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It is found that during glow-discharge nitriding, the flow bombarding the surface contains fast neutral particles that play a significant role in realization of the process along with charged particles.  相似文献   

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In plasma-assisted magnetron sputtering, the ion cathode fall region is the part of the plasma where the DC electric field and ion current evolve from zero to their maximum values at the cathode. These quantities are straightforwardly related to the deposition rate of the sputtered material. In this work we derive simple relations for the measurable axially averaged values of the ion density and the ion current at the ion cathode fall region and relate them with the deposition rate. These relations have been tested experimentally in the case of an argon plasma in a magnetron sputtering system devoted to depositing amorphous silicon. Using a movable Langmuir probe, the profiles of the plasma potential and ion density were measured along an axis perpendicularly to the cathode and in front of the so-called race-track. The deposition rate of silicon, under different conditions of pressure and input power, has been found to compare well with those determined with the relations derived.  相似文献   

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An abrupt change in the spectral width of optogalvanic (OG) signals of Kr atomic lines has been observed at a distance from the cathode wall where the signal itself changes its sign, by using a hollow cathode lamp whose cathode has its both ends open. The width is broader near the cathode wall with its magnitude varying by discharge current while the narrower width which is obtained on passing the laser beam in the central region of cathode cylinder is independent of the current. It is suggested that a well-defined region, where the particles of larger cross section of collisions with Kr atom are confined, is present in front of the cathode wall.  相似文献   

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Experimentally derived emission characteristics — the transfer ratio, angular distribution, energy distributionsN(E) andN(E x ) and energy-angular distribution of emitted electrons — are discussed on the basis of our theoretical model of the sandwich cathode. It was found that electrons during their transfer through the cathode are scattered in the dielectric layer mostly by interactions with optical phonons and traps and in the top metal electrode by collisions with conduction electrons. Comparison of our model with experimental results gave us approximate values of mean free paths and further cathode parameters.  相似文献   

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The form of the velocity distribution function of oscillating electrons in a low-pressure discharge with a hollow cathode is determined using the simple model of mathematical billiards. The distribution function is nonequilibrium and permits the development of instability of the plasma beam type.  相似文献   

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The mechanisms governing the distribution of the longitudinal electron flows over the cathode surface in a discharge with oscillating electrons are studied experimentally. The influence of the discharge gap length on the magnitude and distribution of the electron flows is investigated. It is shown that intense longitudinal electron flows in a tube of diameter d a =31 mm can form only with short anodes of length l a =2.5–3.5 cm. The distributions of the electron current over the cathode surface at various discharge conditions are determined.  相似文献   

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The results of at matrix formulation are used to discuss the pressure dependence of electron drift velocity in gases.  相似文献   

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The influence of the cathode surface unevenness on the angular and energy distributions of electrons emitted from MIM structures is studied. First, the structure of the surface of sandwich cathodes prepared by various technological processes is found with the help of optical and stylus methods for irregularities greater than several thousand Å. The exact expressions and their simplifications correcting the angular and normal energy distributions are derived for arbitrary relief of the cathode described by the surface distribution functiona (). The comparison of these expressions with experimental electron distributions shows that the surface unevenness disturbs only the central part of the angular distribution and that the error is roughly 5 per cent. The correction of the normal energy distribution is much smaller, and the total energy distribution does not depend on the structure of cathode surface at all.Ke Karlovu 5, Praha 2, Czechoslovakia.The author wishes to thank Dr. A. Ryska from TESLA Lankroun, for his help which enabled us to measure the cathode surface with the stylus method.  相似文献   

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The effective masses of electrons m n /m o in the intrinsic region are calculated on the basis of measurements of the temperature dependence of the total magnetic susceptibility and the Hall coefficient of single-crystal and polycrystalline specimens of n- and p-type InSb. It is shown that the effective masses m n /m o are constant in the range considered and their values for the various specimens are 3·43×10–2 to 3·53×10–2.  相似文献   

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We address the problem of transmission of electrons between two noninteracting leads through a region where they interact (quantum dot). We use a model of spinless electrons hopping on a one-dimensional lattice and with an interaction on a single bond. We show that all two-particle scattering states can be found exactly. Comparisons are made with numerical results on the time evolution of a two-particle wave packet, and several interesting features are found. For N particles, the scattering state is obtained within a two-particle scattering approximation. For a dot connected to Fermi seas at different chemical potentials, we find an expression for the change in the Landauer current resulting from the interactions on the dot. We end with some comments on the case of spin-1/2 electrons.  相似文献   

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