Study of GaN adsorption on the Si surface

The adsorption energy, the band structures and DOS (density of states) of GaN on surface of Si(1 0 0) and Si(1 1 1) are calculated by the first-principle using plane-wave pseudo-potentials method based on the density functional theory in order to know the adsorption between the surface of Si and GaN. The calculation results show that GaN is easier adsorbed on the surface of Si(1 0 0) than the surface of Si(1 1 1) under the same experimental condition. There are strong charge distributions between N and Si atom. The bandgap of GaN on surface of Si(1 0 0) becomes a little narrower than that of pure GaN. On the other hand, GaN film is deposited on the surface of Si(1 0 0) by ECR-MOPECVD (electron cyclotron resonance-plasma enhanced chemical vapor deposition) at low temperature. For substrate of Si(1 1 1), no film is obtained under the same experimental condition.     

AlGaN表面坑状缺陷及GaN缓冲层位错缺陷对AlGaN/GaN HEMT电流崩塌效应的影响

利用金属有机气相外延(MOVPE)技术生长了具有不同AlGaN表面坑状缺陷和GaN缓冲层位错缺陷密度的AlGaN/GaN 高电子迁移率晶体管(HEMT)样品,并对比研究了两种缺陷对器件栅、漏延迟电流崩塌效应的影响.栅延迟测试表明,AlGaN表面坑状缺陷会引起栅延迟电流崩塌效应和源漏电阻的增加,而且表面坑状缺陷越多,栅延迟电流崩塌程度和源漏电阻的增加越明显.漏延迟测试显示,AlGaN表面坑状缺陷对漏延迟电流崩塌影响不大,而GaN缓冲层位错缺陷主要影响漏延迟电流崩塌.研究结果表明,AlGaN表面坑状缺陷和Ga 关键词： AlGaN/GaN HEMT 电流崩塌 坑状缺陷 位错缺陷     

高抗激光损伤阈值介孔SiO2 减反射膜

 用P123作模板剂,通过正硅酸乙酯的水解缩聚和溶剂蒸发自组装过程在K9玻璃上制备介孔SiO₂膜。应用FT-IR,XRD,N₂ 吸附-脱附,AFM和UV-Vis表征手段研究了薄膜的介孔结构和光学性能,并使用“R-on-1”模式,以Nd:YAG脉冲激光（9.2 ns, 1 064 nm）测试了薄膜的激光损伤阈值。结果表明:所镀制单层介孔SiO₂膜具有规整的2D p6 mm长周期结构,为SBA-15型,膜层表面比较平整（均方根粗糙度为2.923 nm）,在1 064 nm处的透过率为99.5%, 换算为激光脉宽为1 ns时,膜层的激光损伤阈值为21.6 J/cm²,显示出了较好的减反性能和抗激光损伤性能。     

GaN表面极性的光电子衍射研究

利用x射线光电子衍射的极角扫描模式,采集了GaN（0001）表面由(1010)和(1120)晶面产生的光电子衍射实验曲线,并运用光电子衍射的前向聚焦效应确定了GaN(0001)表面是Ga在最外层的极性面.利用与能量有关的光电子衍射即角分辨光电发射精细结构谱技术并结合多重散射团簇模型计算对GaN(0001)表面的极化性质进行了研究,进一步证实了GaN表面是Ga在最外层的极性面. 关键词： GaN 表面极性 光电子衍射     

Investigating gate metal induced reduction of surface donor density in GaN/AlGaN/GaN heterostructure by electroreflectance spectroscopy

The internal field of GaN/AlGaN/GaN heterostructure on Si-substrate was investigated by varying the thickness of an undoped-GaN capping layer using electroreflectance spectroscopy. The four samples investigated are AlGaN/GaN heterostructure without a GaN cap layer (reference sample) and three other samples with GaN/AlGaN/GaN heterostructures in which the different thickness of GaN cap layer (2.7 nm, 7.5 nm, and 12.4 nm) has been considered. The sheet carrier density (n_s) of a two-dimensional electron gas has decreased significantly from 4.66 × 10¹² cm⁻² to 2.15 × 10¹² cm⁻² upon deposition of a GaN capping layer (12.4 nm) over the reference structure. Through the analysis of internal fields in each GaN capping and AlGaN barrier layers, it has been concluded that the undiminished surface donor states (n_s) of a reference structure and the reduced n_s caused by the Au gate metal are approximately 5.66 × 10¹² cm⁻² and 1.08 × 10¹² cm⁻², respectively.     

GaN真空面电子源光电发射机理研究

采用Cs源持续、O源断续的交替方法成功激活了GaN光电阴极,原位测试了透射模式下的光谱响应曲线,获得了透射模式下高达13%的量子效率.从一维定态薛定谔方程入手,得到了GaN真空面电子源材料的电子透射系数的表达式.对于一定形状的阴极表面势垒,电子透射系数决定于入射电子能量、表面势垒的高度和宽度.根据具有负电子亲和势(NEA)特性的透射式GaN光电阴极的能带及Cs,O覆盖过程中阴极表面势垒的变化情况,结合双偶极层[CaN(Mg):Cs]:O-Cs表面模型,分析了GaN真空面电子源材料NEA特性的形成原因.研究表明:Cs,O激活过程中形成的双偶极层对电子逸出起促进作用,双偶极层的形成是材料表面真空能级下降的原因. 关键词： GaN 电子源 透射系数 双偶极层     

Fabrication of durable hydrophobic surfaces through surface texturing

Low surface energy polymer thin-films can be applied to surfaces to increase hydrophobicity and reduce friction for a variety of applications. However, wear of these thin films, resulting from repetitive rubbing against another surface, is of great concern. In this study, we show that highly hydrophobic surfaces with persistent abrasion resistance can be fabricated by depositing fluorinated carbon thin films on sandblasted glass surfaces. In our study, fluorinated carbon thin films were deposited on sandblasted and as-received smooth glass using deep reactive ion etching equipment by only activating the passivation step. The surfaces of the samples were then rubbed with FibrMet abrasive papers in a reciprocating motion using an automatic friction abrasion analyzer. During the rubbing, the static and kinetic friction forces were also measured. The surface wetting properties were then characterized using a video-based contact angle measuring system to determine the changes in water contact angle as a result of rubbing. Assessment of the wear properties of the thin films was based on the changes in the water contact angles of the coated surfaces after repetitive rubbing. It was found that, for sandblasted glass coated with fluorinated carbon film, the water contact angle remained constant throughout the entire rubbing process, contrary to the smooth glass coated with fluorinated carbon film which showed a drastic decrease in water contact angle with the increasing number of rubbing cycles. In addition, the static and kinetic friction coefficients of the sandblasted glass were also much lower than those of the smooth glass.     

DLTS study of n-type GaN grown by MOCVD on GaN substrates

Electron traps in n-type GaN layers grown homoepitaxially by MOCVD on free-standing GaN substrates have been characterized using DLTS for vertical Schottky diodes. Two free-standing HVPE GaN substrates (A and B), obtained from two different sources, are used. The Si-doped GaN layers with the thickness of 5 μm are grown on an area of 0.9×0.9 cm² of substrate A and on an area of 1×1 cm² of substrate B. Two traps labeled B1 and B2 are observed with trap B2 dominant in GaN on both substrates. There exist no dislocation-related traps which have been previously observed in MOCVD GaN on sapphire. This might be correlated to the reduction in dislocation density due to the homoepitaxial growth. However, it is found that there is a large variation, more than an order of magnitude, in trap B2 concentration and that the B2 spatial distributions are different between the two substrates used.     

GaN及AlGaN薄膜透射光谱的研究

利用透射光谱矩阵光学原理,对三种GaN或AlGaN外延薄膜的透射光谱进行了分析.在传统的透射光谱拟合方法的基础上,添加了表征材料表面粗糙度、膜内散射情况的拟合参量,拟合曲线与实验曲线达到了准确的吻合.结果表明:外延薄膜透射光谱的拟合可以准确提取出材料的消光系数、表面状况、散射情况、折射率及厚度,从而对样品质量作出详细的分析.     

AlGaN/GaN heterostructure-based surface acoustic wave-structures for chemical sensors

We present a new approach in forming of interdigital surface acoustic wave-structures on AlGaN/GaN heterostructure to be applied in chemical sensors technology. This approach uses a selective self-aligned SF₆ plasma treatment of the AlGaN/GaN barrier layer to modify 2DEG density and surface field distribution in the range of interdigital transducers (IDTs) thus enabling SAW excitation. Secondary ion mass spectroscopy was applied to explain the modification of 2DEG density in the plasma treated AlGaN/GaN heterostructure. The initial results in the process technology and characterization are presented.     

Fabrication of hydrophobic alumina aerogel monoliths by surface modification and ambient pressure drying

Hydrophobic crack-free alumina aerogel monoliths were fabricated by -Si(CH₃)₃ (trimethylsilyl substituent) modification of alcogels followed by an ambient pressure drying procedure. One-step solvent exchange and surface modification were simultaneously progressed by immersing alumina alcogels in trimethylmethoxysilane (TMMOS)/hexane solution. It is found that the hydrophobic property of alumina aerogels is affected by the contents of TMMOS from the measurements of contact angle and Fourier transform infrared spectrometry. Thermogravimetry/differential scanning calorimetry analyses reveal that the modified aerogels maintain their hydrophobic behavior up to a temperature of 260 °C. The structure and morphology of the obtained hydrophobic alumina aerogels were characterized by the measurements of N₂ physical adsorption and scanning electron microscopy, which showed that they were highly porous materials with narrow slit-like pore geometry and a high degree of pore size uniformity.     

GaN(0001)表面的电子结构研究

报道了纤锌矿WZ(wurtzite)GaN(0001)表面的电子结构研究.采用全势线性缀加平面波方法计算得到了GaN分波态密度,与以前实验结果一致.讨论了Ga3d对GaN电子结构的影响.利用同步辐射角分辨光电子能谱技术研究了价带电子结构.通过改变光子能量的垂直出射谱勾画沿ΓA方向的体能带结构,与计算得到的能带结构符合得较好.根据沿ΓK和ΓM方向的非垂直出射谱,确定了两个表面态的能带色散 关键词： GaN 角分辨光电发射 全势线性缀加平面波 电子结构     

NEA GaN光电阴极表面模型研究

针对目前NEAGaN光电阴极研究中Cs激活或Cs/O激活后表面状态的形成过程还不清楚的问题,围绕NEAGaN光电阴极的光电发射机理,结合GaN光电阴极激活过程中出现的现象及成功激活的最终效果,给出了GaN光电阴极铯氧激活后的表面模型[GaN(Mg):Cs]:O-Cs。利用该模型可很好地解释单独用Cs激活时约-1.0eV的有效电子亲和势和Cs/O共同激活时-1.2eV的有效电子亲和势的成因,也较好地解释了表面吸附原子的组合形式,即Cs/O激活后激活层的化学结构由Cs2O2和CsO2构成。     

Comparative Analysis of Temperature-dependent .Raman Spectra of GaN and GaN/Mg Films

The Raman spectra of unintentionally doped gallium nitride (GaN) and Mg-doped GaN films were investigated and compared at room temperature and low temperature. The differences of E₂ and A₁(LO) mode in two samples are discussed. Stress relaxation is observed in Mg-doped GaN, and it is suggested that Mg-induced misfit dislocation and electron–phonon interaction are the possible origins. A peak at 247 cm⁻¹ is observed in both the Raman spectra of GaN and Mg-doped GaN. Temperature-dependent Raman scattering experiment of Mg-doped GaN shows the frequency and intensity changes of this peak with temperature. This peak is attributed to the defect-induced vibrational mode. Translated from Chinese Journal of Semiconductors, 2005, 26(4) (in Chinese)     

GaN（1010）表面结构的第一性原理计算

用全势缀加平面波加局域轨道（APW＋lo）的方法计算了六方GaN及其非极性（1010）表面的原子及电子结构.计算出的六方GaN晶体结构参数：晶格常数和体积弹性模量与实验值符合得很好.用平板超原胞模型来计算GaN（1010）表面的原子与电子结构，结果表明表面顶层原子发生键长收缩并扭转的弛豫特性.表面阳离子向体内移动，趋向于sp2平面构形；而表面阴离子向体外移动，趋向于锥形的p3构形.弛豫后，表面实现由半金属性向半导体性的转变.并且，表面电荷发生大的转移，参与表面键的重新杂化，使得表面原子的离子性减弱共价性增强，认为这就是表面原子键收缩并旋转的原因.     

掺镨GaN薄膜的微结构与光致发光

利用背散射／沟道（RBS／C）技术、原子力显微镜（AFM）和光致发光（PL）谱研究了掺镨GaN薄膜的微结构和可见光发光特性。RBS／C结果表明,注入Pr后,在注入层引入了晶格损伤;注入样品经1050℃退火后,部分损伤得到恢复,但是晶体质量没有恢复到注入前的状态。AFM结果表明,注入Pr后,表面凹凸不平,而且在注入区引起了膨胀,膨胀幅度达到23．368nm左右。PL结果表明,在850—1050℃退火,发光强度按e指数增加;当退火温度达到1050℃,发光强度最强,经过数据拟合可得Pr^3＋的热激活能为5．8eV。     

Hexagonal (wurtzite) GaN inclusions as a defect in cubic (zinc-blende) GaN

The dependence of the hexagonal fraction with thickness in MBE-grown bulk cubic (c-) GaN epilayer is presented in this paper. A number of c-GaN epilayers with different thicknesses were characterized via PL and XRD measurements. From the PL spectra, the signal due to h-GaN inclusions increases as the thickness of the c-GaN increases. On the contrary, in the XRD diffractogram, c-GaN shows a dominant signal at all thicknesses, and only a weak peak at ∼35° is observed in the diffractogram, implying the existence of a small amount of h-GaN in the c-GaN layer. The best quality of c-GaN is observed in the first 10 μm of GaN on the top of GaAs substrate. Even though the hexagonal content increases with the thickness, the average content remains below 20% in c-GaN layers up to 50 μm thick. The surface morphology of thick c-GaN is also presented.     

A novel approach for the preparation of organic-siloxane oligomers and the creation of hydrophobic surface

In this paper, poly(acrylate-g-siloxane) with novel comb-like structure was designed and prepared so as to create a strongly hydrophobic polymer surface. In order to achieve this goal, a series of organic-siloxane oligomers with different chain lengths and a double bond were firstly synthesized through the catalytic reforming and hydrosilylation reaction. Then, poly(acrylate-g-siloxane) was prepared by the copolymerization of the resulting oligomers with acrylate via emulsion polymerization. The as-synthesized oligomers were characterized by ¹H NMR and UV spectrometry, and the morphologies and surface chemical compositions of the dried membrane were investigated by FT-IR, XPS, as well as AFM. XPS analysis result shows that the chemical composition of the membrane's surface was rich in polysiloxane segments, which could be responsible for an increase of surface water repellency (the contact angle could reach 115° at a lower content of polysiloxane). A further investigation suggest that the side chain length of siloxane in the poly(acrylate-g-siloxane) was the dominant factor in influencing the hydrophobicity of the membrane’ surface. When the siloxane chain length reaches to eight, the membrane's surface could exhibit the strongest hydrophobicity.     

MOCVD生长的GaN和GaN:Mg薄膜的拉曼散射

通过显微拉曼散射对用金属有机化学气相沉积(MOCVD)法在Al2O3衬底上生长的六方相CaN和掺Mg的P型GaN薄膜进行了研究。在两个样品的拉曼散射谱中同时观察到位于640,660cm^-1附近的两个峰。640cm^-1的峰归因于布里渊区边界(L点)最高声学声子的二倍频,而660cm^-1的峰为布里渊区边界的光学声子支或缺陷诱导的局域振动模。掺Mg的GaN在该处的峰型变宽是Mg诱导的缺陷引起的加宽或Mg的局域模与上述两峰叠加的结果。在掺Mg的样品中还观察到276,376cm^-1几个局域模并给予了解释。同时掺Mg的GaN中出现了应力弛豫的现象,掺Mg引起的失配位错和电子-声子相互作用都有可能对E2模的频率产生影响。