Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications. PACS 42.62.-b; 81.05.Kf; 82.50.Pt     

Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses

Microfluidic chambers embedded in silica glass are drilled by water-assisted ablation with a femtosecond laser. The continuous scanning ablation increases the processing speed up to 50 μm/s. Not only may microchambers or microtrenches be obtained at high speed and in one step, but also combined structures consisting of cascaded microchambers and microtrenches may be fabricated. The inner-wall morphology of the microchambers is analyzed by a scanning electron microscope. PACS 87.80.Mj; 52.38.Mf; 82.50.Pt; 42.62.-b; 42.70.Ce     

3-D microstructuring inside photosensitive glass by femtosecond laser excitation

We show that a femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties of transparency, hardness and chemical and thermal resistances. The photosensitivity arises from the cerium in the glass. After exposure to a focused laser beam, latent images are written. Modified regions are developed by a post-baking process and then preferentially etched away in a 10% dilute solution of hydrofluoric acid at room temperature. We have measured the critical dose for modification of the photosensitive glass, and fabricated 3-D microstructures with microcells and hollow microchannels embedded in the glass based on the critical dose. Received: 12 August 2002 / Accepted: 13 August 2002 / Published online: 4 December 2002 RID="*" ID="*"Corresponding author. Fax: +81-48/468-4682, E-mail: mmasudaw@postman.riken.go.jp     

Fabrication of microfluidic optical waveguides on glass chips with femtosecond laser pulses

We describe the fabrication of microfluidic channel structures on the surface of a borosilicate glass slide by femtosecond laser direct writing for optical waveguide application. Liquid with a variable refractive index is fed into the microchannel, serving as the core of the waveguide. We demonstrate that either a multimode or a single-mode waveguide can be achieved by controlling the refractive index of the liquid.     

Fabrication of a micro-optical lens using femtosecond laser 3D micromachining for two-photon imaging of bio-tissues

We report, for the first time to our knowledge, on the application of a micro-optical lens fabricated by three-dimensional (3D) femtosecond laser direct writing for two-photon fluorescence imaging of biological tissues. We show that the two-photon fluorescence images of a plant leaf tissue acquired with the micro-optical lens are comparable to that of a 5× objective lens. Our result represents an important step towards the application of micro-optical components fabricated by femtosecond laser micromachining in miniaturized nonlinear fluorescence microscopy applications, such as two-photon endoscopy.     

Fabrication of three-dimensional microfluidic channels in glass by femtosecond pulses

Fabrication of three-dimensional microfluidic channels in glasses by water-assisted ablation with femtosecond laser pulses was investigated. The experimental results showed that formation of the photoinduced microchannels by femtosecond pulses depended on the incident laser power and the scanning speed. For the same scanning speed, the shape of cross-section of channels changed from ellipse to circle with increasing the laser power. Under the optimum condition of laser processing, we fabricated two layers of microfluidic channels with diameter of about 8 μm inside glass. The distance between two layers of microchannels was about 20 μm.     

Titanium micromachining by femtosecond laser

The ultimate goal of this research was to characterize the ablation depth with respect to pulse energy, translation speed, and consecutive passes in order to obtain the parameters to have smooth microchannel surfaces. A logarithmic dependence of the channel depth on the laser pulse energy was observed with two different distinct ablation regimes. Although the same fluence values were used with two different lens sizes, the slopes of these ablation regimes were quite different. 100 mm lens has a small optical penetration length with steeper ablation slope in the first regime, whereas the 15 mm lens has the opposite. In the second part of the ablation regime, the slope was lower for 100 mm lens as compared to 15 mm lens. Furthermore, spike formation has been seen in 100 mm lens study at 0.308, 0.370, 0.431, and 0.493 J/cm² fluence values yet no spike formations have been seen in 15 mm lens study.     

Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing

We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at ～1150°C by which the porous glass can be consolidated. We show that a square-wavelike channel with a total length of ～1.4 cm and a diameter of ～64 μm can be easily produced ～250 μm beneath the glass surface.     

A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.     

Fabrication of hollow optical waveguides in fused silica by three-dimensional femtosecond laser micromachining

We report on the fabrication of hollow optical waveguides in fused silica using femtosecond laser micromachining. We show that in such hollow waveguides, high-intensity femtosecond laser beams can be guided with low optical loss. Our technique, which was established earlier for fabrication of optofluidic structures in glass, can ensure a high smoothness at the inner surfaces of the hollow waveguides and provide the unique capability of fabrication of hollow waveguides with complex geometries and configurations. A transmission of ∼90% at 633 nm wavelength is obtained for a 62-mm-long hollow waveguide with an inner diameter of ∼250 μm. In addition, nonlinear propagation of femtosecond laser pulses in the hollow waveguide is demonstrated, showing that the spectral bandwidth of the femtosecond pulses can be broadened from ∼27.2 to ∼55.7 nm.     

Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

Three-dimensional (3D) micromachining of photosensitive glass is demonstrated by photochemical reaction using femtosecond (fs) laser for lab-on-a-chip application. True 3D hollow microstructures embedded in the glass are fabricated by fs laser direct writing followed by heat treatment and successive wet etching. The modification mechanism of the photosensitive glass by the fs laser and advantage of this process are discussed. Various microcomponents for the lab-on-a-chip devices such as microfluidics, microvalves, microoptics, microlasers, etc. are fabricated by using this technique and their performance is examined . PACS 42.62.-b; 82.50.Pt; 87.80.Mj     

Rapid fabrication of optical volume gratings in Foturan glass by femtosecond laser micromachining

We report on rapid fabrication of optical volume gratings in Foturan glass using a modulated femtosecond laser focused with cylindrical lenses. An optical volume grating with an area of 2 mm ×3 mm and ∼2 mm thickness can be achieved within 10 min by use of this method. Optical micrography confirms the volume nature of the gratings and shows that they consist of 10 μm-thickness planes with a period of 15 μm. The diffraction efficiency is examined to be ∼56%. The limitations and future implementations of the fabricated volume gratings are discussed.     

Three‐dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips

Internal modification of transparent materials such as glass can be carried out using multiphoton absorption induced by a femtosecond (fs) laser. The fs‐laser modification followed by thermal treatment and successive chemical wet etching in a hydrofluoric (HF) acid solution forms three‐dimensional (3D) hollow microstructures embedded in photosensitive glass. This technique is a powerful method for directly fabricating 3D microfluidic structures inside a photosensitive glass microchip. We used fabricated microchips, referred to as a nanoaquarium, for dynamic observations of living microorganisms. In addition, the present technique can also be used to form microoptical components such as micromirrors and microlenses inside the photosensitive glass, since the fabricated structures have optically flat surfaces. The integration of microfluidics and microoptical components in a single glass chip yields biophotonic microchips, in other words, optofluidics, which provide high sensitivity in absorption and fluorescence measurements of small volumes of liquid samples.     

Computer-generated volume holograms fabricated by femtosecond laser micromachining

We define computer-generated volume holograms (CGVHs) as arbitrary 3D refractive index modulations designed to perform optical functions based on diffraction, scattering, and interference phenomena. CGVHs can differ dramatically from classical volume holograms in terms of coding possibilities, and from thin computer-generated holograms in terms of efficiency and selectivity. We propose an encoding technique for designing such holograms and demonstrate the concept by scanning focused femtosecond laser pulses to produce localized refractive index modifications in glass. These CGVHs show a significant increase in efficiency with thickness. Consequently, they are attractive for photonic integration with free-space and guided-wave devices, as well as for encoding spatial and temporal information.     

X-ray emission from femtosecond laser micromachining

We characterize the spectral properties of X-rays generated from selected metal and semiconductor targets when 120-fs laser pulses are focused to intensities of∼10¹⁴–3×10¹⁵ W/cm² during laser micromachining in air. High fluxes of multi-keV-energy X-rays could be obtained with 280-μJ pulses at a 1 kHz repetition rate. The yield and spectral composition of the X-rays are found to depend sensitively on the processing conditions, and thus the X-ray emission is expected to be a novel indicator of optimal laser machining. Received: 17 July 2000 / Accepted: 27 October 2000 / Published online: 28 February 2001     

Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

A new technology for rapid prototyping of lab-on-chip devices is described. Direct write of a near-infrared femtosecond laser forms three-dimensional (3D) latent images inside photostructurable glass. Modified regions are developed by a post-annealing and then preferentially etched away in dilute hydrofluoric acid solution with an etching selectivity of 40–50 times, resulting in the formation of true 3D hollow microstructures inside the glass. Microfluidic structures with microcells and microchannels embedded in the glass are fabricated by this technique. PACS 42.62.-b; 47.85.Np; 81.05.Kf     

100-kHz diffraction-limited femtosecond laser micromachining

We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to /15 peak–valley and /100 rms. Clean 1.7-m diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. PACS 87.80.Mj; 42.60.Jf; 42.65.Re     

Optical waveguide writing inside Foturan glass with femtosecond laser pulses

We investigated the femtosecond laser writing of optical waveguides inside Foturan glass at various pulse energies and focusing depths. An optimal waveguide fabricated solely by femtosecond laser irradiation showed a refractive index modulation of ∼1.7×10^-3 and a minimum transmission loss of ∼0.80 dB/cm. This type of waveguide had lower transmission loss than those fabricated by a hybrid process of femtosecond laser exposure and following thermal treatment. An optical splitter was also fabricated at high pulse energy. PACS 42.65.Re; 42.82.Et; 42.70.Gi     

Generating optical vortex with computer-generated hologram fabricated inside glass by femtosecond laser pulses

We introduce a novel method to generate the optical vortex with computer-generated hologram (CGH) fabricated inside glass by femtosecond laser pulses. The CGH was directly written inside glass by femtosecond laser pulses induced microexplosion without any pre- or post-treatment of the material. We also realized the restructured optical vortex beams of both the transmission and reflection pattern with high fidelity using a collimated He-Ne laser beam. The total diffractive efficiency of both the transmission and reflection pattern is about 4.79%.