Characteristics of sputtered TaBx thin films as diffusion barriers between copper and silicon

Thin films of TaB_x interposed between Cu and Si are examined here as diffusion barriers for Cu metallization. In order to investigate the performance of Cu/TaB_x/Si contact systems, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), sheet resistance measurement, scanning electron microscopy (SEM), cross-sectional transmission electron microscopy (XTEM), and Auger electron spectroscopy (AES) depth profile were used. Results of this study indicate that the barrier characteristics are significantly affected by the B/Ta ratio. In addition, the failure mechanism for the Cu/TaB_x/Si contact systems is also discussed herein.     

Fabrication and characterization of a Cu seed layer on a 60-nm trench-patterned SiO2 substrate by a self-assembled-monolayer (SAM) process

Continuous electroless deposition of a 10-nm thick layer of Cu was successfully performed on a SiO₂/Si substrate coated with a 3-nm Au catalytic layer. The Au catalytic layer was formed by a self-assembled monolayer (SAM) process terminated with NH₂ headgroups, upon which negatively charged Au particles were deposited via electrostatic interaction with the positively charged NH₂-SAM. The Au and NH₂-SAM layers were analyzed by X-ray photoelectron spectroscopy (XPS) and contact angle analysis. Atomic force microscopy, field emission scanning electron microscopy, and XPS revealed that the Cu layer formed by this electroless processes had good step-coverage, small grain size, and excellent adhesion to the substrate. The proposed process is a very promising method for fabrication of a conductive Cu seed layer in a 60-nm trench-pattern.     

Growth and study of ultrathin insulating SiO2 and MgO layers on the ferromagnetic electrode surface

In this paper, we present the experimental results on the application of the pulsed laser deposition (PLD) method to form functional SiO₂ and MgO layers in contact with Fe₃Si and Fe ferromagnetic electrodes In situ X-ray photoelectron spectroscopy and low-energy ion scattering spectroscopy, in situ conversion electron Mössbauer spectroscopy and Rutherford backscattering and channeling of light ions were used to study the structural properties and morphology of formed ultrathin SiO₂ and MgO layers, as well as the chemical and phase composition of Fe₃ Si/SiO₂ and Fe/MgO interfaces.     

Electron beam-physical vapor deposition of SiC/SiO2 high emissivity thin film

When heated by high-energy electron beam (EB), SiC can decompose into C and Si vapor. Subsequently, Si vapor reacts with metal oxide thin film on substrate surface and formats dense SiO₂ thin film at high substrate temperature. By means of the two reactions, SiC/SiO₂ composite thin film was prepared on the pre-oxidized 316 stainless steel (SS) substrate by electron beam-physical vapor deposition (EB-PVD) only using β-SiC target at 1000 °C. The thin film was examined by energy dispersive spectroscopy (EDS), grazing incidence X-ray asymmetry diffraction (GIAXD), scanning electron microscopy (SEM), atomic force microscopy (AFM), backscattered electron image (BSE), electron probe microanalysis (EPMA), X-ray photoelectron spectroscopy (XPS) and Fourier transformed infra-red (FT-IR) spectroscopy. The analysis results show that the thin film is mainly composed of imperfect nano-crystalline phases of 3C-SiC and SiO₂, especially, SiO₂ phase is nearly amorphous. Moreover, the smooth and dense thin film surface consists of nano-sized particles, and the interface between SiC/SiO₂ composite thin film and SS substrate is perfect. At last, the emissivity of SS substrate is improved by the SiC/SiO₂ composite thin film.     

Fabrication and surface characterization of biomimic superhydrophobic copper surface by solution-immersion and self-assembly

Biomimic superhydrophobic surfaces with contact angle greater than 150° and low sliding angle on copper substrate were fabricated by means of a facile solution immersion and surface self-assembly method. The scanning electron microscopy showed a nanoneedle structure copper surface with sporadic flower-like aggregates after treatment with sodium hydroxide and potassium persulfate solution. X-ray photoelectron spectroscopy and X-ray diffraction results confirmed that the formed nanoneedles were crystallized Cu(OH)₂. And the hydrophilic Cu(OH)₂ surface can be further modified into superhydrophobic through surface self-assembly with dodecanoic acid.     

Synthesis and characterization of superhydrophobic functionalized Cu(OH)2 nanotube arrays on copper foil

Superhydrophobic functionalized cupric hydroxide (Cu(OH)₂) nanotube arrays were prepared on copper foils via a facile alkali assistant surface oxidation technique. Thus nanotube arrays of Cu(OH)₂ were directly fabricated on the surface of copper foil by immersing in an aqueous solution of NaOH and (NH₄)₂S₂O₈. The wettability of the surface was changed from surperhydrophilicity to superhydrophobicity by chemical modification with 1H,1H,2H,2H-perfluorodecyltriethoxysilane (FAS). The morphologies, microstructures, crystal structure, chemical compositions and states, and hydrophobicity of the films on the copper foil substrates were analyzed by means of scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and water contact angle measurement. It was found that the rough structure of the surface helped to magnify the wettability. The static contact angle (CA) for water is larger than 160° and the contact angle hysteresis (CAH) is lower than 5° on the modified surface. The high roughness of the nanotube arrays along with the generated C-F chains by chemical modification contributed to the improved superhydrophobicity. The present research is expected to be significant in providing a new strategy for the preparation of novel multifunctional materials with potential industrial applications on copper substrates.     

High-performance hierarchical cypress-like CuO/Cu<Subscript>2</Subscript>O/Cu anode for lithium ion battery

Composite CuO/Cu₂O/Cu anode for lithium ion battery was designed and synthesized via facile electrodeposition and the subsequent in situ thermal oxidation in air at 300 °C for 1 h. The as-prepared composite CuO/Cu₂O/Cu anode was studied in terms of scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), galvanostatic charge/discharge, cyclic voltammetry (CV), and AC impedance. As expected, the composite CuO/Cu₂O/Cu with CuO-rich surface displayed hierarchical cypress-like morphology; furthermore, the hierarchical cypress-like CuO/Cu₂O/Cu anode also delivered satisfactory electrochemical performances. For example, the reversible discharge capacity remained at 534.1 mAh/g even after 100 cycles. The enhanced electrochemical performances were attributed to the hierarchical cypress-like porous structure and the synergistic effect among the composite active copper oxides and highly conductive Cu current collector.     

Preparation and characterization of Cd2Nb2O7 thin films on Si substrates

Thin Cd₂Nb₂O₇ films were grown on single-crystal p-type SiO₂/Si substrates by the metallo-organic decomposition (MOD) technique. The films were investigated by X-ray diffraction, X-ray energy-dispersive spectroscopy, and field emission scanning electron microscopy, and showed a single phase (cubic pyrochlore), a crack-free spherical grain structure, and nanoparticles with a mean size of about 68 nm. A Cauchy model was also used in order to obtain the thickness and index of refraction of the stack layers (transparent layer/SiO₂/Si) by spectroscopic ellipsometry (SE). The dielectric constant (K) of the films was calculated to be about 25 from the capacitance-voltage (C-V) measurements.     

Ultrathin Mo/MoN bilayer nanostructure for diffusion barrier application of advanced Cu metallization

Ultrathin Mo (5 nm)/MoN (5 nm) bilayer nanostructure has been studied as a diffusion barrier for Cu metallization. The Mo/MoN bilayer was prepared by magnetron sputtering and the thermal stability of this barrier is investigated after annealing the Cu/barrier/Si film stack at different temperatures in vacuum for 10 min. The failure of barrier structure is indicated by the abrupt increase in sheet resistance and the formation of Cu₃Si phase proved by X-ray diffraction (XRD) and energy-dispersive X-ray spectroscopy (EDS). High resolution transmission electron microscopy (HRTEM) examination suggested that the ultrathin Mo/MoN barrier is stable and can prevent the diffusion of Cu at least up to 600 °C.     

Nano-scale copper oxidation on leadframe surface

Copper oxidation studies were carried out by means of field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), transmission electron microscopy (TEM), energy dispersive X-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS) techniques. The growth of copper oxide occurs as a copper surface comes in an oxygen containing environment. The reaction sequence leading to oxidation of the copper surface is generally accepted to be oxygen chemisorption, nucleation and growth of the surface oxide and bulk oxide growth. HRTEM examination of the cross section of the oxidized copper sample revealed the interface region in between the copper and copper oxide. At high oxidation temperature, formation of micro-voids and separations were observed along this interface region. Poor adhesion at this interface region due to micro-voids and separation were found to be the root cause of delamination issue. EELS analysis determined that for regions with intact interface the oxidation system is Cu/CuO/Cu₂O/CuO, however, in regions containing micro-voids or separation it is found to be Cu/Cu₂O/CuO.     

Cu/SiO2/Si(111)体系中Cu和Si的扩散及界面反应

室温下利用磁控溅射在p型Si(111)衬底上沉积了Cu薄膜. 利用X射线衍射和卢瑟福背散射分别对未退火以及在不同温度点退火后样品的结构进行了表征. 在此基础上，研究了Cu/SiO₂/Si(111)体系的扩散和界面反应. 实验结果表明：当退火温度高于450℃时出现明显的扩散现象，并且随着温度的升高，体系扩散现象会更加显著. 当退火温度低于450℃时没有铜硅化合物生成，当温度达到500℃时才有铜硅化合物生成. 关键词： 薄膜 扩散 界面反应 硅化物     

Direct production of carbon nanotubes decorated with Cu2O by thermal chemical vapor deposition on Ni catalyst electroplated on a copper substrate

Carbon nanotubes (CNTs) decorated with Cu₂O particles were grown on a Ni catalyst layer deposited on a Cu substrate by thermal chemical vapor deposition from liquid petroleum gas. Ni catalyst nanoparticles with different sizes were produced in an electroplating system at 45 °C using the corrosive effect of H₂SO₄ which was added to solution. These nanoparticles provide the nucleation sites for CNT growth avoiding the need for a buffer layer. The surface morphology of the Ni catalyst films and CNT growth over this catalyst was studied by scanning electron microscopy (SEM). High temperature surface segregation of the Cu substrate into the Ni catalyst layer and its exposition to O₂ at atmospheric environment, during the CNTs growth, lead to the production of CNTs decorated with about 6 nm Cu₂O nanoparticles. We used SEM to study the surface characteristics of Ni catalyst films and characteristic of grown CNTs. Raman spectroscopy, transmission electron microscopy (TEM), electron diffraction (EDX), X-ray diffraction, and X-ray photoelectron spectroscopy (XPS) revealed the formation of CNTs. The selected area electron diffraction pattern, EDX, and XPS studies show that these CNTs were decorated with Cu₂O nanoparticles. This way of fabrication is the easiest and lowest cost method.     

Electrical metal contacts to atomically thin 2H-phase MoTe2 grown by metal–organic chemical vapor deposition

We grow atomically thin molybdenum ditelluride (MoTe₂) films on a SiO₂/Si substrate by means of metal–organic chemical vapor deposition (MOCVD). Our Raman spectroscopy measurements reveal the formation of 2H-phase MoTe₂ films. Further, transmission electron microscopy and X-ray photoelectron spectroscopy studies indicate a three-atomic-layer structure and the surface element composition of MoTe₂ films. In this study, we mainly focus on the influence of metal contacts attached to the films on their electrical performance. We fabricate 2H-phase-MoTe₂-based field-effect transistors (FETs) with various metal contacts such as titanium/gold, nickel and palladium, which present p-type semiconductor properties. We also examine the influence of the work functions of the contact metals on the electrical properties of three-atomic-layer-MoTe₂-based FET devices. For a p-type MoTe₂ semiconductor, higher work functions of the contact metals afford narrower Schottky barrier heights (SBHs) and eventually highly efficient carrier injection through the contacts.     

Research of microstructural characteristics on nanocrystalline diamond by microwave plasma CVD

In this study, the nanocrystalline diamond (NCD) films were carried out by microwave plasma chemical vapor deposition (CVD) with CH₄/Ar/H₂ gas concoction on Si substrate at moderate temperatures. The characteristics of NCD films were evaluated using scanning electron microscopy, Raman spectroscopy, transmission electron microscopy, optical emission spectroscopy and optical contact angle meter. The analytical results revealed that C₂ radial was the dominant species in the deposited process. From TEM observation, the NCD films were formed via the etching of hydrocarbons and a small amount of H₂ content additive into gas mixture has improved the aggregation of the nucleation film to form the NCD films. The more hydrophobic surfaces imply that NCD films are the potential biomaterial in the application of article heart valve or stent.     

Mechanochemically conjugated PMHS/nano-SiO2 hybrid and subsequent optimum grafting density study

In this paper, we reported the preparation of poly(methylhydrosiloxane) (PMHS)/SiO₂ hybrid particles by mechanochemical method based on high energy ball milling (HEBM). The obtained hybrid particles were characterized by Fourier transform infrared (FT-IR) spectroscopy, ²⁹Si CP (cross-polarization) MAS NMR, viscosity measurement, particle size distribution, thermal analysis (TGA, DSC and DTG), static contact angle (CA), field emission scanning electron microscopy (FE-SEM) and transmission electron microscopy (TEM). FT-IR and ²⁹Si CP MAS NMR spectra indicate that PMHS is chemically anchored onto the surface of nano-SiO₂. Viscosity measurement, particle size distribution, FE-SEM and TEM demonstrate that an appropriate grafting density optimizes the dispersion of nanoparticles in poly(dimethylsiloxane) (PDMS) matrix, so lower viscosity can be achieved. Too high or too low grafting density may only achieve suboptimal and poor dispersions. The optimum grafting density of PMHS on nano-SiO₂ was determined by thermal analysis, with approximately 0.0531 PMHS/nm². Static contact angle measurement indicates that the water contact angle of hybrid particles is modulated by changing the grafting density of PMHS on nano-SiO₂. The CA value of PMHS/SiO₂ hybrid with optimum grafting density is 139.4°, and the highest CA value of PMHS/SiO₂ hybrid is approximately 158.2°.     

Cu-In-O composite thin films deposited by reactive DC magnetron sputtering

Cu-In-O composite thin films were deposited by reactive DC magnetron sputtering at room temperature. The samples were characterized by scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX), X-ray diffraction (XRD), UV/vis spectrophotometer, four-probe measurement and Seebeck effect measurement, etc. The samples contain Cu, In and O. The ratios of Cu to In and O to In increase with increase in O₂ flow rates. The ratio of Cu to In is over 1 and this suggests that Cu is in excess. The obtained Cu-In-O thin films are very possibly made of rhombohedral In₂O₃ and monoclinic CuO. Transmittance of the films decreases with increase in O₂ flow rate. The decrease in transmittance results from increase in Cu content in the films. The optical band gap of all the samples is estimated to be 4.1-4.4 eV, which is larger than those of In₂O₃ and CuO. The sheet resistance of the films decreases with increase in O₂ flow rate. Conductivity of the films is a little low, due to the addition of Cu and the poor crystalline quality of the film. The conduction behavior of the films is similar to that of In₂O₃ and the conduction mechanism of Cu-In-O thin films is through O vacancy.     

Novel Pd-Cu/bacterial cellulose nanofibers: Preparation and excellent performance in catalytic denitrification

In this work, we describe a novel facile method to prepare long one-dimensional hybrid nanofibers by using hydrated bacterial cellulose nanofibers (BCF) as template. Palladium-copper nanoparticles were prepared in BCF by immersing BCF in a mixture solution of PdCl₂ and CuCl₂ in water and followed reduction of absorbed metallic ion inside of BCF to the metallic Pd-Cu nanoparticles using potassium borohydride. The bare BCF and the composites were characterized by a range of analytical techniques including scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). The results reveal that the Pd-Cu nanoparticles were homogeneously precipitated on the BCF surface. The Pd-Cu/BCF was used as a catalyst for water denitrification, which showed that it has high catalytic activity.     

Electrochemical performance of CeO<Subscript>2</Subscript> nanoparticle-decorated graphene oxide as an electrode material for supercapacitor

Cerium oxide nanoparticles and cerium oxide nanoparticle-decorated graphene oxide (GO) are synthesized via a facile chemical coprecipitation method in the presence of hexadecyltrimethylammonium bromide (CTAB). Nanostructure studies and electrochemical performances of the as-prepared samples were systematically investigated. The crystalline structure and morphology of the nanocomposites were examined by X-ray diffraction (XRD), scanning electron microscopy (SEM), transition electron microscopy (TEM), Raman spectrum, and X-ray photoelectron spectroscopy (XPS). Electrochemical properties of the CeO₂ electrode, the GO electrode, and the nanocomposites electrodes were investigated by cyclic voltammetry (CV), galvanostatic charge/discharge (GCD), and electrochemical impedance spectroscopy (EIS) measurements. The CeO₂ nanoparticle-decorated GO (at the mole ratio of CeO₂/GO = 1:4) electrode exhibited excellent supercapacitive behavior with a high specific capacitance of 382.94 F/g at the current density of 3.0 A/g. These superior electrochemical features demonstrate that the CeO₂ nanoparticle-decorated GO is a promising material for next-generation supercapacitor systems.     

Ternary semiconductor compounds CuInS2 (CIS) thin films synthesized by electrochemical atomic layer deposition (EC-ALD)

In this paper the formation and characterization of the I-III-VI₂ semiconductor compound CuInS₂ (CIS) on gold substrate at room temperature by electrochemical atomic layer deposition (EC-ALD) method are reported. Optimum deposition potentials for each element are determined using cyclic voltammetry (CV) technique and Amperometric I-t method is used to prepare the semiconductor compound. These thin films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), field emission scanning electron microscopy (FE-SEM) and Fourier transform infrared spectroscopy (FT-IR). XRD results indicate that the CIS thin films have a (1 1 2) preferred orientation. The XPS analyses of the films reveal that Cu, In and S are present in an atomic ratio of approximately 1:1:2. And their semiconductor band gaps are found to be 1.50 eV by FT-IR.     

Preparation, optical properties, magnetic properties and thermal stability of core-shell structure cobalt/zinc oxide nanocomposites

Cobalt nanoparticles coated with zinc oxide can form composite spheres with core-shell structure. This coating process was based on the use of silane coupling with agent 3-mercaptopropyltrimethoxysilane (HS-(CH₂)₃Si(OCH₃)₃, MPTS) as a primer to render the cobalt surface vitreophilic, thus it renders cobalt surface compatible with ZnO. X-ray photoelectron spectroscopy (XPS) was used to gain insight into the way in which the MPTS is bound to the surface of the cobalt nanoparticles. The morphological structure, chemical composition, optical properties and magnetic properties of the product were investigated by using transmission electron microscopy (TEM), X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDS), photoluminescence (PL) spectroscope and vibrating sample magnetometer (VSM). It was found that the Co/ZnO core-shell structure nanocomposites exhibited both of favorable magnetism and photoluminescence properties. Results of the thermogravimetric analysis (TGA) and differential thermal analysis (DTA) indicated that the thermal stability of cobalt/zinc oxide was better than that of pure cobalt nanoparticles.