Formation of Al<Subscript>2</Subscript>O<Subscript>3</Subscript>–TiO<Subscript>2</Subscript> bilayer using atomic layer deposition and its application to dynamic random access memory

To enhance film conformality together with electrical property suitable for dynamic random access memory (DRAM) capacitor dielectric, the effects of oxidant and post heat treatment were investigated on aluminum and titanium oxide (Al₂O₃–TiO₂) bilayer (ATO) thin film formed by atomic layer deposition method. For the conformal deposition of Al₂O₃ thin film, the O₃ oxidant required a higher deposition temperature, more than 450 °C, while H₂O or combined oxygen sources (H₂O+O₃) needed a wide range of deposition temperatures ranging from 250 to 450 °C. Conformal deposition of the TiO₂ thin film was achieved at around 325 °C regardless of the oxidants. The charge storage capacitance, measured from the ATO bilayer (4 nm Al₂O₃ and 2 nm TiO₂) deposited at 450 °C for Al₂O₃ and 325 °C for TiO₂ with O₃ oxidant on the phosphine-doped poly silicon trench, showed about 15% higher value than that of 5 nm Al₂O₃ single layer thin film without any increase of leakage current. To maintain the improved electrical property of the ATO bilayer for DRAM application, such as enhanced charge capacitance without increase of leakage current, upper electrode materials and post heat treatments after electrode formation must be selected carefully. Dedicated to Professor Su-Il Pyun on the occasion of his 65th birthday.     

Controlled growth of ZnO nanorod templates and TiO<Subscript>2</Subscript> nanotube arrays by using porous TiO<Subscript>2</Subscript> film as mask

Silver nanoparticles well dispersed in a spherical Poly(vinylpyrollidone)(PVP) matrix were simply prepared by spray pyrolysis of aqueous solutions of AgNO₃ and PVP without any reducing agent. Highly monodisperse silver particles were obtained above the initial mass ratio of PVP/AgNO₃ ∼ 1 and in a certain narrow temperature range. Below the critical mass ratio the silver particles grew to larger ones polydispersely. As the ratio increased above it, they became smaller maintaining their monodispersity. The use of PVP considerably decreased the reduction temperature of the silver nitrate from 450 °C to 250 °C under the same pyrolysis conditions, due to its reducing nature. As the pyrolysis temperature increased above the decomposition temperature of PVP, the silver particles in the matrix grew to merge to a single particle while their crystallite size did not increase as much. The spherical assemblies of the silver nanoparticles were hardly disengaged even after severe washing off the matrix materials. The mechanism of the nanoparticle growth was also discussed.     

An efficient method to prepare high-performance dye-sensitized photoelectrodes using ordered TiO<Subscript>2</Subscript> nanotube arrays and TiO<Subscript>2</Subscript> quantum dot blocking layers

High-performance dye-sensitized photoelectrodes using ordered TiO₂ nanotube arrays (TNTs) and TiO₂ quantum dot blocking layers are fabricated. The free-standing TNT membranes with perfect ordered morphology are prepared by three times of anodic oxidation on Ti foils. These TNT membranes can be easily transported to conductive glasses to fabricate front-side illuminated photoelectrodes. By changing anodic oxidation duration, the thickness of TNT membranes can be controlled, which shows significant influence on the UV-Vis reflectance and absorption abilities of TNT-based photoelectrodes and further influence photovoltaic performance of dye-sensitized solar cells (DSSCs). The highest power conversion efficiency (PCE) of DSSCs about 6.21 % can be obtained by using TNT membranes prepared with anodic oxidation of 3 h. For further improving photovoltaic performance of DSSCs, TiO₂ quantum dot (QDs) blocking layers are inserted between conductive glasses and TNT membranes in the photoelectrodes, which show remarkable effects. The highest PCE of DSSCs with this kind of blocking layers can increase to 8.43 %, producing 35.75 % enhancement compared with that of the counterparts without TiO₂ QD blocking layers.     

TiO<Subscript>2</Subscript> nanofibers embedding single crystalline TiO<Subscript>2</Subscript> nanowires

Epitaxially grown titanium dioxide (TiO₂) nanofibers embedding single crystalline TiO₂ nanowires (NWs) were successfully fabricated by electropinning poly(vinyl pyrrolidone)/ethanol solutions mixed with hydrothermally synthesized TiO₂ NWs and titanium isopropoxide precursors and subsequently calcinating the electrospun nanofibers. Utilizing scanning electron microscopy (SEM) and transmission electron microscopy (TEM), the morphologies of TiO₂ NWs and nanofibers were investigated. High resolution TEM (HR-TEM) and selected area electron diffraction (SAED) allowed us to indentify the fact that, during the calcination process under the optimized condition, titanium isopropoxide precursors were epitaxially crystallized on the surface of single crystalline TiO₂ NWs. Based on the X-ray diffraction (XRD) experiments, it was also realized that the crystalline structure of hydrothermally synthesized TiO₂ NWs and epitaxially crystallized TiO₂ nanofibers is anatase and that TiO₂ composite nanofibers embedding TiO₂ NWs exhibited a higher crystallinity than the pristine TiO₂ nanofibers. Additionally, ultraviolet visible (UV–Vis) spectra of nanofibers indicated that optical properties of TiO₂ nanofibers can be tuned by introducing the single crystalline TiO₂ NWs.     

Supercapacitive performance of homogeneous Co<Subscript>3</Subscript>O<Subscript>4</Subscript>/TiO<Subscript>2</Subscript> nanotube arrays enhanced by carbon layer and oxygen vacancies

Self-supported and binder-free electrodes based on homogeneous Co₃O₄/TiO₂ nanotube arrays enhanced by carbon layer and oxygen vacancies (Co₃O₄/co-modified TiO₂ nanotube arrays (m-TNAs)) are prepared via a simple and cost-effective method in this paper. The highly ordered TNAs offer direct pathways for electron and ion transport and can be used as 3D substrate for the decoration of electroactive materials without any binders. Then, by a facile one-step calcination process, the electrochemical performance of the as-obtained carbon layer and oxygen vacancy m-TNAs is approximately 83 times higher than that of pristine TNAs. In addition, Co₃O₄ nanoparticles are uniformly deposited onto the m-TNAs by a universal chemical bath deposition (CBD) process to further improve the supercapacitive performance. Due to the synergistic effect of m-TNAs and Co₃O₄ nanoparticles, a maximum specific capacitance of 662.7 F g^?1 can be achieved, which is much higher than that of Co₃O₄ decorated on pristine TNAs (Co₃O₄/TNAs; 166.2 F g^?1). Furthermore, the specific capacitance retains 86.0 % of the initial capacitance after 4000 cycles under a high current density of 10 A g^?1, revealing the excellent long-term electrochemical cycling stability of Co₃O₄/m-TNAs. Thus, this kind of heterostructured Co₃O₄/m-TNAs could be considered as promising candidates for high-performance supercapacitor electrodes.     

The fabrication of TiO<Subscript>2</Subscript> nanoparticle/ZnO nanowire arrays bi-filmed photoanode and their effect on dye-sensitized solar cells

Porous TiO₂ nanoparticles coated on ZnO nanowire arrays (TiO₂ NP/ZnO NW) as photoanode for dye-sensitized solar cell (DSSC) has been fabricated and investigated to improve the power conversion efficiency. The TiO₂ NP/ZnO NW photoanode consists of single crystalline ZnO NWs synthesized via hydrothermal method and porous TiO₂ NP film covered on the surface of ZnO NW arrays by screen printing technique. The effect of TiO₂ NPs thickness of the bi-filmed photoanode on the cell performance has been investigated, and TiO₂ NP/ZnO NW DSSC with NP thickness of ~5 μm exhibits the best efficiency of 4.68%, higher than 1.16% of ZnO NW DSSC and 3.18% of TiO₂ NPs DSSC, prepared and tested under identical conditions. The efficiency increase is attributed to the enlarged photocurrent, due to the greatly enhanced surface area for dye absorption and light harvesting efficiency resulted from TiO₂ NPs, and improved open-circuit voltage, due to reduced electron recombination by providing direct conduction pathway along ZnO NWs.     

Nanosized TiO<Subscript>2</Subscript> particles decorated on SiO<Subscript>2</Subscript> spheres (TiO<Subscript>2</Subscript>/SiO<Subscript>2</Subscript>): synthesis and photocatalytic activities

Nanosized TiO₂ and nano-anatase TiO₂ decorated on SiO₂ spherical core shells were synthesized by using a sol–gel method. The synthesized pure TiO₂ nano particle and TiO₂ grafted on SiO₂ sphere with various ratios have been characterized for their structure and morphologies by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectrophotometry (FTIR) and transmission electron microscopy (TEM). Their surface areas were measured using the BET method. The photocatalytic activity of all nanocomposites was investigated using methylene blue as a model pollutant. The synthesized TiO₂/SiO₂ particles appeared to be more efficient in the degradation of methylene blue pollutant, as compared to pure TiO₂ particles.     

Photooxidation of Ethylbenzene with TiO<Subscript>2</Subscript> and Metal Coated TiO<Subscript>2</Subscript> and its Kinetics

Summary. Photooxidation of ethylbenzene with oxygen to give ethylbenzene hydroperoxide has been achieved in a stirred photochemical reactor that was cooled by a water system by irradiation with a 400W high-pressure mercury lamp and using TiO₂ powder and metal coated TiO₂. The effects of the amount of copper or silver coated on TiO₂ and of the temperature on the rate of oxidation have been investigated. It is suggested that thermal cleavage of the O–O bond and photochemically generated singlet oxygen should be considered as the initiating step in a radical chain mechanism. An optimum loading of 6% Ag or 4–5% Cu was observed for photooxidation of ethylbenzene.     

TiO<Subscript>2</Subscript> nanotube arrays: a study on the surface electrochemical reactions during the photoelectrochemical process

The surface electrochemical reactions of TiO₂ nanotube arrays (NTAs) corresponding to different active species of TiO₂ NTAs (·OH, h⁺, and ·O₂ ^?) play key roles during the photoelectrochemical process. Effect of the active species and surface electrochemical reactions are studied by adding capture agents of isopropyl alcohol (IPA) for ·OH, ammonium oxalate ((NH₄)₂C₂O₂) for h⁺, and benzoquinone (BQ) for ·O₂ ^? radicals. The changes of photocurrent with addition of capture agents confirm the existence of ·OH, h⁺, and ·O₂ ^? during photoelectrochemical process. IPA and (NH₄)₂C₂O₂ additions are found to enhance the photocurrent by accelerating the consumption velocity of h⁺ indirectly and directly and restricting the chargers recombination. BQ can decrease the photocurrent stepwise to 0 due to the indirect consumption of e^? on surface of TiO₂ NTAs. The consumption of h⁺ by forming ·OH is 38% that of the whole consumption of h⁺. The ratio of chargers recombination is higher than 80.8% that of the whole photogenerated chargers.     

Effect of TiO<Subscript>2</Subscript> surface modification in Rhodamine B photodegradation

Commercial TiO₂ nanoparticles were superficially modified through polymeric resins obtained from polymerization of citrate complexes of Y³⁺ and Al³⁺ with ethylenglycol. The materials were treated at 450 °C for 4 h to obtain modified nanoparticles, which were characterized by HR-TEM, Zeta potential and surface area through N₂ fisisorption. Rhodamine B photodegradation by visible light irradiation and in presence of those modified nanoparticles was compared with the same process in presence of unmodified commercial TiO₂ nanoparticles. It was observed, by UV–visible spectroscopy, that the catalytic photoactivity in presence of modified nanoparticles was smaller than that observed with commercial TiO₂ nanoparticles. However, the surface modifier played an important role in the photodegradation kinetic process, showing a non-linear relation between modifier amount and photodegradation rate, presenting a maximum value at 0.8% (w/w).     

Thermal behavior of Fe<Subscript>2</Subscript>O<Subscript>3</Subscript>/TiO<Subscript>2</Subscript> mesoporous gels

Summary Titania-based photocatalytic materials were prepared by sol-gel method using Fe³⁺ and polyethyleneglycol (PEG₆₀₀) as additives. Thermogravimetry (TG), differential thermal analysis (DTA) and evolved gas analysis (EGA) with MS detection were used to elucidate processes that take place during heating of Fe³⁺ containing titania gels. The microstructure development of the Fe₂O₃/TiO₂ gel samples with and without PEG₆₀₀ admixtures was characterized by emanation thermal analysis (ETA) under in situ heating in air. A mathematical model was used for the evaluation of ETA results. Surface area and porosity measurements of the samples dried at 120&deg;C and the samples preheated for 1 h to 300 and 500&deg;C were compared. From the XRD measurements it was confirmed that the crystallization of anatase took place after thermal heating up to 600&deg;C.     

Compatibility of TiO<Subscript>2</Subscript> with a CaO-CaCl<Subscript>2</Subscript> melt

Interaction of TiO₂ with a CaO-CaCl₂ melt was studied to determine whether electrolytic production of titanium from oxide raw materials is possible.     

Fabrication and characterization of TiO<Subscript>2</Subscript>–SiO<Subscript>2</Subscript> composite nanoparticles and polyurethane/(TiO<Subscript>2</Subscript>–SiO<Subscript>2</Subscript>) nanocomposite films

TiO₂–SiO₂ composite nanoparticles were prepared by a sol–gel process. To obtain the assembly of TiO₂–SiO₂ composite nanoparticles, different molar ratios of Ti/Si were investigated. Polyurethane (PU)/(TiO₂–SiO₂) hybrid films were synthesized using the “grafting from” technique by incorporation of modified TiO₂–SiO₂ composite nanoparticles building blocks into PU matrix. Firstly, 3-aminopropyltriethysilane was employed to encapsulate TiO₂–SiO₂ composite nanoparticles’ surface. Secondly, the PU shell was tethered to the TiO₂–SiO₂ core surface via surface functionalized reaction. The particle size of TiO₂–SiO₂ composite sol was performed on dynamic light scattering, and the microstructure was characterized by X-ray diffraction and Fourier transform infrared. Thermogravimetric analysis and transmission electron microscopy (TEM) employed to study the hybrid films. The average particle size of the TiO₂–SiO₂ composite particles is about 38 nm when the molar ratio of Ti/Si reaches to1:1. The TEM image indicates that TiO₂–SiO₂ composite nanoparticles are well dispersed in the PU matrix.     

Photovoltaic properties of oriented ZnO nanowires arrays decorated with TiO<Subscript>2</Subscript> shell layer for dye-sensitized solar cell application

Almost vertically aligned ZnO nanowires have been grown on Silicon substrates via a simple hydrothermal method. In order to improve the photoelectric conversion efficiency for fabricated dye-sensitized solar cells (DSSCs), an easily-operated immersing method was employed to fabricate a TiO₂/ZnO nanowires array heterojunction, which has advantage of high aspect ratio, low recombination rate and high absorption of visible light. The structure and surface morphology of the samples were characterized by X-ray powder diffraction (XRD) and scanning electron microscopy (SEM), respectively. The photovoltaic properties of TiO₂/ZnO based DSCCs were measured by considering the power efficiency (η), photocurrent density (J_sc), open-circuit voltage (V_oc), and fill factor (FF). An efficiency of 0.559% is achieved for the composite cell, increasing 0.426 and 0.185% for the ZnO nanowires cell and TiO₂ cell, respectively. The short-circuit current and open-circuit voltage are also enhancing. The improvements are because of high surface are of TiO₂ shell layer, as well as fast electron transport and light scattering effect of ZnO nanowires.     

Dispersion state and catalytic properties of vanadia species on the surface of V<Subscript>2</Subscript>O<Subscript>5</Subscript>/TiO<Subscript>2</Subscript> catalysts

The dispersion state and catalytic properties of anatase-supported vanadia species are studied by means of X-ray diffraction (XRD), laser Raman spectroscopy (LRS), H₂ temperature-programmed reduction (TPR) and the selective oxidation of o-xylene to phthalic anhydride. The almost identical values of the experimental dispersion capacity of V₂O₅ on anatase and the surface vacant sites available on the preferentially exposed (001) plane of anatase suggest that the highly dispersed vanadium cations are bonded to the vacant sites on the surface of anatase as derived by the incorporation model. When the loading amount of V₂O₅ is far below its dispersion capacity, the dispersed vanadia species might mainly consist of isolated VO_x species bridging to the surface through V-O-Ti bonds. With the increase of V₂O₅ loading the isolated vanadia species interact with their nearest neighbors (either isolated or polymerized vanadia) through bridging V-O-V at the expenses of V-O-Ti bonds, resulting in the increase of the ratio of polymerized to isolated vanadia species and the decrease of the reactivity of the associated surface oxygen anions and, consequently, although the activity increases with loading to reach a maximum value, the turn over number (TON) of the V₂O₅/TiO₂ catalyst decreases linearly. When the loading amount of V₂O₅ is higher than its dispersion capacity, the turn over number decreases more rapidly with the increase of V₂O₅ loading due to the formation of V₂O₅ crystallites in which the oxygen anions associated with V-O-V bonds are less reactive and only partially exposed on the surface.     

Photocatalytic reduction of CO<Subscript>2</Subscript> over TiO<Subscript>2</Subscript> based catalysts

At present, carbon dioxide is considered the largest contributor among greenhouse gases. This review covers the current state of problem of carbon dioxide emissions from industrial and combustion processes, the principle of photocatalysis, existing literature related to photocatalytic CO₂ reduction over TiO₂ based catalysts and the effects of important parameters on the process performance including light wavelength and intensity, type of reductant, metal-modified surface, temperature and pressure. Presented at the 34th International Conference of the Slovak Society of Chemical Engineering, Tatranské Matliare, 21–25 May 2007.     

Diagnostics of Plasma Behavior and TiO<Subscript>2</Subscript> Properties Based on DBD/TiO<Subscript>2</Subscript> Hybrid System

Plasma catalysis is gaining increasing interest in environmental and energy applications, such as the destruction of gas pollutants and hydrocarbon conversion. In order to further improve the application of plasma catalysis, it is crucial to understand the fundamental mechanisms, especially the mutual interaction between plasma and catalyst. In this paper, a parallel-plate dielectric barrier discharge (DBD) reactor is developed to investigate the plasma behavior and TiO₂ properties in the plasma/catalytic hybrid system. The introduction of TiO₂ thin film coated on the dielectric improves the discharge intensity, which significantly contributes to the enhancement of reactive species and charges. The energy efficiency of generating ozone in DBD/TiO₂ system has been approximately raised by 38% compared to pure DBD when the applied voltage reaches 13 kV. It is fortunately found that the discharge does not change the crystal structure of the TiO₂, but the band gap increases from 3.13 to 3.39 eV, which has been proved to enhance the oxidizability of TiO₂ in the degradation of methyl orange experiment under UV light. The FTIR and XPS spectra also demonstrate that N element is doped into the structure of TiO₂. These results successfully illustrate the plasma behavior and catalyst properties in plasma/catalysis hybrid system and provide reference for the optimization of the plasma catalysis process.     

Degradation of ofloxacin by UVA-LED/TiO<Subscript>2</Subscript> nanotube arrays photocatalytic fuel cells

The degradation of ofloxacin (OFX) at low concentration in aqueous solution by UVA-LED/TiO₂ nanotube arrays photocatalytic fuel cells (UVA-LED/TiO₂ NTs PFCs) was investigated. TiO₂ nanotube arrays (TiO₂ NTs) photoanode prepared by anodization-constituted anatase–rutile bicrystalline framework. The results indicated that the degradation efficiency of OFX by UVA-LED/TiO₂ NTs PFC was significantly enhanced by 14.3% compared with UVA-LED/TiO₂ NTs photocatalysis. The pH affected the degradation efficiency markedly; the highest degradation efficiency (95.0%) and the pseudo-first-order reaction rate constant k value (0.049 min^?1) were achieved in neutral condition (pH 7.0). The degradation efficiency increased with the increasing concentration of dissolved oxygen (DO) in the UVA-LED/TiO₂ NTs PFC. The main reactive species of OFX degradation are positive holes (h⁺) and superoxide ion radicals (O ₂ ^·? ) in a DO sufficient condition. Furthermore, the possible pathways of OFX degradation were proposed.     

Enhancement of photocatalytic H<Subscript>2</Subscript> evolution over TiO<Subscript>2</Subscript> nano-sheet films by surface loading NiS nanoparticles

NiS/TiO₂ nano-sheet films (NiS/TiO₂ NSFs) photocatalysts were prepared by loading NiS nanoparticles as noble metal-free cocatalysts on the surface of TiO₂ films through a solvothermal method. The prepared samples were characterized by XRD, SEM, EDS, UV–Vis absorption spectra and XPS analysis. The photocatalytic H₂ evolution and photoluminescence spectroscopy (PL) experiments indicated that the NiS cocatalysts could efficiently promote the separation of photogenerated charge carriers in TiO₂ and consequently enhance the H₂ evolution activity. The hydrogen yield obtained from the optimal sample reached 4.31 μmol cm^–2 at 3.0 h and the corresponding energy efficiency was about 0.26%, which was 21 times higher than that of pure TiO₂ NSF. A possible photocatalytic mechanism of NiS cocatalyst on the improvement of the photocatalytic performance of TiO₂ NSF was also proposed.