Surface ablation of lithium tantalate by femtosecond laser

We report measurements of the laser induced breakdown threshold in lithium tantalate with different number of pulses delivered from a chirped pulse amplification Ti: sapphire system. The threshold fluences were determined from the relation between the diameter D² of the ablated area and the laser fluence F₀. The threshold of lithium tantalite under single-shot is found to be 1.84 J/cm², and the avalanche rate was determined to be 1.01 cm²/J by calculation. We found that avalanche dominates the ablation process, while photoionization serves as a free electron provider.     

Second harmonic generation by femtosecond Yb-doped fiber laser source based on PPKTP waveguide fabricated by femtosecond laser direct writing

The frequency doubling of femtosecond pulses from an Yb-doped fiber laser source was demonstrated in a PPKTP waveguide fabricated by femtosecond laser direct writing. The PPKTP waveguide contains a fixed period of 8.9 μm and the feomtosecond fundamental pulses have a central wavelength of 1044 nm. A maximum SHG power of 406 mW was produced, yielding a conversion efficiency of 5.6%. Numerical simulations were carried out to investigate the property of frequency doubling for femtosecond pulses. The results show that the SHG process proceeds even the quasi-phase-matching (QPM) condition is not well satisfied, which is significantly different from that of “long” pulses or CW light and is accorded with the experimental results.     

Micromachining of a thin film by laser ablation using femtosecond laser with masks

A gold thin film was machined by laser ablation using a femtosecond laser with mask patterns in the shape of lines and numbers. The patterns were successfully transferred with proper focusing and laser fluence. The optimal femtosecond laser fluence to keep the line width was about 5.2 mJ/cm² on the mask, and 99 mJ/cm² on the film. The processing resolution was 13 μm, and the narrowest line width was about 4 μm.     

Metal thin film ablation with femtosecond pulsed laser

Micromachining thin metal films coated on glass are widely used to repair semiconductor masks and to fabricate optoelectrical and MEMS devices. The interaction of lasers and materials must be understood in order to achieve efficient micromachining. This work investigates the morphology of thin metal films after machining with femtosecond laser ablation using about 1 μm diameter laser beam. The effect of the film thickness on the results is analyzed by comparing experimental images with data obtained using a two-temperature heat transfer model. The experiment was conducted using a high numerical aperture objective lens and a temporal pulse width of 220 fs on 200- and 500-nm-thick chromium films. The resulting surface morphology after machining was due to the thermal incubation effect, low thermal diffusivity of the glass substrate, and thermodynamic flow of the metal induced by volumetric evaporation. A Fraunhofer diffraction pattern was found in the 500-nm-thick film, and a ripple parallel to the direction of the laser light was observed after a few multiple laser shots. These results are useful for applications requiring micro- or nano-sized machining.     

Investigation of nanoparticle generation during femtosecond laser ablation of metals

The production of nanoparticles via femtosecond laser ablation of gold and copper is investigated experimentally involving measurements of the ablated mass, plasma diagnostics, and analysis of the nanoparticle size distribution. The targets were irradiated under vacuum with a spot of uniform energy distribution. Only a few laser pulses were applied to each irradiation site to make sure that the plume expansion dynamics were not altered by the depth of the laser-produced crater. Under these conditions, the size distribution of nanoparticles does not exhibit a maximum and the particle abundance monotonously decreases with size. Furthermore, the results indicate that two populations of nanoparticles exist within the plume: small clusters that are more abundant in the fast frontal plume component and larger particles that are located mostly at the back. It is shown that the ablation efficiency is strongly related to the presence of nanoparticles in the plume.     

Effect of energy above laser-induced damage thresholds in the micromachining of silicon by femtosecond pulse laser

A 400 nm second harmonic Ti : sapphire femtosecond laser was applied to structure silicon base on a direct-write process in air. A series of lines were ablated with pulses of 300-fs duration at varying power densities ranging from 50 to 100 nJ of energy on 2″ silicon (1 1 1) wafers. In this event, we investigate and report extensive laser induced thermal damage and redeposition encompassing the ablated lines at high energy levels above the damage threshold of the silicon. In addition, the effect of polarisation on the direction of micromachining is also observed and discussed. The resolution and quality of these lines were also found to hold a linear relationship to the laser energy up to its thermal threshold limit.     

Investigation on femtosecond laser irradiation energy in inducing hydrophobic polymer surfaces

This study investigates the use of ultrashort femtosecond laser pulses to induce hydrophobic properties on PMMA surfaces. The modification of surface wetting property exhibits a strong dependence on the amount of energy deposited on the PMMA surface. A simple equation has been deduced from the laser parameters to express the energy deposition. It was revealed that water contact angle (WCA) of more than 120°, with a maximum of around 125°, could be achieved when the total energy deposited per unit area on the PMMA surface ranged from 600 J/cm² to 900 J/cm² at an energy deposition rate of around 50 J/cm²/s. Beyond this range, WCA reduced with increasing amount of energy deposition. Furthermore, with higher energy deposition rate or higher laser fluence, total energy required to induce hydrophobic surfaces was reduced. Under different energy deposition, the quantity of polar groups or non-polar groups induced was responsible for the changes in WCA and thus the different surface hydrophobicity.     

Large negative refractive index modification induced by irradiation of femtosecond laser inside optical glasses

We report on the refractive index modification (Δn) and its cross sectional profile of the created lines inside the different types of optical glasses, containing BaO, TiO₂, or La₂O₃ as a metal oxide. The lines were fabricated by scanning a stage and focusing the femtosecond laser pulses, 800 nm wavelength, a 250 kHz repetition rate and 200 fs pulse duration, from the Ti:sapphire regenerative amplifier system. The Δn measurements were performed with the qualitative phase microscopy technique. As a result, it was found that the Δn and its sign are different depending on glass types. For example, in the glasses containing TiO₂, the Δn became smaller in the modified region and some of them showed relatively large decrease of the Δn, Δn < −0.01, with about 10 μm width. Such a glass material could be useful for the compact optics and optical devices.     

High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser

Fabrication of high-resolution 3D structures with laser radiation on the surface of brittle materials has always been a challenging task. Even with femtosecond laser machining, micro-cracks and edge chipping occur. In order to evaluate processing modes optimal both in quality and productivity, we investigated high-speed (50 kHz) femtosecond laser processing of BK7 glass with the use of design of experiments and regression analysis. An automated inspection technique was developed to extract quality characteristics of test-objects. A regression model was obtained appropriate to fabricate microchannels with a predefined depth in the range of 1–30 µm with average accuracy of 5%. It was found that high quality machining modes are in the range of 0.91–2.27 µJ energy pulses, overlap of 53–62%, three and more number of passes. A material removal rate higher than 0.3 mm³/min was reached and microfluidic structures were formed based on data obtained.     

Micromachining of semiconductor by femtosecond laser for integrated circuit defect analysis

The latest International Technology Roadmap for Semiconductors (ITRS) has highlighted the detection and analysis of defects in Integrated Circuits (IC) as a major challenge faced by the semiconductor industry.Advanced tools used today for defect cross sectioning include dual beams (focused ion- and electron-beam technologies) with resolution down to the sub-Angstrom level. However ion milling an IC with a FIB is time consuming because of the need to open wide cavities in front of the cross-sections that need to be analyzed. Therefore the use of a femtosecond laser as a tool for direct material removal is discussed in this paper. Experiments were performed on IC structures to reveal the different layers of fabrication: selective or total ablation can occur depending on the laser energy density, without delamination of the layers. Different laser irradiation conditions like pressure (air, vacuum), polarization, beam shaping, and scanning parameters have been used to produce different types of cavities. The femtosecond laser engraving of silicon-based structures could be useful for cross-sectioning devices but also for other applications like direct-write lithography, photomask repair, maskless implantation or reverse engineering/restructuring.     

Surface micro/nanostructuring of titanium under stationary and non-stationary femtosecond laser irradiation

In this paper the surface topography of titanium samples irradiated by femtosecond laser pulses is described. When the fluence is about 0.5 J/cm² periodic ripples with a period of about 700 nm are formed. For fluences between 0.5 and 2 J/cm², a microcolumnar surface texture develops in the center of the irradiated spots and ripples are formed in the periphery of the spots. When experiments are performed with a non-stationary sample, the microcolumns exhibit ripples similar to those observed when the radiation fluence is about 0.5 J/cm² and in the outer regions of the irradiated areas for fluences between 0.5 and 2 J/cm². Since the energy distribution in the transverse cross-section of the laser beam is Gaussian, we conclude that the ripples form when the microcolumns are subjected to fluences near the melting threshold of the material at the trailing edge of the moving laser beam.     

Femtosecond pulsed laser ablation of thin gold film

Laser micromachining on 1000 nm-thick gold film using femtosecond laser has been studied. The laser pulses that are used for this study are 400 nm in central wavelength, 150 fs in pulse duration, and the repetition rate is 1 kHz. Plano-concave lens with a focal length of 19 mm focuses the laser beam into a spot of 3 μm (1/e² diameter). The sample was translated at a linear speed of 400 μm/s during machining. Grooves were cut on gold thin film with laser pulses of various energies. The ablation depths were measured and plotted. There are two ablation regimes. In the first regime, the cutting is very shallow and the edges are free of molten material. While in the second regime, molten material appears and the cutting edges are contaminated. The results suggest that clean and precise microstructuring can be achieved with femtosecond pulsed laser by controlling the pulse energy in the first ablation regime.     

Investigation of impact of photonic crystal fiber structure modified by femtosecond laser micromachining on long period gratings׳ sensing characteristics

The sensing characteristics of long period gratings (LPGs) in photonic crystal fiber (PCF) can be changed by using femtosecond laser to modify the PCF waveguide structure although dispersive characteristic plays a key role in determining the sensitivity. Based on the coupled local-mode theory, the coupling behaviors and spectral characteristics of the LPGs in PCF fabricated by a femtosecond laser and a CO₂ laser are analyzed which are supported by experiment results. When the distance between the central of fiber core and the peak of the drilled hole, namely the micro-hole diameter is about 3.5 μm, the temperature and strain sensitivities are changed by 27% (from 6.20 to 7.81 pm/°C) and −21% (from −2.41 to −1.91 pm/με) in comparison with the changes of the sensitivities that is induced by CO₂ laser. The investigation demonstrates that the local structural changes of PCF have an impact on the sensitivity of LPGs. The investigation demonstrates the versatility of the technique in potential applications to design the desired sensitivity of fiber grating flexibly by forming proper geometrical modulations.     

Fabrication of platinum particles by intense, femtosecond laser pulse irradiation of aqueous solution

Platinum nano-particles were directly fabricated through molecular dissociation process induced by tightly focused femtosecond laser pluses in hydrogen hexachloroplatinate (IV) hexahydrate (H₂PtCl₆·6H₂O) aqueous solution. After irradiation, it was found that UV-visible absorption spectrum of the solution was changed and a large number of small platinum particles were synthesized. The variation of absorbance in the spectrum and the yield the particle synthesis depended on the concentration of the solution. The most effective condition for particle synthesis was 0.1 wt%. Black precipitates of platinum particles were observed in the bottom of the vessel after irradiation in some cases. The dispersibility of the particles was greatly improved by the addition of polyvinylpyrrolidone (PVP) as a dispersant, and no precipitates were found in the solution with 1.0 × 10⁻² wt% PVP. Consequently, highly monodispersed platinum nano-particles with the mean size of about 3 nm were successfully fabricated.     

Femtosecond laser machining of electrospun membranes

We demonstrate that a femtosecond laser can be used to machine arbitrary patterns and pattern arrays into free-standing electrospun polycaprolactone (PCL) membranes. We also examine the influence of various laser irradiation settings on the final microstructure of electrospun membranes. A beam fluence of 0.6 J/cm² is used to ablate holes in 100 μm thick PCL membranes. The machined holes have an average diameter of 436 μm and a center-to-center spacing of 1000 μm. Based on these results, the femtosecond ablation of electrospun membranes shows great potential for fabricating a variety of functional tissue scaffolds. This technique will advance scaffold design by providing the ability to rapidly tailor surface morphology, while minimizing and controlling the deformation of the electrospun fibers.     

Femtosecond pulsed laser ablation with spatial filtering

With the rise in demand for miniaturized features with better acute edge acuity and negligible thermal damage zone, one of the key vital areas lies in the refinement of the quality of the laser beam itself. Spatial filter is routinely used in optical micromachining systems to smoothen the Gaussian profile of the machining spot in order to obtain a feature of the desired quality. However, its profile smoothening effect has never been investigated for femtosecond pulsed laser micromachining process since the extremely high peak power of femtosecond pulses will cause damage on the filtering aperture of spatial filter. During the development of an acousto-optical micromachining system using femtosecond pulses, we found that if the damage of the filtering aperture can be circumvented, spatial filter can improve the machining quality of femtosecond pulse ablation, especially when ablation is conducted at low-fluency range (just above the ablation threshold fluency). In this paper, we investigate and demonstrate both the improvement and potential that beam refinement can bring about. In our experiment, a series of test patterns were ablated with a 400 nm second-harmonic Ti:Sapphire femtosecond laser of 150 fs duration at varying pulse energy ranging from 31 to 39 nJ. The specimen used in the experiment is a platinum- (Pt) sputtered coating of 100 nm thickness on a quartz substrate. The results show a significant improvement in the constancy of the shape as well as the size of ablated feature, revealing an improved beam profile and beam energy distribution due to spatial filtering.     

Photoetching of spherical microlenses on glasses using a femtosecond laser

We fabricated spherical microlenses on optical glasses by femtosecond laser direct writing (FLDW) in ambient air. To achieve good appearances of the microlenses, a meridian-arcs scanning method was used after a selective multilayer removal process with spiral scanning paths. A positive spherical microlens with diameter of 48 μm and height of 13.2 μm was fabricated on the surface of the glass substrate. The optical performances of the microlens were also tested. Compared to the conventional laser direct writing (LDW) technique, this work could provide an effective method for precise shape-controlled fabrication of three-dimensional (3D) microstructures with curved surfaces on difficult-to-cut materials for practical applications.