Laser induced copper electroless plating on polyimide with Q-switch Nd:YAG laser

The results of laser induced deposition of copper on polyimide substrate from copper electrolyte solution are reported. Unlike most work reported in the literatures where CW Ar⁺ lasers were used, a second harmonic (532 nm wavelength) Q-switch Nd:YAG laser was used for our experiments. The deposition process was conducted by laser-catalyzing of the polyimide surface and subsequent photothermal-accelerated reduction of copper-complex ions in an alkaline reducing environment. The characteristics of the deposited copper line were investigated in terms of laser beam scanning speed, and the number of scans. The surface morphology and chemical composition of the deposited copper were analyzed using field emission scanning electron microscope (FESEM) and energy dispersive spectrometer (EDX). The optimum processing conditions have been identified. The copper deposit was found to adhere well to the substrate.     

Surface metallization of alumina ceramics by pulsed high energy density plasma process

Surface metallization of alumina ceramics was carried out by pulsed high energy density plasma (PHEDP). A layer of copper film was deposited on the surface of alumina ceramics. Scanning auger electron microscopy (SAM) analysis revealed that copper diffused deep into the alumina substrate. Bonding of alumina and copper film was good. The reaction between copper and alumina was studied by X-ray diffraction (XRD) analysis. A copper aluminum oxide unstable at high temperature and very difficult to be synthesized, cubic phase CuAl₂O₄, was detected. A kinetics complexity in reaction of PHEDP and ceramics was discussed. An adiabatic model was used to describe heating and quenching of the PHEDP processing and analyze the interaction between PHEDP and alumina ceramics. The experimental results suggest that PHEDP method is a useful technology for various metal–ceramics bonding.     

Structure evolution and stoichiometry control of Pb(Zr, Ti)O3 thick films fabricated by electrospray assisted vapour deposition

Well-crystallized and stoichiometric Pb(Zr, Ti)O₃ (PZT) films, typically ∼5 μm thick, with pure perovskite-type rhombohedral structures have been successfully prepared via an electrospray assisted vapour deposition (ESAVD) method. Control of the deposition temperature within a narrow range of 300-400 °C resulted in films with the most desirable phases. PZT films with close stoichiometric match with the expected composition ratio and uniform element distribution were obtained by adding the appropriate levels of excess Pb in the precursor solutions. The annealed films were uniform, dense, compact and adherent to the substrates. The dielectric constant, ?_r, and loss tangent, tan δ, of the fabricated PZT films measured at 10 kHz were 442 and 0.09, respectively. The ESAVD deposited PZT films showed a remanent polarization, P_r, of 15.3 μC/cm² and coercive field, E_c, of 86.7 kV/cm. These results demonstrate the clear potential of the ESAVD method as a promising technique for the fabrication of thick PZT films.     

Basic mechanisms in laser etching and deposition

Laser-induced chemical processing of solid surfaces has the potential for being an important and powerful technique for fabrication of a variety of devices. Successful applications rest on a detailed understanding of the nature of laser-induced reactions and their effects on the properties of materials. In this paper fundamental studies illustrating key features of laser etching and deposition are reviewed. Topics covered include the effect of the choice of precursor and deposition conditions on film composition and morphology, self-propagation of exothermic reactions, thermal and electronic effects in laser-assisted etching of semiconductors, metals and polymers, and special aspects of laser-surface photophysics as they may affect chemical reactions.     

Research of rapid and direct thick coatings deposition by hybrid plasma-laser

In this paper, a new technology of direct and rapid thick coatings fabrication with hybrid plasma-laser deposition manufacturing (PLDM) technology is advanced which is also suitable for functional prototyping and tooling applications. It emphasizes on the influence of laser to the microstructure of coatings and physical properties of surface layers. Unlike the direct rapid plasma deposition manufacturing (PDM), in hybrid plasma-laser deposition manufacturing, the laser beam enters into plasma arc beam and focuses on the molten pool as assisting heat energy. A 280 W pulsed Nd:YAG (yttrium-aluminum garnet) laser machine is used to inspect the effect. The experimental results show that the laser beam could improve the surface state; the elements distribution of coatings deposited by PLDM was even; the physical properties of surface coatings fabricated with PLDM were better than that deposited by PDM.     

Application of iterative path revision technique for laser cutting with controlled fracture

Laser cutting using the controlled fracture technique has great potential to be employed for the ceramic substrate machining. The heat produced on the surface of a ceramic substrate by the laser separates the substrate controllably along the moving path of the laser beam. Because the extension of the breaking frontier is lager than the movement of the laser spot, the actual fracture trajectory deviates from the desired trajectory when cutting a curve or cutting an asymmetrical straight line. To eliminate this deviation, the iterative learning control method is introduced to obtain the optimal laser beam movement path. The fracture contour image is grabbed by a CCD camera after laser cutting completion. A new image processing system is proposed to detect the deviation between the desired cutting path and the actual fracture trajectory. The laser-movement path for the next trial can then be determined according to the iterative path revision algorithm. The actual fracture trajectory converging to the desired cutting path is assured after a few path revisions. The experimental materials used in these experiments are alumina ceramics and the laser source is CO₂ laser. The proposed system can achieve a machining precision of about 0.1 mm.     

Optimization of laser printing of nanoparticle suspensions for microelectronic applications

Digital printing of interconnects for electronic devices requires processes capable of delivering controlled amounts of conductive inks in a fast and accurate way. Laser-induced forward transfer (LIFT) is an emerging technology that enables controlled printing of voxels of a wide range of inks with micrometer resolution. Its use with high solids content nanoparticle suspensions results in the deposition of voxels shaped as the impinging laser beam. This allows higher processing speeds, increasing the throughput of the technique. However, the optimum conditions for printing spot-like voxels have not been determined, yet. In this work, we perform a systematic study of the main experimental parameters, including laser pulse energy, laser beam dimensions, and gap distance, in order to understand the role that these parameters play in laser printing. Based on these results, we find that there is a narrow fluence range at distances close to the receiving substrate where spot-like voxels are deposited. We also provide a detailed discussion of the possible mechanisms that may lead to the observed features.     

Diamond coating deposition by synergy of thermal and laser methods—A problem revisited

Diamond coatings were deposited by synergy of the hot filament CVD method and the pulse TEA CO₂ laser, in spectroactive and spectroinactive diamond precursor atmospheres. Resulting diamond coatings are interpreted relying on evidence of scanning electron microscopy as well as microRaman spectroscopy. Thermal synergy component (hot filament) possesses an activating agent for diamond deposition, and contributes significantly to quality and extent of diamond deposition. Laser synergy component comprises a solid surface modification as well as the spectroactive gaseous atmosphere modification. Surface modification consists in changes of the diamond coating being deposited and, at the same time, in changes of the substrate surface structure. Laser modification of the spectroactive diamond precursor atmosphere means specific consumption of the precursor, which enables to skip the deposition on a defined substrate location. The resulting process of diamond coating elimination from certain, desired locations using the CO₂ laser might contribute to tailoring diamond coatings for particular applications. Additionally, the substrate laser modification could be optimized by choice of a proper spectroactive precursor concentration, or by a laser radiation multiple pass through an absorbing medium.     

Laser synthesis of palladium-alumina composite membranes for production of high purity hydrogen from gasification

This paper describes a special method of laser-based deposition to synthesize palladium-ceramic composite membranes. Thin film Pd was deposited on a ceramic substrate by Nd-YAG laser irradiation of coating precursor PdCl₂ on γ-alumina substrate. The parameters of the laser processing technique were optimized to synthesize metal-ceramic composite membranes. The physical and chemical characteristics of Pd coated γ-alumina membranes were studied and compared with various other alumina membranes referenced in the literature. Hydrogen permeation experiments were performed in a CO + CO₂ + CH₄ + H₂ environment under typical catalytic steam gasifier exit conditions. The Pd-ceramic composite showed good mechanical and thermal stability and resulted in a hydrogen permeability flux of about 0.061 mol/m² s. The activation energy of the Pd membrane was found to be 5.39 kJ/mol in a temperature range of 900-1300 °F.     

Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining

Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. One of the most important features of femtosecond laser processing is that a femtosecond laser beam can induce strong absorption in even transparent materials due to nonlinear multiphoton absorption. This makes it possible to directly create three-dimensional (3D) microfluidic structures in glass that are of great use for fabrication of biochips. For fabrication of the 3D microfluidic structures, two technical approaches are being attempted. One of them employs femtosecond laser-induced internal modification of glass followed by wet chemical etching using an acid solution (Femtosecond laser-assisted wet chemical etching), while the other one performs femtosecond laser 3D ablation of the glass in distilled water (liquid-assisted femtosecond laser drilling). This paper provides a review on these two techniques for fabrication of 3D micro and nanofluidic structures in glass based on our development and experimental results.     

An in situ transport measurement of interfaces between SrTiO3(1 0 0) surface and an amorphous wide-gap insulator

We have explored the transport properties of the interface between a SrTiO₃(1 0 0) single crystal and a CaHfO₃ wide-gap insulator layer deposited by pulsed laser deposition. The electrical transport measurements were done in situ during the heterojunction fabrication and consistently showed an enhancement of interface conductivity. A conducting interface was always obtained, independent of deposition parameters (laser pulse rate, laser fluence, oxygen pressure, and substrate termination). The conduction was attributed to plume-induced photocurrent in SrTiO₃. The current decay rate after insulator film fabrication was strongly influenced by substrate termination. An exponential relaxation-type photocurrent decay was clearly seen on SrO-termination, whereas a nearly constant conductivity was seen for up to 24 h on TiO₂-terminated surfaces.     

Laser rapid manufacturing of Colmonoy-6 components

This paper introduces a new manufacturing technique for the fabrication of Colmonoy-6 components using laser rapid manufacturing (LRM). LRM is a upcoming rapid manufacturing technology, being developed at various laboratories around the world. It is similar to laser cladding at the process level with different end applications. In general, laser cladding technique is used to deposit material on the substrate either to improve the surface properties or to refurbish the worn out parts, while LRM is capable of near net shaping the components by layer-by-layer deposition of the material directly from CAD model. In the present study, a high power continuous wave (CW) CO₂ laser system, integrated with a co-axial powder-feeding system and three-axis workstation was used. The effect of processing parameters during multi-layer deposition of Colmonoy-6 has been studied and optimized to fabricate about a dozen bushes. Thus fabricated bushes were finally machined and ground to achieve the desired dimensions and surface finish. These bushes were tested for non-destructive testing (like-ultrasonic testing, Dye-penetrant testing), metallographic examinations, micro-hardness measurement, X-ray diffraction and thermal ageing. Results compared well with those fabricated by deposition of Colmonoy-6 on austenitic stainless steel rods using gas Tungsten arc welding (GTAW). Thus, the new manufacturing technique not only produced quality product, but also minimized machining of hard-faced material and brought significant saving of time and costly Colmonoy-6 material.     

In situ STM of pulsed laser nanostructured deposits: First stages of film formation

In the synthesis of nanostructured thin films the characterization of the growth processes plays a fundamental role for the control of the film and surface properties. Moreover when the deposition technique is based on the production and the assembling of nanoparticles/clusters the characterization of the precursor size distribution is of fundamental importance.We have designed a pulsed laser deposition (PLD) apparatus for the production of nanostructured thin films and surfaces, connected to a UHV variable temperature scanning tunneling microscope (STM). The whole system is devoted to the synthesis and in situ study of nanostructured and nanoporous functional metal and metal oxide films and surfaces. We have deposited W nanoparticles produced by a few hundreds laser pulses in order to investigate the initial mechanisms of the film growth. Different deposition conditions have been explored by controlling the laser generated plasma expansion through a background gas in the PLD chamber. STM measurements have been performed on W thin films deposited on different substrates to study both the size distribution and the aggregation of the precursors on the surface. Although substrate effects must be taken into account, the control of the background gas pressure and of the target-to-substrate distance allows to produce surfaces with different morphologies. This opens the possibility to tailor the material properties through the control of the size and deposition energy of the building nano-units.     

一种新颖的实现纳米条纹沉积方法研究

利用近共振激光驻波场操纵中性原子实现纳米量级条纹沉积技术是一种新型的研制纳米结构长度传递标准的方法,采用了一种新颖的方法,通过预准直孔的设定,将原子束在空间分成三部分,利用中间部分的原子束和近共振激光驻波场相互作用,在激光驻波场辐射压力作用下使原子按照特定周期沉积在基板上,从而实现纳米条纹的制作.利用两侧部分的原子束与探测激光束相互作用,通过其感生荧光来监测中间部分原子束沉积过程中的准直效果,从而为原子的沉积过程提供实时的原子束特性监测.最后对纳米沉积条纹在经由三狭缝预准直结构作用前后的效果进行了三维仿真,结果表明,未采用该三狭缝预准直结构时,纳米沉积条纹的半高宽为32nm,对比度为8∶1,而采用该三狭缝预准直结构之后,纳米沉积条纹的半高宽为6.2nm,对比度为28∶1,大大提高了纳米沉积条纹的质量.     

Pulsed laser deposition—UV laser sources and applications

Progress in material research and processing industry is fueled by the technique of pulsed laser deposition (PLD). High energy excimer lasers enable this technique since every material is amenable to their high photon energies. Spectral properties, temporal pulse and laser beam parameters of state of the art excimer lasers will be compared with frequency converted Nd:YAG lasers. Both quality and longevity of the deposited layers strongly depend on the degree of accuracy achieved in the thin film ablation and subsequent deposition process.     

Fractal analysis and atomic force microscopy measurements of surface roughness for Hastelloy C276 substrates and amorphous alumina buffer layers in coated conductors

In coated conductors, surface roughness of metallic substrates and buffer layers could significantly affect the texture of subsequently deposited buffer layers and the critical current density of superconductor layer. Atomic force microscopy (AFM) is usually utilized to measure surface roughness. However, the roughness values are actually relevant to scan scale. Fractal geometry could be exerted to analyze the scaling performance of surface roughness. In this study, four samples were prepared, which were electro polished Hastelloy C276 substrate, mechanically polished Hastelloy C276 substrate and the amorphous alumina buffer layers deposited on both the substrates by ion beam deposition. The surface roughness, described by root mean squared (RMS) and arithmetic average (R_a) values, was analyzed considering the scan scale of AFM measurements. The surfaces of amorphous alumina layers were found to be fractal in nature because of the scaling performance of roughness, while the surfaces of Hastelloy substrates were not. The flatten modification of AFM images was discussed. And the calculation of surface roughness in smaller parts divided from the whole AFM images was studied, compared with the results of actual AFM measurements of the same scan scales.     

On the delamination and crack formation in a thin wall fabricated using laser solid freeform fabrication process: An experimental–numerical investigation

Parts fabricated using laser solid freeform fabrication (LSFF) are subject to thermal stresses due to the layer-by-layer material deposition and the temperature distribution characteristic throughout the process domain. The thermal stress patterns and intensity contribute significantly to potential delamination and crack formation. In this paper, the temperature distribution and stress field induced during the multilayer LSFF process, and their correlation with delamination and crack formation are studied. This is performed by a numerical and experimental investigation in the fabrication of a thin wall of 304L stainless steel. For time-dependent predictions on the locations of maximum temperatures and thermal stresses and their patterns, a three-dimensional (3D) transient finite element model is employed to simulate the process, including the geometry of the deposited materials as well as coupled temperature and stress distributions across the process domain. The experimental results are used to verify the numerical results as well as to investigate the correlation between the numerical results and micro-crack formations across the fabricated parts. The experiments are conducted with the same process parameters used in the numerical analyses using a 1 kW Nd:YAG pulsed laser. The trend of numerical and experimental results reveals that by preheating the substrate prior to the fabrication process, it is possible to substantially reduce the micro-cracks formed across the part. To demonstrate the feasibility of preheating on the reduction of micro-cracks, several simulations and experiments are performed in which a crack-free result is obtained when the substrate is preheated to 800 K. For this case, 22% reduction in thermal stresses is obtained throughout the process domain.     

Role of growth temperature and oxygen partial pressure on the structural and electrical properties of pulsed laser deposited La1−xSrxnO3−δ thin films

The paper presents the fabrication and characterization of La_0.65Sr_0.35MnO_3−δ (LSMO) polycrystalline thin films deposited directly on Si (1 0 0) substrates using pulsed laser deposition technique. Various deposition parameters like substrate temperature and oxygen partial pressure have been varied systematically to obtain stoichiometric, crack-free films with smooth surface morphology having nearly monodisperse grain size distribution. The substrate temperature variation from 600 to 800 °C had profound effects on the microstructure and topography of the deposited film, with optimum result being obtained at 700 °C. The variation of partial pressure of oxygen controls the deposition kinetics as well as the stoichiometry of the film in terms of oxygen vacancy, which influences the magnetic and electrical transport properties of the manganate films. The microstructure and crystallinity of the deposited films have been studied using X-ray diffraction, scanning electron microscopy and atomic force microscopy. A correlation between the oxygen stoichiometry and micro-structural and transport properties of the deposited films has been obtained.     

Analysis and prediction of single laser tracks geometrical characteristics in coaxial laser cladding process

Direct Laser Fabrication is a promising new manufacturing technology coming from laser cladding process. From a coaxial nozzle, powder is fed through a laser beam on a substrate. The powder melting and solidification processes lead to the fabrication of a part layer by layer. In this work 316L stainless steel powder is used to form laser tracks on a low carbon steel substrate. The layer geometry is an important process characteristic to control the final part of fabrication. This paper presents analytical relationships between the laser tracks geometrical characteristics (width, height, area, penetration depth) and the processing parameters (laser power P, scanning speed V and powder mass flow Q_m). Three values of each processing parameters are fixed and so 27 different experiments have been made and analyzed. The validity of these results is discussed studying the correlation coefficient R, the graphical analysis of the residuals and the uncertainty evaluations. Two kinds of models are studied to predict the form and the geometrical characteristics of the single laser tracks cross sections. The first one is an analytical model in which the distribution of the powder in the feed jet is supposed to govern the laser clad geometry. Three distributions are proposed: Gaussian, uniform and polynomial. In the second model the general form of the clad cross section is supposed to be a disk due to the surface tension forces. Analytical relationships are established between the radius and the center of the disk in one hand and the process parameters in the other hand. This way we show that we can reproduce the laser track geometry in all the area experimentally explored.     

Laser micromachining of porous anodic alumina film

A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35 μm were fabricated on anodic alumina film with good precision and reproducibility. PACS 79.20.Ds; 82.45.Cc; 42.62.Cf