电子回旋共振等离子体特性及其对生长氮化镓晶膜的影响

为了解并优化在电子回旋共振等离子体辅助化学汽相沉积GaN晶膜的工艺研究中的等离子体特性,利用朗缪尔探针及法拉第筒系统地测量了离子密度(N_i)、等离子体势(V_p)、电子温度(T_e)及离子流强(J_i)等多个等离子体参量随微波功率(P_w)及沉膜室气压(p)变化的关系.给出了在P_w＝850W,p＝0.22Pa时,上述等离子体参量的轴向及径向分布.GaN晶膜的生长速率、电学及晶体学性能 关键词：     

Effect of neutral pressure on the He plasma flow measurement in a linear device

Axial and azimuthal flow velocities have been measured in a linear plasma device called NAGDIS-II (NAGoya DIvertor Simulator-II), along with plasma density and electron temperature, using a vector Mach probe composed of two Mach probes, one of which is for the axial flow, and the other is for the azimuthal flow. To study the effect of neutral pressure on the deduction of the Mach numbers, the ratio of upstream to downstream currents are measured by changing the neutral pressure for the deduction of flow velocities. Helium plasma was generated with pressure of 2–35 mTorr. Since the ion gyro-radius at the magnetic flux of 300 G is larger than the probe size, an unmagnetized collisionless Mach probe theory was used for the deduction of Mach numbers and their variations. In order to check the range of collisionality, plasma density (n_e = 10¹⁰–10¹¹ cm^?3) and electron temperature (T_e = 2–9 eV) are measured by a single electric probe using a conventional collisionless probe theory. Variations of Mach number, electron temperature and plasma density with collisionless models are to be compared with those using collisional models for different pressures where ionization and ion-neutral collision are included. Mach numbers by the collisionless model are found to be overestimated by 120% for the maximum difference even in weakly collisional plasmas. A clear flow reversal exists in the axial direction with higher pressure plasma, even in the linear machine. Azimuthal flows are also measured simultaneously along with axial flows, yet they seem to be very small in the present cold ion plasma (T_i/T_e << 1).     

Non-Maxwellian electron energy distribution function in He,He/Ar,He/Xe/H<Subscript>2</Subscript> and He/Xe/D<Subscript>2</Subscript> low temperature afterglow plasma

Experimental studies of the electron energy distribution function “EEDF” under well defined conditions in flowing afterglow plasma, using a Langmuir probe are reported. The EEDF is measured in He₂ ⁺ and Ar⁺ dominated plasmas and in XeH⁺ and XeD⁺ dominated recombining plasmas. He is used as a buffer gas at medium pressures in all experiments (1600 Pa, 250 K). The deviation of the measured EEDF from Maxwellian distribution is shown to depend on plasma composition and on the processes governing the plasma decay. The influence of energetic electrons produced during the plasma decay on the body and tail of the EEDF is observed. The mechanism of energy balance in afterglow plasma is discussed.     

VUV emission model of REB-heated plasma

VUV emission model of a hygrogen plasma with oxygen impurity (T _e=tens of eV,n _e 10¹⁴–10¹⁶ cm^–3,ⁿimp=1–3 % n_e) is constructed in order to judge different possibilities of plasma diagnostics (especiallyT _e measurements) in the REBEX experiments. Two sets of calculations based on the nonstationary corona model are performed: time dependent continuous and line spectra in the range 5 eV—5 keV in the constantT _e approximation (discussion ofT _e measurements by the filter-method) and time dependent intensities of selected spectral lines (2s-2p type) of ionsO ²⁺–O⁵⁺ at variableT _e (including plasma heating by REB and radiative cooling). A possibility of plasma energy content determination from radiation losses is shown.We would like to acknowledge many helpful discussions with dr. P. unka; we thank also dr. J. Ullschmied for comparing our results with diamagnetic measurements.     

Characterization of the Edge Plasma of the CASTOR-Tokamak

The edge plasma of the CASTOR-tokamak was investigated by Langmuir and collector probes. T_e – values derived from both methods agree satisfactorily and are in the range from 15 eV to 45 eV, depending on the minor radius and the magnitude of the discharge current. However, the collector probe measurements indicate an anisotropic plasma and impurity flow in the edge plasma.     

Spectroscopic Measurement of Electron Temperature and Density in an Argon Plasma Jet Based on Collisional‐Radiative Model

The present paper describes a spectroscopic method or determining electron temperature T_e and density N_e in an argon plasma jet on the basis of a Collisional‐Radiative model of argon. Electron temperature and density in the argon plasma were measured by the method developed, and comparison of them was discussed with those obtained with a Langmuir probe. The results or T_e and N_e obtained by the spectroscopic method agreed roughly with those by the probe.     

射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究

分别通过Langmuir探针测量和动力学模型模拟方法研究了射频感应耦合Ar-N₂等离子体中电子能量分布、电子温度、电子密度等物理量随N₂含量的变化规律.实验研究结果表明：电子能量分布呈现出非Maxwell型分布,并由双温分布向三温分布过渡;电子温度在不同的气压下随N₂含量的增加呈现出不同的变化规律.在放电气压小于1.3 Pa时,电子温度随N₂含量的增加而下降;当气压大于1.3 Pa时,电子温度随N₂关键词： 感应耦合等离子体 2混合气体放电')" href="#">Ar-N₂混合气体放电 电子能量分布 Langmuir探针     

Comments on the Bohm Criterion and on the Determination of the Ion Velocity at the Sheath Edge in Non‐Maxwellian Plasma

This work is devoted to the study of the Bohm criterion in the general case of the electron energy distribution function (EEDF). Investigations are performed by means of a Monte Carlo integration method. We resolve the cold fluid equation system describing the ion motion within the sheath, assuming collisionless conditions, singly charged and mono kinetic incoming ions (BOHM model). Results confirm that the limit ion velocity at the sheath edge to assure a monotone electric field with a positive charge over the entire sheath is v_i ≥ (kT_e/M_i) or ε_i ≥ 1/3 <ε_e> in the case of Maxwellian electrons. We show that in the case of a Druyvesteyn electron energy distribution, this limit is larger, it is ε_i ≥ 0.6 <ε_e>. The study is also extended to other distributions functions. Because of the large controversy in recent publications, concerning the boundary conditions at the sheath entrance, we discuss the collisionless conditions at the sheath edge according to the plasma parameters. It is shown that in a collisionless sheath, the condition n_i(χ) ≥ n_e(χ) can be used to determine the limit ion velocity at the sheath edge of the negatively biased collector (Langmuir probe for instance) (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Influence of Plasma Resistance and Fluctuation on Probe Characteristics in Detached Recombining Plasmas

In order to find the causes of the strong anomaly of current‐voltage characteristics of Langmuir probe observed in detached recombining plasmas in a linear divertor plasma simulator, NAGDIS‐II, we have investigated plasma resistance along a magnetic field and potential fluctuations in the detached recombining plasmas. Simple calculation on the ratio between the plasma length, at which plasma resistance and resistance of ion sheath formed around a probe tip become equal, and an electron collection length indicates that the evaluation of electron temperature T_e becomes inaccurate at T_e of less than 0.6 eV when plasma density and neutral pressure are 1.0 × 10¹⁸ m^—3 and 10 mtorr, respectively. The potential fluctuation in detached recombining plasmas was found to be so large compared to T_e/e, which can also modify the probe characteristics.     

Measurements of Flow Velocity in the Plasma Generator PSI‐2

The plasma flow velocity in the Plasma Generator PSI‐2 has been investigated by using of Mach probe. PSI‐2 is a stationary high‐current arc discharge in which the quasi‐neutral plasma expands along the magnetic field lines. The low‐temperature (T_e < 20 eV), medium density (n_e ∼ 10¹⁸— 10¹⁹ m^—3 ) plasma in the discharge is similar to the plasma in the divertor region of tokamaks. From the ratio of ion saturation currents collected from opposite sides of the probe the flow velocities (Mach numbers) in argon and hydrogen discharges are obtained.     

Investigation of the Beam Plasma Discharge in Electronegative Gases Using the Second Derivative of Langmuir Probe Characteristics

The distribution of the charge carriers is measured and the influence of the attachment processes on the electron energy distribution function is demonstrated for beam plasma discharges in SF₆, CF₄ and O₂ with the aid of the second derivative of Langmuir probe characteristics. The structuration of the plasma into regions of predominating negative ions and regions of predominating electrons is determined by the the established radial T_e-profile. The dimension of the quasi electronfree plasma changes significantly as well at transition from the turbulent heating mechanism into the electron impact plasma generation as by occuring low-frequency instabilities. With increasing n_?/n_e a deficit of low energetic electrons appears in the electron energy distribution parallel to the formation of the negative ion peak. The saturation currents at n_e/n_?=0 yield the mass ratios between negative and positive ions.     

Anomalous Electric Fields Inside a Dense Plasma of a Current Sheet

For the first time there have been analyzed profiles of electric-field-sensitive n_a spectral lines of the Li-like impurity ions CIV, NV, OVI emitted by a hot dense plasma of a plane current sheet. Theoretical profiles of these lines have been calculated with an allowance for Anomalous Electric Fields (AEF). By comparing the experimental and theoretical profiles of the lines it has been established for the first time that in the plane current sheet there were developed AEF of rms strengths F₀ ≈ (100–120) kV/cm in the time interval from τ = ?0.2 μs to τ = 0 (the time τ was counted from the instant of the maximum intensity of the spectral line OVI 5291 Å). These results have been backed up by a similar analysis of the experimental profiles of the spectral line HeII 4686 Å of the primary gas of the discharge. The AEF reached these strengths at the same instant of time, τ = ?0.2 μs, when electron and ion temperatures reached their maxima: T_e ? 100 eV, T_i ≈ 300 eV. The instant τ = ?0.2 μs corresponds to a transition from the metastable stage to the explosive phase of the current sheet evolution. At this time the ratio of the AEF energy density to the thermal energy density of the plasma was § ≡ F²₀/[8π/N_eT_e + N_iT_i)] ≈ 10^?3, which exceeded a similar ratio for the thermal wave field by three orders of magnitude.     

Mode transition in magnetic pole enhanced inductively coupled argon plasmas

The electrical probe (Langmuir probe) diagnostics of different plasma parameters and operation regimes (E/H modes) of magnetic pole enhanced, inductively coupled (MaPE-ICP) argon plasmas are investigated. It is shown that uniform, high density (n _e ∼ 10¹² cm^-3) and low electron temperature (T _e ∼ 1.5 eV) plasma can be produced in low pressure argon discharges at a low power (100 W). It is found that an MaPE-ICP reactor operates in two different modes; capacitive (E mode) and inductive (H mode). No density jump or hysteresis are reported between these modes. The effect of pressure on transition power, where the mode changes from E to H mode at 20 sccm gas flow rate are studied and it is found that for all pressures tested (∼7.5 mTorr to 75 mTorr) the transition power remains same. In the inductive mode, the above plasma parameters show a smooth variation with increasing filling gas pressure at fixed power. The intensity of the emission line at 750.4 nm due to 2p ₁ → 1s ₂ (Paschen’s notation) transition, closely follows the variation of n _e with RF power and filling gas pressure. Measured electron energy probability function (EEPF) shows that electron occupation mostly changes in the high-energy tail, which enlightens close similarity of the 750.4 nm argon line to electron number density (n _e ). The behaviour of the electron energy probability function (EEPF) with regard to pressure and RF power in two operational modes is presented.     

Acoustic perturbations in a pulsedRF-plasma

The response of a stationary weakly ionized plasma to a density perturbation in the neutral gas component was studied in a neon plasma with the following typical properties: electron density ¯N _e≈8×10¹² cm^?3, electron temperature on the axis of the vesselT _e0≈3.0 eV; neutral gas densityN _n≈1×10¹⁷cm^?3 and neutral gas temperatureT _n0≈600 °K. A neutral density perturbation, generated 50 cm apart from the plasma, produces a fluctuation in the ion density and a sharp spike in the differential voltage of a floating double probe. The experimental observations demonstrate the propagation of an ion sheath and of an electric field perturbation together with the neutral density perturbation. An interpretation of the plasma response to acoustic wave pulses has been proposed by Ingard and Schulz in a theory on acoustic wave modes in a weakly ionized gas. The experimental results are in good agreement with the theoretical expectations.     

Plasma parameters in the upgraded Trimyx-M Galathea

Results are presented from measurements of the plasma parameters in the upgraded Trimyx-M Galathea. After the barrier magnetic field and the energy of the injected hydrogen plasma bunch were increased to B _bar ∼ 0.1 T and W ₀ ≈ 200 J, respectively, the following plasma parameters were achieved: the density n ∼ 5 × 10¹³ cm⁻³, the plasma confinement time τ* = 800–900 μs, the elergy of the confined plasma W ₁ ∼ 100 J, the ratio of the plasma pressure to the barrier magnetic pressure β ₀ ∼ 0.2, the electron temperature T _e ∼ 20 eV, and the ion temperature T _i ∼ 2T _e . The maximum time during which the plasma density decreased e-fold, τ _p , was found to be 300 μs at B _bar = 0.1 T, which agrees with the classical transport model.     

Probe measurements in a plasma having an anisotropic electron velocity distribution function

In this paper a number of questions connected with the diagnostics of anisotropic electron velocity distribution functions possessing a drift velocity were examined. In an example involving a model distribution function, the possible errors in measurements of the electron energy distribution function (EEDF) using a cylindrical probe oriented parallel to the particle flow are estimated. It is shown that application of a standard method for treating probe volt-ampere characteristics leads to over- and underestimates relative to the true values of the measured temperatures T _e ⁺ and T _e ^– , found respectively according to the currents i⁺(V) and i^–(V) on a flat probe, oriented along and against a specific direction. A comparison of calculated T _e ⁺ +/T _e ^– ratios is made with experimental data.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 9, pp. 9–13, September, 1990.     

Characterisation of laser-produced tungsten plasma using optical spectroscopy method

This paper describes results of spectroscopic investigation of laser-produced tungsten plasma. The laser intensity on the target surface reached up to 30 GW/cm² depending on the focusing conditions. Optical spectra emitted from plasma plumes which were formed under vacuum conditions in front of the tungsten target due to the interaction of Nd-YAG laser pulses (1.06 μm, 0.5 J), were characterised by means of an optical spectrometer (λ/Δλ= 900) in the wavelength range from 300 to 1100 nm. The spectra were recorded automatically with the use of a CCD detector with exposition time varied from 100 ns to 50 ms. On the basis of WI and WII lines it was possible to estimate electron temperature and electron density which corresponded to the expansion phase of the plasma. T_e and N_e were measured as 1.1 eV and 8×10¹⁶ cm^-3, respectively. The spectra collected by the ion energy analyser showed that the plasma included tungsten ions up to 6+ ion charge. Signals from the ion collector allowed to estimate the average value of ion energy of tungsten as 4.6 keV. Basing on this value the electron temperature corresponding to the initial stage of the plasma formation was estimated to be about 320 eV. Optical microscope investigation showed that laser irradiation caused structural changes on the surface of the target.     

射频反应性溅射沉积的Cd2SnO4薄膜物理性质与缺陷特性研究

在Ar+O₂混合气氛中射频反应性溅射Cd-Sn合金靶制备了透明导电Cd₂SnO₄(简称CTO)薄膜。用X射线衍射测量了CTO膜的结构。实验结果表明,这种薄膜的电学和光学性质依赖于混合气体中的氧浓度、衬底温度以及沉积后的热处理。获得的CTO膜最低电阻率为1.74×10^-6Ω·cm,可见光光谱区最高透射率为95％。对于氧浓度为6％、衬底温度为400℃时沉积的CTO膜,经热处理后,其光隙能由热处理前的2.37eV增大为2.6 关键词：     

The Influence of Collisions in the Space Charge Sheath on the Ion current Collected by a Langmuir Probe

The current/voltage characteristics of a cylindrical Langmuir probe have been studied in Ar⁺/electron afterglow plasmas in helium carrier gas under truly thermal conditions at 300 K using our flowing afterglow/Langmuir probe (FALP) apparatus. The orbital motion limited (oml) ion and electron current regions of the probe characteristics have been explored over a wide range of the reduced probe voltage (up to ～ 100) and over a wide range of electron (n_e) and ion (n₊) number densities (1.6 × 10⁷ to 1.5 × 10¹⁰ cm^?3) at a constant pressure of the He carrier gas of 1.2 Torr. The observed increase of the probe ion currents above those predicted by collisionless oml theory, resulting in an apparent increase of the measured ion number density above n_e in the plasma, is explained by the enhancement in the ion current collection efficiency due to collisions of ions with neutral gas atoms in the space charge sheath surrounding the probe. The continuous change in the exponent, χ, of the power-law dependence,i₊ ∞ V of the ion current, i₊, on the probe voltage, V_p from 0.5 at the highest n₊ (smallest sheath) towards 1.0 at the lowest n₊ (large sheath) indicates that the ion current collection from the plasma changes from the oml current regime at the high n₊ to the continuum regime at the low n₊ when the ions undergo multiple collisions with the helium atoms in the space charge sheath and thus “drift” towards the probe.     

弱电离大气等离子体电子能量分布函数的理论研究

使用球谐展开的方法求解玻尔兹曼方程,得到了弱电离大气等离子体(79％氮气和21％的氧气)的电子能量分布函数(EEDF).发现当约化电场较小时(E/N＜100 Td),EEDF在2-3 eV急剧下降,在此情况下,高能尾部比麦氏分布要小;当约化电场增加,E/N＞ 400 Td,分布函数趋近于麦氏分布;当约化电场进一步增加,E/N＞ 2000 Td,EEDF的高能尾部(超过200 eV)相对于麦氏分布增加,在高频场作用下,EEDF更倾向于麦氏分布.当ω》vm时,有效电子温度只依赖于E/ω,而与碰撞频率无关;当ω《vm时,有效电子温度只依赖于E/N,与微波频率无关.与一些单原子分子等离子体中电子-电子碰撞在电离度大于10-6时就会影响EEDF不同,空气等离子体中,只有当电离度大于0.1％时,电子-电子碰撞才会对EEDF有明显影响.