Thermal model for nanosecond laser sputtering at high fluences

The vaporization effect and the following plasma shielding generated by high-power nanosecond pulsed laser ablation are studied in detail based on the heat flux equation. As an example of Si target, we obtain the time evolution of the calculated surface temperature, ablation rate and ablation depth by solving the heat flow equations using a finite difference method. It can be seen that plasma shielding plays a more important role in the ablation process with time. At the same time, the variation of ablation depth per pulse with laser fluence is performed. Our numerical results are more agreed with the experiment datum than other simulated results. The result shows that the plasma shielding is very important.     

Fabrication of Mg-doped ZnO thin films by laser ablation of Zn:Mg target

Mg-doped ZnO thin films were fabricated by laser ablation of Zn:Mg targets consisting of Mg metallic strips and Zn disk in oxygen atmosphere with a goal to facilitate convenient control of Mg contents in the films. The characteristics of the deposited films were examined by analyzing their photoluminescence (PL), X-ray diffraction and X-ray photoelectron spectroscopy (XPS) spectra. Mg contents as analyzed by XPS indicate that the target composition is fairly transferred to the deposited films. The wurtzite structure of ZnO was conserved even for the highly doped ZnO films and there was no Mg- or MgO-related XRD peaks. With increase in the Mg content, the bandgap and PL peak energy shifted to blue and the Stokes shift became larger.     

Effects of transverse magnetic field on a laser-produced Zn plasma plume and ZnO films grown by pulsed laser deposition

By adopting a fast photography and time-resolved optical emission spectrometry, we have investigated the effects of transverse magnetic field on the expansion dynamics and enrichment of Zn atoms and Zn⁺ ions in a plume produced by laser ablation of a Zn target in oxygen atmosphere. Plume splitting due to the magnetic field was apparent but the splitting patterns of Zn and Zn⁺ were totally different. The surface morphology and photoluminescence characteristics also changed significantly. In particular, the growth rate increased by as much as 2.4-4.3 times compared to the conventional PLD method.     

Vaporization and Plasma Shielding during High Power Nanosecond Laser Ablation of Silicon and Nickel

A thermal model to describe the high-power nanosecond pulsed laser ablation is presented. It involves the vaporization and the following plasma shielding effect on the whole ablation process. As an example of Si target, we obtainthe time evolution of the calculated surface temperature, ablation rate and ablation depth. It can be seen that plasma shielding plays a more important role in the ablation process with time. At the same time, the ablation depth with laser fluence based on different models is shown. Moreover, we simulate the pulsed laser irradiation Ni target. The evolution of the transmitted intensity and the variation of ablation depth per pulse with laser fluence are performed. Under the same experimental conditions, the numerical results calculated with our thermal model are more in agreement with the experimental data.     

Effects of an ultrashort prepulse on soft X-ray generation from an aluminium plasma produced by femtosecond Ti:Sapphire laser pulses

The influence of a prepulse on soft X-ray emission in the range of 50–200 from an aluminium plasma produced by 130 fs Ti: Sapphire laser pulses with an intensity of 10¹⁴ W/cm² at normal incidence is studied. An ultrashort prepulse with an intensity of 10¹³ W/cm² significantly enhances soft X-ray emission when there is a long time separation ( > 100 ps) between the prepulse and an intense main pulse. It is also observed for the first time that a prepulse with a short pulse time separation can slightly reduce soft X-ray emission, contrary to the previous work done using 248 nm laser pulses. This can be explained qualitatively in terms of the dependence of absorption on the length scale.     

Charged particle emission,photon emission,and plasma formation induced by CO2 laser pulsed irradiation of WC-Co hardmetals in vacuum and in air

The thresholds of charged particle emission, photon emission and plasma formation induced by CO₂ laser pulsed irradiation of WC-Co hardmetals were determined. The influence of the surface roughness and chemical composition on the thresholds and on the mechanism of the plasma formation was considered. The first experimental data were obtained which indicate the possible realization of the emissive mechanism of air optical breakdown in the vicinity of the solid surface.     

Temporally and spectrally resolved analysis of a copper plasma plume produced by ultrafast laser ablation

We report an experimental analysis of the plasma plume produced during ultrafast laser ablation of a copper target, in high vacuum. The plasma plume optical emission is studied by using a hybrid time-gated imaging technique which allows obtaining simultaneous information on the spectral and spatial characteristics of the emitting species. We used both single and double pulse ablation scheme, observing their influence on the characteristics of the ablated atomic species.     

Influence of additional external pressure on optical emission intensity in liquid-phase laser ablation

We examined the influence of additional external pressure on the optical emission intensity from plasmas produced by laser ablation of a Ti target immersed in distilled water. We adopted two methods for applying the external pressure. When ambient water was pressurized by connecting the ablation chamber to N₂ gas at a pressure range of 0.1-0.9 MPa, we observed the increase in the optical emission intensity with the pressure. This increase was considered to be caused by the change in the amount of dissolved N₂ gas in the water. On the other hand, when an external pressure of 30 MPa was applied to ambient water by using a mechanical pump, we observed the compression of the spatial distribution of the optical emission intensity. These experimental results suggest a possibility that chemical reactions and physical states (pressure and temperature) of liquid-phase laser-ablation plasmas can be controlled by adding external pressure to ambient liquid.     

Space-resolved soft X-ray emission from laser produced lithium plasma

Space-resolved emission spectroscopy was used to study the evolution of 13.5 nm line intensity and electron temperature of the plasma generated by laser ablation of lithium target. Two emitting regions were observed, their intensities depending on laser fluency. Plasma image is discussed in the frame of a Gaussian model of particle expansion.     

Parametric optimization of a narrow-band 13.5-nm emission from a Li-based liquid-jet target using dual nano-second laser pulses

We demonstrate the applicability of a Li-based liquid jet as a regenerative source of narrow-band extreme-ultraviolet (EUV) emission at 13.5 nm. It was found that a conventionally used single laser pulse did not produce optimum plasma conditions for a low-Z target, like Li. It was shown that deployment of dual nano-second laser pulses enhanced the in-band EUV conversion efficiency (CE) at 13.5 nm in 2 sr by three times its value using a single laser pulse. Dependence of the emission spectra and EUV CE on the delay time between dual laser pulses revealed that the emission at 13.5 nm from Li ions was preferably enhanced at a lower plasma temperature compared to that at 13.0 nm from oxygen ions.     

Enhanced production of fast multi-charged ions from plasmas formed at cleaned surface by femtosecond laser pulse

We present atomic, energy, and charge spectra of ions accelerated at the front surface of a silicon target irradiated by a high-contrast femtosecond laser pulse with an intensity of 3×10¹⁶ W/cm², which is delayed with respect to a cleaning nanosecond laser pulse of 3-J/cm² energy density. A tremendous increase in the number of fast silicon ions and a significant growth of their maximum charge in the case of the cleaned target from 5+ to 12+ have been observed. The main specific features of the atomic, energy, and charge spectra have been analyzed by means of one-dimensional hydrodynamic transient-ionization modeling. It is shown that fast highly charged silicon ions emerge from the hot plasma layer with a density a few times less than the solid one, and their charge distribution is not deteriorated during plasma expansion.This revised version was published online in August 2005 with a corrected cover date.     

X-ray spectra from highly ionized dense plasmas produced by ultrashort laser pulses

Hydrogen-like and helium-like X-ray spectra (between 7.1 and 8.2 , i.e., 1500 to 17.50 eV, respectively) from solid aluminium targets irradiated with high intensity (up to 10¹⁷ W/cm²) subpicosecond (0.7 ps) laser pulses have been measured. The spectra show that the resonance lines are very broad and very asymmetric. Evidence for a Doppler-shifted reabsorption of the resonance line emission has been found. The spectra have been simulated by a computer code for the calculation of spectral-line intensities and linewidths. Electron densities exceeding the critical density have been estimated for different laser intensities by comparing the observed and simulated intensity ratio of different dielectronic satellite lines. From the X-ray spectra generated byp- ands-polarized radiation fat different laser intensities, the thresholds for the formation of hydrogen-like and helium-like ions have been determined.     

Low-energy ion emission from a xenon gas-puff laser-plasma X-ray source

We have measured low-energy ion emission from a gas-puff laser-plasma X-ray source. The ions may cause the degradation of the condenser mirror of the extreme ultra-violet projection lithography system. A 0.7 J in 8 ns Nd:YAG laser at 1.06 μm was focused onto the xenon gas-puff target with an intensity of ∼10¹² W/cm². The silicon (111) plates, placed at a distance of 32 mm from the laser-interaction region, were exposed with the xenon ions. The average ion energy was measured to be less than 50 eV with a Faraday-cup detector placed close to the silicon plates. The xenon deposition occurred in the silicon plates with a depth of less than 40 nm. The deposition density was measured with a quadrupole secondary ion mass spectrometer to be 10²¹ /cm³ after 1500 laser shots. The energy-conversion efficiency from the laser energy into the ions is ∼0.1%/4 π sr/shot. For the lithography system, if we can remove such ion bombardment completely using novel techniques such as electro-magnetic devices or gas flow curtain techniques, the lifetime of the condenser mirror will be extended significantly. Received: 20 November 2000 / Published online: 9 February 2001     

Modulation instability by intense laser beam in magnetized plasma

Modulation instability of an intense right-hand elliptically polarized laser beam propagating through magnetized plasma is investigated by a new method. The nonlinear dispersion relation, in which the relativistic and ponderomotive nonlinearities are taken into account, is obtained for the laser radiation in magnetized plasma by the Lorentz transformation. The Karpman equation is firstly generalized to the case of three dimensions with three field components. When the nonlinear frequency shift of the electromagnetic field in plasma is involved, the nonlinear evolution equation for the slowly varying envelope of the laser field is obtained. Thus, modulation instability of the intense laser beam in magnetized plasma is studied and the temporal growth rate of the instability is derived. The analysis shows that the peak growth rate of self-modulation instability is increased due to the axial magnetization of plasma. It is also shown that the growth rate of modulation instability is increased significantly near the critical surface in a laser-plasma.     

Nanocylinder-array structure greatly increases the soft X-ray intensity generated from femtosecond-laser-produced plasma

In order to increase the soft X-ray conversion efficiency for the femtosecond-laser-produced plasma, we adopted a nanocylinder-array structure target. Gold nanocylinder-array targets with 70–90 nm cylinder diameter and 100 nm cylinder pitch were made. A continuous smooth soft X-ray spectrum adequate for X-ray absorption spectroscopy was obtained. An around 20-fold soft X-ray (7–20 nm) fluence enhancement compared with a flat-surface gold foil target was obtained when the cylinder height was 18 μm. X-ray (>0.06 keV) pulse duration was 17 ps, which is much shorter than that obtained by using the pre-pulse technique. The X-ray pulse peak intensity was 7-fold higher than that of a gold foil target. Received: 2 May 2001 / Revised version: 1 June 2001 / Published online: 18 July 2001     

Femtosecond laser ablation of aluminium

We investigate femtosecond laser ablation of aluminium using a hybrid simulation scheme. Two equations are solved simultaneously: one for the electronic system, which accounts for laser energy absorption and heat conduction, the other for the dynamics of the lattice where the ablation process takes place. For the electron-temperature a generalized heat-conduction equation is solved by applying a finite difference scheme. For the lattice properties, e.g. pressure, density or temperature, we use common molecular dynamics. Energy transfer between the subsystems is allowed by introducing an electron-phonon coupling term. This combined treatment of the electronic and atomic systems is an extension of the well known two-temperature model [Anisimov, Kapeliovich, Perel’man, Electron emission from metal surfaces exposed to ultra short laser pulses, JETP Lett. 39 (2)].     

Detailed study of the effect of a short prepulse on soft X-ray spectra generated by a high-intensity KrF* laser pulse

The effect of a short prepulse (0.5 ps) on soft X-ray spectra from a plasma generated by a high intensity KrF* laser pulse (main pulse: 0.5 ps, intensity I _main=5.3×10¹⁵ W/cm²) on flat targets of Al and Cu has been studied in detail. The spectra have been measured as a function of the pulse separation t between the two pulses and the prepulse intensity I _pre. It was found that both the overall emission and the line emission increased with t (at constant I _pre) and with I _pre (at constant t). In particular, lines in the shorter wavelength region had higher intensity. The influence of the prepulse on the line emission of specific transitions in the Al spectra was investigated systematicly. An explanation for the observed effects is given.     

Recombination emissions and spectral blueshift of pump radiation from ultrafast laser induced plasma in a planar water microjet

We report spectroscopic investigations of an ultrafast laser induced plasma generated in a planar water microjet. Plasma recombination emissions along with the spectral blueshift and broadening of the pump laser pulse contribute to the total emission. The laser pulses are of 100 fs duration, and the incident intensity is around 10¹⁵ W/cm². The dominant mechanisms leading to plasma formation are optical tunnel ionization and collisional ionization. Spectrally resolved polarization measurements show that the high frequency region of the emission is unpolarized whereas the low frequency region is polarized. Results indicate that at lower input intensities the emission arises mainly from plasma recombinations, which is accompanied by a weak blueshift of the incident laser pulse. At higher input intensities strong recombination emissions are seen, along with a broadening and asymmetric spectral blueshift of the pump laser pulse. From the nature of the blueshifted laser pulse it is possible to deduce whether the rate of change of free electron density is a constant or variable within the pulse lifetime. Two input laser intensity regimes, in which collisional and tunnel ionizations are dominant respectively, have been thus identified.     

Ablation mechanism study on metallic materials with a 10 ps laser under high fluence

Single shot ablation of metallic materials of aluminium, titanium alloy (Ti6Al4V) and gold has been studied with 10 picoseconds (ps) laser pulses experimentally and theoretically. The ablation rate variation at high fluence was explained by a simplified predictive model based on critical-point phase separation (CPPS) theory. A comparison between experimental and numerical results inferred that CPPS may well be the dominant ablation mechanism for high fluence laser ablation at 10 ps laser duration.