Plume splitting in pico-second laser-material interaction under the influence of shock wave

In this work, molecular dynamics simulations are conducted to study the physics of plume splitting in pico-second laser material interaction in background gas. The velocity distribution shows a clear split into two distinctive components. Detailed atom trajectory track reveals the behavior of atoms within the peaks and uncovers the mechanisms of peak formation. The observed plume velocity splitting emerges from two distinguished parts of the plume. The front peak of the plume is from the faster moving atoms and smaller particles during laser-material ablation. This region experiences strong constraint from the ambient gas and has substantial velocity attenuation. The second (rear) peak of the plume velocity originates from the larger and slower clusters in laser-material ablation. These larger clusters/particles experience very little constraint from the background, but are affected by the relaxation dynamics of plume and appear almost as a standing wave during the evolution. Density splitting only appears at the beginning of laser-material ablation and quickly disappears due to spread-out of the slower moving clusters. It is found that higher ambient pressure and stronger laser fluence favor earlier plume splitting.     

光谱测量在激光加工在线监测上的应用研究进展

随着现代工业的发展,复杂加工环境和对象、大动态范围、高效率和高精度激光加工需求愈加迫切,在线监测并实时优化激光加工参数是一条重要的解决途径。与此同时,激光与物质相互作用时可产生与加工参数、加工过程和目标特性密切相关的光信号和表面光学特性变化,在线测量光信号光谱可分析加工过程和状态,故光谱测量有望成为一种重要的激光加工在线监测手段。实际上,光谱测量已应用于激光焊接、激光切割和钻孔、激光清洗打磨、微纳结构制备和增材制造等几乎所有激光加工工艺,具有分辨率高和光谱信息丰富等特点。分析和总结了用于激光加工在线监测的光谱测量技术,包括等离子体光谱、反射光光谱和非线性光信号光谱等。基于单脉冲和多脉冲激光加工激发等离子体信号的光谱测量,除实现化学成分定性和定量监测外,还可以根据特征谱线相对强度变化实时调焦,根据等离子体温度监测和调控激光加工过程中与热效应相关的物理过程;作为一种无损伤且工作距离较远的监测方法,反射光光谱监测可通过测量特定波段反射光信号光谱积分功率、特征谱线和波段位置和强度来有效监测材料表面清洁度、损伤、色度和成分变化等;而在特定条件下产生的谐波信号、荧光信号和拉曼信号等非线性光信号,尽管应用场景有限,但提供了一种实现成分、焦距和材料损伤等监测的新方法。进而,展望了光谱测量在激光加工在线监测上应用的未来发展趋势,包括多种光信号的光谱协同监测与光、声、温度及图像等多种信号测量的复合监测。同时,人工智能技术与在线监测和激光加工的深入结合将进一步推动激光加工技术的智能化发展。     

Dynamic ultrasonic contact detection using acoustic emissions

For a non-contact ultrasonic material removal process, the control of the standoff position can be crucial to process performance; particularly where the requirement is for a standoff of the order of <20 μm. The standoff distance relative to the surface to be machined can be set by first contacting the ultrasonic tool tip with the surface and then withdrawing the tool to the required position. Determination of this contact point in a dynamic system at ultrasonic frequencies (>20 kHz) is achieved by force measurement or by detection of acoustic emissions (AE). However, where detection of distance from a surface must be determined without contact taking place, an alternative method must be sought.     

Model of workpiece erosion for electrical discharge machining process

The previously published step-wise model (SWM) of cold electrodes erosion of electric arc heaters (EAHs) was modified for the calculation of workpiece removal rate (WRR) in electrical discharge machining (EDM) process. Modified model applies both relations the step-wise erosion model and the point heat source erosion model and takes into account the discharge current, the discharge pulse/pause time and thermophysical properties of machined material. The results of calculations show a reasonable agreement with data obtained experimentally by different authors about different materials and conditions.     

激光驱动飞片的动量耦合模型研究

 激光驱动飞片技术在动高压加载和模拟空间高速粒子运动规律等实验中有重要的应用价值。而激光与飞片的动量耦合模型研究是激光驱动飞片技术的重要内容之一,其实质是激光与物质的作用规律的宏观表征。以激光支持爆轰波（LSDW）理论为基础,建立了约束条件下激光驱动飞片的动量模型,模型考虑了激光功率密度、脉宽、聚焦焦斑、侧向稀疏波、飞片表面气体参数、飞片面积等因素的影响,比较全面地反映了LSDW对飞片的力学作用特性,理论计算结果与参考文献结果吻合较好,误差不超过25%。     

ESTIMATED TEMPERATURE ON A MACHINED SURFACE USING AN INVERSE APPROACH

An experiment devoted to the heat flux estimation in a workpiece during a machining process by turning is presented. The method is based on temperature measurement from thermocouples embedded in the workpiece, close to the heated surface. A model that expresses the heat flux according to the temperature at the sensors is developed. The stationary and linearity assumptions are used in order to decompose the three-dimensional original problem into two bi-dimensional problems. This decomposition can be realized given the difference between the cutting speed and feed velocity in two orthogonal directions. The temperature on the machined surface is calculated from the estimated heat flux and the heat transfer model in the workpiece. The application concerns hard steel machining, using a CBN insert tool. Three parameters are placed into evidence from this application: the temperature magnitude on the machined surface, the thermal gradient in the workpiece, and the `thermal persistence' that represent the heating time of the machined surface. This study leads to a better understanding of the influence of temperature during a hard steel turning process.     

抛光工艺参数对熔石英元件低频面形精度的影响

根据工件与抛光盘的相对运动关系及熔石英元件抛光加工材料去除模型,系统分析了转速比和偏心距等参数对材料去除函数的影响。通过理论分析和抛光加工实验,研究了不同工艺参数对低频段面形精度的影响规律。利用高分辨率检测仪器对熔石英元件低频面形误差进行了检测,优选出较佳的抛光工艺参数组合,并进行了相应的实验验证,提出了提高光学元件抛光加工低频面形质量的相应措施。     

Calculus removal on a root cement surface by ultrashort laser pulses

Ultrashort-pulse-laser ablation of dental calculus (tartar) and cement is performed on root surfaces. The investigation shows that the threshold fluence for ablation of calculus is a factor of two to three times smaller than that of a healthy root cement surface. This indicates that ultrashort laser pulses may provide an appropriate tool for selective removal of calculus with minimal damage to the underlying root cement. Future application of an in situ profiling technique allows convenient on-line monitoring of the ablation process.     

Automatic compensation of laser beam focusing parameters for flying optics

Flying optics technologies are used for a range of applications such as a large workpiece processing and laser texturing. It is essential to compensate the variations of laser beam focus parameters while the focus head is moving. A flying optics automatic compensation approach is proposed to achieve invariable laser focal size, focus depth and focus position through computer controlled objective lens and focus lens position. A simple mechanical control method is also presented for the realization of constant beam parameters for flying optics. Numerical simulation is illustrated for a CO₂ laser texturing application. The flying optics parameters compensation is simple and easy to control.     

Self-focusing of Gaussian laser beam in collisionless plasma and its effect on stimulated Raman scattering process

This paper presents an investigation of self-focusing of Gaussian laser beam in collisionless plasma and its effect on stimulated Raman scattering process. The pump beam interacts with a pre-excited electron plasma wave thereby generating a back-scattered wave. On account of Gaussian intensity distribution of laser beam, the time independent component of the ponderomotive force along a direction perpendicular to the beam propagation becomes finite, which modifies the background plasma density profile in a direction transverse to pump beam axis. This modification in density affects the incident laser beam, electron plasma wave and back-scattered beam. We have set up the non-linear differential equations for the beam width parameters of the main beam, electron plasma wave, back-scattered wave and SRS-reflectivity by taking full non-linear part of the dielectric constant of collisionless plasma with the help of moment theory approach. It is observed from the analysis that focusing of waves greatly enhances the SRS reflectivity.     

Removal mechanisms of micro-scale particles by surface wave in laser cleaning

This paper is to investigate the mechanisms of micro-scale particle removal by surface wave, which was induced by a short pulse laser in a cleaning process. The authors analyzed the adhesive forces of particles on substrate surface and the clearance force produced by surface wave in laser cleaning. The physical model of particle removal by laser-induced surface wave was established to predict the removal area and the processing conditions of laser cleaning. In this research, a KrF excimer laser was applied to irradiate 304 stainless steel specimen distributed with copper particles to generate surface wave for copper particle removal. Considering that a time-varying and uniformly distributed heat source irradiates on material surface with thermao-elastic behavior, the displacement and acceleration of substrate induced by a pulsed laser were solved by an uncoupled thermal–mechanical analysis based on the finite element method. The processing parameters such as laser energy, laser spot size are discussed, respectively. A series of laser cleaning experiments were designed to compare with computation results. The results show that the removal area by surface wave beyond the laser spot increases with the laser energy and that, the surface acceleration decreases with the increase of the laser spot size.     

单晶硅微纳构件加工表面性能的时变性研究

采用蒙特卡罗方法和分子动力学方法相结合, 模拟单晶硅微纳构件加工表面的时效过程, 研究其对加工表面质量和构件力学性能的影响. 模拟结果表明: 在时效过程中, 单晶硅微纳构件加工变质层的有序度显著提高, 残余应力大幅降低, 表面粗糙度略有增加, 此外还发现加工变质层中非晶硅原子在时效过程中大幅减少, 部分非晶硅出现了再结晶现象, 其中部分BCT5-Si以及金属相(Si-Ⅱ)结构原子转化为金刚石结构(Si-I). 时效作用对加工后单晶硅微纳构件表面性能具有重要的影响, 同时可以提高微纳构件的拉伸力学性能. 关键词： 蒙特卡罗方法 纳米加工 表面性能 时变性     

Use of the grey relational analysis to determine optimum laser cutting parameters with multi-performance characteristics

This paper presents an effective approach for the optimization of laser cutting process of St-37 steel with multiple performance characteristics based on the grey relational analysis. Sixteen experimental runs based on the Taguchi method of orthogonal arrays were performed to determine the best factor level condition. The response table and response graph for each level of the machining parameters were obtained from the grey relational grade. In this study, the laser cutting parameters such as laser power and cutting speed are optimized with consideration of multiple-performance characteristics, such as workpiece surface roughness, top kerf width and width of heat affected zone (HAZ). By analyzing the grey relational grade, it is observed that the laser power has more effect on responses rather than cutting speed. It is clearly shown that the above performance characteristics in laser cutting process can be improved effectively through this approach.     

Experimental approach to the laser machining of PMMA substrates for the fabrication of microfluidic devices

This paper deals with CO₂ laser machining of a suitable amorphous polymer (PMMA) as a flexible technique for the rapid fabrication of miniaturized structures such as microfluidic devices.A model to estimate the main dimensions (depth and width) of the grooves produced by the laser on PMMA is presented, taking into account the influence of the main process parameters (incident power, scanning speed and spot diameter). This theoretical model allows to control the engraving process showing that laser could represent a valid alternative for the production of microchannels. PMMA single-use devices are found to be easier to manufacture with respect to the conventional glass or silicon products.In a second step, IR laser vaporization is adopted for the removal of a single layer of PMMA. This is achieved using multiple overlapping sequences of straight grooves with different scanning directions. The proposed technique showed that the removal depth varied proportionally with the number of layers machined, while surface roughness is influenced by the grooves spacing and the orientation of the scanning direction between successive layers.A method for thermally bonding the PMMA sheets, constituting the 3D structure of the chip, is also presented. The combination of high temperatures and low bonding pressures makes it possible to generate a bulk junction enabling good performances in terms of sealing characteristics.     

Excimer laser-induced etching of sub-micron surface relief gratings in fused silica using phase grating projection

Phase grating projection using a Schwarzschild objective is presented in conjunction with a process that allows laser-induced etching of transparent materials at the interface of liquids, in order to generate periodical surface relief structures with sub-micron resolution in fused silica. The achieved sinusoidal gratings exhibit a period of 780 nm and a depth of up to 180 nm, having a roughness lower than 5 nm r.m.s. The depth and roughness of the gratings are related to the applied laser fluence and pulse number. In addition to the grating formation, an overall removal of material at higher laser fluences was found. Received: 3 December 2001 / Accepted: 5 December 2001 / Published online: 11 February 2002     

Yield improvement for displays’ color filters surface by establishing a precision reclaim-module

An effective surface micromachining process for yield improvement was developed using microelectromechanical etching as a precision reclaim-module for indium tin oxide (ITO) thin-film nanostructures from the displays’ color filter surface of thin film transistor liquid crystal displays (TFT-LCDs). The low yield of ITO thin-film deposition is an important factor in optoelectronic semiconductor production. By establishing a recycling process using the ultra-precise removal of thin-film nanostructures, the optoelectronic semiconductor industry can effectively recycle defective products, minimizing both production costs and pollution. For the etching-process, an adequate gap-width between the negative-electrode and the ITO surface, a high flow velocity or a higher working temperature of the electrolyte, results in a higher removal rate for ITO thin-films. Also, adequate feed rate of the workpiece (displays’ color filter) combined with enough electrical power produces a fast removal rate. Pulsed direct current can improve the effect of dregs discharge and is advantageous to associate with the fast feed rate of the workpiece, but it raises the current rating. A smaller edge radius and a small width of the negative-electrode provide a larger discharge space and better etching effect. Microelectromechanical etching requires only a short period of time to remove the ITO thin-film easily and cleanly.     

Energy mechanism during machining process by high-power continuous CO2 laser

The high-power continuous CO₂ laser (4 KW) can provide an energy capable of causing melting or even, with special treatment of surface, vaporizing an XC42 - iron sample. During the laser-metal interaction, the energetic machining mechanism takes place according to the following assumptions: Laser energy absorbed by metal is maximal for a p-polarization. The melting front precedes the laser beam. The beam interacts with a preheated surface whose temperature is near the melting point. In such conditions one finds that mean average absorptive power (A), calculated through Maxwell's equations at fusion temperature, is around 25%, which enables us to calculate the laser energy absorbed by the metal. The available thermal models provide a lot of information concerning thermal diffusion but are unable to describe the physical process of the groove. Hence practical information required for industrial applications cannot be obtained. So in this work we have established a model able to calculate the characteristic parameters of the groove (or cut) as a function of laser energy and beam impact diameter (D). This model is based on writing down the balance of exchanged heat during the time of laser-material interaction ((t). This new procedure makes it possible to determine the machining parameters (laser power P, impact diameter D, and machining speed V) which one has to use during the machining process in order to implement an optimum groove (or cut) with predetermined characteristics (width L_s, and groove depth P_r).     

Laser milling of martensitic stainless steels using spiral trajectories

A laser beam with sub-picosecond pulse duration was driven in spiral trajectories to perform micro-milling of martensitic stainless steel. The geometry of the machined micro-grooves channels was investigated by a specifically conceived Scanning Probe Microscopy instrument and linked to laser parameters by using an experimental approach combining the beam energy distribution profile and the absorption phenomena in the material. Preliminary analysis shows that, despite the numerous parameters involved in the process, layer removal obtained by spiral trajectories, varying the radial overlap, allows for a controllable depth of cut combined to a flattening effect of surface roughness. Combining the developed machining strategy to a feed motion of the work stage, could represent a method to obtain three-dimensional structures with a resolution of few microns, with an areal roughness S_a below 100 nm.     

Pulsed laser desorption near a jet orifice: Concentration profiles of entrained perylene vapor

We have investigated the entrainment in a jet expansion of material vaporized with a laser pulse from a surface below but closely adjacent to the jet orifice. Jets of He and Ar were used as carriers, and perylene was the test substance. Its distribution in space and time far from the nozzle was measured by laser-induced fluorescence and one-dimensional imaging with an optical multichannel analyzer. The width of the perylene concentration profile was found to be much narrower than the width of the gas expansion, especially in He. This makes it possible to extract a useful portion of the entrained material through a skimmer. Depending on the values of experimental parameters, the center of the profile first appears above, on, or below the jet axis and then moves lower with time. Effects of several parameters on shape and time-dependent position of the profile were investigated. The results can be used to optimize the overlap of the concentration pulse with a skimmer or other probe.     

Investigations into the mechanism of material removal and surface modification at atomic scale on stainless steel using molecular dynamics simulation

A molecular dynamics simulation (MDS) has been carried out to investigate the material removal phenomenon of chemo-mechanical magnetorheological finishing (CMMRF) process. To understand the role of chemical assisted mechanical abrasion in CMMRF process, material removal phenomenon is subdivided into three different stages. In the first stage, new atomic bonds viz. Fe–O–Si is created on the surface of the workpiece (stainless steel). The second stage deals with the rupture of parent bonds like Fe–Fe on the workpiece. In the final stage, removal of material from the surface in the form of dislodged debris (cluster of atoms) takes place. Effects of process parameters like abrasive particles, depth of penetration and initial surface condition on finishing force, potential energy (towards secondary phenomenon such as chemical instability of the finished surface) and material removal at atomic scale have been investigated. It was observed that the type of abrasive particle is one of the important parameters to produce atomically smooth surface. Experiments were also conducted as per the MDS to generate defect-free and sub-nanometre-level finished surface (Ra value better than 0.2 nm). The experimental results reasonably agree well with the simulation results.