溶胶-凝胶法制备SiO2-TiO2平板光波导工艺研究

采用溶胶-凝胶法制备了SiO₂-TiO₂平板光波导,计算了平板光波导通光条件,分析了硅/钛溶胶-凝胶材料的热性能,观测了平板光波导的结构形貌,并测试了其通光损耗。结果表明：经过200℃,30 min干燥处理的凝胶薄膜呈疏松多孔状态,对于非对称平板波导,存在芯层通光截止厚度,而且当SiO₂-TiO₂芯层厚度为0.5 μm时,SiO₂下包层厚度至少有6 μm才能防止1550 nm波长光泄露入单晶硅衬底中。制备的光波导对于1550 nm波长光传输损耗最小值为0.34 dB/cm。     

基于平板波导的小型红外光栅光谱仪光学设计

为实现红外光谱仪器的小型化,通过分析现有小型光谱仪,提出了一种基于平板波导的小型红外光栅光谱仪的设计方法。平板波导光谱仪的小型化原理与一般的微小型光谱仪不同。在平板波导光谱仪中,光束被限制在一层薄薄的平板波导介质中传播,看起来像是整个光学系统被压扁了。在垂直于平板波导的方向上光学元件的尺寸可以做到很小,从而显著减小光学系统的尺寸。该系统的设计可分为Czerny-Turner结构设计、波导结构设计。先根据像差理论设计Czerny-Turner结构,目标是保证光谱分辨率及校正像差;然后根据几何光学理论设计波导结构,包括平板波导和两个柱面透镜,目标是压缩光束并校正像散;最后将它们输入Zemax软件中进行综合优化,以获得最优的光学系统。据此方法设计了一个平板波导红外光栅光谱仪,工作波段为8~12 μm,数值孔径为0.22,采用线阵探测器。通过Zemax软件对结果进行分析和评价,表明仪器光学系统的尺寸为130 mm×125 mm×20 mm,工作波段内光谱分辨率达到80 nm,满足设计指标要求。证明了该优化设计方法是可行的,所得系统尺寸小、性能高。     

A wide-band polymeric electro-optic modulator array based on unidirectional coupling between multi-mode waveguide array and a vertical configured dumping planar waveguide

A polymeric wide-band electro-optic (EO) modulator array based on unidirectional mode-coupling between the guiding multi-mode waveguide array and a vertical configured planar dumping waveguide was developed. A low insertion loss of <1.7 dB was obtained due to asymmetrically designed guiding waveguide and the dumping waveguide. A modulation depth of 91% was achieved with the device length of 3.5 cm at a low driving voltage of 3.2 V. The employment of the dumping planar waveguide not only provides an efficient way to achieve the unidirectional coupling mechanism, but also effectively confines the light coupled from the guiding waveguides within the planar dumping waveguide. The combination of unidirectional coupling and light confinement effects ensures low cross talk of <22 dB between adjacent guiding waveguides. Since the proposed modulator is based on the unidirectional coupling mechanism, it is intrinsically wide-band. A wide-band operation from 1308 to 1324 nm was experimentally obtained. The unidirectional mode-coupling-based wide-band modulation principle can be readily applied to other wavelengths, such as 1330 and 1550 nm ranges.     

Subwavelength grating Fourier‐transform interferometer array in silicon‐on‐insulator

A planar waveguide Fourier‐transform spectrometer with densely arrayed Mach‐Zehnder interferometers is demonstrated. Subwavelength gratings are used to produce an optical path difference without waveguide bends. The fabricated device comprises of an array of 32 Mach‐Zehnder interferometers, which produce a spatial interferogram without any moving parts, yielding a spectral resolution of 50 pm and a free‐spectral range of 0.78 nm. As a result of similar propagation losses in subwavelength grating waveguides and conventional strip waveguides, loss imbalance is minimized and high interferometic extinction ratio of −25 to −30 dB is obtained. Furthermore, phase and amplitude errors arising from normal fabrication variation are compensated by the spectral retrieval process using calibration measurements.     

Waveguide Array Wavelength Router Design to Improve Insertion Loss Uniformity

We propose a wavelength router design to improve insertion loss uniformity. Branched waveguides are placed at junctions between the waveguide array and a planar waveguide. The diffracted light injected into planar waveguides is forwarded in different directions. At the image plane of the planar waveguide, a flat top envelope is attained to ensure loss uniformity among output ports.     

Grating couplers for thick SOI rib waveguides

The use of grating couplers in high index contrast waveguides like silicon on insulator (SOI) offers several advantages over other coupling approaches, including better alignment tolerances and allowing for wafer-scale testing. The grating couplers were developed for nanometric SOI waveguides (Si-wires), and recently also for micrometric rib waveguides. In this paper we review our work in fiber-to-chip grating couplers for thick SOI rib waveguides, where a coupling efficiency of ?2.2?dB was demonstrated experimentally. We also discuss the use of grating couplers to improve optical throughput (étendue) of a planar waveguide Fourier-Transform (FT) spectrometer implemented in thick rib waveguides.     

Parametric amplification of light waves at low-frequency pumping in aperiodic nonlinear photonic crystals

A theory of monochromatic light propagation in a fiber amplifier is developed. It is shown that competition between coherent gain-guided modes is qualitatively different from interaction between incoherent beams. Spatial beating between modes limits the gain of the mode with lower input power even if the corresponding modal gain coefficient is higher. Depending on the input beam parameters, the amplifier output can be dominated by either a single guided mode or their combination. The theory is illustrated by analyzing the gain behavior of a single planar waveguide and arrays of two and three narrow planar waveguides.     

AWG中波导间耦合造成的相位畸变的分析

用(1,1)阶Pad啨近似的广角BPM计算了阵列波导光栅(AWG)中由于阵列波导间耦合造成的相位畸变以及由于相位畸变引起的相位误差分别考虑了光从中心/非中心输入波导入射两种情况结果表明,波导间的耦合会造成显著的相位畸变,但由此引起的相位误差却很小,光从中心输入波导入射时对应的相位误差10-3rad,从非中心输入波导入射时的相位误差约为10-2rad针对波导阵列边缘效应引起的相位畸变,设计AWG结构时,在阵列部分两侧增加了边缘辅助波导结构,从而消除了边缘效应,使得边缘阵列波导对应的相位误差从10-1rad量级减小为10-3(10-2)rad量级.     

Monolithically integrated photonic-crystal devices with photodiodes

In this paper, we demonstrate the monolithic integration of a conventional waveguide, a photonic crystal demultiplexer, a photonic crystal taper coupler, photonic crystal waveguides, and photodiodes in InGaAsP-based material to form a planar nano-optics system. Photonic crystal demultiplexers consist of hexagonally arranged air holes. Finite-difference time-domain method is implemented to investigate the performance of the demultiplexer. The system is fabricated using e-beam lithography and conventional photolithography. The input light at wavelengths of 1530 and 1550 nm can be separated using the demultiplexing system. These can then be detected by photodiodes that exhibit a wide-bandwidth performance of 22 GHz.     

Single etch grating couplers for mass fabrication with DUV lithography

Surface grating couplers enable efficient coupling of light between optical fibers and planar waveguide circuits. While traditional grating designs require two etch steps for efficient coupling to silicon-on-insulator waveguides, recently proposed subwavelength structured gratings can achieve the same coupling efficiencies with a single etch step, thereby significantly reducing fabrication complexity. Here we demonstrate that such couplers can be fabricated on a large scale with ultra-violet lithography, achieving a 5?dB coupling efficiency at 1,550?nm. Through both simulations and experiments we give physical insight on how pattern fidelity impacts the performance of these couplers, and propose strategies to deal with inevitable process variations.     

一种通带平坦的粗波分复用/解复用器件的研制

随着粗波分复用(CWDM)系统在城域网和接入网中日益广泛的应用,人们对粗波分复用／解复用器的研究也逐渐展开。报道了一种8通道波长间隔为20nm的粗复用／解复用器。该器件基于阵列波导光栅(AWG)原理设计,利用平面光波导技术(PLC)制作,采用多模干涉输入结构和“S”形阵列波导结构,实现了较宽的通带宽度和较低的串扰。实验测得1dB带宽大于10nm,相邻串扰大于24dB,非相邻串扰大于32dB。介绍了其设计原理和制作过程,给出了光束传播法(BPM)数值模拟结果,并和实验结果进行了对比。     

Efficient green-light generation by proton-exchanged periodically poled MgO:LiNbO3 ridge waveguide

Efficient cw 532?nm green-light generation is demonstrated using a periodically poled MgO:LiNbO3 ridge waveguide prepared by a process that combines annealed proton exchange and precise dicing. Performance of waveguides with different widths has been investigated. The 6-μm-wide, 1.6-cm-long uncoated ridge waveguide has achieved a green output power of 127?mW under a coupled fundamental light power of 250?mW. The highest conversion efficiency achieved is 53%.     

K-Na离子交换单模平面波导的制备及其表征

通过K-Na离子交换技术制备了多模玻璃平面波导.采用棱镜耦合技术测量了波导的有效折射率,用IWKB方法拟合得到K-Na离子交换波导的折射率分布符合高斯分布,由色散曲线得到单模波导的制备条件(即扩散深度范围),从而得出单模波导的离子交换时间范围,制备出单模波导,并通过求解WKB色散方程得出单模波导的表面折射率.用普通数码相机,通过对离子交换平面玻璃光波导传输线进行数字成像,根据传输线上的光强分布拟合出光强传输衰减曲线,计算出单模波导的传输损耗大约为0.4 dB/cm.     

Proton beam writing of Nd:GGG crystals as new waveguide laser sources

Focused proton beam writing has been utilized to fabricate optical channel waveguides in Nd:GGG crystals. The 1?MeV proton beam irradiation creates a local modified region with positive refractive index changes at the end of the proton trajectory, in which the channel waveguide could confine the light field in a symmetric way. Room-temperature laser emission has been achieved at 1063.7?nm, with absorbed pump power of 61?mW (at 808?nm). The obtained slope efficiency of the Nd:GGG waveguide laser system is as high as 66%, which is, to our best knowledge, the highest value for integrated lasers from ion beam processed channel waveguide systems.     

Circular grating coupler for creating focused azimuthally and radially polarized beams

We show a planar optical circuit design that takes light from an input waveguide and creates a focused azimuthally or radially polarized beam emanating from the surface of the substrate. It is implemented in silicon-on-insulator waveguides and does not require any external components to focus the beam. The focal spot size can be subwavelength and is potentially useful for lithography, imaging, optical data storage, optical trapping, optical excitation of molecules, or coupling to optical fibers.     

数值模拟二维间隙表面等离子波导传输特性

利用表面等离子激元的新颖特性,设计了二维间隙表面等离子波导.以这种结构为基础通过变形和组合形成90°直角弯曲波导、T型光功率分配器和光开光,采用时域有限差分法研究了它们的传输特性.结果表明:不同于介质光波导的弯曲损耗来自于辐射泄漏,90°直角弯曲间隙表面等离子波导的能量损耗主要来自于金属中的欧姆热损耗.在间隙达到40 nm以上后,当直行段的长度适当时,弯曲段的透射率较相同长度的直波导的透射率要大.T型光功率分配器在两输出波导的间隙宽度比达到0.6及以上时,不同于传统介质波导的分光原则,能量主要沿等效折射率较小的输出臂流出.当两输入光的相位反相时,T型光开关处于输出截止的状态,当两输入光的相位同相时,T型光开关处于输出导通的状态.所有波导间隙均小于衍射极限,实现了超衍射极限传播,可用于未来了超大规模集成光路中.     

Phase-matched second harmonic blue light generation in ion implanted KNbO3 planar waveguides with 29% conversion efficiency

We report for the first time to our knowledge, noncritical phase-matched second harmonic generation in an ion-implanted KNbO₃ planar waveguide. The guided TM₀ mode of the fundamental wave (868 nm) is converted into the second harmonic TE₁ mode (434 nm). From 1.3 kW of internal fundamental peak power 385 W second harmonic blue light is generated giving a conversion efficiency of 29%. A comparison of the measured and the theoretical efficiencies implies that phase-matching is achieved over the full waveguide length. Based on these first experimental results we estimate that 100 mW of blue light can be generated from 400 mW of input power using an optimized KNbO₃ planar waveguide of 1 cm length.     

Study on diffraction characteristics of a planar diamond waveguide

A numerical simulation is performed to study the far-field diffraction properties of planar diamond waveguides.The far-field intensity distributions of a planar air waveguide and a diamond waveguide with different distances are given by numerical calculations.In the experiment,the diffraction patterns on the screen with different distances are recorded using a He-Ne laser as the light source,wherein the laser beam is coupled with and propagates in the diamond waveguide.The simulation results are found to be consistent with the experimental ones.     

A circular system of coupled waveguides and an optical analogue of bloch oscillations

The process of light propagation in a nonuniform system of tunnel-coupled waveguides is studied. The nonuniform system of waveguides is realized by making a circular system of waveguides on the inner wall of a supporting tube with the help of the SPCVD technology, which is designed for the synthesis of preforms of optical fibers. It is shown that the waveguide light beam propagates in such a system along a wavelike trajectory and partially radiates outwards at the crests of this trajectory. The oscillation period of the trajectory is measured, and it is shown that it is possible to input radiation into the waveguide mode by the process that is inverse to the process of light emission from the structure.     

Negative index and indefinite media waveguide couplers

We study the coupling interaction between dielectric waveguides and coupling elements made from negative-refracting media. The coupling configuration consists of a length of dielectric waveguide, which terminates either directly into or near a planar layer composed of the negative-refracting medium, and is followed by a second waveguide. Radiation output from the first waveguide is refocused at the position of the second waveguide, so that the negative-refracting layer serves as a coupler between the waveguides. Because both isotropic negative-index layers and bilayers of indefinite media can recover the near-field, evanescent components of a source field distribution, the coupling between the input and output waveguides can be highly efficient – in principle providing perfect, lossless coupling. We present simulations and some initial experimental results illustrating the coupling effect, and speculate on the potential for optical fiber couplers and integrated modulators. PACS 42.79.Gn; 41.20.-q; 42.70.-a