MEMS系统中微平板结构声振耦合性能研究

微机电系统(micro-electro-mechanical system,MEMS) 是指内部微结构尺寸在微米甚至纳米量级的微电子机械装置,是一个独立的智能系统. 长宽厚均处于微米量级的微平板为MEMS 中的典型结构,其声学和力学特性直接影响MEMS 的性能. 针对同时受声压激励和气膜力(通过考虑相同尺寸微平板振动引入) 作用的四边简支微平板结构,应用Cosserat 理论和Hamilton 原理,建立了考虑微尺度效应(本征长度和Knudsen 数)影响的声振耦合理论模型,并通过多重Fourier 展开法求解了耦合方程,得到了系统的传声损失结果. 通过频域分析,考虑微平板的不同振动频率、振动幅度和板间距,系统研究了不同尺度效应下微结构中气体薄膜所产生的阻尼力对微平板结构传声特性的影响. 研究发现尺度效应对于微结构的声振特性影响巨大,振动行为对微结构的传声特性也有很大影响,控制并减小微平板的振动幅度以及增大微平板的间距都能够提高微平板的声振性能. 研究结果为MEMS 中微平板的稳定性优化设计提供了理论参考.      

粘弹性-弹性层合微悬臂梁的自由振动

吸附膜的粘弹性性质对微梁生物传感器的固有频率有显著影响.首先,在欧拉梁假设下,采用线性粘弹性积分型本构关系和拉普拉斯变换方法,建立了动态识别技术中粘弹性-弹性层合微悬臂梁自由振动的基本方程;其次,采用空域分离变量法和时域微分求导法,获得了积分-偏微分系统的固有频率,并采用求解代数方程的卡尔丹公式和不等式的性质,在材料参数和几何参数张成的高维空间获得了齐次通解的结构;最后,研究了微梁的几何尺寸、吸附膜的粘弹性参数、膜基厚度比和模量比对微梁自由振动的影响.结果表明:吸附膜的粘弹性阻尼效应使得微梁的稳态固有频率低于瞬态固有频率;随着吸附膜松弛时间的减小,微梁瞬态固有频率漂移与稳态固有频率漂移之间的差别逐渐增大;通过控制膜基厚度比或模量比等参数可以使微梁振动进入弱阻尼振动区域.     

考虑横向拉伸的FGM夹层双曲扁壳自由振动分析

在双曲正弦高阶剪切变形理论的基础上,针对横向位移增加厚度坐标的幂函数项,考虑了横向拉伸的影响,研究了简支条件下功能梯度夹层双曲扁壳的自由振动。基于Hamilton原理推导出了其动力学模型,利用Navier方法计算了表层是功能梯度材料,芯层是匀质材料的双曲扁壳的量纲为一的固有频率,并与已有结果进行了比较。分析了功能梯度材料性质梯度变化指数、芯层厚度、长厚比、曲率半径与厚度比对量纲为一的固有频率的影响。结果表明:与已有结果比较,基于考虑横向拉伸影响的正弦剪切变形理论,功能梯度夹层双曲扁壳对量纲为一的固有频率的计算结果是准确的;量纲为一的固有频率随着材料性质梯度变化指数的增加而单调减小,随着长厚比的增加而单调增加,随着芯层厚度的增加而单调增加。     

基于尺寸效应的FG-SMA微梁非线性自由振动特性研究

形状记忆合金具有相变温度低、输出应力高、能耗小、驱动电压低、可恢复应变大、生物相容性好等特性.随着形状记忆合金制备技术的进一步发展,有学者提出将功能梯度形状记忆合金材料用于微机电系统等智能微结构,将使其具有更优良的特性.因此开展机电多场耦合功能梯度形状记忆合金微结构的非线性自由振动特性研究具有重要研究价值.论文基于冯卡门几何非线性理论,综合考虑静电力和分子间作用力的影响,考虑尺寸效应,基于修正偶应力理论,建立两端固定的功能梯度形状记忆合金微梁模型,对功能梯度形状记忆合金微梁相变前后的机电耦合非线性自由振动问题进行深入研究,分析了尺寸效应参数、几何结构参数和相变参数等对功能梯度形状记忆合金微梁自由振动特性的影响.     

弹性介质中输流微管道的热弹性振动分析

研究热环境中被弹性介质包围的微米输流管道的横向振动问题. 根据Hamilton 原理及非线性热弹性理论建立管道横向振动控制方程,并利用复模态法对其进行求解,得到了系统的固有频率和屈曲失稳临界流速,讨论了环境温度和一些重要系统参数对管道振动特性的影响. 研究结果表明:环境温度变化、管道和流体的微尺度效应、管道外径及弹性介质刚度对输流微管道固有频率和临界流速都有很大影响.     

基于修正偶应力和高阶剪切变形理论的变截面微梁的自由振动

基于修正偶应力和高阶剪切理论建立了仅含有一个尺度参数的Reddy变截面微梁的自由振动模型,研究了变截面微梁自由振动问题的尺度效应和横向剪切变形对自振频率计算的影响。基于哈密顿原理推导了动力学方程与边界条件,并采用微分求积法求解了各种边界条件下的自振频率。算例结果表明,基于偶应力理论预测的变截面微梁的自振频率均大于经典梁理论的预测结果,即捕捉到了尺度效应。另外,梁的几何尺寸与尺度参数越接近,尺度效应就越明显,而梁的长细比越小,横向剪切变形对自振频率的影响就越明显。     

含弱界面的微纳尺度双层梁的热弹性分析

众多微尺度实验已经证实了一些材料在微纳尺度下的力学行为具有尺寸效应.这种现象采用经典的弹性理论无法得到合理的解释,因而需要新的理论,修正偶应力理论就是其中一种.采用修正偶应力理论研究微纳尺度下两端自由铁木辛柯双层梁受热载荷后的弯曲响应,考虑两层之间存在弱界面.获得了梁的挠度、曲率以及界面剪力等表达式,并与经典弹性力学的结果进行了比较.通过分析计算可知,采用修正偶应力理论可预测微纳尺度下双层梁的尺寸效应,而当梁的特征尺寸远大于其材料的内禀尺度时,则与经典理论的结果一致.     

热环境中旋转运动功能梯度圆板的强非线性固有振动

研究热环境中旋转运动功能梯度圆板的非线性固有振动问题.针对金属-陶瓷功能梯度圆板,考虑几何非线性、材料物理属性参数随温度变化以及材料组分沿厚度方向按幂律分布的情况,应用哈密顿原理推得热环境中旋转运动功能梯度圆板的非线性固有振动方程组.考虑周边夹支边界条件,利用伽辽金法得到了圆板的横向非线性微分方程,并确定了静载荷引起的静挠度.考虑到固有振动微分方程具有强非线性的特点,采用改进的多尺度法进行求解,得出非线性固有频率表达式.通过算例,分析了旋转运动功能梯度圆板固有频率随转速、温度等参量的变化情况.将论文退化结果与现有文献所得解进行对比,并将龙格-库塔法和周期图法所得数值解与论文的解析解进行了比较,结果是吻合的.结果表明,非线性固有频率随金属含量的增加而降低;随转速和圆板厚度的增大而升高;随功能梯度圆板表面温度的升高而降低,且当金属、陶瓷表面温度同时升高时,非线性固有频率下降的更快.给出的固有频率和位移解对于功能梯度结构的动力特性分析具有参考意义.     

基于应变梯度中厚板单元的石墨烯振动研究

基于应变梯度理论建立了单层石墨烯等效明德林(Mindlin) 板动力学方程,推导了四边简支明德林中厚板自由振动固有频率的解析解. 提出了一种考虑应变梯度的4 节点36 自由度明德林板单元,利用虚功原理建立了单层石墨烯的等效非局部板有限元模型. 通过对石墨烯振动问题的研究,验证了应变梯度有限元计算结果的收敛性. 运用该有限元法研究了尺寸、振动模态阶数以及非局部参数对石墨烯振动特性的影响. 研究表明,这种单元能够较好地适用于研究考虑复杂边界条件石墨烯的尺度效应问题. 基于应变梯度理论的明德林板所获得石墨烯的固有频率小于基于经典明德林板理论得到的结果. 尺寸较小、模态阶数较高的石墨烯振动尺度效应更加明显. 无论采用应变梯度理论还是经典弹性本构关系,考虑一阶剪切变形的明德林板模型预测的固有频率低于基尔霍夫(Kirchho) 板所预测的固有频率.      

考虑表面效应的双层圆板的自由振动分析

考虑微生化传感器中谐振器的结构特点,基于Kirchhoff薄板理论与表面弹性理论推导了考虑表面效应的双层圆板的自由振动方程.使用伽辽金法得到了近似解.分析了硬化与软化表面效应与表面残余应力对双层圆板固有频率的影响.结果表明,与已有简化的单层圆板模型相比,现有考虑表面效应的双层板模型会得到与之不同的固有频率.随着板厚与上...     

Nonlinear vibration analysis of micro-plates based on strain gradient elasticity theory

In this study, non-linear free vibration of micro-plates based on strain gradient elasticity theory is investigated. A general form of Mindlin’s first-strain gradient elasticity theory is employed to obtain a general Kirchhoff micro-plate formulation. The von Karman strain tensor is used to capture the geometric non-linearity. The governing equations of motion and boundary conditions are obtained in a variational framework. The Homotopy analysis method is employed to obtain an accurate analytical expression for the non-linear natural frequency of vibration. For some specific values of the gradient-based material parameters, the general plate formulation can be reduced to those based on some special forms of strain gradient elasticity theory. Accordingly, three different micro-plate formulations are introduced, which are based on three special strain gradient elasticity theories. It is found that both geometric non-linearity and size effect increase the natural frequency of vibration. In a micro-plate having a thickness comparable with the material length scale parameter, the strain gradient effect on increasing the non-linear natural frequency is higher than that of the geometric non-linearity. By increasing the plate thickness, the strain gradient effect decreases or even diminishes. In this case, geometric non-linearity plays the main role on increasing the natural frequency of vibration. In addition, it is shown that for micro-plates with some specific thickness to length scale parameter ratios, both geometric non-linearity and size effect have significant role on increasing the frequency of non-linear vibration.     

VIBRATION ANALYSIS OF MICROSCALE PLATES BASED ON MODIFIED COUPLE STRESS THEORY

A non-classical Kirchhoff plate model is developed for the dynamic analysis of microscale plates based on the modified couple stress theory in which an internal material length scale parameter is included. Unlike the classical Kirchhoff plate model, the newly developed model can capture the size effect of microscale plates. Two boundary value problems of rectangular micro- plates are solved and the size effect on the lowest two natural frequencies is investigated. It is shown that the natural frequencies of the microscale plates predicted by the current model are size-dependent when the plate thickness is comparable to the material length scale parameter.     

A size-dependent Kirchhoff micro-plate model based on strain gradient elasticity theory

A size-dependent Kirchhoff micro-plate model is developed based on the strain gradient elasticity theory. The model contains three material length scale parameters, which may effectively capture the size effect. The model can also degenerate into the modified couple stress plate model or the classical plate model, if two or all of the material length scale parameters are taken to be zero. The static bending, instability and free vibration problems of a rectangular micro-plate with all edges simple supported are carried out to illustrate the applicability of the present size-dependent model. The results are compared with the reduced models. The present model can predict prominent size-dependent normalized stiffness, buckling load, and natural frequency with the reduction of structural size, especially when the plate thickness is on the same order of the material length scale parameter.     

碳纳米管增强型复合材料功能梯度板的自由振动模型与尺度效应

基于一种新的各向异性修正偶应力理论,建立了碳纳米管增强复合材料功能梯度板的自由振动模型。该模型能够描述尺度效应,且仅包含一个尺度参数。基于一阶剪切变形理论和哈密顿原理推演了板的运动微分方程,并以四边简支板为例给出了自振频率的解析解。讨论了板的几何尺寸、碳纳米管体分比含量和分布方式等因素对板的自振频率的影响。结果表明,本文模型所预测的板的自振基频总是高于经典弹性理论的Mindlin板模型的预测结果,两者间的差异在板的几何尺寸接近尺度参数的值时非常明显,且会随着板的几何尺寸的增大而逐渐消失。     

黏弹性地基上功能梯度材料板的振动分析

为研究黏弹性地基上功能梯度材料板的自由和强迫振动特性,基于Reddy高阶剪切变形理论以及由Shen导得的广义Karman型方程,用双重Fourier级数法推导了三参数黏弹性地基上四边简支功能梯度材料板自由振动和动力响应的解析解,计算了各模态自振频率和半波冲击载荷作用下的动力响应,讨论了材料组分指数、黏弹性地基参数、边厚比等因素对自由振动和动力响应的影响.结果表明,黏弹性地基的剪切和压缩刚度显著提升了功能梯度材料板的振动频率,减小了动力响应;另外,地基的黏性对振动频率和动力响应也有一定的影响.     

纳米板振动特性的两类尺度效应研究1)

利用非局部应变梯度理论研究了纳米板横向自由振动特性。通过迭代法获得非局部应力的渐近表达式,利用哈密顿变分原理推导了纳米板的振动控制方程。针对四边简支边界条件,运用双重三角级数法给出了板固有频率的表达式,然后研究了非局部参数、材料特征参数、几何尺寸对纳米板自振频率的影响。数值结果表明：非局部效应会弱化纳米板的等效刚度,因而使板的固有频率降低,应变梯度效应则与之相反,两类效应仅在纳米尺度下对自振频率有显著影响;板几何尺寸的改变也会对其振动频率产生重要影响。     

A non-classical Kirchhoff plate model incorporating microstructure,surface energy and foundation effects

A new non-classical Kirchhoff plate model is developed using a modified couple stress theory, a surface elasticity theory and a two-parameter elastic foundation model. A variational formulation based on Hamilton’s principle is employed, which leads to the simultaneous determination of the equations of motion and the complete boundary conditions and provides a unified treatment of the microstructure, surface energy and foundation effects. The new plate model contains a material length scale parameter to account for the microstructure effect, three surface elastic constants to describe the surface energy effect, and two foundation moduli to represent the foundation effect. The current non-classical plate model reduces to its classical elasticity-based counterpart when the microstructure, surface energy and foundation effects are all suppressed. In addition, the newly developed plate model includes the models considering the microstructure dependence or the surface energy effect or the foundation influence alone as special cases and recovers the Bernoulli–Euler beam model incorporating the microstructure, surface energy and foundation effects. To illustrate the new model, the static bending and free vibration problems of a simply supported rectangular plate are analytically solved by directly applying the general formulas derived. For the static bending problem, the numerical results reveal that the deflection of the simply supported plate with or without the elastic foundation predicted by the current model is smaller than that predicted by the classical model. Also, it is observed that the difference in the deflection predicted by the new and classical plate models is very large when the plate thickness is sufficiently small, but it is diminishing with the increase of the plate thickness. For the free vibration problem, it is found that the natural frequency predicted by the new plate model with or without the elastic foundation is higher than that predicted by the classical plate model, and the difference is significant for very thin plates. These predicted trends of the size effect at the micron scale agree with those observed experimentally. In addition, it is shown both analytically and numerically that the presence of the elastic foundation reduces the plate deflection and increases the plate natural frequency, as expected.     

A new Kirchhoff plate model based on a modified couple stress theory

In this paper a new Kirchhoff plate model is developed for the static analysis of isotropic micro-plates with arbitrary shape based on a modified couple stress theory containing only one material length scale parameter which can capture the size effect. The proposed model is capable of handling plates with complex geometries and boundary conditions. From a detailed variational procedure the governing equilibrium equation of the micro-plate and the most general boundary conditions are derived, in terms of the deflection, using the principle of minimum potential energy. The resulting boundary value problem is of the fourth order (instead of existing gradient theories which is of the sixth order) and it is solved using the Method of Fundamental Solutions (MFS) which is a boundary-type meshless method. Several plates of various shapes, aspect and Poisson’s ratios are analyzed to illustrate the applicability of the developed micro-plate model and to reveal the differences between the current model and the classical plate model. Moreover, useful conclusions are drawn from the micron-scale response of this new Kirchhoff plate model.