静电悬浮转子微陀螺及其关键技术

静电悬浮转子微陀螺具有比振动式微陀螺精度高的潜在优点，并可同时测量二轴角速度和三轴线加速度。介绍了静电悬浮转子微陀螺的研究现状。对该静电悬浮转子微F1螺／加速度计的工作原理、特点进行了分析，并对实现高精度静电悬浮转子微陀螺／加速度计晌关键技术如静电稳定悬浮、微位移检测控制、静电恒速旋转驱动、微机械加工和真空封装技术等进行了探讨。指出这一新颖MEMS陀螺是高精度多轴集成微惯性传感器技术发展的一个重要方向，具有广阔的应用前号和较大的发展潜力。     

模糊控制在静电悬浮转子微陀螺起支中的应用

给出了一种基于UV-LIGA技术的静电悬浮转子微陀螺,提出了控制系统组成方案,为了实现转子的起支控制和稳定悬浮,模糊控制被应用于该系统中,首先,对轴向压膜阻尼和滑膜阻尼进行有限元分析,并用解析法进行分析,计算结果表明两种方法的一致性,从而得到阻尼的解析表达式。然后,建立了带偏置电压的双边支承下的数学模型,并对数学模型进行模糊控制仿真研究,仿真结果表明,相对于PID控制,模糊控制具有较强的鲁棒性,具有响应速度快,自适应能力强的优点。最后,设计了悬浮控制系统,给出了硬件和软件组成。     

静电悬浮式惯性仪表中的微位移检测技术

静电陀螺仪、空间静电加速度计等基于静电悬浮的惯性仪表在高精度的惯性导航和空间微重力测量领域得到广泛应用。近年来，对基于MEMS工艺的悬浮式微惯性传感器的研究引起了广泛的重视。介绍了静电悬浮式惯性仪表中采用的差动电容式微位移检测电路的原理，分别对静电陀螺、静电加速度计和MEMS微陀螺、微加速度计的电极配置方案和位移检测的接口电路进行了分析，并对不同的位移检测方案进行了比较.     

基于静电悬浮转子的硅微陀螺技术

设计了一种转子采用五自由度静电悬浮的微机械陀螺。微陀螺基于玻璃-硅-玻璃键合的三明治结构、环形转子、体硅工艺、电容式位移检测方案;采用公共电极施加高频激励信号,基于隔离网络和频分复用的方法实现检测电极与加力电极的复用以简化陀螺结构;通过有源静电悬浮系统约束环形转子沿五自由度的运动,并提供足够的支承刚度;转子的转速控制基于三相可变电容式电机驱动方式,借助于检测转子与定子旋转电极的电容变化获得转子速度以实现转速闭环控制。目前已加工出基于深反应离子刻蚀工艺的微结构,采用基于DSP的数字控制器实现了环形转子的五自由度稳定悬浮。     

硅微机械陀螺仪频率调谐控制系统设计

硅微机械陀螺结构的驱动和检测模态谐振频率差(Δf)是决定其结构机械灵敏度的主要因素,当Δf≈0时,陀螺结构处于频率调谐状态,此时陀螺的机械灵敏度达到最大峰值且噪声和分辨率等指标可得到有效提高。提出了一种基于正交信号和驱动位移相位差的鉴相控制方法,以判断陀螺结构是否处于频率调谐状态,并通过调节检测模态刚度达到频率调谐目的。首先,介绍了陀螺结构检测模态谐振频率调节的原理,并结合结构参数量化分析了频率调节范围。其次,分析了鉴相控制方法,并在其基础上设计了频率调谐控制系统,建立了整机系统模型,并对其进行了稳定性分析。最后,结合整机模型进行了仿真,采用所提出的方法可实现(Δf)的快速、稳定、自主调节,系统的标度因数指标调谐前后分别为13.1 m V/(°/s)和220.6 m V/(°/s),大大提高了结构的机械灵敏度,验证了设计方案。     

双质量解耦硅微陀螺仪的非理想解耦特性研究和性能测试

为了分析双质量解耦硅微陀螺结构中的机械耦合误差,对微陀螺结构的非理想解耦特性进行了研究。首先,阐述了双质量解耦硅微陀螺仪的结构原理,推导了双质量解耦硅微陀螺仪的检测位移;接着构建检测框架在驱动模态下非理想的解耦模型,推导了由非理想解耦导致检测框架的平动位移与转动位移的公式;然后进行了结构非理想解耦特性仿真分析,对驱动模态时检测框架和检测模态时驱动框架的非理想运动特性进行仿真,结果表明检测框架的残余平动位移达到驱动位移的0.86%,最大转动残余位移达到了驱动位移的2.7%,而驱动框架的平动残余位移达到了检测位移的1.36%,转动残余位移达到了检测位移的0.87%;最后,对加工的双质量解耦硅微陀螺结构芯片的非理想解耦误差进行了测量,结果表明非真空封装下的正交误差达到158.65(o)/s,失调误差为19.03(o)/s,偏置稳定性达到12.01(o)/h。     

一种双质量硅微陀螺仪

双质量块结构形式的硅微陀螺仪能够有效消除轴向加速度等共模干扰的影响。利用结构解耦方法设计了一种新型的双质量双线振动式硅微机械陀螺仪。依据双质量硅微陀螺的结构和工作原理,通过简化的动力学方程,对该陀螺的驱动和检测模态进行了理论分析,并利用Ansys有限元软件对陀螺的驱动和检测模态进行了数值仿真。仿真结果表明,该陀螺结构设计能够实现驱动和检测模态的完全解耦,从而验证了设计思想的正确性。通过仿真,得到了驱动和检测模态的仿真频率值。在对微陀螺加工所采用的加工工艺进行简单介绍后,对加工出的硅微机械陀螺仪样品的模态频率值进行了电路测试。由于加工误差的存在,实验得到的驱动和检测频率值与仿真设计值存在1.6%的误差。最后在转台上对样品的标度因数进行了测定,得到了该双质量硅微陀螺仪的标度因数为2.518mV/((°)?s-1)。     

静电悬浮微陀螺的压膜阻尼特性

空气阻尼对静电微陀螺系统的动态特性起着重要的影响。根据流体力学,构建了描述微陀螺内部气体压膜阻尼特性的线性Reynolds方程。将微陀螺内部气膜分成了13个分区,推导了转子在轴向振动、径向振动、径向摆动时的压膜阻尼系数。根据微陀螺的结构参数进行仿真,结果表明:轴向压膜阻尼系数对微陀螺支承系统的动态特性影响最大,而压膜阻尼系数与气体的温度,压强呈线性关系,与振动幅值呈抛物线型关系;在低频段系统呈现阻尼力,而到高频段,系统呈现弹性力。利用Simulink进行了微陀螺的系统建模,得出压膜阻尼系数Cz对PID参数的选取,尤其是Kd参数,起着重要作用,同时对系统的稳定性也有一定的影响。     

线振动硅微机械陀螺结构误差参数分离和辨识

推导了线振动微机械陀螺的三自由度误差力学方程,并详细分析了陀螺耦合误差的产生机理。分析结果表明,各种结构误差是导致陀螺耦合误差信号的主要原因。在此基础上,利用振动和模态理论给出了陀螺结构误差参数的分离和辨识的试验方法和结果。试验结果表明,同相耦合分量和正交耦合分量是微机械陀螺的两种主要误差信号,造成正交耦合的主要原因是驱动轴和检测轴之间的刚度耦合以及驱动轴和检测轴各自的刚度不对称,造成同相耦合的主要原因是驱动轴和检测轴之间的阻尼耦合以及检测轴刚度不对称和驱动力不对称。结构误差参数的分离和辨识试验方法将为下一步的陀螺结构优化、微加工工艺改进以及耦合误差抑制提供基础。     

无驱动结构硅微机械陀螺冲击响应信号分析

介绍了一种用于旋转飞行器单通道控制的无驱动结构硅微机械陀螺.陀螺利用旋转飞行器的滚转作为驱动,敏感任意方向的横向角速度.在陀螺冲击试验中,陀螺冲击响应信号的幅度和宽度较大.在实际应用中,幅度超过1.5 V、宽度超过100 ms的冲击响应信号有能力阻塞旋转飞行器控制信号通道,影响旋转飞行器正常飞行.对陀螺冲击响应信号产生的原因进行了分析,分析表明,由于陀螺摆片偏心,陀螺在受到厚度方向的冲击时摆片绕扭转梁发生了偏摆.提出了通过增加陀螺扭转梁厚度的方法,减小陀螺在单位冲击加速度下的摆角幅度.通过实验证明,如果陀螺扭转梁增厚从48 μm增加到75 μm,陀螺冲击响应信号的幅度和宽度将减小约18倍.     

Selection of two-dimensional nonlinear strain waves in micro-structured mediaSelection d'ondes de déformation non linéaires à deux dimensions dans des milieux à microstructure

It is shown that the micro-displacement gradient allows the propagation of two-dimensional localized long nonlinear strain waves in a medium with microstructure. These waves may exist even in the presence of dissipation and energy input in the microstructured medium but with selected values of the wave amplitude and velocity. An increase or a decrease in the wave amplitude and velocity happens faster at the initial stage than that of the plane localized wave. However, their steady values selected by the energy input/output, are higher for the plane waves. To cite this article: A.V. Porubov et al., C. R. Mecanique 332 (2004).     

Fiber suspension flow in a tapered channel: The effect of flow/fiber coupling

A numerical model for predicting the flow and orientation state of semi-dilute, rigid fiber suspensions in a tapered channel is presented. The effect of the two-way flow/fiber coupling is investigated for low Reynolds number flow using the constitutive model of Shaqfeh and Fredrickson. An orientation distribution function is used to describe the local orientation state of the suspension and evolves according to a Fokker–Plank type equation. The planar orientation distribution function is determined along streamlines of the flow and is coupled with the fluid momentum equations through a fourth-order orientation tensor. The coupling term accounts for the two-way interaction and momentum exchange between the fluid and fiber phases. The fibers are free to interact through long range hydrodynamic fiber–fiber interactions which are modeled using a rotary diffusion coefficient, an approach outlined by Folgar and Tucker. Numerical predictions are made for two different orientation states at the inlet to the contraction, namely a fully random and a partially aligned fiber orientation state. Results from these numerical predictions show that the streamlines of the flow are altered and that velocity profiles change from Jeffery–Hamel, to something resembling a plug flow when the fiber phase is considered in the fluid momentum equations. This phenomenon was found when the suspension enters the channel in either a pre-aligned, or in a fully random orientation state. When the suspension enters the channel in an aligned orientation state, fiber orientation is shown to be only marginally changed when the two-way coupling is included. However, significant differences between coupled and uncoupled predictions of fiber orientation were found when the suspension enters the channel in a random orientation state. In this case, the suspension was shown to align much more quickly when the mutual coupling was accounted for and profiles of the orientation anisotropy were considerably different both qualitatively and quantitatively.     

On the fiber orientation in steady recirculating flows involving short fibers suspensions

In this work we present a new numerical strategy to treat the 3D Fokker–Planck equation in steady recirculating flows. This strategy combines some ideas of the method of particles, with a more original treatment of the periodicity condition, which characterizes the steady solution of the FP equation in steady recirculating flows, as usually encountered in some rheometric devices. Using this numerical technique the fiber orientation distribution can be computed accurately in any steady recirculating flow. The simulation results can be used to identify some rheological parameters of the suspension, using an inverse technique, as well as to analyze the validity of some simplified models widely used, which require a closure relation. Thus, in this paper several closure relations of the fourth-order orientation tensor will be discussed in the context of a numerical example involving a steady recirculating flow.     

A steady laminar flow of a suspension in a channel

A two dimensional model of a steady flow of a suspension in an inclined channel is developed and studied with the aid of an integral method. The model explains the existence of two operational modes in such a channel, predicted earlier by Probstein et al. (1977).     

Steady Natural Convection Flow of a Particulate Suspension Through a Parallel-Plate Channel

A continuum model for two-phase (fluid/particle) flow induced by natural convection is developed and applied to the problem of steady natural convention flow of a particulate suspension through an infinitely long channel. The walls of the channel are maintained at constant but different temperatures. The two-phase model accounts for particle-phase viscous effects. Boundary conditions borrowed from rarefied gas dynamics are employed for the particle-phase wall conditions. Various closed-form solutions for different special cases are obtained. A parametric study of the physical parameters involved in the problem are performed to illustrate the influence of these parameters on the flow and heat transfer aspects of the problem.     

Investigation of the stability of a plane-channel suspension flow with account for finite particle volume fraction

Within the framework of the two-fluid approach, a variant of a heterogeneous-medium model which takes into account a finite volume fraction of the inclusions and a small but finite phase velocity slip is proposed. The interphase momentum exchange is described by the Stokes force with the Brinkman correction for the finite particle volume fraction. The suspension viscosity depends on the particle volume fraction in accordance with the Einstein formula. Within the framework of the model constructed, a formulation of the problem of linear stability of plane-parallel two-phase flows is proposed. As an example, the stability of a channel suspension flow is considered. The system of equations for small disturbances with the boundary conditions is reduced to an eigenvalue problem for a fourth-order ordinary differential equation. Using the orthogonalization method, the dependence of the critical Reynolds number on the governing nondimensional parameters of the problem is studied numerically. It is shown that taking a finite volume fraction of the inclusions into account significantly affects the laminar-turbulent transition limit.     

Numerical study of concentrated fluid–particle suspension flow in a wavy channel

The particle migration effects and fluid–particle interactions occurring in the flow of highly concentrated fluid–particle suspension in a spatially modulated channel have been investigated numerically using a finite volume method. The mathematical model is based on the momentum and continuity equations for the suspension flow and a constitutive equation accounting for the effects of shear‐induced particle migration in concentrated suspensions. The model couples a Newtonian stress/shear rate relationship with a shear‐induced migration model of the suspended particles in which the local effective viscosity is dependent on the local volume fraction of solids. The numerical procedure employs finite volume method and the formulation is based on diffuse‐flux model. Semi‐implicit method for pressure linked equations has been used to solve the resulting governing equations along with appropriate boundary conditions. The numerical results are validated with the analytical expressions for concentrated suspension flow in a plane channel. The results demonstrate strong particle migration towards the centre of the channel and an increasing blunting of velocity profiles with increase in initial particle concentration. In the case of a stenosed channel, the particle concentration is lowest at the site of maximum constriction, whereas a strong accumulation of particles is observed in the recirculation zone downstream of the stenosis. The numerical procedure applied to investigate the effects of concentrated suspension flow in a wavy passage shows that the solid particles migrate from regions of high shear rate to low shear rate with low velocities and this phenomenon is strongly influenced by Reynolds numbers and initial particle concentration. Copyright © 2008 John Wiley & Sons, Ltd.     

Resolution-optimised nonlinear scheme for secondary derivatives

A 5-point-stencil optimised nonlinear scheme with spectral-like resolution within the whole wave number range for secondary derivatives is devised. The proposed scheme can compensate for the dissipation deficiency of traditional linear schemes and suppress the spurious energy accumulation that occurs at high wave numbers, both of which are frequently encountered in large eddy simulation. The new scheme is composed of a linear fourth-order central scheme term and an artificial viscosity term. These two terms are connected by a nonlinear weight. The proposed nonlinear weight is designed based on Fourier analysis, rather than Taylor analysis, to guarantee a spectral-like resolution. Moreover, the accuracy is not affected by the optimisation, and the new scheme reaches fourth-order accuracy. The new scheme is tested numerically using the one-dimensional diffusion problem, one-dimensional steady viscous Burger’s shock, two-dimensional vortex decaying, three-dimensional isotropic decaying turbulence and fully developed turbulent channel flow. All the tests confirm that the new scheme has spectral-like resolution and can improve the accuracy of the energy spectrum, dissipation rate and high-order statistics of turbulent flows.     

考虑间隙反馈控制时滞的磁浮车辆稳定性研究

常导磁吸型(EMS)磁悬浮列车在悬浮控制中的每个环节,时滞是不可避免的,当时滞超过一定程度后,系统有可能失稳.本文针对EMS磁浮列车控制环节的临界时滞与车辆参数(如运行速度、反馈控制增益、导轨参数和悬挂参数)的关系开展研究.建立了磁浮车辆/导轨耦合动力学模型,车辆包含1节车辆和4个磁浮架,考虑车辆的10个自由度,每个磁浮架上包含4个悬浮电磁铁.导轨模拟为一系列简支Bernoulli-Euler梁,采用模态叠加法对导轨振动方程进行求解.采用传统线性电磁力模型实现车辆和轨道的耦合.采用比例-微分控制算法对电磁铁电流进行反馈控制,实现车辆稳定悬浮,并假设时滞均发生在控制环节,且只考虑间隙反馈控制环节的时滞.采用四阶龙格库塔法对耦合系统动力学方程进行求解,编写了数值仿真程序,计算得到车辆导轨耦合系统在考虑间隙反馈控制时滞时的响应.将系统运动发散时的时滞大小视为临界时滞,开展了参数规律影响分析.通过分析,给出了提高时滞条件下车辆稳定性的方法,包括增大导轨的弯曲刚度和阻尼比,减小间隙反馈控制增益并增大速度反馈控制增益,以及增大二系悬挂阻尼.      

Assessment of a high-order accurate Discontinuous Galerkin method for turbomachinery flows

In this work the capabilities of a high-order Discontinuous Galerkin (DG) method applied to the computation of turbomachinery flows are investigated. The Reynolds averaged Navier–Stokes equations coupled with the two equations k-ω turbulence model are solved to predict the flow features, either in a fixed or rotating reference frame, to simulate the fluid flow around bodies that operate under an imposed steady rotation. To ensure, by design, the positivity of all thermodynamic variables at a discrete level, a set of primitive variables based on pressure and temperature logarithms is used. The flow fields through the MTU T106A low-pressure turbine cascade and the NASA Rotor 37 axial compressor have been computed up to fourth-order of accuracy and compared to the experimental and numerical data available in the literature.