离子辐照产生的空位型缺陷对Si中B原子热扩散的影响

使用二次离子质谱仪分析了附加的空位型缺陷对单晶Si中注入B原子热扩散的影响. Si中B原子是通过30keV B离子室温注入而引入的, 注入剂量为2×10¹⁴cm^－2. Si中附加的空位型缺陷通过两种方式产生: 一是采用40或160keV He离子注入单晶Si到剂量5×10¹⁶cm^－2,并经800°C退火1h; 二是采用0.5MeV F或O离子辐照单晶Si到剂量5×10¹⁵cm^－2.结果显示, 不同方式产生的附加的空位型缺陷均能抑制注入的B原子在随后热激活退火中发生瞬间增强扩散效应, 并且抑制的效果依赖于离子的种类和离子的能量. 结合透射电子显微镜和卢瑟福背散射分析结果对以上抑制效应进行了定性的讨论.     

非晶熔石英表面等离子体刻蚀过程 中的表面晶化研究

本工作采用电子回旋共振(ECR)低压等离子体刻蚀技术, 刻蚀非晶熔石英表面. Ar/CF₄为反应气体刻蚀后再经O等离子体钝化, 非晶熔石英表面出现晶化现象. 晶化层约几百纳米厚. Ar/CF₄在ECR的电磁场作用下产生F离子与C离子, F离子使熔石英表面的Si-O共价键断裂, 并释放出O离子. C离子与O离子迅速键合生成CO₂, 而被断键的Si原子与四个F原子键合生成气态SiF₄. 熔石英原始表面被去除的同时, 在新的表面留下大量不饱和Si原子. 不饱和Si原子在高温条件下被O等离子钝化, 形成结晶态α 方石英.     

高能Pb离子辐照注碳SiO2的红外谱研究

室温下，先用120keV的C离子注入二氧化硅薄膜样品至剂量2.0×1017、5.0×1017或8.6×1017ions/cm2，再用950MeV的Pb离子分别辐照至剂量5.0×1011、1.0×1012或3.8×1012 ions/cm2，然后测量样品的傅里叶变换红外(FTIR)光谱. 通过分析测量得到的傅里叶变换红外谱，发现Pb离子辐照在注碳SiO₂样品中可引起大量的Si－C和Si (C)－O－C等化学键的形成，大剂量Pb离子辐照可在大剂量注碳的SiO₂中产生分子CO₂. 大量的Si－C键的存在和分子CO₂的形成，预示着高能Pb离子辐照在注碳SiO₂样品中有可能形成了纳米Si团簇和/或SiC晶粒.     

快重离子辐照引起Ni/SiO2界面原子混合及相变研究

在室温下用308 MeV的Xe离子和853 MeV的Pb离子辐照Ni/SiO2样品, 用卢瑟福背散射和X射线衍射技术对样品进行了分析。 通过分析Ni/SiO2样品中元素成分分布和结构随离子辐照剂量和电子能损的变化, 探索了离子辐照在Ni/SiO2样品中引起的界面原子混合与结构相变现象。 实验结果显示, Xe和Pb离子辐照均能引起明显的Ni原子向SiO2基体的扩散并导致界面附近Ni, Si和O原子的混合。 实验观测到低剂量Xe离子辐照可产生NiSi2相, 而高剂量Xe离子辐照则导致了Ni3Si和NiO相的形成。 根据热峰模型, Ni原子的扩散和新相的形成可能由沿离子入射路径强电子激发引起的瞬间热峰过程驱动。Ni/SiO2 interface were irradiated at room temperature with 308 MeV Xe ions to 1×1012, 5×1012 Xe/cm2 and 853 MeV Pb ions to 5×1011 Pb/cm2, respectively. These samples were analyzed using Rutherford Backscattering Spectrometry (RBS) and X ray diffraction spectroscopy (XRD), from which the intermixing and phase change were investigated. The obtained results show that both Xe and Pb ions could induce diffusion of Ni atoms to SiO2 substrates and result in intermixing of Ni with SiO2. Furthermore, 1.0×1012 Xe/cm2 irradiation induced the formation of NiSi2 and 5.0×1012 Xe/cm2 irradiation created Ni3Si and NiO phases. The diffusion of Ni atoms and the formation of new phase may be driven by a transient thermal spike process induced by the intense electronic energy loss along the incident ion path.     

a-Si∶O∶H薄膜微结构及其高温退火行为研究

以微区Raman散射、X射线光电子能谱和红外吸收对等离子体增强化学气相沉积(PECVD)法制备的氢化非晶硅氧(a-Si∶O∶H)薄膜微结构及其退火行为进行了细致研究.结果表明a-Si∶O∶H薄膜具有明显的相分离结构,富Si相镶嵌于富O相之中,其中富Si相为非氢化四面体结构形式的非晶硅(a-Si),富O相为Si,O,H三种原子随机键合形成的SiO_x∶H(x≈1.35).经1150℃高温退火,薄膜中的H全部释出;SiO_x∶H(x≈1.35)介质在析出部分Si原子的同     

a-Si:H掺杂机理的研究

本文利用CNDO/2量子化学理论方法,对P和B原子在四面体配位的Si₄₆和Sl₄₆H₆₀H₄^*原子集团中置换Si原子前后的原子集团能量和能态分布变化进行了计算.计算结果表明:1)在Si₄₆H₆₀H₄^*原子集团中用P(或B)置换引Si原子后在能隙中明显地出现施主(或受主)态子带,同样在Si_{46相似文献}   

低能质子辐照ZnO/silicone白漆产生微观损伤的红外光谱研究

 通过空间综合辐照模拟设备对能量小于200 keV质子辐照下ZnO/silicone白漆光学性能变化及损伤机理进行研究。结果表明,ZnO/silicone白漆的光学性能退化主要发生在可见光区,太阳吸收比随质子辐照能量、注量的增加而增大。借助傅里叶变换红外光谱分析技术研究了质子辐照ZnO/silicone白漆时有机硅树脂的光学性能退化机理。质子辐照使ZnO/silicone白漆中游离氧含量增加,氧化硅原子上的有机取代基使Si—C链断裂,并生成活性羟基,而这种活性羟基能促使有机硅树脂内Si—O—Si键的裂解。同时Si—O—Si链内氧原子未成键的孤对电子与邻近硅原子的3d空轨道配位,降低了π*轨道的能量,提高了对光吸收的几率,增强了n→π*电子跃迁,使吸收带红移,从而导致ZnO/silicone白漆光学性能退化。     

He,Au离子辐照AuCu_3致元素表面偏析

采用磁控溅射方法在单晶硅(111)衬底上制备了AuCu_3薄膜,用2 MeV He离子和1 MeV Au离子对薄膜进行辐照,用卢瑟福背散射对He,Au离子辐照前后AuCu_3薄膜近表面的成分变化进行了分析,对不同离子辐照导致的表面元素偏析行为进行了研究.结果表明:当2 MeV He离子辐照时,随着辐照剂量增大,观察到样品近表面Au元素偏析的趋势;当1 MeV Au离子辐照时,随着辐照剂量增大,观察到样品近表面Cu元素偏析的趋势,与He离子辐照相反.通过对He,Au离子在样品中产生的靶原子空位及其分布分析,发现靶原子空位浓度分布的梯度是导致两种不同表面元素偏析趋势的原因,空位扩散是其中的主要机理.     

X射线驻波方法研究半导体超薄异质外延层

利用双晶单色器和精密二圆衍射仪,在北京同步辐射装置建立了同步辐射X射线驻波实验技术,并用这一实验技术结合X射线衍射方法,研究了Si晶体中外延生长的超薄Ge原子层的微结构.实验结果表明,由于Ge原子的偏析,在Si晶体样品中形成了共格生长的Ge_xSi_1－x合金层,浓度平均值为x≈0.13;650℃退火会使Ge原子向表面扩散,Si晶体中的合金层消失,在晶体表面形成接近纯Ge的单原子层.     

α-Al2O3(0001)表面原子缺陷对ZnO吸附影响

采用基于密度泛函理论的分子动力学方法，对α-Al₂O₃(0001)表面 Al，O原子空位缺陷及其对ZnO吸附进行了理论计算.电子局域函数显示了表面空位处的电子密度变化，表面Al原子空缺处有非常明显的缺电子区域，悬挂键临近O的电子密度增大，有利于对Zn的吸附；O原子空缺处的Al原子处存在孤立电子，其ELF值为005—03，将有利于同电负性较大的O或O^2-结合.通过吸附动力学模拟与体系能量的计算发现，表面缺陷显著增强了表面 的化学吸附，空缺原子处都被吸附原子填补，吸附结合能远大于单晶表面的情况.在Al空缺的表面，由于ZnO的O与表面O形成双键，破坏了α-Al₂O₃(0001)表面O六 角对称结构，减小了 O的表面扩散，从而不利于规则的ZnO薄膜生长.相反，O的空缺表面，弥补了α-Al_{2O3(0001)表面O空位缺陷，不影响基片表面O六角对称结构.}     

Mechanism of boron diffusion in amorphous silicon

We have elucidated the mechanism for B migration in the amorphous (a-) Si network. B diffusivity in a-Si is much higher than in crystalline Si; it is transient and increases with B concentration up to 2 x 10(20) B/cm(3). At higher density, B atoms in a-Si quickly precipitate. B diffusion is indirect, mediated by dangling bonds (DB) present in a-Si. The density of DB is enhanced by B accommodation in the a-Si network and decreases because of a-Si relaxation. Accurate data simulations allow one to extract the DB diffusivity, whose activation energy is 2.6 eV. Implications of these results are discussed.     

Mechanisms of ion-beam-enhanced diffusion in amorphous silicon

We have investigated ion-beam-enhanced diffusion of Au in undoped and B doped amorphous Si. The diffusion coefficients depend linearly on ion flux and exibit an Arrhenius-like temperature dependence with an activation energy of 0.37 eV in the temperature range 200–350° C. Moreover the diffusivity is enhanced by a factor of 5 by B-doping at a concentration of 1×10²⁰ atoms/cm³. A similar enhancement is observed in thermal diffusion of Au which has an activation energy of 1.5 eV. On the basis of these results a model for the ion-beam-enhanced diffusion of Au is proposed where the high density of defects present in amorphous Si act as traps for the fast moving interstitial Au atoms. The effectiveness of this trapping process can be changed by the high concentration of mobile defects generated by the beam and also by a change in the charge state of the traps induced by the presence of B.     

Si中掺杂原子的瞬间增强扩散现象及抑制方法

简要地介绍了单晶Si中注入掺杂原子在热激活退火中发生的瞬间增强扩散现象 ,综述了该现象发生的可能的微观机制和目前提出的几种抑制方法 ,展望了高能重离子在该领域的应用前景.The transient enhanced diffusion in crystalline silicon implanted with dopants and followed by high temperature annealing to activate the dopants is introduced. The physical mechanisms of transient enhanced dopant diffusion are then reviewed together with a short introduction to the proposed suppressing methods. Finally, the perspectives with using high energy heavy ions in this field are briefly discussed.     

Analysis of temperature and enhanced diffusion effects in sputtering of CrSi2

Previously reported experimental results on sputtering and enhanced diffusion processes in CrSi₂ during 100 keVXe⁺ bombardment at different temperatures have been quantitatively analyzed.The framework for the analysis is a simple theoretical model in which the Si atoms are considered mobile in a matrix of Cr atoms whose density is assumed constant and diffusivity is considered zero everywhere. Erosion velocity of the matrix (due to the sputtering of Cr atoms), sputtering and enhanced diffusion processes of Si atoms are taken into account in the mathematical model.In our analysis we show that the time evolution of the total number of sputtered atoms in binary solids cannot yield an unambigous conclusion as to the existence of preferential sputtering.Further, it is found that in the case of CrSi₂ the preferential sputtering of Si atoms depends on the suicide temperature.     

在超声分子束下气相四甲基硅分子的多光子解离与电离

采用超声分子束技术，以飞行时间质谱仪，在４１０～３７１ｎｍ内着重检测了不同波长、不同能量的激光对气相Ｓｉ（ＣＨ３）４分子多光子电离（ＭＰＩ）飞行时间（ＴＯＦ）质谱产物分布的影响。根据实验结果，对Ｓｉ（ＣＨ３）４分子多光子解离电离可能经历的通道和反应机理进行了讨论。     

200 nm-1000 nm spectra of light emitted in the impact of ~(40)Ar~(10+) upon Al and Si solid surfaces

This paper reports the measured results of the 200 nm-1000 nm characteristic spectral lines of Al, Si and Ar atoms when highly charged ions 40Ar10+ are incident upon Al and P-type Si surfaces. The ion 40Ar10+ is provided by the ECR ion source of the National Laboratory of the Heavy Ion Accelerator in Lanzhou. The results show that when the low-speed ions in the highly charged state interact with the solid surfaces, the characteristic spectral lines of the target atoms and ions spurted from the surfaces can be effectively excited. Moreover, because of the competition of the non-radiation de-excitation of the hollow atom by emitting secondary electrons with the de-excitation process by radiating photons, the spectral intensity of the characteristic spectral lines of Ar atoms on the P-type Si surface is, as a whole, greater than that of Ar atoms on the Al surface.     

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采用分子动力学模拟方法研究了样品温度对Ar+与SiC样品表面相互作用的影响。由模拟结果可知,SiC样品中Si原子的溅射产额随着温度的升高而增加,而温度对C原子的溅射产额影响不大。在相同温度下,Si原子的溅射产额要高于C原子的溅射产额。溅射出来的Si原子和C原子主要来源于样品的表层区域,样品中的Si和C原子密度、键密度及它们的成键方式也发生了较大的变化。初始样品中Si和C原子的密度是均匀的,而被轰击过后的样品表面Si原子的密度要高于C原子,而样品中部C原子的密度要高于Si原子。初始样品都是Si-C键,成键方式为Si-Csp3;被轰击过后又有Si-Si和C-C键,成键方式也发生了变化,还有Si-Csp1和Si-Csp2。     

Poloidal rotation of main ions in the CT-6B tokamak

The poloidal rotation velocity of neutral hydrogen atoms is measured using the Doppler shift of the Hα spectral line emitted in the CT-6B tokamak. The poloidal rotation of hydrogen atoms is generated through the collisions and charge-exchanges with main ions (protons). Therefore, the rotation direction of main ions can be deduced from that of neutral hydrogen atoms. The experimental results show that the main ions rotate in the electron diamagnetic drift direction, the same as the impurity ions, in the plasma core. The neutral hydrogen atoms rotate also in the electron diamagnetic drift direction in the edge region of the plasma. However, the rotation direction of main ions in the edge region cannot be judged from the experimental result due to the long mean free path of hydrogen atoms in the edge region. An inward diffusion flux of hydrogen atoms toward the torus inside with a velocity of the same order of magnitude as their poloidal rotation is also observed.     

200 nm–1000 nm spectra of light emitted in the impact of <Superscript>40</Superscript>Ar<Superscript>10+</Superscript> upon Al and Si solid surfaces

This paper reports the measured results of the 200 nm–1000 nm characteristic spectral lines of Al, Si and Ar atoms when highly charged ions ⁴⁰Ar¹⁰⁺ are incident upon Al and P-type Si surfaces. The ion ⁴⁰Ar¹⁰⁺ is provided by the ECR ion source of the National Laboratory of the Heavy Ion Accelerator in Lanzhou. The results show that when the low-speed ions in the highly charged state interact with the solid surfaces, the characteristic spectral lines of the target atoms and ions spurted from the surfaces can be effectively excited. Moreover, because of the competition of the non-radiation de-excitation of the hollow atom by emitting secondary electrons with the de-excitation process by radiating photons, the spectral intensity of the characteristic spectral lines of Ar atoms on the P-type Si surface is, as a whole, greater than that of Ar atoms on the Al surface.