Plasma plume induced during laser ablation of graphite

The plasma plume induced during ArF laser ablation of a graphite target is studied. Velocities of the plasma expansion front are determined by the optical time of flight method. Mass center velocities of the emitting atoms and ions are constant and amount to 1.7×10⁴ and 3.8×10⁴ m s⁻¹, respectively. Higher velocities of ions result probably from their acceleration in electrostatic field created by electron emission prior to ion emission. The emission spectroscopy of the plasma plume is used to determine the electron densities and temperatures at various distances from the target. The electron density is determined from the Stark broadening of the Ca II and Ca I lines. It reaches a maximum of ∼9.5×10²³ m⁻³ 30 ns from the beginning of the laser pulse at the distance of 1.2 mm from the target and next decreases to ∼1.2×10²² m⁻³ at the distance of 7.6 mm from the target. The electron temperature is determined from the ratio of intensities of ionic and atomic lines. Close to the target the electron temperature of ∼30 kK is found but it decreases quickly to 11.5 kK 4 mm from the target.     

Influence of fast electrical discharge on expansion of laser produced plasma

For some applications of laser produced plasma it may be advantageous to implement some degree of control on the ion flux and velocity distribution in the plasma expansion. We have shown how a fast, high current discharge in a laser produced plasma leads to a dramatic increase in the plasma ionization and expansion velocity. These observations are consistent with a magnetohydrodynamic discharge model whereby the self-induced magnetic field causes radial compression of an open-ended plasma column.     

Spectroscopic analysis of a laser-induced NaCl–water plasma. The influence of self-absorption

A spectroscopic study of the plasma plume created by a laser beam on the surface of NaCl aqueous solution is presented. Optical emission spectra are recorded and temporally analyzed; electron number density is determined from the Stark broadening of the NI nitrogen line, and temperature is obtained from relative intensity of OI oxygen lines. The intensity of an atomic line from sodium was used to quantitate its molar percentage in the Oceanic and Mediterranean sea, and calibration curves have been constructed for concentrations ranging up to 1.5%.     

Scanning the laser beam for ultrafast pulse laser cleaning of paint

Aligned arrays of N₂-encapsulated multilevel branched carbon nanotubes were synthesized using a simple one step CVD method by pyrolysis of ferrocene and acetonitrile. Electron energy loss spectroscopy (EELS) and elemental mapping studies reveal that gaseous nitrogen was encapsulated in the carbon nanotubes. Batch-type pyrolysis of catalysts induced flow fluctuation of the reaction gases, resulting in the growth of branched junctions. Molecular nitrogen extruded rapidly along conical catalyst particles inducing N₂ encapsulation inside the branched nanotubes. PACS 07.78.+s; 61.46.+w; 81.07.De; 81.15.Gh     

Investigation of debris dynamics from laser-produced tin plasma for EUV lithography light source

The dynamics of debris from the laser-produced tin (Sn) plasma was investigated for an extreme ultraviolet light source in order to establish the guideline for the optimum design of a mitigation system, such as a mass-limited target. The dissemination of the Sn atoms from the different shapes of a wire and a mass-limited droplet target were investigated using the laser-induced fluorescence (LIF) imaging method. The Sn droplet targets with a diameter in the range of 5 to 17 μm were prepared by a new droplet generating technique using a pulsed laser. There was a large difference in the angular distribution of Sn atoms in the plane parallel and perpendicular to the wire axis, indicating the curvature of the target surface governed the angular distribution of the ablated species. The spatial distributions of Sn atoms from the droplet targets were similar to those from the curved surface of the wire targets. The ablation dynamics of the droplet observed by a high-speed imaging camera is also discussed.     

High repetition rate femtosecond laser nano-machining of thin films

Thin film laser micromachining has been utilized for repairing semiconductor masks, creating solar cells and fabricating MEMS devices. A unique high repetition rate femtosecond fiber laser system capable of variable repetition rates from 200 KHz to 25 MHz along with helium gas assist was used to study the effect of pulse repetition rate and pulse energy on femtosecond laser machining of gold-coated silicon wafer. It was seen that high repetition rates lead to smaller craters with uniform line width. Craters created at 13 MHz pulse repetition rate with 2.042 J/cm² beam energy fluence measured 110 nm in width and had a heat affected zone of 0.79 μm. It was found that pulse repetition rate only played a significant role in the size of the heat affected zone in the lower pulse energy ranges. In the future, a 1 W laser system will be acquired to find the optimal repetition rate that would create the minimal feature size with the least heat affected zone. Using this kind of setup along with techniques such as radial polarization and a different gas assist may enable us to create sub 100 nm feature size with good quality.     

Characterization of Cd1?xMgxTe film and plasma diagnostic studies by optical emission spectroscopy during sputtering

Cd_1−x Mg _x Te is an attractive II–VI semiconductor alloy candidate for obtaining energy gaps wider than 1.5 eV of CdTe needed for the top junction absorber layer in a polycrystalline thin-film tandem solar cell. We have shown that these alloy films can easily be prepared by sputtering, however, the sputtering rate is substantially lower than for CdTe and the attainable cell performance has been poor, both before and after activation treatments with chlorine-containing vapors. In this work we have applied optical emission spectroscopy (OES) using selected peaks of ArII, CdII, MgI, TeII and correlated the results with crystallographic and morphological characteristics of the deposited films. Results were obtained as a function of rf sputter power and sputter gas pressure.     

Fe and Fe+2%Si targets as ion sources via UV laser ablation plasma

In the last years the ion component of a laser-produced plasma has been considered and studied as an object to provide high-density ion sources, which can be applied in many fields such as laser-induced implantation. In this work a KrF laser beam of 10⁸ W/cm² irradiance was focused onto single-crystalline Fe and single-crystalline Fe with 2% of Si targets and the characteristics of both free expanding laser-produced plasmas were compared. The time-of-flight (TOF) method was applied to determine the ion charge yield at various laser fluences and the ion angular spread. The analyses of TOF spectra showed a synergetic effect of the silicon admixture in target material on the Fe ions production. Besides, this admixture was also responsible of the increasing of the plasma temperature which corresponds in turn to the increasing of the average kinetic energy of the particles as well as of the more collimated ion distribution.     

The formation of relativistic electromagnetic solitons in plasma Bragg gratings induced by two counter-propagating laser pulses

The generation of relativistic electromagnetic solitons in plasma with spatiotemporal density modulation is investigated. When two counter-propagating laser pulses overlap in underdense plasma, the interaction between the pulses and plasma modulates the electron and ion densities resulting in localized, stable, long-living relativistic electromagnetic solitons. They are caused by the Stimulated Raman Scattering instability. The dependence of the formation of relativistic electromagnetic solitons on the ion motion, plasma parameters, and laser parameters is studied by particle-in-cell simulations as well.     

Optodynamic monitoring of laser micro-drilling of glass by using a laser probe

We present a new method for monitoring of the laser micro-drilling process. The method is based on detection of acoustic waves in air above the processed sample using a laser beam deflection probe (LBDP). We present an augmentation of the experimental set-up by means of a digital micrographic system which enables the acquisition of images of the plasma plume and of the hole cross-section during a drilling sequence. Comparing the acquired images with the detected LBDP signals, we examine the drilling process from a new perspective.     

Fabrication of fluorescent nanoparticles of dendronized perylenediimide by laser ablation in water

Highly fluorescent organic nanoparticles with size of about 300 nm were prepared by nanosecond laser ablation of micrometer-sized powder of dendronized perylenediimide dispersed in water. The nanoparticle colloidal solution provided a fluorescence quantum yield of 0.58. The absorption and emission spectral studies demonstrated that the bulky dendron groups at the side bays of perylenediimide chromophore efficiently suppress the interchromophoric interactions in the nanoparticles. Fluorescence measurement on several single nanoparticles underlines that the prepared nanoparticles are bright and photo-stable enough to be a useful probe for single particle fluorescence investigation.     

Femtosecond laser modification of living neuronal network

An all-wet femtosecond laser microprocessing technique was utilized for patterning and cutting functional network of living neuronal cells on a multi-electrode dish (MED). The neuronal cells cultured on a source substrate were transferred onto an electrode in a MED probe in solution by utilizing a femtosecond laser-induced impulsive force and a pattern of neuronal cells were formed on the MED probe. The cellular activity of the detached neurons was supported that neurites could be regenerated around the electrodes. As another processing method, the neurons stretching between electrodes were selectively cut by the direct femtosecond laser irradiation and the spontaneous electrical activity of the neuronal network was evaluated. While the spontaneous action potentials of neurons were synchronized before the cutting, the synchronization disappeared after the cutting, indicating that the neuronal network is locally disconnected by the laser cutting. The present method is applicable to artificial reconstruction of living neuronal network.     

Shock-wave velocity of a femtosecond-laser-produced plasma

Fluorescence measurements have been used to characterize the velocity of atoms in a femtosecond-laser-produced plasma. Nanogram amounts of a copper sample were ablated by the focused radiation (λ=775 nm) of an all-solid-state laser. The laser was operated at a pulse rate of 10 Hz with an energy of 200μJ per pulse. The microplasma expanded into a defined argon atmosphere of pressures between 0.02 and 850 mbar. Atomic fluorescence was excited in the laser plume by a dye-laser pulse with the wavelength set to the line Cu I 282.4 nm. The narrowed beam of the dye-laser was directed into the plasma at different heights above the sample surface. The fluorescence radiation was measured with an échelle-spectrometer, equipped with an intensified-charge-coupled device as the detector. The velocity depends strongly on the pressure of the ambient atmosphere and the distance from the sample surface. The highest velocity found at an argon pressure of 0.02 mbar was 1.0×10⁶ cm s⁻¹.     

Substrate dependence of ion motion in femtosecond laser ablation cloud observed by planar laser-induced fluorescence

We have observed the motion of Sm⁺ ions as well as Sm atoms produced by femtosecond laser ablation of a solidified samarium solution sample on substrates by using a planar laser-induced fluorescence method. Kinetic energies of both Sm⁺ ions and Sm atoms increase as the electrical conductivity of the substrate decreases, which suggests the effect of surface charging. The kinetic energy of Sm⁺ ions is larger than that of Sm atoms for a variety of substrates due to the further electrical acceleration by the surface charge. The knowledge of ion motion will be the key information for the optimization of femtosecond laser simultaneous atomization and ionization of organic and inorganic samples on substrates.     

Analysis of the laser ablation processes for thin-film silicon solar cells

A detailed analysis of the monolithical series connection of thin-film silicon modules with ZnO/Ag back contact is presented. In this study, pulsed lasers with wavelengths of 1064 nm and 532 nm were used. The influence of various laser parameters like laser power, pulse overlap, etc., on the different patterning steps is discussed. The focus of this study was on the back contact patterning process. Here (i) the flake formation process during the ablation and (ii) the influence of a NIR-laser source as an alternative approach to the green laser were investigated in detail. The latter would reduce system costs if only one NIR-laser source could be used for all patterning steps.     

Laser etching of glass substrates by 1064 nm laser irradiation

TiB₂-based cermets are prepared by combustion synthesis followed by a pressing stage in a granulate medium. Products obtained by combustion synthesis are characterized by a large remaining porosity (typically 50%). To produce dense cermets, a subsequent densification step is performed after the combustion process and when the reacted material is still hot. To design the process, numerical simulations are carried out and compared to experimental results. In addition, physical and electrical properties of the products related to electrical contact applications are evaluated. PACS 81.20.Ka; 81.05.Mh; 72.80.Tm     

Molecular imaging by Mid-IR laser ablation mass spectrometry

Mid-IR laser ablation at atmospheric pressure (AP) produces a mixture of ions, neutrals, clusters, and particles with a size distribution extending into the nanoparticle range. Using external electric fields the ions can be extracted and sampled by a mass spectrometer. In AP infrared (IR) matrix-assisted laser desorption ionization (MALDI) experiments, the plume was shown to contain an appreciable proportion of ionic components that reflected the composition of the ablated target and enabled mass spectrometric analysis. The detected ion intensities rapidly declined with increasing distance of sampling from the ablated surface to ∼4 mm. This was rationalized in terms of ion recombination and the stopping of the plume expansion by the background gas. In laser ablation electrospray ionization (LAESI) experiments, the ablation plume was intercepted by an electrospray. The neutral particles in the plume were ionized by the charged droplets in the spray and enabled the detection of large molecules (up to 66 kDa). Maximum ion production in LAESI was observed at large (∼15 mm) spray axis to ablated surface distance indicating a radically different ion formation mechanism compared to AP IR-MALDI. The feasibility of molecular imaging by both AP IR-MALDI and LAESI was demonstrated on targets with mock patterns. Presented at the 9-th International Conference on Laser Ablation, 2007 Tenerife, Canary Islands, Spain     

Investigation of radial profiles of vibrational and rotational temperatures in nitrogen DC glow discharge

Spatially resolved measurements of vibrational and rotational temperature determined from the N₂(C) nitrogen bands intensities have been performed by means of optical scanner of original construction. It has been found that radial variations of studied bands are independent of pressure and discharge current under our experimental conditions, i.e. in the pressure range (100–300) Pa and for discharge current up to 40 mA. Moreover, it has been found that vibrational as well as rotational temperatures stay almost constant in the radial direction. No radial changes of both temperatures can be explained by good thermal conductivity of the positive column of DC glow discharge. This research was supported by grants: Charles University No. GAUK 194/01, Ministry of Education of Czech Republic MSM 11320002, and Grant Agency of Czech Republic GAČR 202/03/0827. The theme of presented article was included in the EU project No. G1RT-CT-2002-05083 “Plasmatech”.     

Morphology studies of the metal surfaces with enhanced absorption fabricated using interferometric femtosecond ablation

Recently, the enhancing of bulk metals optical absorption with focused femtosecond pulses was demonstrated. This absorption enhancement is caused by different nano- and micro-structures which are formed during laser ablation with ultrashort pulses. In this paper we study the evolution of the surface structures using interferometric ablation and compare it to normal fs-ablation. Previously we have shown that interferometric femtosecond ablation is an efficient method to fabricate absorbing metal surfaces. In this study we ablated large areas of hole-array structures with different pulse numbers in polished stainless steel and copper samples. The evolution of surface morphology and the depth of the holes for these structured surfaces are presented. In addition, the reflectance of laser generated surface structures are measured at the wavelength range of 200–2300 nm using a standard spectrophotometer.     

A point source analytical model of inverse pulsed laser deposition

A simple analytical model for inverse pulsed laser deposition is proposed. In the model the motion of the evaporated material is assumed to emerge as from a point source located above the surface of evaporation at some distance. The obtained thickness profiles of inverse deposited films agree well with those calculated by the test particle Monte Carlo method. The proposed approach has been applied for analysis of experimental data on inverse pulsed laser deposition of graphite in nitrogen atmosphere with nanosecond pulses of laser fluences between 1 and 7 J/cm². The model describes well the thickness profiles and pressure dependence of film growth rate for inverse deposition.