微/纳米多层金刚石自支撑膜的制备及生长特性的研究

在30kW级直流电弧等离子喷射化学气相沉积装置下,采用Ar-H2-CH4混合气体,通过控制工艺参数,在钼衬底上分别制备了普通微米自支撑膜及多层金刚石自支撑膜并对其进行研究.结果显示,同普通微米膜相比,多层膜体是由微米晶金刚石层和纳米晶金刚石层组成,表面光滑,微米层与纳米层间具有相互嵌套式的界面;多层膜中各层膜体的内应力沿生长方向有明显变化,出现一个从压应力到拉应力变化的过程;在沉积过程中,随着层数变化,膜体的生长速率也发生相应的变化.     

高功率CO2激光器CVD金刚石窗口制备研究

本文研究制备了可应用于高功率CO2激光器的CVD金刚石窗口.首先使用环形天线-椭球谐振腔式MPCVD装置沉积制备直径2英寸(1英寸=2.54 cm)金刚石自支撑膜,然后将膜片双面抛光,激光切割成矩形基片,再采用蒸镀法在基片表面制备中心波长在10.6μm的增透膜,最终制备得到金刚石光学窗口.采用傅里叶红外透射谱、热导仪、...     

化学气相沉积(CVD)金刚石研究现状和发展趋势

化学气相沉积(CVD)技术的发展使得金刚石优异的综合性能得以充分发挥,在诸多领域获得应用,并有可能实现跨越式的发展。色心使得金刚石量子加速器初步显示了巨大可行性,包括紫外激光写入窗口等诸多应用场景将金刚石的光、电、热和力学综合优势发挥到了极致,超宽禁带金刚石半导体应用将很快实现,金刚石的散热应用也在不断拓展。本文在总结CVD金刚石的制备方法和性能特点的基础上,根据金刚石的本征特点和应用领域,将其分为量子级、电子级、光学级、热学级和力学级五类,对各类金刚石的研究和应用状况进行了详细阐述,进一步明晰CVD金刚石目前的发展状态,对研判其未来发展趋势有重要意义。     

Study of polycrystalline diamond layers deposited from gas phase

Crystallite size in polycrystalline diamond layers with a grain size exceeding 3 μm are determined by the X-ray topography method with the use of a divergent beam from a point source. For layers with thicknesses in the range 80–700 μm deposited in SHF plasma and 1–40 μm obtained by the method of a hot filament, the size distribution of crystallites is obtained. Asterism of some spots on X-ray diffraction patterns from the diamond layers with thicknesses exceeding 100 μm showed plastic deformation of individual crystallites. The parameters of deep levels in the band gap of undoped high-resistance diamond layers and the acceptor-type defects with an activation energy higher than 1 eV are determined by the method of charge relaxation spectroscopy.     

Photonic Heterostructures with Properties of Ferroelectrics and Light Polarizers

The optical and electro-optical properties of a new type of photonic heterostructure composed of alternating ferroelectric molecular layers and optically anisotropic layers of another material are considered. A numerical simulation of the real prototype of this heterostructure, which can be prepared by the Langmuir—Blodgett method from layers of a ferroelectric copolymer (polyvinylidene fluoride trifluoroethylene) and an azo dye with photoinduced optical anisotropy, has been performed. It is shown that this heterostructure has pronounced polarization optical properties and yields a significant change in the polarization state of light at the photonic band edges in the ranges of the maximum density of photon states. The latter property can be used to obtain an enhanced electro-optic effect at small spectral shifts of the photonic band (the latter can be provided by the piezoelectric effect in ferroelectric layers).     

P型掺杂金刚石厚膜的电火花加工

CVD金刚石具有和天然金刚石相近的一系列独特的力学、热学、声学、电学、光学和化学性能,在航空、航天、国防等高科技领域具有广阔的应用前景.但是,普通CVD金刚石膜是绝缘体,无法直接进行电加工.本文在分析了电火花加工半导体材料去除速率的基础上,通过掺硼对CVD金刚石厚膜进行半导体改性,继而实现了其电火花加工.通过研究,建立了掺硼金刚石厚膜电火花加工去除速率的经验公式.最后,通过Raman和SEM分析对CVD金刚石厚膜的电火花加工机理进行了初步探讨.     

高质量CVD金刚石膜的氧化损伤

高质量CVD金刚石膜的高温损伤的研究是其高温应用的基础。抛光的金刚石膜经780℃保温3min后,红外透过和可见光的透过率开始下降;780℃保温15min后,其红外透过和可见光的透过率严重受损。扫描电镜、原子力学显微镜及台阶仪的结果表明：CVD金刚石膜氧化的开始阶段主要集中在晶界、表面孔洞等缺陷处,随后导致金刚石膜的晶面也开始刻蚀,表面粗糙度增大,最终使得金刚石膜丧失红外和可见光的透过。     

金刚石单晶高温高压合成中氮对硫的影响

为了研究在金刚石大单晶生长过程中氮对硫的影响,在6.5 GPa高压条件下采用温度梯度法分别研究了两种不同合成体系中金刚石的合成.利用傅里叶显微红外光谱(FTIR)仪对所合成的金刚石进行了测试,测试结果表明:晶体中(a)中不含有氮,晶体中(b)中氮的浓度为280 ppm.此外,对所合成的样品进行了X射线光电子能谱测试,测试结果表明:在Ib型金刚石中有硫元素存在,而硫未进入到IIa型金刚石中.因此,金刚石中氮的存在对金刚石中硫的进入有促进作用.     

High pressure phase transformation in MnS

The structural, optical and electrical behaviour of MnS under high pressure was investigated. For X-ray investigations and optical observations a gasketed diamond anvil cell was used. Measurements of the electrical conductivity were performed in a Bridgman opposed-anvil apparatus. A structural phase transition at 7.2 GPa from the cubic α-phase (NaCl-type) to the B16-type structure (GeS-type) was detected by X-ray investigations and confirmed by optical observations. Measurements of the electrical conductivity showed a linear decreasing electrical gap energy in dependence on pressure.     

硼协同掺杂金刚石单晶的高温高压合成

金刚石是一种具有优异性能的极限性超硬多功能材料。人工合成的金刚石可通过掺杂的方式使其具有各种独特的性质。掺硼金刚石兼具p型半导体的导电特性和金刚石自身优良的物理和化学性能,在国防、医疗、勘探、科研等领域具有极高的应用价值。本文基于本课题组高温高压(HPHT)法合成的系列掺硼金刚石以及硼协同掺杂金刚石单晶,进行了硼掺杂金刚石、硼氢协同掺杂金刚石以及硼氮协同掺杂金刚石的合成和性能特征等方面的研究。通过表征合成样品在光学、电学方面的性能,探讨了不同掺杂添加剂对合成金刚石性能的影响,为合成高性能的半导体金刚石提供了思路。     

以磷化铁为添加剂沿(111)面生长磷掺杂金刚石大单晶

掺杂是调控金刚石性能的一种重要手段。本文采用温度梯度法,在5.6 GPa、1 312 ℃的条件下,选用Fe₃P作为磷源进行磷掺杂金刚石大单晶的合成。金刚石样品的显微光学照片表明,随着Fe₃P添加比例的增加,金刚石晶体的颜色逐渐变深,包裹体数量逐渐增加,晶形由板状转变为塔状直至骸晶。金刚石晶形的变化表明Fe₃P的添加使生长金刚石的V形区向右偏移,这是Fe₃P改变触媒特性的缘故。红外光谱分析表明,Fe₃P的添加使金刚石晶体中氮含量上升,这说明磷的进入诱使氮原子更容易进入金刚石晶格中。激光拉曼光谱测试表明,随着Fe₃P添加比例的增加,所合成的掺磷金刚石的拉曼峰位变化不大,其半峰全宽(FWHM)值变大,这说明磷的进入使得金刚石晶格畸变增加。XPS测试结果显示,随着Fe₃P添加比例的增加,金刚石晶体中磷相对碳的原子百分含量也会增加,这意味着添加Fe₃P所合成的金刚石晶体中有磷存在。     

碳酸钙掺杂对Ⅰb型金刚石沿不同晶面生长行为的影响

作为天然金刚石生长环境的碳酸盐,研究其掺杂对人造金刚石晶体生长行为的影响具有重要的学术价值。本文运用高温高压下的温度梯度法,将碳酸钙(CaCO₃)按照不同比例掺杂到金刚石合成腔体内的碳源中,用以研究其掺杂对金刚石分别沿(100)或(111)晶面生长行为的影响。利用光学显微成像对掺杂合成金刚石晶体形貌的表征表明:随着碳酸钙掺量的增加,沿(100)面生长的金刚石晶形由塔状变为板状且出现了裂晶、连晶现象,晶体颜色先变浅再变黑,内部出现了包裹体;同样,沿(111)面生长的金刚石晶形由板状逐渐变为塔状且出现了裂晶、孪晶现象,晶体颜色逐渐变黑,内部包裹体增多。用激光拉曼光谱对掺杂金刚石晶体质量的表征表明:随着碳酸钙掺量的增加,沿(100)或(111)面生长的掺杂金刚石的拉曼峰位偏移量均增大,半峰全宽均变大。这说明碳酸钙掺杂使得金刚石晶格畸变增加、内应力变大。本文对碳酸钙掺杂影响沿两不同面生长金刚石的晶形、颜色、内部质量等行为的成因进行了分析,为本课题后续研究奠定了基础。     

直流电弧等离子喷射CVD中控制生长(111)晶面占优的金刚石膜

运用光发射谱(OES)技术对大功率直流电弧等离子喷射CVD金刚石膜的气相沉积环境进行了原位诊断,研究了气相环境中主要含碳基团的浓度及分布与沉积参数的关系,发现了C2基元比其他基元对沉积参数更加敏感.利用光发射谱对C2基元发射强度的监测,实时调控沉积各参数,在大功率直流电弧等离子喷射CVD中实现了(111)晶面占优的金刚石膜的可控生长,I(111)/I(220)XRD衍射峰强度的比值达48.     

对Fe-Ni-B催化剂合成的金刚石中含硼包裹物的研究

本文以自制的Fe基含硼合金作催化剂,石墨片作碳源,压力和温度分别为5.3GPa和1570K条件下,在六面顶压机上合成了0.6mm左右的含硼金刚石晶体.利用X射线衍射仪(XRD)分析了金刚石晶体的结构,证明金刚石是六方结构的.在光学显微镜下观察了金刚石的晶形,利用透射电子显微镜(TEM)和能谱仪(EDS)对金刚石晶体进行了微观分析,发现了多种含硼包裹物,包括(Fe,Ni)23(C,B)6,(Fe,Ni)3(C,B),(Fe,Ni)B,(Fe,Ni)2B,Ni3B,B4C等.研究了它们的化学组成与微观结构,并分析了含硼包裹物的来源与形成过程.结合金刚石的生长过程分析认为,合金触媒是金刚石中包裹物元素的主要来源,通过调整触媒的成份和含量可以控制金刚石内杂质元素的种类.硼元素在金刚石中既可以以化合物的形式存在,也可以替代碳原子存在于金刚石内.     

高温高压与CVD金刚石单晶衬底质量对比研究

本文通过高分辨X射线衍射(HRXRD)、激光拉曼光谱(Raman)、晶格畸变检测等测试分析方法对多组高温高压(HTHP) Ⅰb、HTHP Ⅱa和化学气相沉积(CVD)型(100)面金刚石单晶样品进行对比研究。HRXRD和Raman的检测结果均表明HTHP Ⅱa型金刚石单晶的结晶质量接近天然金刚石,其XRD摇摆曲线半峰全宽和Raman半峰全宽分别为0.015°~0.018° 和1.45~1.85 cm^-1。晶格畸变检测仪的检测结果表明,HTHP Ⅱa型金刚石单晶的应力分布主要有两种:一种几乎无明显应力分布,另一种沿<110>方向呈对称的放射状分布,其他区域无晶格畸变。HTHP Ⅰb和CVD型金刚石单晶应力分布均相对分散,晶格畸变复杂,与其HRXRD和Raman的检测结果相符。进一步利用等离子体刻蚀法对三种类型金刚石单晶(100)面位错缺陷进行对比分析,结果表明,HTHP Ⅱa型金刚石位错密度为三者中最低,仅为1×10³ cm^-2。本研究为制备高质量大尺寸CVD金刚石单晶的衬底选择提供了实验依据。     

大尺寸单晶金刚石磨抛一体化加工研究

金刚石因其优异的物理性质被视为下一代半导体材料,然而其极高的硬度、脆性和耐腐蚀性导致其加工困难,尤其是对于大尺寸的化学气相沉积(chemical vapor deposition, CVD)单晶金刚石(SCD)晶片而言,目前还缺乏一种高效、低成本的磨抛加工方法。本文提出一种基于工件自旋转的同心双砂轮磨抛一体化加工技术,在一次装夹中,先采用金刚石磨料的陶瓷内圈砂轮磨削单晶金刚石晶片表面,将单晶金刚石表面迅速平坦化,后采用金刚石与CuO混合磨料的外圈溶胶-凝胶(sol-gel,SG)抛光轮抛光单晶金刚石晶片表面,使其在较短时间内完成从原始生长面(Sa约46 nm)到原子级表面精度(Sa＜0.3 nm)的加工。磨削加工中,硬质金刚石磨料的陶瓷砂轮高速划擦金刚石晶片表面,在强机械作用下获得较大的材料去除以及纳米级的光滑单晶金刚石表面,同时引起进一步的表面非晶化;SG抛光加工中,硬质金刚石磨料高速划擦单晶金刚石表面形成高温高压环境,进一步诱导CuO粉末与单晶金刚石表面的非晶碳发生氧化还原反应,实现反应抛光。磨抛一体化的加工技术为晶圆级的单晶、多晶金刚石的工业化生产提供借鉴。     

Structural and optical properties of vapour‐etching based porous silicon

The structural and optical properties of porous silicon (PS) layers prepared by Vapour‐Etching (VE) of moderately and heavily boron‐doped Si substrates are investigated. The VE technique produces rough PS layers that are essentially formed of interconnected cluster‐like structures. Optical investigations indicate that this surface roughness enables the PS layers to be used as antireflection coatings in silicon based devices. These optical characteristics are investigated by optical reflectivity and light scattering. The local chemical state and the microstructure of the PS layers are studied by electron energy loss spectroscopy (EELS) in transmission electron microscopy (TEM), and are correlated to the red photoluminescence (PL). TEM studies point out that the cluster‐like interconnected structures are composed of luminescent nanocrystallites. PL measurements display that both quantum confinement and surface passivation determine the electronic states of the silicon nanocrystallites. The complex dielectric function is calculated from the experimental single‐scattering distribution spectrum using a Kramers Kronig analysis. The first resonance peak in the imaginary part is observed at 2.3 eV; two other broadened features appear at 4.7 and 8.8 eV. The latter is generally related to an interface plasmon resulting from the silicon‐silicon oxide interface. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

CVD法制备高质量金刚石单晶研究进展

本文介绍了制备单晶金刚石的主要方法并对其进行了对比,从籽晶选择、预处理和生长工艺几个方面综述了微波等离子体化学气相沉积法制备金刚石单晶的研究进展,并简单介绍了目前国内外在单晶金刚石制备上的进展,最后对CVD金刚石单晶在电子领域的应用进行了展望.     

The pentacene films on the glass/ITO surface: structure and optical properties

Abstract

The structure, morphology and optical transmittance spectra of pentacene films on the (glass/ITO) surface were studied. The films were grown by two methods - the thermal vacuum deposition (TVD) and pulsed laser deposition (PLD). The electron diffraction pattern from thermally deposited pentacene films confirms their polycrystalline structure while the diffraction pattern of PLD-coated layers has a diffusion character. The results obtained showed that layers deposited by the TVD method has an optical spectrum that is characteristic for the pentacene film in contrary to the layers deposited by the PLD method. It is found a sensitivity of the optical transmittance of pentacene films to the ammonia action, which may be used for development the optical gas sensor.     

Microstructure optical and electrical studies of cadmium selenide thin films

Nucleation and growth of cadmium selenide thin films are of considerable interest because of their direct effect on the optical and electrical properties of this material. Vacuum-deposited layers on amorphous and crystalline substrates showed a polycrystalline structure. The layers were deposited at a pressure of 10⁻⁴ Pa, with two deposition rates of 12 nm/s and 15 nm/s. The electrical resistivity and the optical absorption were studied for a group of layers on quartz substrate. As well the morphology and the microstructure were investigated by X-ray and electron microscopy. Few activation energies were estimated from the optical absorbance and thermo-resistance.