analysis. The thin films had a transparency of greater than 70% in the visible region. The optical band-gap energy was 3.454 eV. Scanning electron microscopy and profilometry analysis highlighted the change in morphology that occurred as a result of laser processing. This comparative study shows that our sol-gel processing route differs significantly from ZnO sol-gel films prepared by conventional furnace annealing which requires temperatures above 450 °C for the formation of crystalline ZnO.     

Enhancing indium tin oxide (ITO) thin film adhesiveness using the coupling agent silane

The coupling agent γ-mercapto propyl trimethoxy silane (WD-80) was used to enhance the adhesiveness of the indium tin oxide (ITO) thin film, which was prepared on a glass substrate using the sol-gel method. The nano-scratching test, XRD, TEM, SEM, and UV-vis spectrophotometer were employed to examine film adhesion, crystal structure, surface morphology, and transmittance. The results indicated that silane coupling agent, used in low concentration, did not change the film structure but increased the critical load of the film by 49%, from 4.16 mN to 6.20 mN, when the film was peeled off from the substrate. The principle by which the coupling agent works is discussed. In addition to increasing with the light wavelength, the average transmittance of the film in the visible range varied from 78.9% to 83.6%. Moreover, as a function of the WD-80 silane coupling agent, the film exhibited a high smoothness and density due to the orderly arrangement of particles.     

Pulsed laser ablation of indium tin oxide in the nano and femtosecond regime: Characterization of transient species

Tin doped indium oxide (ITO) is a n-type highly degenerate, wide band-gap semiconductor that is extensively used for many engineering applications. Pulsed laser ablation of indium tin oxide in the nano and femtosecond regime has been performed in our laboratory. Plume diagnostics has been carried out by means of a fast Intensified Coupled Charge Device (ICCD) camera. Optical emission spectroscopy has been applied to characterize the transient species produced in the nano and femtosecond regime. The time evolution of emission lines, in the femto and nanosecond regime, have been compared and discussed. In the mass spectrometry, of the ionized species, the presence of mixed metal oxide clusters has been detected. This fact is an indication that chemical reactions can occur during the plasma expansion or on the ITO surface.     

Frequency-tripled Nd:YAG laser ablation in laser structuring process

With the increasing demand for finer lines/spaces on PCB boards, a new technology—laser structuring—has emerged in recent years. In this research, the frequency-tripled Nd:YAG laser is selected as the laser source in laser structuring; this laser is often used in miniaturization machining. This paper describes in detail the processing parameters’ influences, such as laser power, numbers of repetition, repetition rate and bite size, on laser structuring results. From the research results, it can be concluded that the line width and depth are increased with increases in the laser power and numbers of repetition. Repetition rate, bite size and velocity are related to one another. When the bite size is fixed, the velocity increases with the repetition rate and the depth of the line is decreased at the same time. When the repetition rate is fixed, velocity increases with the bite size.     

Pulsed laser deposition process of PLZT thin films using an infrared Nd:YAG laser

Pulsed laser depositions of PLZT thin films were performed using an Nd:YAG (1064 nm) laser. The growths took place in vacuum or in an oxygen background. Room temperature and 500 °C were the used substrate temperatures. The X-ray diffraction analysis revealed a preferential crystallographic orientation in the films grown at room temperature in vacuum. Such result is discussed. The velocity distribution functions of the species in the plasma plume were obtained from a time of flight study using optical emission spectroscopy. The maximums of these distributions functions fall around 10⁶ cm/s, equivalent to an energy range of 18-344 eV. Ionic species of heavy elements (like lead) achieved higher velocities than other lighter species. This result is linked to the creation of an accelerating spatial charge and to the thermal nature of the target material extraction that allows some elements to be released first than others. Chemical state variations of the elements present in the films were analyzed. Under these different growing conditions, lead chemical states varied the most.     

The effect of carbon contamination and argon ion sputtering on the work function of chlorinated indium tin oxide

The work function of indium tin oxide (ITO) was increased by treating ITO with dichlorobenzene with UV light. Carbon contamination of the Cl-ITO was measured using X-ray Photoelectron Spectroscopy (XPS) and argon ion sputtering was used to remove the carbon from the surface. It was found that the carbon contamination from residual dichlorobenzene significantly lowered the work function of the ITO and after argon ion sputtering the work function increased to 5.8 eV. It was found that chlorination of ITO occurs after more than 6 min of UV exposure. Further sputtering of ITO resulted in the removal of the functionalized chlorine, the introduction of argon ion contaminants on the ITO decreases its work function.     

Spectroscopic studies of laser induced aluminum plasma using fundamental,second and third harmonics of a Nd:YAG laser

In the present work, we have studied the spatial evolution of the aluminum plasma produced by the fundamental (1064 nm), second (532 nm) and third (355 nm) harmonics of a Q-switched pulsed Nd:YAG laser. The experimentally observed line profiles of neutral aluminum have been used to extract the excitation temperature using Boltzmann plot method whereas the electron number density has been determined from the Stark broadened profiles. Besides we have studied the variation of excitation temperature and electron number density as a function of laser irradiance at atmospheric pressure. In addition, we have performed quantitative analysis of photon absorption and vapor ionization mechanism at three laser wavelengths and estimated the inverse bremsstrahlung (IB) absorption and photoionization (PI) coefficients. The validity of the assumption of local thermodynamic equilibrium is discussed in the light of the experimental results.     

Nd:YAG laser synthesis of nanostructural V2O5 from vanadium oxide sols: Morphological and structural characterizations

Vanadium oxide thin films were prepared by sol-gel method, then subjected to Nd:YAG laser (CW, 1064 nm) radiation. The characteristics of the films were changed by varying the intensity of the laser radiation. The nanocrystalline films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM) and scanning electron microscopy (SEM). XRD revealed that above 102 W/cm² the original xerogel structure disappears and above 129 W/cm² the films become totally polycrystalline with an orthorhombic structure. From TEM observations, we can see that due to laser radiation, the originally fibrillar-like particles disappear and irregular shaped, layer structured V₂O₅ particles are created. From XPS spectra we can conclude that due to laser radiation the O/V ratio increased with higher intensities.     

Band bending at the conducting polymer/indium tin oxide interfaces with and without ultraviolet treatment

In this study, the effect of ultraviolet treatment on the band bending at the poly(3,4-ethylenedioxythiophene) doped with poly(4-styrenesulfonate)/indium tin oxide (PEDOT:PSS/ITO) interfaces were researched. The authors suggested that ultraviolet treatment could lead to a reduction in the band bending at the PEDOT:PSS/ITO interface, owing to the removal of carbon contamination at the ITO surfaces and a decrease in the number of the trap-states at the PEDOT:PSS/ITO interface.     

Moving perforation of rocks using long pulse Nd:YAG laser

Laser perforating is a new method in oil and gas wells where researchers look for an alternative to explosive methods. One of the important problems with this method is the generation of uniform and cylindrical holes at a selected pitch for enhancing the permeability of rocks. In non-moving laser perforation, the nozzle of the laser and the rock do not approach each other and due to laser convergence in a point, uniform and cylindrical holes are not created. For this reason, moving laser perforation is suggested in this research. One of the important parameters in moving laser perforation is the power of the laser that can be perforated at a specific rate. In this article we predicted the laser power for a definite rate of perforation (ROP) and then the accuracy of this prediction was evaluated to support the experiments. A pulsed Nd: YAG laser, with a pulse energy around 5.5 J, pulse repetition rate of 30 Hz and pulse duration of 2 ms were used for rock perforation in this study. The results shows that the presented relation for perforation could reliably be used in practice. Furthermore, by knowing the rate of perforation, the required laser power for consistent drilling could be calculated.     

The effect of laser patterning parameters on fluorine-doped tin oxide films deposited on glass substrates

The purpose of this study is to pattern the fluorine-doped tin oxide thin film deposited on the soda-lime glass substrates for touch screen applications by ultraviolet laser. The patterned film structures provide the electrical isolation and prevent the electrical contact from each region for various touch screens. The surface morphology, edge quality, three-dimensional topography, and profile of isolated lines and electrode structures after laser patterning were measured by a confocal laser scanning microscope. Moreover, a four-point probe instrument was used to measure the sheet resistance before and after laser patterning on film surfaces and also to discuss the electrical property at different laser spot overlaps. After laser patterning, a high overlapping area of laser spot was used to pattern the electrode layer on film surfaces that could obtain an excellent machined quality of edge profile. All sheet resistance values of film surfaces near the isolated line edge were larger than the original ones. Moreover, the sheet resistance values increased with increasing laser spot overlapping area.     

Surface modification of indium tin oxide films by amino ion implantation for the attachment of multi-wall carbon nanotubes

Amino ion implantation was carried out at the energy of 80 keV with fluence of 5 × 10¹⁵ ions cm⁻² for indium tin oxide film (ITO) coated glass, and the existence of amino group on the ITO surface was verified by X-ray photoelectron spectroscopy analysis and Fourier transform infrared spectra. Scanning electron microscopy images show that multi-wall carbon nanotubes (MWCNTs) directly attached to the amino ion implanted ITO (NH₂/ITO) surface homogeneously and stably. The resulting MWCNTs-attached NH₂/ITO (MWCNTs/NH₂/ITO) substrate can be used as electrode material. Cyclic voltammetry results indicate that the MWCNTs/NH₂/ITO electrode shows excellent electrochemical properties and obvious electrocatalytic activity towards uric acid, thus this material is expected to have potential in electrochemical analysis and biosensors.     

Removal of graffiti from the mortar by using Q-switched Nd:YAG laser

This paper presents part of the larger study on microstructural features of mortars and it's effects on laser cleaning process. It focuses on the influence of surface roughness, porosity and moisture content of mortars on the removal of graffiti by Nd:YAG laser. The properties of this laser are as follows: wavelength (λ) 1.06 μm, energy: 500 mJ per pulse, pulse duration: 10 ns. The investigation shows that the variation of laser fluence with the number of pulses required for the laser cleaning can be divided into two zones, namely effective zone and ineffective zone. There is a linear relationship observed between number of pulses required for laser cleaning and the laser fluence in the effective zone, while the number of pulses required for the laser cleaning is almost constant even though the laser fluence increases in the ineffective zone. Moreover, surface roughness, porosity and moisture content of mortar samples have influence on the laser cleaning process. The effect of these parameters become however negligible at the high level of laser fluence. The number of pulses required for the laser cleaning is low for smooth surface or less porous mortar. Furthermore, the wetness of the samples facilitates the cleaning process.     

Effect of the heat treatment on the infrared emissivity of indium tin oxide (ITO) films

Indium tin oxide (ITO) films were deposited on glass substrates at temperatures ranging from 100 °C to 400 °C by direct current magnetron sputtering. The mean infrared emissivities at the waveband of 8-14 μm were measured in process of heating and cooling between room temperature and 350 °C. Microstructure and phases of ITO films before (Group A) and after (Group B) heat treatment were characterized by SEM and XRD, respectively. Electrical properties were characterized with a four-point probe method and by Hall measurement system. During heat treatment, the infrared emissivity of the film increases with the increase of temperature, and decreases with the decrease of temperature. While, the infrared emissivity of the films decreases slightly around 250 °C in heating process. On the other hand, after heat treatment, the crystalline phases of the films have no obvious change. However, both the resistivity and the infrared emissivity of all films decrease.     

Accuracy control of three-dimensional Nd:YAG laser shaping by ablation

Improving the dimensional accuracy along the optical axis without decreasing the materials removing rate is a key issue in three-dimensional laser shaping. This paper presents a concept for performing three-dimensional laser shaping by directly using machining laser as the photo source of the non-contacting measuring device. Due to the high power measuring photo source and a 1.06 μm bandpass filter, the interference caused by the emission light of ablated surface can be effectively avoided, the delay time is not needed to be inserted between the laser pulse and the measurement. So the measurement will not decrease the material removal rate and productivity. By using this system, the shaping accuracy of 30 μm can be achieved at the removing rate of about 4.0×10⁻² mm³/sec for Si₃N₄ ceramic, both are much better than the results obtained before.     

Studies on the electrochemiluminescent behavior of luminol on indium tin oxide (ITO) glass

The electrochemiluminescence (ECL) of luminol on indium tin oxide (ITO) glass was high even under a low potential around 0.4-0.5 V, which was quite different from other electrodes such as platinum. ITO nanoparticles were synthesized and used in the research on ITO glass in the ECL process. A static interaction between ITO and luminol is confirmed from UV-vis and fluorescence spectra. Then the ECL enhancement can be supposed to originate from the adsorption of luminol on ITO, which facilitated luminol’s oxidization to the excited state, giving out ECL. On the other hand, ITO can catalyze the generation of reactive oxygen species (ROSs), similar to some other nanomaterials, which also favored the ECL enhancement of luminol.     

Laser welding of glasses using a nanosecond pulsed Nd:YAG laser

This work reports on laser welding of two 1 mm thickness borosilicate glasses through the irradiation with a nanosecond pulsed laser, as a novel alternative to the use of ultrashort pulsed lasers for welding of transparent materials. Two different methodologies were investigated and compared in terms of interface quality. In a first approach, the glasses were joined without any absorbing intermediate layer. However, the bond interface possesses defects. To improve the resulting bond interface, the use of a titanium ultrathin intermediate layer was proposed to weld the glasses substrates, acting as a sealant between them. The laser parameters were optimized to achieve the best joining conditions of the Ti film. The use of the Ti layer gives rise to a bond interface more homogeneous and free of damages. As a further step, thin glasses of 86 µm thickness, of great technological value, were joined through the Ti film as well. The joined interfaces were inspected through optical microscopy and scanning electron microscopy (SEM) while the bond quality was evaluated by Scanning Acoustic Microscopy (SAM).     

Ellipsometry investigation of the effects of annealing temperature on the optical properties of indium tin oxide thin films studied by Drude-Lorentz model

Float glass substrates covered by high quality ITO thin films (Balzers) were subjected for an hour to single thermal treatments at different temperature between 100 °C and 600 °C. In order to study the electric and optical properties of both annealed and not annealed ITO-covered float glasses, ellipsometry, spectrophotometry, impedance analysis, and X-ray measurements were performed. Moreover, variable angle spectroscopic ellipsometry provides relevant information on the electronic and optical properties of the samples. ITO film is modeled as a dense lower layer and a surface roughness layer. The estimated optical density for ITO and the optical density of the surface roughness ITO layer increases with the annealing temperature. In the near-IR range, the extinction coefficient decreases while the maximum of the absorption in the near UV range shift towards low photon energy as the annealing temperature increases. Spectrophotometry was used to estimate the optical band-gap energy of the samples. The thermal annealing changes strongly the structural and optical properties of ITO thin films, because during the thermal processes, the ITO thin film absorbs oxygen from air. This oxygen absorption decreases the oxygen vacancies therefore the defect densities in the crystalline structure of the ITO thin films also decrease, as confirmed both by ellipsometry and X-ray measurements.     

Gas protection optimization during Nd:YAG laser welding

Many laser processes, such as welding or surface treatments are associated with an undesired phenomenon, which is oxidation. The solution commonly employed to solve this problem approaches the shielding gas and/or the shielding gas device. What we propose in this paper is a methodology with the goal to optimize the protection gas device design as well as the gas flow in the case of laser welding and surface treatments. The pressure created by the gas flow on the sample surface is recorded and analysed together with the operating parameters influence in order to reach the objectives. The nozzle system designed and presented below assures the protection against material oxidation using minimal gas flow rates and increases the welding penetration in the case of high-power Nd:YAG laser welding.     

Luminescence properties of highly Cr co-doped Nd:YAG powder produced by sol-gel method

We examined luminescence properties of highly chromium co-doped Nd:YAG powders fabricated by the sol-gel method. Though the maximum luminescence intensity of Cr:YAG was at 3.0 mol% of Cr³⁺ concentration, we found that the enhancement effect on Nd:YAG by co-doping Cr³⁺ was continued until 6.0 mol% of Cr³⁺ concentration. This phenomenon is well-explained by a simple energy transfer model derived from the rate equations between Cr³⁺ and Nd³⁺. The enhancement of sensitization for Nd³⁺ activator by high co-doped Cr³⁺ is very effective for making a miniaturized or thin film-type solar laser.