Discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field

For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions (DUHOCAMIS) was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.     

Discharge characteristics of the DUHOCAMIS with a high magnetic bottle-shaped field

For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions （DUHOCAMIS） was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.     

Magnetic Field Enhancement of the Optogalvanic Signal in a Hollow Cathode Discharge

An optogalvanic signal enhancement was obtained in a magnetic field applied on a hollow cathode discharge-detector. In this magnetic field a mutual correlation was observed between optogalvanic signal behaviour, discharge current change and lower level population of the transition corresponding to the 632,8 nm laser irradiation spectral line.     

Characteristics of an ion source with a plasma cathode and a multipole magnetic system for confining fast electrons

Parameters and ion-emission characteristics of the plasma generated in the anode stage of an ion source with a hollow glow-discharge plasma cathode are studied. To decrease the minimum operating gas pressure to 5×10³ Pa, a multipole magnetic system was installed on the surface of the hollow cathode and the peripheral magnetic field was enhanced in the anode stage of the source. The effect of the gas pressure, the plasma-cathode current, and the voltage between the electrodes of the anode stage on the value of the ion current extracted from the plasma is investigated. It is found that the size of the exit aperture of the hollow cathode substantially affects the efficiency of ion extraction. The potential (1–5 V) and the electron temperature (1–8 eV) of the anode-stage plasma are measured by the probe method. The conditions are determined that ensure the maximum ion-emission current from the plasma at low gas pressures.     

Reactive process and hysteresis effect in magnetron with magnetized hollow cathode enhanced target

The hysteresis effect in the reactive process was investigated in the magnetron with a magnetized hollow cathode enhanced target (HoCET) in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron. The process, where both the magnetron and hollow cathode plasmas are combined, is compared to the magnetron sputtering. The hysteresis curve in the magnetized HoCET magnetron, recording the titanium emission intensity versus varying content of nitrogen in the gas mixture exhibits a local maximum on the increasing part of the curve. The hysteresis curve is shifted to lower contents of nitrogen than the hysteresis curve for the magnetron. It is concluded that more efficient utilization of the reactive gas takes place in this device.     

Effect of the inside profile of a hollow cathode on the plasmaplume

The effect of the inside profile of a hollow cathode on the intensity of plasma plume has been studied in a low-pressure (~3-torr) argon discharge. The effectiveness of three different `inside' profiles of a hollow cathode was compared by performing emission spectroscopy on the plasma plume in each case. A conical-profile hollow cathode produced a plasma plume that was much more intense than the one in a commonly used cylindrical-profile hollow cathode     

Hollow cathode magnetron discharge

A discharge formed in a cylindrical coaxial diode with a cylindrical mesh cathode, placed in an axial magnetic field, is reported. Spectroscopic and other characteristic features of the discharge made with and without the magnetic field, are similar to those of the hollow cathode discharge.     

磁场中矩形空心阴极离子分布的计算

本文用解析方法研究了在均匀磁场中入射离子在矩形空心阴极中的分布。结果表明当空心阴极的深度和宽度接近的时候，入射离子在一个侧面上的分布不受另一个侧面的影响，同时受阴极深度影响的在底面上的离子分布及粒子数量都从阴极的中心到边缘而单调地降低。     

激光诱导荧光能级寿命检测中磁场的干扰

在孔阴极放电激光诱导荧光氩原子Ａｒ１５ｐ［３／２］２能级寿命检测中，当加强外碰场于其观察方向，被测能级寿命随磁场强度的增加而缩短。其自然能级寿命被确定为１２０ｎｓ。     

On the problem of the role played by photoemission in the mechanism of a discharge with a hollow cathode

The paper investigates the arc voltage and certain characteristics of the luminescence of a discharge in helium with a cylindrical hollow cathode in a magnetic field. Based on a comparison of the effect of a magnetic field on the electrical and optical characteristics of the discharge, the role played in the discharge mechanism by photoemission from the cathode is discussed.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Radiofizika, Vol. 15, No. 4, pp. 631–633, April, 1972.     

On the stationary states of electron beams in a drift space

The results of a number of studies on virtual cathodes in electron beams subjected to a high magnetic field are shown to be erroneous. The possibility of a virtual cathode occurring in coaxial hollow beams at currents below the limiting value is proved rigorously.     

N2���������ŵ���΢���������ŵ�ת���PIC/MCģ��

开发了氮空心阴极放电PIC/MC二维自洽模型。研究了N2传统空心阴极向微空心阴极放电转变过程中电势和电场的变化。结果表明,不同尺寸的空心阴极放电的电势及电场分布规律几乎类似,但空心阴极孔径减小且气压增加时,电场近似线性增加;典型微空心阴极电场比传统空心阴极放电电场约大3个量级;微空心阴极放电产生的电子,氮分子离子和氮原子离子的密度比传统空心阴极放电约大3个量级,且微空心阴极放电中,N2+密度比N+密度大8倍以上。     

Full-dimensional Monte Carlo simulation of glow discharges with superposed magnetic fields

A Monte Carlo simulation code is described that is suitable for modelling low-pressure glow discharges that possess cylindrical symmetry, but are of otherwise completely variable geometry. In this single-particle simulation in 3 space and 3 velocity dimensions, an entire discharge including the cathode fall can be modelled with or without magnetic fields of arbitrary shape. Electric and magnetic fields are given externally and are not adjusted self-consistently. Collision processes are modelled in great detail, and cathode sputtering phenomena are also included in the simulation. This simulation code is applied to hollow cathode discharges with and without superimposed magnetic fields and to a Penning discharge. Exemplary results are shown that include density profiles of cathode-sputtered atoms, energy distribution functions of electrons and cathode sputtering effects for a Penning discharge. Comparisons to results from experiment and other simulations are given.     

Cold-hollow-cathode arc discharge in crossed electric and magnetic fields

A crossed-field cold-hollow-cathode arc is stable at low working gas pressures of 10⁻²–10⁻¹ Pa, magnetic-field-and gas-dependent arcing voltages of 20–50 V, and discharge currents of 20–200 A. This is because electrons come from a cathode spot produced on the inner cathode surface by a discharge over the dielectric surface. The magnetic field influences the arcing voltage and discharge current most significantly. When the plasma conductivity in the cathode region decreases in the electric field direction, the magnetic field increases, causing the discharge current to decline and the discharge voltage to rise. The discharge is quenched when a critical magnetic field depending on the type of gas is reached. Because of the absence of heated elements, the hollow cathode remains efficient for long when an arc is initiated in both inert and chemically active gases.     

Discharge System with a Self-Heated Hollow Cathode and an Evaporating Anode in a Cusp Magnetic Field for Oxide Coatings Deposition

Technical Physics - The properties of a discharge with a self-heated hollow cathode and an evaporating anode placed in a cusp magnetic field created by two oppositely connected coils installed near...     

Determination of electron density and energy influx in a hollow cathode glow discharge used for powder modification

The electron density and energy influx in an argon hollow cathode glow discharge were determined to obtain adequate parameters for subsequent surface modification of low density polyethylene (LDPE) powder to change the wettability. The electron density was studied by Langmuir probe measurement in dependence on process gas pressure and hollow cathode material. Besides the determination of the rate of increasing electron density with input power an optimal experimental pressure was determined. The energy influx was studied by thermal probe measurements in dependence on process gas pressure, bias voltage, axial position and hollow cathode material. Inside the hollow cathode the energy influx is nearly constant along the whole cathode length. With increasing pressure the energy influx decreased. At biased thermal probe the energy influx was observed to decrease up to the floating potential and beyond it increases with increasing voltage. Using different hollow cathode materials the electron density as well as the energy influx reach higher values for aluminum than for copper and stainless steel.     

The Radio Frequency Hollow Cathode Discharge Induced by the RF Discharge in the Plasma‐Jet Chemical Reactor

In the recent decade an RF driven, low‐pressure plasma reactor with supersonic plasma jet was developed (RPJ). This reactor was successfully used for deposition of thin films of various materials. The deposition of thin films indicates that the properties of the deposited films are dependent on the sputtering or reactive sputtering processes appearing inside the nozzle (hollow athode). The nozzle (hollow athode) fabricated of different kinds of materials and alloys works both as a cathode of the radio frequency (RF) hollow cathode discharge and as a nozzle for plasma jet channel generation as well. The RF hollow cathode discharge is a secondary discharge, which is induced by the primary RF plasma generated in the reactor chamber. The present paper deals with the experimental study of this RF hollow cathode discharge. The stress is laid on the investigation of the axial distribution of discharge parameters and sputtering processes inside the nozzle. On the base of experiments, the simple model of the axial distribution of the investigated RF hollow cathode discharge has been developed.     

Non-local model of hollow cathode and glow discharge

A general form of the non-local equation for an ionization source in glow discharge and hollow cathode 3D-simulation is formulated. It is a fundamental equation in hollow cathode theory, which allows formulation of a complete set of field equations for a self-consistent problem in a stationary glow discharge and hollow cathode. It enables us to describe the region of negative glow and the hollow cathode effect and compare calculation results of electrical dependencies (pressure-voltage) with experimental data, – under conditions of gradual appearance of the hollow cathode effect.     

Spectroscopy of the regenerative soot

The mechanisms and processes of the formation of the regenerative soot in a graphite hollow cathode discharge that produces and emits carbon clusters are presented. Mass spectrometry with a specially designed E×B velocity filter analyzes the entire range of the charged clusters from C ₁ to ∼C ₄₃₀₀. The state of the carbon vapour within the source is evaluated by using the characteristic line emissions from the carbonaceous discharge whose formative mechanisms depend upon the kinetic and potential sputtering of the sooted cathode. The carbonaceous discharge generates atomic and ionic C and its clusters C _m (m≥ 2), noble gas metastable atoms and ions, energetic electrons and photons in the cavity of the graphite hollow cathode. The parameters of soot formation and its recycling depend critically on the discharge parameters, the geometry of the hollow cathode and 3D profile of the cusp magnetic field contours. Received 2nd July 2001 and Received in final form 10 September 2001     

Improvement of the efficiency of a glow discharge-based ion emitter with oscillating electrons

Ion emission from the plasma of a low-pressure (≈5×10⁻² Pa) glow discharge with electrons oscillating in a weak (≈1 mT) magnetic field is studied in relation to the cold hollow cathode geometry. A hollow conic cathode used in the electrode system of a cylindrical inverted magnetron not only improves the extraction of plasma ions to ≈20% of the discharge current but also provides the near-uniform spatial distribution of the ion emission current density. The reason is the specific oscillations of electrons accelerated in the cathode sheath. They drift in the azimuth direction along a closed orbit and simultaneously move along the magnetic field toward the emitting surface of the plasma. A plasma emitter with a current density of ≈1 mA/cm² over an area of ≈100 cm² designed for an ion source with an operating voltage of several tens of kilovolts is described.