Roughness and correlation-length determination of rough-surface objects using the speckle contrast

A method using the speckle contrast for the determination of both the roughness and the correlation length of surface-height variations of a rough-surface object is proposed on the basis of the statistical properties of the Gaussian speckle field in the image region. The expression for the speckle contrast is first theoretically derived in the optical imaging system as a function of the defocus distance and the surface parameters of the object. By solving the equations expressing the speckle contrasts at the image and defocus planes, a unique solution is found to exist for the roughness and the correlation length. In particular, a useful approximate relation that the roughness depends only on the contrast ratio is derived for relatively small values of the roughness. The experiments were performed to confirm the validity of the proposed method. The present method has an advantage of the simplicity in a measuring procedure where the contrasts at only the two points are required to determine the surface parameters.     

Measurement of surface roughness properties using speckle patterns with non-gaussian statistics

The surface roughness properties (i.e. the rms surface roughness and the correlation length) of strong diffuse objects are investigated by using the speckle patterns which obeys the non-gaussian statistics. The intimate linear relation is found to exist between the rms surface roughness of objects and the maximum contrast obtained from the varying curves of the average image speckle contrast as a function of the point spread of an optical imaging system. The correlation length of surface roughness of objects is related to the averaged intensity distribution of speckle patterns produced at the far-field diffraction plane. It now becomes clear that the rms roughness and the correlation length of strong diffuse objects are determined, respectively, from the maximum speckle contrast at the image plane and the averaged speckle intensity distribution at the far-field diffraction plane.     

基于灰度共生矩阵的表面粗糙度研究

介绍了激光散斑的形成及其统计性质,拍摄大量不同加工工艺、不同表面粗糙度标准样块的散斑图像,基于激光散斑图像的灰度共生矩阵及惯性矩、角二阶矩、熵、相关性4个参量,对图像进行了纹理分析.分别绘制了不同加工工艺、不同表面粗糙度标准样块的4个参量与表面粗糙度关系的特性曲线.最后将实验结果和未知表面粗糙度工件的实验数据进行比对,准确估算出了工件的表面粗糙度.     

粗糙表面对散斑统计特性的影响

为研究高速摄影中激光相干噪声的影响因素,降低激光照明中散斑噪声对高速摄影成像质量的影响,对激光照射表面的粗糙程度与形成的散斑场统计特性之间的关系进行了研究。基于菲涅尔-基尔霍夫衍射原理,分析了高斯光束入射在随机粗糙表面上经反射形成的散斑图样,通过对大量散斑图样的数据统计,得出了激光散斑的信噪比、自相关函数、概率密度函数与入射表面粗糙度之间的变化关系。计算结果表明:粗糙度的增大使散斑场信噪比降低、相干程度减小、概率密度降低,即表面越粗糙散斑噪声越严重。     

微粗糙圆柱的各向异性散斑特性研究

分析了高斯光束照射微粗糙圆柱在菲涅尔衍射区形成的散斑图像统计特性,给出了强度起伏自相关函数与表面曲率及粗糙程度等参数之间的关系.根据强度起伏自相关函数的离散化定义,实验并计算了圆柱轴向与径向结构有差异情况下的散斑强度起伏相关函数.结果表明,对于C1和C2圆柱沿垂直于圆柱轴向的散斑尺寸变长,强度起伏自相关函数沿平行和垂直于圆柱轴两个方向的波动相差较大;对于C3和C4圆柱两个方向上的散射特性基本相同;测量C1和C3的结果表明,散斑尺寸和形状依赖于圆柱表面的皱褶和圆柱表面曲率两个因素.研究结果对于如柱型管道、轴承等方面的机械制造的质量控制有重要的应用价值.     

Statistical properties of speckle intensity variations in the diffraction field under illumination of coherent light

The statistical properties of speckle intensity variations produced by coherent light in the diffraction field of diffusely transmitting objects are investigated experimentally with intimate relation to their surface roughness. The probability distribution and the average contrast of intensity variations in speckle patterns are studied as a function of the surface roughness of the objects and the receiving plane in the diffraction field.     

基于自相关函数的非平面表面粗糙度的图像纹理研究

采用自相关函数对不同加工工艺形成的非平面工件表面粗糙度进行了研究。讨论了自相关函数及其扩展度参数与图像纹理特性的关系,构建了实验装置,利用图像处理软件对实验所得的激光散斑图像进行了处理,得到了自相关函数及其扩展测度参数随表面粗糙度的变化曲线。为研究非平面工件的粗糙度,提供了一种新的方法。     

基于多色散斑延长效应的表面粗糙度测量及影响因素分析

粗糙表面在多波长激光束照射下形成的多色散斑场显示出散斑延长效应,利用此效应可以测量表面粗糙度,并且测量结果在一定条件下不受粗糙表面横向特征的影响。通过模拟计算随机粗糙表面的多色散斑场,以空间平均的多色散斑场局部自相关函数研究了平均散斑延长率〈χ〉对表面轮廓均方根偏差σh的依赖关系,分析了测量系统因素,如入射激光波长组合、成像器件光敏单元尺寸和动态范围对测量结果的影响。结果表明,以空间平均的局部自相关函数代替集平均的散斑自相关函数描述多色散斑延长效应是有效的;为达到一定的粗糙度测量精度,应选择合适的入射激光波长组合和合适的成像器件光敏单元尺寸。     

Some effects of surface roughness on the appearance of speckle in polychromatic light

A statistical formulation is given explaining the fibrous structure seen in speckle patterns in polychromatic light. It is shown that the appearance of the structure is strongly dependent on the surface roughness of the diffuser. This may be useful as the basis of a determination of surface roughness.     

基于激光散斑成像的零件表面粗糙度建模

表面粗糙度是衡量机械表面加工水平的重要参数. 通过构建一套激光散斑成像采集系统, 获取了不同表面加工类型和不同粗糙度值的零件表面激光散斑图像. 应用Tamura纹理特征理论提取图像的纹理粗糙度、对比度、方向度特征, 并分析了这三个特征与表面粗糙度的关系. 发现了纹理粗糙度特征与表面粗糙度的单调关系, 推导出平磨、外磨、研磨三种表面加工工艺的粗糙度值与图像纹理粗糙度特征的数学函数关系, 实现了表面粗糙度的测量. 同时, 利用Tamura纹理特征与加工工艺的依赖关系, 建立了基于贝叶斯网络的工艺识别推理模型, 推理出了零件表面加工工艺. 通过为多种加工类型表面建立粗糙度测量模型, 为粗糙度测量提供了新思路. 实验证明所提的粗糙度测量模型能以较高的准确率识别出零件表面加工类型并测量出其表面粗糙度值.     

Statistical Properties of Laser Speckles Generated from Far Rough Surfaces

The statistical properties of speckle patterns generated from far rough surfaces, under illumination of a Gaussian beam, are investigated. The surface roughness dependence of the first- and second-order moments of intensity is theoretically investigated, and their analytical expressions have been derived and presented. The analysis indicates that the mean intensity distribution on the receiver plane is closely related to the ratio of the lateral correlation length to the surface root mean square (rms) height. On the other hand, the speckle size and the correlation degree of the speckle intensities are found to be independent of the parameter characterizing the roughness of a surface, and are only determined by the laser beam waist.     

Measurement of surface roughness properties by means of laser speckle techniques

The statistical properties of speckle intensity variations produced by coherent light in the far-field diffraction plane of an iluminated area of an object are studied experimentally as a function of the radius of an illuminating beam over the object and are found to have a relation to its surface roughness and correlation lenght. Measurements of the surface roughness and the correlation lenght become possible by investigating the contrast variation of the speckle intensity as a function of the radius of the illuminating beam.     

高斯型弱散射屏产生的像面散斑场的分布特性研究

弱散射屏产生的远场散斑由一个中央亮斑和一个分布于亮斑周围而与正态散斑类似的散斑结构, 根据弱散射屏远场的散斑图样, 人们假设弱散射屏产生的像面散斑为均匀背景与正态散斑两者相干叠加的结果, 但这种假设与实际像面散斑存在歧异, 基于上述情况, 本文利用4f高通滤波光学成像系统, 研究了高斯型弱散射屏产生的像面散斑场的统计特性, 得出只有表面均方根粗糙度与入射光波的波长相差不多时上述假设才是可行的结论. 关键词： 弱散射屏 f光学成像系统')" href="#">4f光学成像系统 像面散斑     

利用散斑图像测量表面粗糙度的计算机模拟及实验

从菲涅耳-基尔霍夫衍射公式出发推导出了粗糙面近场衍射方程。通过对观察面散斑光强统计特性的分析,提出了采用镜射光强分量法测量表面粗糙度的思想。为验证该方法的有效性,首先用计算机模拟产生具有不同统计特性的随机表面,然后对由随机表面产生的散斑场及其光强分布进行计算。计算结果表明,与传统的散斑对比度法相比,散斑镜射光强分量法测量弱粗糙表面粗糙度具有更大的适用范围和更高的测量精度,克服了散斑对比度法易受表面横向相关长度影响的缺点。通过实验对计算机模拟结果进行了验证。     

Surface roughness measurement using spatial-average analysis of objective speckle pattern in specular direction

The speckle contrast method (SCM) and the light scattering method (LSM) are two of the most promising optical techniques for on-line surface roughness measurement of slightly-rough surface. However, due to the lack of capability in eliminating the influence from the diffuse component of scattered light, SCM and LSM are both sensitive to the variations of surface correlation length. Additionally, for LSM, the presence of speckle noise leads to fluctuations in the measuring results. To solve these problems, an approach based on the spatial-average analysis of the objective speckle pattern in the specular direction, simply called spatial-average method (SAM), is proposed. The SAM establishes the quantitative relationship between a new characteristic parameter extracted from the recorded speckle image and the rms surface roughness, eliminates to a large extent the influence of diffuse light component on the measuring results, and immunizes itself from the speckle noise. The theoretical foundation of SAM is given in details. A computer simulation is then performed to make comparisons among these three methods. Finally an experiment is presented.     

Hurst exponent determination for digital speckle patterns in roughness control of metallic surfaces

In this paper, we present a study of metallic surface roughness using the Hurst exponent calculated from speckle pattern. A set of samples was prepared using polishing techniques and the roughness was directly measured by means of an optical profilometer. To study the H exponent, an experiment was performed by illuminating the samples using an expanded laser beam and the surface image was captured by a CCD camera. We applied techniques of the Hurst exponent calculation, traditionally calculated from surface profile, in the digitalized speckle patterns generated by the rough surfaces. We showed a clear dependence of the H exponent on roughness of the samples. We demonstrated that this tool is very sensitive to defects in the surfaces and can be used for roughness control.     

基于灰度共生矩阵的非平面表面粗糙度的图像纹理研究

采用灰度共生矩阵对不同加工工艺形成的非平面工件表面粗糙度进行了研究。讨论了灰度共生矩阵中二阶矩、对比度、相关值,熵等与图像纹理特性的关系,构建了实验装置,并利用Matlab软件对采集的激光散斑图像进行了处理,得到了共生矩阵的4个特征参数随表面粗糙度的变化曲线。为研究非平面工件的粗糙度,提供了一种新的技术途径。     

Study on the reduction of speckle noise in the reconstructed image of digital hologram

As one of the most important 3-D display technique, reduction of speckle noise in the reconstructed image of digital holography should be grounded on the digital hologram itself. Based on the whole process of the recording and reconstruction of digital holography, the optical distributions of recorded object and reconstructed image of digital holography have been studied. It has been proposed that the root formation cause of speckle noise in its reconstructed image is the speckle noise formed on the recorded object surface when illuminated by coherent light because of its optical roughness. A novel approach has been presented to reduce speckle noise in digital holography by changing the interference structure of hologram itself. First, by reducing the speckle noise in the reconstructed image, the distribution of ideal reconstruction light with reduced speckle noise is acquired. Then in turn, taking the ideal reconstruction light with reduced speckle noise as ideal object light, a new hologram can be rebuilt, which can reconstruct the ideal object light. The experimental results are given to confirm the proposed method. Therefore, it offers a brand-new thought and practical way to reduce the speckle noise in the reconstructed image of digital holography.     

弱散射屏的像面散斑自相关函数特性的实验研究

在对随机弱散射屏进行表面参数的原子力显微镜测量和建立了门积分取样平均的随机光强自相关函数测量系统的基础上,对弱散射屏在严格像面和离焦像面上产生的散斑自相关函数进行了测量。发现在严格像面上,散斑平均颗粒的大小随表面粗糙度增加而减小,且光强自相关函数次极大的相关间隔宽度随粗糙度增加而减小;而次极大的超伏随粗糙度的增大而增大;在离焦像面上,离焦量的增加使光强的自相关函数下降变得平滑,并使极小值点和次极大点变得不明显或者消失。     

Statistical properties of the sum of partially-developed,correlated speckle patterns

General formulas for the average contrast and probability density function of the sum ofN partially-developed, correlated speckle patterns have been theoretically derived. These two parameters characterizing the statistical properties of added speckle patterns have been actually evaluated for the sum of two partially-developed, correlated speckle patterns and shown in figures as a function of the surface roughness of illuminated objects, the wavelength difference of two illuminating lights, and the number of scattering cells within the illuminated area of objects.