New optical devices for surface roughness measurements

This paper describes two optical devices: one device is capable of measuring real-time the surface roughness of the magnetic coating in the production process in the range of 5 to 40 nm (RMS) and the other device is designed for table measurements. Both devices are easy-to-install and easy-to-use.     

Polarization phase-shifting Newton interferometer for plane optical surface measurements

This Letter introduces a polarization phase-shifting Newton interferometer that can be utilized for plane optical surface measurements, a setup constructed to realize the interferometer, and the experimental results from the use of the setup. The results confirm not only the validity but also the feasibility of the interferometer.     

An integrated optical coupler used in a fibre interferometry system for on-line surface measurements

In this paper, an integrated optical (IO) coupler produced using the technique of silica-on-silicon was described. A fibre interferometry system using the IO coupler was then developed and its performance was tested. The environmental noise and disturbances in this system were reduced significantly after combining a reference interferometer and an all fibre polarisation scrambler so as to produce good stability and repeatability. Furthermore, the measurement mirror was mounted on a piezoelectric transducer (PZT) and disturbances were introduced in the system in order to simulate on-line surface measurements. Both a commercial fibre and the IO couplers were compared using this method. Better experimental results were achieved when the system using the IO coupler than using the fibre one.     

光学加工过程中高次非球面的三坐标测量数据处理

三坐标轮廓检测是大口径高次非球面确定性加工过程中的主要面形测量手段。由于原始三坐标数据包含较大的检测误差,无法直接应用于加工过程,本文提出了一组数据处理算法对误差进行全面去除。首先,对获取的检测数据采用基于球心曲面重建的测头半径补偿算法进行测头半径误差补偿,然后对补偿后数据进行坐标系旋转平移误差去除,最后对提取的检测面形残差进行基于KNN的残差噪点过滤。其中,提出的基于球心曲面重建的测头半径补偿算法通过引入一个高精度的测头球心包络面拟合模型,来计算各检测点的测头半径补偿向量,仿真实验证明:算法补偿精度达到RMS<4 nm;提出的基于KNN的残差噪点过滤算法,通过采用插值方法提高样本空间密度和优化噪声度量值的计算,提高了噪点的识别敏感度并实现了噪点的自动化去除。最终根据整个误差清理算法构建了检测点云处理软件,应用实践表明其有效提高了镜面加工过程中检测点云的数据处理精度和效率。     

Development and investigation of an optical tilt sensor

An optical tilt sensor was developed and its performance was investigated. The tilt sensor set-up consisted of a laser light source, lenses and an image sensor. A precision reference tilt sensor was also installed on the same stage, and the measurement results of tilt angles using the optical and reference tilt sensors were correlated. The correlation coefficient (R-value) obtained under ideal conditions was 0.99454, indicating that the optical tilt sensor could produce as accurate measurements as the precision reference tilt sensor. The R-value decreased to 0.97714 and 0.93209 when the image sensor was shifted backwards and forwards from the focal plane by 1 mm, respectively. The R-value decreased to 0.96840 when the tilt sensor was performed with the room light turned on. There were not significant differences in the measurement results obtained with air conditioners turned on and off, indicating that the optical tilt sensor was robust and was not sensitive to the surrounding air turbulence. These findings are useful for the final design of the optical tilt sensor.     

Experimental investigation of a modified Beckmann-Kirchhoff scattering theory for the in-process optical measurement of surface quality

An experimental investigation of a modified Beckmann-Kirchhoff scattering theory applied in an in-process optical measurement of surface quality is described. The proposed theory describes the scattered light intensity distribution from a surface with the additional layers, and can be employed to analyze the surface characteristics in in-process measurement. Based on light scattering principle and machine vision method, the surface roughness is extracted to testify the correction of the modified Beckmann-Kirchhoff scattering theory. The experimental apparatus consists of a collimated laser diode, a beam splitter, a screen, a measuring lens and a camera. Test specimens with different surface roughness are studied. The results obtained demonstrate the feasibility of in-process optical measurement of surface quality using the modified model.     

Optical methods for precision measurements

Contactless measuring techniques are becoming increasingly important for industrial applications. The use of a laser, solid-state detector arrays and powerful small computers leads to a very efficient fringe analysis in holography as well as in Moiré and speckle techniques. Due to the computer analysis, much more information can be extracted from interferograms, leading to higher sensitivities and accuracies. The application of different fringe analysis procedures is discussed, together with some potentials of the application of interferometry, holography, and speckle and Moiré techniques.     

用于自由电子激光的光学速调管的设计与测试

 详述了用于合肥自由电子激光用的光学速调管的物理设计与测试,以及光学速调管实际运行结果与升级计划。测试结果表明,考虑三维效应的OPERA3D场有限元计算法比解析设计更精确,多周期波荡器中任意周期磁场峰值受该周期外其它周期波荡器磁体的影响小于10%。     

用于自由电子激光的光学速调管的设计与测试

详述了用于合肥自由电子激光用的光学速调管的物理设计与测试,以及光学速调管实际运行结果与升级计划。测试结果表明,考虑三维效应的OPERA3D场有限元计算法比解析设计更精确,多周期波荡器中任意周期磁场峰值受该周期外其它周期波荡器磁体的影响小于10%。     

New method for loss measurements in optical waveguides

A new three-prism method for measuring losses of optical waveguides is presented. It has a high accuracy and is comparatively simple, both in construction and during the measurement process. The method can be applied to all kinds of planar waveguides and enables one to obtain results which are independent of the coupling efficiencies of the middle movable prism and laser radiation fluctuations.     

Experimental measurements on transverse vibration characteristics of piezoceramic rectangular plates by optical methods

This study provides two non-contact optical techniques to investigate the transverse vibration characteristics of piezoceramic rectangular plates in resonance. These methods, including the amplitude-fluctuation electronic speckle pattern interferometry (AF-ESPI) and laser Doppler vibrometer (LDV), are full-field measurement for AF-ESPI and point-wise displacement measurement for LDV, respectively. The edges of these piezoceramic rectangular plates may either be fixed or free. Both resonant frequencies and mode shapes of vibrating piezoceramic plates can be obtained simultaneously by AF-ESPI. Excellent quality of the interferometric fringe patterns for the mode shapes is obtained. In the LDV system, a built-in dynamic signal analyzer (DSA) composed of DSA software and a plug-in waveform generator board can provide the piezoceramic plates with the swept-sine excitation signal, whose gain at corresponding frequencies is analyzed by the DSA software. The peaks appeared in the frequency response curve are resonant frequencies. In addition to these optical methods, the numerical computation based on the finite element analysis is used to verify the experimental results. Good agreements of the mode shapes and resonant frequencies are obtained for experimental and numerical results.     

Reconstruction of the precision surface shape of substrates for reflective X-ray optical components on the basis of single-axis profilometer measurements

The features of quality control of surfaces of precision optical components are considered. A method of surface reconstruction based on long-trace profilometer measurements is developed.     

Guided-wave methods for optical configurations

Guided-wave methods used in the past to treat electromagnetic problems and applications in the microwave area have recently been extended to cover work in fiber and integrated optics. The basic principles of these methods are reviewed briefly and, in particular, the “open” properties of optical configurations are contrasted to the “closed” characteristics that describe most microwave applications. These aspects are illustrated in the context of beam couplers of uniform and periodic varieties, which are shown to lend themselves to rigorous treatment by microwave guided-wave methods that include both theoretical and experimental facets.     

The use of surface photovoltage measurements for the surface characterisation of photoconductors

Measurements of the surface photovoltage as a function of wavelength of the exciting radiation show a number of features which change with variations in the surface conditions. In the case of photoconducting cadmium sulphide, it is shown that the changing spectral features, rather than being directly associated with surface states, are due to bulk transitions which give rise to changes in the bulk carrier concentrations and (indirectly) to changes in the surface potential as a result of redistribution of charge between bulk and surface states.     

Development of methods of precise ultrasonic measurements in small volumes of liquids

The application of ultrasonic methods to investigation of problems of molecular physics and molecular biology is greatly limited by the necessity of precise measurements of ultrasound velocity and absorption in small volumes of liquids. Fixed path interferometric methods are the most adequate for such measurements in the low MHz region.In this paper disadvantages of the present interferometric methods of ultrasonic measurements are considered and new resonator cells and a simple device for such measurements are described. Accuracies of 10^?4% for the velocity change and to better than 1% for the attenuation change, at frequencies of about 7 MHz, are obtained by the device described. The volumes of the resonator cells vary within 0.1 to 0.8 ml depending on the purpose of investigation.     

Nonlinear optical technique for precise retardation measurements

We present a highly sensitive nonlinear optical technique to measure optical retardation. The technique is based on second-harmonic generation from thin films using two beams at the fundamental frequency. The sensitive polarization dependence of the process allows measuring optical retardation very precisely. The technique relies on fundamental symmetry principles and does therefore not require complicated experimental arrangement or data analysis. The technique was demonstrated by determining the retardation of a nominal half-wave plate to a precision and repeatability better than lambda/10(4).