用等离子体辅助分子束外延生长氧化锌单晶薄膜

利用等离子体辅助分子束外延(P-MBE)方法,通过优化生长条件,在c平面蓝宝石(Al_2O_3)上生长出氧化锌(ZnO)单晶薄膜。使用反射式高能衍射仪(RHEED)原位监测到样品表面十分平整,X射线摇摆曲线(XRC)测得ZnO薄膜的<002>取向半峰全宽为0.20°,证实为ZnO单晶薄膜。室温下吸收谱(ABS)和光致发光(PL)谱显示了较强的激子吸收和发射,且无深能级(DL)发光。电学性能测量表明,生长的ZnO为n型半导体,室温下载流于浓度为7×10~(16) cm~(-3),与体单晶ZnO中的载流子浓度相当。     

分子束外延生长Sb薄膜及其量子尺寸效应

在GaAs(001)衬底上，用分子束外延生长Sb(111)薄膜，用反射式高能电子衍射仪原位监控生长过程，用透射电子显微镜观察薄膜结构，并用van der Pauw方法测量了电阻率随生长温度的变化，观察到Sb薄膜半金属/半导体转变及其量子尺寸效应． 关键词：     

分子束外延生长GaN薄膜的新方法

GaN是一种宽禁带半导体材料,非常适合于制作从蓝光到近紫外波段的光电器件,它也是Ⅱ-V族含氮化合物中研究得最充分的材料,近年来在国际上受到很大重视.在材料制备方面初步解决了p型掺杂的困难,从而制成了高功率的发光二极管. 目前生长GaN比较成功的方法是使用有机气体氮源的金属有机物化学汽相淀积.但它所生成的是纤锌矿(六角)结构,而且是生长在蓝宝石衬底上.生长温度也高达1000℃.要使得GaN材料有可能实用,需要采用低温生长的分子束外延(MBE)技术,并在GaAs,Si等半导体衬底上生长出闪锌矿(立方)结构的GaN薄膜.这样才有可能最终解决p型…     

用激光分子束外延在Si衬底上外延生长高质量的TiN薄膜

采用激光分子束外延技术,利用两步法,在Si单晶衬底上成功地外延生长出TiN薄膜材料.原子力显微镜分析结果显示, TiN薄膜材料表面光滑,在10 μm×10 μm范围内,均方根粗糙度为0842nm.霍耳效应测量结果显示,TiN薄膜在室温条件下的电阻率为36×10^-5Ω·cm,迁移率达到5830 cm²/V·S,表明TiN薄膜材料是一种优良的电极材料.X射线θ—2θ扫描结果和很高的迁移率均表明,高质量的TiN薄膜材料被外延在Si衬底 关键词： 激光分子束外延 TiN单晶薄膜 外延生长     

用激光分子束外延在Si衬底上外延生长高质量的TiN薄膜

采用激光分子束外延技术，利用两步法，在Si单晶衬底上成功地外延生长出TiN薄膜材料.原子力显微镜分析结果显示， TiN薄膜材料表面光滑，在10 μm×10 μm范围内，均方根粗糙度为0842nm.霍耳效应测量结果显示，TiN薄膜在室温条件下的电阻率为36×10^-5Ω·cm，迁移率达到5830 cm²/V·S，表明TiN薄膜材料是一种优良的电极材料.X射线θ—2θ扫描结果和很高的迁移率均表明，高质量的TiN薄膜材料被外延在Si衬底     

Pt/La0.67Sr0.33MnO3异质结中的反常霍尔效应

非磁/铁磁异质结构中存在很多有趣的演生现象,特别是,铂/铁磁异质结构中的反常霍尔效应是一个研究热点.采用脉冲激光沉积技术和射频磁控溅射技术制备出具有原子级接触界面的铂/锰酸锶镧异质结,并对异质结的电输运性能进行了系统的研究.实验发现,铂/锰酸锶镧异质结中存在由铂贡献的反常霍尔效应,这是由磁近邻效应诱导铂表现出铁磁性造成的.反常霍尔电阻随着温度的降低而急剧增加,并且在低于40 K时改变符号.反常霍尔电阻随铂厚度的增加而急剧降低,证实了铂的铁磁性起源于异质结界面.此外,异质结在低外加磁场下可能产生了拓扑霍尔效应,这是由异质结界面处的Dzyaloshinskii-Moriya相互作用诱导产生手性磁畴壁结构引起的.上述研究结果为进一步理解非磁/铁磁异质结构中的电子自旋和电荷输运之间的相互作用提供了实验基础.     

高Tc氧化物超导薄膜的分子束外延研究综述

高临界温度（Ｔｃ）氧化物超导体的研究日新月异。作为高Ｔｃ超导研究重要组成部分的氧化物超导薄膜物理和技术也得到了飞速发展。分子束外延（ＭＢＥ）作为一项高级精密的真空镀膜技术，也跟其它镀膜技术一样，在高Ｔｃ超导薄膜的研究中发挥了独特的作用并取得了许多重要成就。本文结合作者近年来在高温超导体ＭＢＥ研究方面的工作，对这一新兴领域的进展和概况作一综述性介绍，并对该领域未来的发展作一些展望     

分子束外延PbTe单晶薄膜的反常拉曼光谱研究

采用分子束外延(MBE)方法在BaF₂(111)衬底上生长了高质量的PbTe单晶薄膜， 拉曼光谱测量观察到了表面氧化物的振动模、布里渊区中心(q≈0)纵光学(LO)声子振动模以 及声子-等离子激元耦合模振动.随着显微拉曼光谱仪激光光斑聚焦深度的改变，各拉曼散射 峰的峰位、积分强度、半高宽等都表现出不同的变化趋势. 随着激光光斑聚焦位置从样品表 面上方3μm处变化到表面下方3μm处，PbTe外延薄膜的LO声子频率从119cm^-1移 动到124cm^{-1关键词： PbTe外延薄膜 拉曼散射 纵光学声子}     

分子束外延HgCdTe材料的光致发光研究

报道了分子束外延生长 Ｈｇ０．６８ Ｃｄ０．３２ Ｔｅ 材料的光致发光测量结果。研究了原生样品和退火处理样品、以及氮离子注入样品的低温光致发光特征。对光致发光的测试结果进行拟合得到的禁带宽度, 与用红外透射谱得到的薄膜禁带宽相近; 其半峰宽和带尾能量较小, 显示了较高的薄膜质量。样品经过退火后带尾能量降低, 双晶衍射的半峰宽也有明显的变窄     

SrRuO3超薄膜制备条件和拓扑霍尔效应的关联

使用激光分子束外延在SrTiO₃(001)衬底上生长SrRuO₃薄膜,并研究激光能量密度、生长温度和靶材表面烧蚀度等生长参数对于SrRuO₃表面形貌、基本磁电性质以及拓扑霍尔效应的影响.当在最优条件下生长SrRuO₃薄膜时,样品表面平整、台阶清晰,具有最低的金属-绝缘体转变温度,电阻率最低,且具有最显著的拓扑霍尔效应;而改变生长参数生长的SrRuO₃薄膜由于存在更多的缺陷,其表面较粗糙,金属-绝缘体转变温度增大,或表现出绝缘体行为,而拓扑霍尔效应会变弱甚至消失.     

Anomalous Hall effect of facing-target sputtered ferrimagnetic Mn4N epitaxial films with perpendicular magnetic anisotropy

Epitaxial Mn$_{4}$N films with different thicknesses were fabricated by facing-target reactive sputtering and their anomalous Hall effect (AHE) is investigated systematically. The Hall resistivity shows a reversed magnetic hysteresis loop with the magnetic field. The magnitude of the anomalous Hall resistivity sharply decreases with decreasing temperature from 300 K to 150 K. The AHE scaling law in Mn$_{4}$N films is influenced by the temperature-dependent magnetization, carrier concentration and interfacial scattering. Different scaling laws are used to distinguish the various contributions of AHE mechanisms. The scaling exponent $\gamma > 2$ for the conventional scaling in Mn$_{4}$N films could be attributed to the residual resistivity $\rho_{xx0}$. The longitudinal conductivity $\sigma_{xx}$ falls into the dirty regime. The scaling of $\rho_{\rm AH}=\alpha \rho_{xx0} +b\rho_{xx}^{n}$ is used to separate out the temperature-independent $\rho_{xx0}$ from extrinsic contribution. Moreover, the relationship between $\rho_{\rm AH}$ and $\rho_{xx}$ is fitted by the proper scaling to clarify the contributions from extrinsic and intrinsic mechanisms of AHE, which demonstrates that the dominant mechanism of AHE in the Mn$_{4}$N films can be ascribed to the competition between skew scattering, side jump and the intrinsic mechanisms.     

Morphological and optical properties of titanyl phthalocyanine films deposited by supersonic molecular beam epitaxy (SuMBE)

We studied the growth and properties of titanyl phthalocyanine (TiOPc) thin films made by supersonic molecular beam epitaxy (SuMBE). Interesting differences in the growth properties on amorphous (quartz) and crystalline (mica) substrates were found, indicating that SuMBE gives rise to an epitaxy of disc-like organic molecules on crystalline substrates. The combined control of the kinetic energy of the molecules in the supersonic beam specific to SuMBE and of the substrate temperature during deposition are the key parameters used to determine the final properties of the films. We show that SuMBE is a well-suited epitaxy method for the deposition of relatively large organic molecules, leading to layers of thin organic (single-)crystals with lateral dimensions in the micrometer range. By SuMBE we can control the growth of different polymorphs of TiOPc. We found and studied two ways to produce films of red and infrared absorbing phase II TiOPc, which is of interest for applications in organic solar cells.     

GaAs(001)衬底上分子束外延生长InNSb单晶薄膜

利用射频氮等离子辅助分子束外延(RF-MBE)技术在GaAs(001)衬底上生长稀氮 InNSb半导体薄膜,并通过原子力显微镜(AFM)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)和拉曼散射光谱等测量手段对样品的微结构和N组分等进行了表征.结果显示样品有较好的晶体质量,N组分可高达0.84%(XRD的结果).本文还对样品的输运性质进行了表征,结果显示样品在室温下具有较低的载流子浓度和较高的迁移率.另外,初步研究表明在InSb中掺入N可导致其室温磁阻明显下降. 关键词： 分子束外延 稀氮半导体 X射线衍射 拉曼光谱     

Raman study of the segregation of GaAs/AlAs heterostructures grown by molecular beam epitaxy

The Raman spectra of the optical confined phonons in the GaAs/AlAs ultra-thin layer superlattices grown with different growth conditions were used to determine the compositional profiles and to study the process of segregation at the heterointerfaces. A modified kinetic model was developed in order to calculate the compositional profiles in the samples under investigation. The comparison between the experimentally obtained compositional profiles and those calculated by the kinetic model allowed us to determine the parameters characterizing the segregation. It was shown that the increase of pressure of As acts equivalently to the decrease of the growth temperature, resulting in a more abrupt compositional profile.     

蓝宝石衬底上异质外延生长碳化硅薄膜的研究

报道了在蓝宝石(αAl2O3)衬底上采用atmosphericpressurechemicalvapor(APCVD)技术异质外延碳化硅薄膜材料的研究.通过引入ⅢⅤ族氮化物为中间的缓冲层,在C(0001)蓝宝石上成功地生长出SiC薄膜,经过四晶衍射分析,分别在3549°和7502°发现了6HSiC(0006)面和(00012)晶面族的对称衍射峰,显示SiC薄膜的晶体取向与(0001)面的衬底是相同的.扫描电子显微镜(SEM)的观察显示薄膜表面连续、光滑,不要利用二次离子质谱仪(SIMS)方法对生长膜层在纵 关键词： 碳化硅 外延生长 化学汽相淀积     

Effects of AlN nucleation layer thickness on crystal quality of AlN grown by plasma-assisted molecular beam epitaxy

In this paper,the effects of thickness of AlN nucleation layer grown at high temperature on AlN epi-layer crystalline quality are investigated.Crack-free AlN samples with various nucleation thicknesses are grown on sapphire substrates by plasma-assisted molecular beam epitaxy.The AlN crystalline quality is analysed by transmission electron microscope and x-ray diffraction (XRD) rocking curves in both (002) and (102) planes.The surface profiles of nucleation layer with different thicknesses after in-situ annealing are also analysed by atomic force microscope.A critical nucleation thickness for realising high quality AlN films is found.When the nucleation thickness is above a certain value,the (102) XRD full width at half maximum (FWHM) of AlN bulk increases with nucleation thickness increasing,whereas the (002) XRD FWHM shows an opposite trend.These phenomena can be attributed to the characteristics of nucleation islands and the evolution of crystal grains during AlN main layer growth.     

基于分子束外延生长的1.05 eV InGaAsP的超快光学特性研究

利用分子束外延方法制备了应用于四结光伏电池的1.05 eV InGaAsP薄膜, 并对其超快光学特性进行了研究. 温度和激发功率有关的发光特性表明: InGaAsP材料以自由激子发光为主. 室温下InGaAsP材料的载流子发光弛豫时间达到10.4 ns, 且随激发功率增大而增大. 发光弛豫时间随温度升高呈现S形变化, 在低于50 K时随温度升高而增大, 在50–150 K之间时减小, 而温度高于150 K时再次增大. 基于载流子弛豫动力学, 分析并解释了温度及非辐射复合中心浓度对样品材料载流子发光弛豫时间S形变化的影响.     

Structural and electrical properties of single crystalline and bi-crystalline ZnO thin films grown by molecular beam epitaxy

C-oriented ZnO epitaxial thin films are grown separately on the a-plane and c-plane sapphire substrates by using a molecular-beam epitaxy technique. In contrast to single crystalline ZnO films grown on a-plane sapphire, the films grown on c-plane sapphire are found to be bi-crystalline; some domains have a 30o rotation to reduce the large mismatch between the film and the substrate. The presence of these rotation domains in the bi-crystalline ZnO thin film causes much more carrier scatterings at the boundaries, leading to much lower mobility and smaller mean free path of the mobile carriers than those of the single crystalline one. In addition, the complex impedance spectra are also studied to identify relaxation mechanisms due to the domains and/or domain boundaries in both the single crystalline and bi-crystalline ZnO thin films.     

Fe3O4/MgO(100)薄膜的激光分子束外延与磁电学性能

 采用激光分子束外延方法,以烧结α-Fe₂O₃/为靶材,在MgO（100）基底上制备了Fe₃O₄薄膜。通过反射高能电子衍射原位观察了薄膜生长前后的表面结构,结果表明所生长的Fe₃O₄薄膜表面平整。经显微激光拉曼光谱和X光电子能谱分析证实所得薄膜表面成分为纯相Fe₃O₄。磁电学性能采用多功能物性系统测量,结果表明：当温度降至100 K附近时,薄膜电阻率有较大增加,Verwey相转变的范围变宽而且不明显,说明反向晶粒边界的存在;在7 160 kA·m^-1的磁场下,室温磁电阻达到-6.9%,在80和150 K温度下磁电阻分别达到-10.5%和-16.1%;薄膜的室温饱和磁化强度约为260 kA·m^-1,其矫顽磁场约为202 kA·m^-1。     

Current transport in ZnO/Si heterostructure grown by laser molecular beam epitaxy

The n-ZnO/p-Si heterojunction was fabricated by depositing high quality single crystalline aluminium-doped n-type ZnO film on p-type Si using the laser molecular beam epitaxy technique. The heterojunction exhibited a good rectifying behavior. The electrical properties of the heterojunction were investigated by means of temperature dependence current density-voltage measurements. The mechanism of the current transport was proposed based on the band structure of the heterojunction. When the applied bias V is lower than 0.15 V, the current follows the Ohmic behavior. When 0.15V 0.6 V), the space charge limited effect becomes the main transport mechanism. The current-voltage characteristic under illumination was also investigated. The photovoltage and the short circuit current density of the heterojunction aproached 270 mV and 2.10 mA/cm 2 , respectively.