溶胶-凝胶法制备SiO2-TiO2平板光波导工艺研究

采用溶胶-凝胶法制备了SiO₂-TiO₂平板光波导,计算了平板光波导通光条件,分析了硅/钛溶胶-凝胶材料的热性能,观测了平板光波导的结构形貌,并测试了其通光损耗。结果表明：经过200℃,30 min干燥处理的凝胶薄膜呈疏松多孔状态,对于非对称平板波导,存在芯层通光截止厚度,而且当SiO₂-TiO₂芯层厚度为0.5 μm时,SiO₂下包层厚度至少有6 μm才能防止1550 nm波长光泄露入单晶硅衬底中。制备的光波导对于1550 nm波长光传输损耗最小值为0.34 dB/cm。     

Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

The UV wavelength region is of great interest in absorption spectroscopy, which is employed for chemical analysis, since many organic compounds absorb in only this region. Germanium-doped silica, which is often preferred as the waveguide core material in optical devices for telecommunication, cannot accommodate guidance below 400 nm, owing to the presence of UV-absorbing centers. We show that silicon oxynitride (SiO(x) N(y)) waveguides exhibit very good UV performance. The propagation loss for 24-microm -wide SiO(x)N (y) waveguides was found to be ~1.0dB/cm in the wavelength range 220-550 nm. The applicability of these waveguides was demonstrated in a biochemical microsystem consisting of multimode buried-channel SiO(x)N (y) waveguides that were monolithically integrated with microfluidic channels. Absorption measurements of a beta -blocking agent, propranolol, at 212-215 nm were performed. The detection limit was reached at a concentration of 13microM , with an optical path length of 500microm (signal/noise ratio, 2).     

Low-loss polymeric optical waveguides with large cores fabricated by hot embossing

A simple low-cost method of fabricating polymeric optical waveguides with large core sizes for plastic optical fibers is presented. The waveguides are fabricated by hot embossing with an ultraviolet-cured epoxy resin stamper. The stamper is fabricated by replication of a rectangular groove mold that is made from silicone rubber replicated from a ridged original silicon master. The master is fabricated by anisotropic etching of (110) single-crystal silicon. Optical waveguides with large core sizes of 100-500 microm have been fabricated, and a low propagation loss of 0.19 dB/cm at 650 nm was achieved.     

Photochemical welding of silica microspheres to silicone rubber by ArF excimer laser

Transparent fused silica (SiO₂) microspheres 2.5 μm in diameter were photochemically welded to transparent, flexible silicone rubber ([SiO(CH₃)₂]_n) substrate by 193 nm ArF excimer laser induced photochemical modification of silicone into silicon oxide. Single layer of silica microspheres was easily formed on an adhesive silicone rubber before laser irradiation after dropping of silica microspheres dispersed in ethanol and subsequent tape peeling. The welding rate, the percentage of welded microspheres tested by ultrasonic cleaning with ethanol, was examined by varying the single pulse fluence and irradiation time of ArF excimer laser. The welding layer underneath microsphere, silicon oxide, was also found to emit white light of strong intensity under UV light illumination.     

Fabrication of silica-on-silicon planar lightwave circuits by P ECVD and ECR

Plasma enhanced chemical vapor deposition (PECVD) and electron cyclotron resonance (ECR) etching were used in the development of silica layers for planar waveguide applications. The addition of GeH4 to silica was used to control the refractive index of core layers with core-to-clad index differences in the range of 0.2％-1.3％. Refractive index uniformity variance of ±0.0003 was achieved after annealing for 4-inch Si 〈100〉 wafers. The core layers with thickness up to 6 μm were etched by ECR with optimized recipe and mask material. Low-loss silica-on-silicon waveguides whose propagation loss is approximately 0.07 dB/cm at 1550 nm are fabricated.     

Single-step writing of Bragg grating waveguides in fused silica with an externally modulated femtosecond fiber laser

For the first time to our knowledge, high-strength (>30 dB) first-order Bragg grating waveguides were fabricated in bulk fused silica glass in a single-scanning step by modulating a high-repetition-rate femtosecond fiber laser with an external acousto-optic modulator. The modulation induced a waveguide segmentation by delivering controlled bursts of laser pulses to define an array of partially overlapped refractive index voxels. With appropriate choice of modulation frequency and sample scanning speed, low loss waveguides could be formed at high writing speeds to yield sharp Bragg spectral resonances tunable over the 1300 to 1550 nm telecom band. Effects of acousto-optic modulation duty cycle on propagation loss and grating strength are characterized. This modulation method offers facile control and integration of multiwavelength Bragg grating devices to enhance overall functionality of optical circuits in three-dimensional geometries.     

Synthesis of photosensitive poly(methyl methacrylate-co-glycidyl methacrylate) for optical waveguide devices

Photosensitive poly(MMA-co-GMA) for optical waveguide was synthesized, and the refractive index of the polymer film was tuned in the range of 1.481–1.588 at 1550 nm by mixing with bis-phenol-A epoxy resin. The film, which was made by spinning coated the poly(MMA-co-GMA) with photo initiator, had good UV light lithograph sensitivity, high glass transition temperature (T _g : 153°C, after crosslinking) and good thermal stabilities (T _d : up to 324°C, after crosslinking). The optical waveguides with very smooth top surface were fabricated from the resulting polymer by direct UV exposure and chemical development. For waveguides with cladding, the propagation losses of the channel waveguides were measured to be below 3 dB/cm at 1550 nm.     

高功率激光宽光谱减反膜的溶胶-凝胶旋转法制备工艺

 采用溶胶-凝胶法用旋转镀膜工艺在K9玻璃基片上制备出了SiO₂和有机硅单层减反膜以及有机硅-SiO₂双层减反膜。考察了旋转速度对SiO₂和有机硅单层膜的中心透射波长、膜层折射率等基本光学性质的影响，实验确定了双层膜的涂敷工艺。透射光谱测量表明，采用本文工艺条件制备的有机硅 SiO₂双层膜在430～800nm范围内透射率达99％以上。     

Versatile control of geometric birefringence in elliptical hollow optical fiber

A novel optical fiber fabrication technique was developed by converting the symmetry of the silica substrate into the germanosilicate ring core to efficiently introduce geometric birefringence in an elliptical hollow optical fiber. Due to high ellipticity in the hollow ring core, the fiber provides an extremely high group birefringence of 2.35 x 10(-3) at 1550 nm. Single-mode single-polarization guidance was also experimentally confirmed, with a bandwidth of approximately 35 nm. The generic adiabatic mode conversion capability in the taper also provided a stable fusion splice to conventional single-mode fiber with low loss and high tensile strength.     

Low cost fabrication of SiO2 optical waveguides by laser direct writing on Ti-doped Sol-Gel films

A commercial direct laser writing (DLW) system operating at 1070 nm was used to fabricate SiO₂ optical waveguides on silicon wafers. A Ti-doped SiO₂ Sol-Gel film was deposited on the SiO₂/Si substrate by the dip-coating technique, based on which SiO₂ optical waveguides were patterned by DLW using a Ytterbium fiber laser and followed by chemical etching. The effects of laser parameters and the preheated temperature of Sol-Gel films on the dimensions of optical waveguides were studied systematically. The differences of etching rate between laser irradiated and non-irradiated areas in Sol-Gel films preheated at various temperatures are characterized by measuring the thickness of the films. Results demonstrate that the available laser power density range for laser densification and the width of the patterned optical waveguides are influenced strongly by the preheated temperature of the Sol-Gel films. The width of the optimized optical waveguide in this work is 25 μm. The minimum propagation loss of the fabricated optical waveguides is 1.7 dB cm⁻¹ at the wavelength of 1550 nm.     

Ultra compact hybrid plasmonic–photonic coupler: configuration of metal–silica–silicon

In this work, a novel and practical configuration as a hybrid plasmonic–photonic coupler based on silicon (Si) nanofibers, silica waveguides and metal nanoparticles is examined and investigated. All of utilized waveguides, fibers and nanoparticles are embedded in an \(\hbox {Mg}_{2}\hbox {F}\) crystal host. Integrated plasmonic–photonic coupler provides significant transmission efficiency during guiding and propagating of light. Utilizing enhanced plasmonic waveguides helps to reduce the inherent losses such as scattering into the far-field and absorption of optical power inside the employed components, especially in nanoparticles. The transmission loss component under transverse electric excitation (TE) for the superstructure has been calculated as approximately \(\gamma _{T}=3\,\hbox {dB}/675\)  nm. Also, we investigate the coupling efficiency at overlapping regions between Si nanofibers and silica ( \(\hbox {SiO}_{2})\) waveguides which is referred to near-field interactions. Transmitted power ratio and the group velocity of the propagated light are computed and depicted for the proposed coupler.     

2R-regenerative all-optical switch based on a highly nonlinear holey fiber

We report the fabrication of a highly nonlinear holey fiber made from pure silica with an effective area of just ~2.8mu;m(2) at 1550 nm. We believe this to be the smallest effective area yet measured for a holey fiber at 1550 nm. We also report the operation of a 2R regenerative optical switch based on just 3.3 m of the fiber that is shown to have 30 times the nonlinear figure of merit of previous devices based on dispersion-shifted fiber.     

Ultrafast laser waveguide writing: Lithium niobate and the role of circular polarization and picosecond pulse width

For the first time to our knowledge, ultrafast laser writing has generated room-temperature stable guided-wave optics in bulk lithium niobate for the telecommunication spectrum. Among a seven-dimensional parameter space for waveguide optimization, two frequently overlooked parameters, pulse duration and polarization, were found to be key in overcoming undesired nonlinear optical responses imposed by this material. Single-mode waveguides were best formed with circularly polarized light having a relatively long pulse duration of approximately 1.0 ps. The waveguides were highly polarization dependent and guided in both telecommunication bands near 1300 and 1550 nm, exhibiting losses as low as 0.7 dB/cm.     

A mechanically tuned Kerr comb in a dispersion-engineered silica microbubble resonator

This paper discusses the developement and investigation of a silica microbubble resonator(MBR) that is optimized to cancel mode dispersion with material dispersion, at a wavelength of approximately 1550 nm and maintain a quality factor of an optical mode as large as 5.4 × 10~7. Benefitting from the near-zero dispersion and high quality factor, a primary optical comb is generated in the MBR using cascaded four-wave mixing processes, which span over 300 nm with several tens of teeth. Furthermore, the frequency comb could be gradually tuned by mechanically stretching the MBR. This tunable Kerr comb has multiple potential applications in precision measurements and sensing applications, such as molecular spectroscopy and ranging.     

用离子束溅射淀积的氧化物薄膜的折射率

介绍了用于波长为1550nm光通讯波分复用／解复用滤光片的离子束溅射的Ta2O5和SiO2薄膜在法里－珀罗多层膜中的折射率的实时所 方法及拟合方法及拟合结果，给出了它们的淀积时间，淀积速率和计算的光学厚度，分析了这些结果的可靠性。     

Spontaneous Raman scattering in ultrasmall silicon waveguides

We report spontaneous Raman scattering at 1550 nm in ultrasmall silicon-on-insulator (SOI) strip waveguides of 0.098-microm2 cross-sectional area. The submicrometer-scale dimensions provide tight optical confinement and, hence, highly efficient Raman scattering with milliwatt-level cw pump powers. The prospect of Raman amplification in such a deeply scaled-down waveguide device in the presence of various loss mechanisms, particularly free-carrier loss that arises from two-photon absorption, is discussed, and the feasibility of high-gain SOI-based fully integrated optical amplifiers is shown.     

Femtosecond laser fabrication of phase-shifted Bragg grating waveguides in fused silica

Phase-shifted Bragg grating waveguides (PSBGWs) were formed in bulk fused silica glass by femtosecond laser direct writing to produce narrowband (22±3) pm filters at 1550 nm. Tunable π and other phase shifts generated narrow passbands in controlled positions of the Bragg stopband, while the accurate placement of multiple cascaded phase-shift regions yielded a rectangular-shaped bandpass filter. A waveguide birefringence of (7.5±0.3)×10(-5) is inferred from the polarization-induced spectral shifting of the PSBGW narrowband filters.     

Low-loss silica-on-silicon waveguides

Waveguiding structures are one of the fundamental components of integrated photonic circuitry. Devices with low loss and a linear response across a wide wavelength range are especially desirable. In the present Letter, we have successfully developed and characterized low-loss silica waveguides integrated on a silicon substrate with a novel suspended cylinder geometry. The unique design creates a device that is effectively air clad, resulting in a large refractive index contrast for improved optical field confinement. The measured loss is constant from 658 to 1550 nm, and it is independent of the polarization of the input light and the input power.     

Spatial-spectral holographic correlator at 1536 nm using 30-symbol quadriphase- and binary-phase-shift keyed codes

Optical 30-symbol quadriphase-shift keyed (QPSK) and binary-phase-shift keyed (BPSK) codes were processed in a spatial-spectral holographic correlator with the Er(3+): Y(2)SiO(5) spectral hole-burning material operating at 1536 nm in the important 1550-nm communications band. The results demonstrate the ability of spatial-spectral holographic correlators to process QPSK codes and BPSK codes with the same apparatus. The high-fidelity correlations produced by this optical coherent transient device exhibit the low sidelobe characteristics expected for the codes used.     

Optical loss measurements in femtosecond laser written waveguides in glass

The optical loss is an important parameter for waveguides used in integrated optics. We measured the optical loss in waveguides written in silicate glass slides with high repetition-rate (MHz) femtosecond laser pulses. The average transmission loss of straight waveguides is about 0.3 dB/mm at a wavelength of 633 nm and 0.05 dB/mm at a wavelength of 1.55 μm. The loss is not polarization dependent and the waveguides allow a minimum bending radius of 36 mm without additional loss. The average numerical aperture of the waveguides is 0.065 at a wavelength of 633 nm and 0.045 at a wavelength of 1.55 μm. In straight waveguides more than 90% of the transmission loss is due to scattering.