飞秒激光诱导钛表面形成高空间频率周期条纹结构

利用波长为800 nm的飞秒激光,在空气和去离子水中诱导钛表面形成不同的周期条纹结构。在空气中,激光能量密度为0.265 J/cm2时,钛表面主要形成周期为500~560 nm低空间频率条纹结构;激光能量密度为0.102 J/cm2时,主要形成的是周期为220~340 nm高空间频率条纹结构。两种条纹均垂直于入射激光偏振方向,且条纹周期随着脉冲重叠数的增大而增大。在水中,除形成垂直激光偏振方向、周期为215~250 nm的高空间频率条纹结构,还形成了平行于激光偏振方向且周期约为入射激光波长八分之一的高空间频率条纹结构。利用表面等离子体理论、二次谐波及Sipe理论对各种周期条纹结构的形成机理进行分析,发现周期条纹结构的形成与钛表面氧化层有密切的关系。     

飞秒激光诱导钛表面形成高空间频率周期条纹结构

利用波长为800 nm的飞秒激光,在空气和去离子水中诱导钛表面形成不同的周期条纹结构。在空气中,激光能量密度为0.265 J/cm2时,钛表面主要形成周期为500~560 nm低空间频率条纹结构;激光能量密度为0.102 J/cm2时,主要形成的是周期为220~340 nm高空间频率条纹结构。两种条纹均垂直于入射激光偏振方向,且条纹周期随着脉冲重叠数的增大而增大。在水中,除形成垂直激光偏振方向、周期为215~250 nm的高空间频率条纹结构,还形成了平行于激光偏振方向且周期约为入射激光波长八分之一的高空间频率条纹结构。利用表面等离子体理论、二次谐波及Sipe理论对各种周期条纹结构的形成机理进行分析,发现周期条纹结构的形成与钛表面氧化层有密切的关系。     

Structure formation on the surface of alloys irradiated by femtosecond laser pulses

Laser-induced periodic surface structures with different spatial characteristics have been observed after multiple linearly polarized femtosecond laser pulse (120 fs, 800 nm, 1 Hz to 1 kHz pulse repetition frequency) irradiation on alloys. With the increasing number of pulses, nanoripples, classical ripples and modulation ripples with a period close to half of classical ripples have all been induced. The generation of second-harmonic has been supposed to be the main mechanism in the formation of modulation ripples.     

Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface

Spontaneous nanostructure formations on roughened and smooth silicon surface by the femtosecond laser irradiation with the repetition rate of 100 kHz were systematically studied. In addition to the widely accepted so-called coarse ripple, which has the period analogous to the wavelength of the laser beam and aligns perpendicularly to the electric field of the incident laser beam, the ripple which has the period similar to the wavelength of the incident laser beam but aligns parallel to the electric field of the laser beam was observed on the roughened surface for the lower fluence and the higher number of pulse irradiation. Furthermore, the ensemble of dots formed by the enhancement of the local electric field was found on the roughened surface. This structure is preferentially formed around the scratches aligned perpendicularly to the electric field of the laser beam. These novel nanostructures are considered to be peculiar to the femtosecond laser irradiation and open the possibilities for precise control of the spontaneous nanostructure formation by femtosecond laser irradiation.     

Coherent linking of periodic nano-ripples on a ZnO crystal surface induced by femtosecond laser pulses

We demonstrate the coherent linking of periodic nano-ripples formed on the surface of ZnO crystals induced by femtosecond laser pulses. By adjusting the distance between two laser scanning zones, the periodic nano-ripples induced by two separated laser writing processes can be coherently linked and the ZnO nanograting with much longer grooves is therefore produced. The length limitation of this kind of nanograting previously set by the laser focus size is thus overcome. The micro-Raman mapping technique is used to evaluate the quality of coherent linking, and the underlying physics is discussed. The demonstrated scheme is promising for producing large-size self-organized nanogratings induced by femtosecond laser pulses.     

Mechanism for spherical dome and microvoid formation in polycarbonate using nanojoule femtosecond laser pulses

Spherical domes are created on the surface of polycarbonate samples, and microvoids are formed within the bulk using only a femtosecond oscillator with pulse energy of just 0.47?nJ. Size of spherical domes and shape of microvoids are controlled by changing the laser focus inside the material. Their formation is explained by a combination of heat accumulation and dome formation dynamics, where the dome acts as a microlens shifting the laser focus within the sample. The technique described here provides a simple avenue for fabricating smooth microlens arrays of various sizes and opens the possibility for direct fabrication of complex three-dimensional microfluidic channels in transparent materials.     

Morphology control of laser-induced periodic surface structure on the surface of nickel by femtosecond laser

An interesting transition between low spatial frequency laser-induced periodic surface structure(LIPSS) and high spatial frequency LIPSS(HSFL) on the surface of nickel is revealed by changing the scanning speed and the laser fluence. The experimental results show the proportion of HSFL area in the overall LIPSS(i.e., K) presents a quasi-parabola function trend with the polarization orientation under a femtosecond(fs) laser single-pulse train.Moreover, an obvious fluctuation dependence of K on the pulse delay is observed under a fs laser dual-pulse train.The peak value of the fluctuation is found to be determined by the polarization orientation of the dual-pulse train.     

On the physics of self-organized nanostructure formation upon femtosecond laser ablation

We present new results on femtosecond LIPSS on silicon, fostering the dynamic model of self-organized structure formation. The first set of experiments demonstrates LIPSS formation by irradiation with a femtosecond white light continuum. The ripples are, as usual, perpendicular to the light polarization with a fluence-dependent wavelength between 500 and 700 nm. At higher dose (fluence × number of shots), the LIPSS turn to much coarser structures. The second set of experiments displays the dose dependence of pattern evolution at about threshold fluence. In contrast to the general case of multi-pulse LIPSS, where a strong dependence of the structures on the laser polarization is observed, single-shot exposition of silicon at about the ablation threshold results in a concentric pattern of very regular sub-wavelength ripples following the oval shape of the irradiated spot, without any reference to the laser polarization. When increasing the number of pulses, the usual, typical ripples develop and then coalesce into broader perpendicular structures, interlaced with remnants of the first, finer ripples.     

Towards nanostructuring with femtosecond laser pulses

Detailed investigations of the possibilities for using femtosecond lasers for the nanostructuring of metal layers and transparent materials are reported. The aim is to develop a simple laser-based technology for fabricating two- and three-dimensional nanostructures with structure sizes on the order of several hundred nanometers. This is required for many applications in photonics, for the fabrication of photonic crystals and microoptical devices, for data storage, displays, etc. Measurements of thermionic electron emission from metal targets, which provide valuable information on the dynamics of femtosecond laser ablation, are discussed. Sub-wavelength microstructuring of metals is performed and the minimum structure size that can be fabricated in transparent materials is identified. Two-photon polymerization of hybrid polymers is demonstrated as a promising femtosecond laser-based nanofabrication technology. Received: 20 November 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +49-511/2788-100, E-mail: ch@lzh.de     

Defect capture under rapid solidification of the melt induced by the action of femtosecond laser pulses and formation of periodic surface structures on a semiconductor surface

A theory of defect-strain instability with formation of periodic surface relief in semiconductors irradiated by ultra-short (τ_p=10^-13 s) powerful laser pulses is developed. The period and time of formation of surface relief are calculated. Regimes of multi-pulse laser ablation leading to formation of either a smooth surface or arrays of surface-relief spikes are pointed out and corresponding experimental results are interpreted from the viewpoint of the developed theory. Received: 4 December 2000 / Accepted: 23 July 2001 / Published online: 11 February 2002     

Coherent control of high-order harmonics generated with intense femtosecond laser pulses

Experimental results and theoretical analysis on the coherent control of high-order harmonics with chirped femtosecond laser pulses are presented. The coherent control of high-order harmonic generation resulted in sharp harmonic spectra by compensating for induced harmonic chirp with the control of applied laser chirp and it was found to be crucial also in producing sharp and bright harmonics.Received: 18 November 2002, Published online: 8 July 2003PACS: 42.65.Ky Frequency conversion; harmonic generation, including higher-order harmonic generation - 32.80.-t Photon interactions with atoms - 42.65.Re Ultrafast processes; optical pulse generation and pulse compression     

Time-resolved measurement of surface diffusion induced by femtosecond laser pulses

Diffusion of atomic oxygen on a vicinal Pt111 surface induced by femtosecond laser pulses has been studied using optical second-harmonic generation as a sensitive in situ probe of the step coverage. Time-resolved studies of the hopping rate for step-terrace diffusion with a two-pulse correlation scheme reveal a time constant of 1.5 ps for the energy transfer from the electronic excitation of the substrate to the frustrated translations of the adsorbate.     

Color center formation in KCl and KBr single crystals with femtosecond laser pulses

Because of their extremely high instantaneous powers, femtosecond lasers can color many nominally transparent materials. Although the excitations responsible for this defect formation occur on subpicosecond time scales, subsequent interactions between the resulting electronic and lattice defects complicate the evolution of color center formation and decay. These interactions must be understood in order to account for the long-term behavior of coloration. In this work, we probe the evolution of color centers generated by femtosecond laser radiation in potassium chloride and potassium bromide single crystals on time scales from microseconds to hundreds of seconds. By using an appropriately chosen probe laser focused through the femtosecond laser spot, we follow the changes in coloration due to individual or multiple femtosecond pulses and the evolution of that coloration for long times after femtosecond laser radiation is terminated.     

Sub-wavelength surface structuring of NiTi alloy by femtosecond laser pulses

Generation of self-organized sub-wavelength surface structures on a nickel–titanium alloy plate by femtosecond laser pulses is investigated experimentally through line-scribing experiments in air. It is found that Bragg-like relief gratings, with the orientation perpendicular to the laser polarization, are formed over the entire laser-scribed regions. The average period is measured as 630±30 nm. Distinctive features of these novel surface structures include nanoparticle-covered grating ridges and the maintainable spatial period regardless of incidence angles. With different laser parameters and sample scan speeds, sub-wavelength grating structures can evolve into cellular-like nanotextures. Optimal conditions for forming these surface structures are determined in terms of laser energy and scan speed. Elementary analyses of the structured surfaces by X-ray diffraction and photoelectron spectroscopy reveal that both the crystal structures and the chemical elements can remain in their original states, but the surface grains are refined and the atomic percentages are varied after femtosecond laser treatments.     

Effect of polarization on femtosecond laser pulses structuring silicon surface

Arrays of conical-like spikes can be formed on silicon surface after irradiated with femtosecond laser pulses in ambient of SF₆ or N₂. In this article, we report our observations on how the shape of the spikes formed on silicon surface varies with the polarization of laser beam. The experimental results show that, with circular polarized laser irradiation, the shape of the spikes is conical; however, with linearly polarized laser irradiation, the spikes show elliptic conical shape, and the long-axes are perpendicular to the direction of the polarization of laser beam. The asymmetric shape of spikes produced by linearly polarized laser beam can be explained by considering the polarization dependence of Fresnel-refraction.     

Colorizing silicon surface with regular nanohole arrays induced by femtosecond laser pulses

We report on the formation of one- and two-dimensional (1D and 2D) nanohole arrays on the surface of a silicon wafer by scanning with a femtosecond laser with appropriate power and speed. The underlying physical mechanism is revealed by numerical simulation based on the finite-difference time-domain technique. It is found that the length and depth of the initially formed gratings (or ripples) plays a crucial role in the generation of 1D or 2D nanohole arrays. The silicon surface decorated with such nanohole arrays can exhibit vivid structural colors through efficiently diffracting white light.     

Formation of periodic surface structures by ultrashort laser pulses

The formation of periodic surface structures by ultrashort laser pulses was observed experimentally and explained theoretically. The experiments were performed on graphite with picosecond laser pulses. The spatial period of the structures is of the order of the wavelength of the incident radiation, and the orientation of the structures is correlated with the direction of polarization of the light. The key point of the theoretical model proposed is resonance excitation of surface electromagnetic waves, which under conditions such that the temperature of the electronic subsystem is decoupled from the temperature of the crystal lattice causes a “temperature grating” to be written on the flat solid surface of the sample while the laser pulse is being applied on account of the temperature dependence of the surface impedance. The formation of a periodic surface profile from the temperature grating occurs by the volume expansion of a melted layer near the surface of the material. For typical values of the surface tension and viscosity for metals, there is not enough time for the periodic profile to be resorbed before the liquid layer solidifies. The formation of periodic surface structures is delayed in time relative to the laser pulse. Zh. éksp. Teor. Fiz. 115, 675–688 (February 1999)     

Progressive formation of fine and coarse ripples on SiC surface by repeated irradiation of femtosecond laser pulses

In this work, we report the progressive formation of first nanoparticles, next fine ripples, and eventually coarse ripples during the irradiation of single-crystal 6H-SiC surfaces with increasing number of femtosecond laser pulses (λ = 515 nm, τ = 250 fs, repetition rate = 100 kHz). At laser fluences greater than the single-pulse ablation threshold, nanoparticles were produced on the surface by the first few pulses over which fine ripple patterns overlapped at increased pulse numbers. As the pulse number was further increased over ten, the surface was gradually transformed into a coarse ripple–covered one. At laser fluence below the threshold, however, only fine ripples were formed nonuniformly.     

Nanostructuring with spatially localized femtosecond laser pulses

Spatially localized femtosecond pulses have been produced by a combination of scanning near-field optical microscopy with ultrashort pulse lasers. With these pulses direct ablative writing on metal surfaces is demonstrated. Possible applications of this technique for nanostructuring, repair, and production of lithographic masks are discussed.