Data preparation and fabrication of DOE using electron-beam lithography

The application of electron-beam lithography to the generation of diffractive optical elements topology is examined. The formula for the estimation of exposure data volume for variable-shaped electron-beam lithography is presented as a function of diffractive optical element parameters and approximation accuracy. A special software dedicated to preparing exposure data for fabrication of diffractive optical elements is developed. Diffractive optical elements with an artificial refractive index are manufactured with a feature size much less than the wavelength. Design and experimental results on photomasks fabrication for an optical element focusing radiation into a ring with pregiven parameters are presented. The photomask set is manufactured for a reflecting optical element focusing the high power CO₂ laser beam into two points with required parameters for laser welding.     

用串行迭代算法设计具有长焦深功能的衍射光学元件

提出一种串行迭代算法,将它用于控制波前传播进行衍射光学元件设计.用此算法设计出能使半导体激光束聚焦并具有长焦深功能的衍射光学元件.模拟计算结果表明了此设计方法的有效性.该衍射光学元件已用光刻和离子刻蚀技术制备并进行了光学实验研究,取得了与理论设计一致的实验结果.     

双波长共焦衍射光学元件分析与设计

报道二维纯位相环带衍射光学透镜的研究。结果表明，在确定位置的像平面的光强分布呈现相当理想的光聚焦作用；同时以１．０６μｍ和０．６３２８μｍ两种波长为例，对双波长二维成像的环带衍射透镜进行分析计算，结果表明二种波长的光束都能聚焦于同一像平面。这种元件可方便地用于非可见激光中的对焦与光路调整。     

Design of a diffractive optical element for wide spectral bandwidth

A new method for eliminating the chromatic aberration of a diffractive optical element (DOE) for wideband wavelengths is presented. The wideband-wavelength diffractive optical element (WBDOE) consists of two aligned DOE's. The use of different dispersive materials for the two DOE's eliminates chromatic aberration. The design and simulation of a WBDOE for the visible spectrum are presented.     

Correction of dispersion distortion of femtosecond pulses by using the non-planar surface of diffractive optical elements

Peculiarities of propagation of femtosecond pulses through a focusing diffractive optical element(DOE)are considered.It is shown that the time delay between the pulse and phase wavefronts can be decreased by fabricating the DOE on the optimal curvilinear surface.     

Focusing light with a reflection photon sieve

An advanced type of diffractive optical element is presented that combines the concept of the photon sieve with an off-axis, off-normal incidence reflection geometry. Compared to transmission optical elements, the signal-to-background ratio is significantly increased by separating the first from other diffraction orders without drastically reducing the size of the smallest diffractive element. The reflection photon sieve produces sharp foci at maximum contrast and offers the advantages of effective heat dissipation and a large working space above the focal plane. Experimental results for a device working at a photon energy of 100 eV are presented and compared to theory.     

折衍射混合复消色差望远物镜中的色球差

一个正透镜、一个负透镜及一个衍射光学元件以不同的组合可以构成两种折衍射混合光学系统.当这两种系统消球差、彗差及复消色差后会产生不同的色球差.通过赛德尔像差理论,分析了这两种结构产生不同色球差的原因.计算表明当衍射光学元件以负透镜的平面为基底时产生的色球差为以正透镜的平面为基底时产生的色球差的7倍.对衍射光学元件以负透镜的平面为基底的情形,提出了减小系统色球差的解决办法,使系统色球差减小到0.307 mm.另外设计了一个传统复消色差光学系统,并和折衍射混合光学系统进行了比较,分析表明,衍射光学元件可代替传统光学系统中的特殊光学材料并使系统达到相同的成像质量.最后讨论了衍射光学元件的衍射效率对系统成像质量的影响.     

亚波长衍射微透镜的设计

设计了连续浮雕衍射微透镜和与其等效的二元亚波长衍射微透镜,采用旋转体时域有限差分法对通过计算机辅助设计出的元件进行了严格的矢量分析,给出了各元件在焦平面的场强分布.分析结果表明,本文设计的二元亚波长微透镜对连续浮雕微透镜有很好的等效效果;填充因子的脉冲宽度调制法要优于填充因子的线性近似法;制作相对误差不大时深度误差和宽度误差对微透镜聚光能力的影响不大.     

A diffractive optical element for shaping arbitrary beams

A design method is presented for an optical element that shapes an arbitrary collimated beam. The optical element consists of a pair of diffractive optical elements (DOEs). The outgoing beam is also collimated, and can have any desired intensity profile. The phase functions of the DOEs are computed by minimizing an appropriate cost function under an energy conservation constraint.     

折衍混合单透镜的色球差校正研究

分析研究了小视场折射混合单透镜的设计中，当衍射面同时用于消色差和球差时光焦度分配的最优方案，得到了改进的光焦度分配公式，通过设计实例表明，由该改进公式可得到了较好的初始结构，能够有效地克服了衍射光学透镜校球差时产生的较大的色球差，验证了此改进公式的正确性和有效性，此改进公式对折衍混合系统的设计具有指导意义。     

新型轻量化可见光光谱仪成像系统研究与分析

利用衍射光学元件消色差和对波面进行任意整形及自由曲面光学元件校正像差的特性,将衍射光学元件和自由曲面光学元件应用于传统可见光光谱成像光谱仪成像系统中,提出了一种新型的可见光光谱成像光谱仪成像系统,基于衍射光学元件独特的负色散特性,用一片折射/衍射混合光学元件代替传统的双胶合透镜来实现消色差,基于自由曲面光学元件的多自由度特性,在系统中引入两个自由曲面光学元件对系统中的像差进行有针对性的校正,针对具体的设计实例给出了详细的设计步骤,设计结果表明,在相同的参数指标前提下,新型系统仅为4片式结构,和传统系统相比,重量减轻22.9%,总长缩短26.6%,最大口径减小30.6%,调制传递函数值最大提升为1.0视场,调制传递函数值提高0. 35,最大畸变减小1.6%,最大垂轴像差减小56.4%,轴向色差减小59.3%,新型系统各方面的性能都得到了较大的改进,为现代高性能、轻小型可见光光谱成像光谱仪成像系统设计提供了一种新的途径。     

The efficiency of relief-phase diffractive elements at a small number of Fresnel zones

A technique and investigation results are presented on the effect of the number of Fresnel zones on the diffraction efficiency and quality of the wave front formed by a diffractive optical element. Equations are presented for the microstructure reliefs of diffractive optical elements making (regardless of the number of Fresnel zones) the wavefront shape coinciding with the calculated one and ensuring 100% diffraction efficiency at a single wavelength and, in the case of two-layer structures, almost 100% diffraction efficiency in a wide spectral range.     

Pure Diffractive Multicolor Optical Fourier Transform System Design

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实现复消色差的超常温混合红外光学系统

讨论了利用二元光学元件实现红外光学系统消热差的原理和方法,分析了二元光学元件的色散特性及其在校正二级光谱中的优越性,给出了实现复消色差和超常温消热差的混合红外光学系统设计实例.该系统焦距100mm,相对孔径1/2,视场角6°,工作波段8—11μm;采用了两种最常用的硅和锗材料,共三片,结构简单.在-80—200℃的超宽温度范围内,成像质量稳定并达到衍射极限,约在系统0.7孔径处轴向像差曲线基本相交于一点,实现了系统的复消色差. 关键词： 红外光学系统设计 消热差 复消色差 折射/衍射混合光学系统     

Highly efficient broadband double-sided Fresnel lens for THz range

Modern passive THz setups require effective optical elements with a large numerical aperture. Here we propose a new type of the optical element for THz applications, which is a broadband double-sided Fresnel-like lens with an optimized thickness. The optimization is performed to obtain a very low attenuation, low material cost, and small weight in the element media. It also provides achromatic properties for the assumed wavelength range. The experimental evaluation of the proposed diffractive lens by means of time-domain spectroscopy is presented and discussed.     

Plasma mechanisms of pulsed terahertz radiation generation

We present the results on generating terahertz radiation in the plasma of an optical discharge arising in the atmosphere during the focusing of femtosecond laser radiation. Different generation schemes related to focusing of the optical radiation by spherical and axicon lenses, with a constant electric field imposed on the laser spark region, as well as with the use of bichromatic laser radiation, are studied. Directivity patterns and polarization distributions of the terahertz radiation are analyzed in detail for different generation techniques. Comparison with the experimental results obtained by other research groups is given. Possible nonlinear mechanisms of the terahertz radiation generation are discussed.     

利用汉克尔变换设计高斯光束整形衍射元件的应用研究

衍射光学元件由于可以实现对高斯光束的整形而被重视,其通常的设计方法为G-S算法,由于使用傅里叶变换运算量大、费时长,将快速汉克尔变换应用到这些算法中可以极大地提高运算速度,节省运算时间,为设计复杂的光束整形元件提供了高效、可行的方法。本文利用该种方法设计针对中心波长为775 nm、光束束腰口径为6 cm的激光器,成功设计了一个具有二阶相位的折衍混合光学元件。仅单独这一片元件,既可在距离其35 m处得到一半径为200μm的圆形平顶光斑,均方根误差D0.021。当抽样值取2~15时,在普通PC机上运行时间仅为20.05 s,大大节省了优化设计时间(整个优化设计过程往往需要几十次甚是上百次这种运算)。同时利用离子刻蚀技术加工了该折衍混合元件,并进行了实际测试,结果与设计值基本相符,整形效果较好。这种单片的整形元件不仅整形效果好,还有利于与激光器的集成,简化系统的调节。     

Investigation of diffractive optical element for shaping a Gaussian beam into a ring-shaped pattern

To convert a given single-mode He–Ne laser beam into a ring-shaped intensity distribution, a diffractive optical element with 16 levels was designed by YG amplitude-phase retrieval and iteration algorithm. This beam shaper is investigated experimentally and compared with the results of the computer design. The results show good conformity, and the measured diffraction efficiency is 87.2%. In addition, the diffractive effect is observed when the distance between diffractive optical element and CCD is changed.     

A single diffractive optical element implementing spectrum-splitting and beam-concentration functions simultaneously with high diffraction efficiency

In this paper,a novel method is proposed and employed to design a single diffractive optical element(DOE) for implementing spectrum-splitting and beam-concentration(SSBC) functions simultaneously.We develop an optimization algorithm,through which the SSBC DOE can be optimized within an arbitrary thickness range according to the limitations of modern photolithography technology.Theoretical simulation results reveal that the designed SSBC DOE has a high optical focusing efficiency.It is expected that the designed SSBC DOE should have practical applications in high-efficiency solar cell systems.     

多层衍射光学元件成像特性的研究

讨论了多层衍射光学元件的光学成像性质.给出了优化设计多层衍射光学元件最大光栅厚度的方法,分析了构成多层结构的每块单层衍射元件的衍射效率对整体衍射效率的贡献作用.在0.436～0.656 μm的可见光波段,多层衍射光学元件最低衍射效率可达到98%以上,克服了单层衍射元件偏离设计波长后衍射效率显著下降的缺点,改善了宽波段衍射效率.将多层衍射光学元件应用在折、衍射混合光学系统中能够明显提高系统的成像质量,同时使得光学系统体积减小,重量减轻,并且在某些系统中可以避免使用昂贵的特殊材料,从而可以降低光学系统的成本价格.