Remote and high precision step height measurement with an optical fiber multiplexing interferometric system

An optical fiber multiplexing low coherence and high coherence interferometric system, which includes a Fizeau interferometer as the sensing element and a Michelson interferometer as the demodulating element, is designed for remote and high precision step height measurement. The Fizeau interferometer is placed in the remote field for sensing the measurand, while the Michelson interferometer which works in both modes of low coherence interferometry and high coherence interferometry is employed for demodulating the measurand. The range of the step height is determined by the low coherence interferometry and the value of it is measured precisely by the high coherence interferometry. High precision has been obtained by searching precisely the peak of the low coherence interferogram symmetrically from two sides of the low coherence interferogram and stabilizing the Michelson interferometer with a feedback loop. The maximum step height that could be measured is 6 mm while the measurement resolution is less than 1 nm. The standard deviation of 10 times measurement results of a step height of 1 mm configurated with two gauge blocks is 0.5 nm.     

高灵敏度集成光偏振干涉仪特性及生化传感应用研究

利用射频溅射技术在平面单模玻璃波导表面局部淀积一层Ta₂O₅梯度薄膜, 形成复合光波导芯片, 结合棱镜耦合法制备了一种集成光偏振干涉传感器. 基于四层平板波导模型理论分析了复合光波导表面折射率灵敏度S_RI与Ta₂O₅梯度薄膜等效厚度T_eq的关系, 结合实验测定的S_RI得出了本工作中所使用Ta₂O₅梯度薄膜的T_eq ≈ 33.021 nm, 进一步得出芯片吸附层厚度灵敏度S_ab≈ (2.412× 2π) nm^-1. 利用该复合波导偏振干涉仪结合Lorentz-Lorenz有效介质理论测得了市售食用白醋中醋酸的浓度, 并以市售牛栏山二锅头酒为例进行了白酒掺水和掺甲醇的测试, 结果表明, 白酒掺水或甲醇前后的折射率改变量与掺杂量成准线性变化关系; 原位实时监测了丁酰胆碱酯酶的动态吸附过程及细胞色素c/聚苯乙烯磺酸钠的分子自组装过程, 并利用测得的位相差变化结合芯片吸附层厚度灵敏度S_ab 获得了蛋白质表面覆盖度.     

A general strategy of in-situ warpage characterization for solder attached packages with digital image correlation method

Recently, 3-D Digital Image Correlation (DIC) is widely applied to the reliability analysis of electronic packages, which particularly characterizes the in-situ deformation of ball grid array (BGA) packages. During the image correlation procedure, many parameters influence the accuracy and data integrity of measurement result. Facet (subset) size is the principal parameter and has been studied with much effort. However, the solder balls, which are built on the substrate surface, make the scenario different with the conventional 3-D DIC experiment for the planar samples. The undulant surface generates more obstacles for the successful image correlation. In order to summarize an effective solution of 3-D DIC measurement method for solder balls attached packages, camera angle, facet size and facet step are studied with different BGA packages and different stereoscopic camera systems to achieve the best correlation quality. Also, a novel surface treatment method is introduced to guarantee the surface speckles are generated uniformly on the fluctuant surface.     

An integrated optical system for the vacuum ultraviolet region

We use a 0.5 m Seya-Namioka monochromator and two gold plated cylindrical mirrors to set up an optical system which produces a collimated beam of plane polarized, monochromatic radiation in the vacuum ultraviolet region. The two mirrors compensate for the astigmatism of the Seya-Namioka monochromator, thereby increasing the spectral resolution drastically. The degree of linear polarization is about 0.97–1.00 in the spectral region of 6–11.5 eV.     

通用串行航空总线综合测试系统设计

针对目前串行航空总线测试设备功能单一的问题,设计了一种兼容多总线的便携式通用串行航空总线综合测试系统。方案采用模块化设计,详细叙述了系统的硬件及软件设计,系统由通用串行总线仿真设备终端与测试分析设备构成,系统涉及多种串行航空总线,可完成多总线仿真激励输出、监控接收及数据仿真分析功能,可最大程度满足航空电子系统的设备与系统仿真需求。实验结果表明,该通用串行航空总线综合测试系统稳定性好、可靠性高、使用便捷,满足设计需求。     

集成光学电场探头测量HEMP的系统误差分析

讨论了集成光学电场探头测量高空电磁脉冲(HEMP)的系统误差。根据探测器传输函数和HEMP的表达式得出了误差方程。并通过对HEMP表达式的特征分析,对误差方程进行了简化。通过方程的求解,分析了探测器和HEMP波形的各项参数对测量结果的影响。结果表明:误差随着双指数波幅值、半宽/前沿和探测器工作点漂移的增大而增大;探测器的5%和10%系统测量误差对应的最大测量幅值分别为半波电场的0.165倍和0.23倍。该结论可为此类探测器的使用提供参考。     

集成式光读出FPA红外成像系统设计

本文对读出原理、像差要求、图谱质量进行深入研究,进而对读出技术进行深度整合与简化,实现光读出FPA红外成像系统小型化、轻量化、集成化。首先,从FPA的热-机械效应出发,介绍了光读出FPA红外成像系统的工作原理;然后,针对通常采用的光读出FPA红外成像系统体积大、重量大、结构复杂缺陷,提出了高集成度的新型光读出系统;接着,在分析讨论读出光路像差容限、特点的基础上,对以异形棱镜为核心元件的光读出系统进行了具体的光学仿真设计;最后,设计了集光、机、电、软技术的集成式光读出FPA红外成像系统。对系统样机测试结果表明:在确保成像性能的前提下,光读出FPA红外成像系统的体积减小到175 mm×83 mm×105 mm。以异形棱镜为核心元件的光读出技术,在满足成像精度和灵敏度的前提下,可减小读出系统的复杂程度,有效降低了光读出FPA红外成像系统的体积和重量,从而促进光读出FPA成像系统的工业化应用。     

The optical measurement station for complex testing of microelements

The paper presents a concept of optical measurement station for complex testing of microelements including MEMS, MOEMS and electronic components and assemblies. The wide selection of examples proves that the specific measurement requirements are fulfilled by alternative usage of combined conventional and grating interferometers CI/GI (reflective surfaces), in-plane and out-of-plane ESPI (scattering surfaces) and digital holographic interferometry DHI (mixed surfaces) supported by thermovision. All these methods are realized by integrated microinterferometer (IWaM) based on a glass waveguide or air cavity waveguide arrangements. The air cavity IWaM allows to form a thermal output for combined thermovision CI/GI or ESPI measurements.IWaM has a compact design insensitive to mechanical vibrations and may be easily rearranged to work with the selected measurement techniques. It is also fully integrated with an optical microscope and it is designed to work both in laboratories and in production environments.     

The use of a diode laser in an ESPI system

The use of a diode laser in an ESPI system is reported. These lasers have considerable potential advantages over gas lasers in terms of convenience, cost and lifetimes, and may eventually replace the latter in this type of instrument.     

室内多波段光轴一致性测试系统的设计

介绍用于室内检测多波段光电设备光轴一致性的测试系统。该系统采用准直平行光管为测试系统提供无穷远目标。为满足全波段测试，光束无中心遮拦，系统选用离轴抛物面全反射光学系统。采用多光谱分光镜为激光光斑提供瞄准基准，带温控热十字丝的高斯目镜为红外和可见光波段提供瞄准基准，实现了光电设备之间可见与红外、可见与激光、激光与红外光轴的一致性测试。系统具有测试精度高、测试结果可靠等特点。根据初步估算，可见与红外、可见与激光、红外与激光之间的光轴一致性测试精度分别达到了4.01″， 1.08″和 4.05″的水平。该系统有效解决了多波段光测设备光轴间的一致性测试问题。     

A compact ESPI system for displacement measurements of specular reflecting or optical rough surfaces

A stable and compact speckle interferometer for doing out-of-plane displacement measurements on reflective as well as diffusely scattering object surfaces is demonstrated. The set-up is based on a nearly path length compensated interferometer of the Fizeau type and uses diffuse illumination of the object combined with a speckled reference wave. This combination eliminates the need for special optical components, and the interferometer can be built of commonly available components. The diffuse illumination wave is obtained by scattering coherent light from a diffusely scattering surface. The speckled reference wave is established by reflecting a part of the diffuse illumination wave from a glass plate placed in front of the object. Besides relaxing the alignment tolerances of the set-up, the diffuse illumination eliminates the need for any preparation of the surface under test, which turns the system into a candidate for testing micro mechanical systems. When using the interferometer for measurements of the eye, the risk of focusing the laser beam on the retina is decreased due to the diffuse object illumination.     

远场光钳与近场光钳的发展

以经典光学为基础的光钳技术(又称"光镊")在生物、物理和化学等领域得到了广泛的发展和应用,但是该技术受到高倍显微物镜的尺寸和光学衍射极限等多种因素的制约,从而限制了其进一步发展。而远场光纤光钳和近场光钳技术,从不同方面克服了传统光钳的局限。回顾了传统光钳、远场光纤光钳和近场光钳的发展,着重讨论了各种方法的工作原理、实验方法和技术性能,对这几种光钳技术进行了深入地总结和细致地比较。     

基于MEMS光开关的机群系统光互连网络

基于MEMS光开关设计了星型环型混合拓扑的光互连网络,为其开发了具有硬件路由功能的光互连网络控制卡(ONIC),以LAN为控制网络实现了对MEMS光开光的动态配置。提出了影响网络系统整体性能的关键因素,分析并测试了光互连网络的通信性能。环网稳定带宽达51Mb/s,峰值数据传输率可达1Gb/s,且数据量在3Mb以上时,网络整体性能明显提高。     

Use of personal computers for an integrated personnel dosimetry system

A dosimetric data processing system has been developed using inexpensive and simple small computers. Designed for limited dosimetry activities, this system can be operated by people with no special computer training, and is briefly described below.

     

集成光学电场探头测量HEMP的系统误差分析

讨论了集成光学电场探头测量高空电磁脉冲（HEMP）的系统误差。根据探测器传输函数和HEMP的表达式得出了误差方程。并通过对HEMP表达式的特征分析,对误差方程进行了简化。通过方程的求解,分析了探测器和HEMP波形的各项参数对测量结果的影响。结果表明：误差随着双指数波幅值、半宽/前沿和探测器工作点漂移的增大而增大;探测器的5%和10%系统测量误差对应的最大测量幅值分别为半波电场的0.165倍和0.23倍。该结论可为此类探测器的使用提供参考。     

Design of an electromagnetic system for wide-band optical modulators

The parameters of a slot-type electromagnetic system that can be used in ultrahigh-frequency wide-band optical modulators are studied. Analytical expressions for the bandwidth of the device are obtained, and this parameter in prototypes is estimated. Experiments on optical radiation modulation by microwave signals show that these electromagnetic systems are promising for volume optical modulators.     

线缆系统电磁脉冲效应测量系统研制和试验

分析了实验室瞬态X射线产生的系统电磁脉冲(SGEMP)效应测试所面临的技术问题,提出了解决方法、措施以及实验室模拟瞬态X射线的SGEMP模拟试验方法。通过电子屏蔽、电磁屏蔽、光电隔离、信号对称提取等特殊技术处理,解决了SGEMP效应模拟试验方法和测量系统抗X射线、抗电磁辐射等技术问题,并在大型瞬态X射线模拟源上,测出了瞬态X射线辐照时金属腔内线缆的SGEMP效应波形及幅值。     

线缆系统电磁脉冲效应测量系统研制和试验

分析了实验室瞬态X射线产生的系统电磁脉冲(SGEMP)效应测试所面临的技术问题,提出了解决方法、措施以及实验室模拟瞬态X射线的SGEMP模拟试验方法。通过电子屏蔽、电磁屏蔽、光电隔离、信号对称提取等特殊技术处理,解决了SGEMP效应模拟试验方法和测量系统抗X射线、抗电磁辐射等技术问题,并在大型瞬态X射线模拟源上,测出了瞬态X射线辐照时金属腔内线缆的SGEMP效应波形及幅值。     

An integrated reconfigurable optical add-drop multiplexer based on using an opto-VLSI processor and a 4-f imaging system

A novel integrated reconfigurable optical add-drop multiplexer (ROADM) structure is proposed and demonstrated experimentally. The ROADM employs an interface substrate that enables the integration of a fiber-lens collimator array and an Opto-VLSI processor to realise a 4-f imaging system through optical beam steering. Phase hologram optimization of the Opto-VLSI processor is investigated, for maximizing the number of wavelength channels while keeping adequate insertion loss and crosstalk levels. Experimental results are shown, which demonstrate a broadband operation and the principle of the ROADM with crosstalk of less than −30.5 dB and insertion loss of less than 6 dB for the drop and through operation modes.     

运载火箭一体化测发系统的并行测试研究

现役运载火箭一体化测发系统的单任务测试模式,已无法满足运载火箭的高密度、快速测发的需求。通过控制软件多线程设计实现多任务控制的并行处理;使用分布式执行终端,同步完成并行测试功能。设计具有包含多任务信息的通讯协议,实现并行测试信息的网络传输。利用软件的共享缓存技术实现多任务之间的信息交互。在信息传输中通过字节流模式进行先进先出的实时通信,保证了运载火箭测发的实时性。通过对一体化测发系统的并行测试研究,可实现一套测发控系统对箭上多个子系统同时进行测试。 并行测试技术的研究利用了计算机系统并行处理能力,通过测发软件的并行设计,实现可由用户控制的多任务并行测试系统,提高了运载火箭的测试效率和节省测试费用,是解决运载火箭高密度、低成本发射的一种技术途径。