激光光刻中的超分辨现象研究

激光光刻是加工微光学及二元光学掩模的主要手段。光刻的最细线宽对所加工的二元微器件性能起决定作用。本文导出了会聚的高斯光束用于激光光刻时在光刻胶内的光场近似上此可判断出能光刻线条的分辨力。若入射高斯光束受到振中相位调制时,胶层内的光强分布将发生变化,从而影响曝光线条的线宽和质量。计算看出：当入射光中心环受到遮拦时,可以得到超光刻物镜极限分辨的线条宽度（０．６μｍ）,但此时对曝光能量控制要求很高。在激     

精确控制大数值孔径微透镜列阵面形的显影阈值方法

提出了一种可对大矢高、非球面微透镜阵列面形进行精确控制的新方法。针对不同面形的微透镜阵列，该方法首先对光致抗蚀剂表面的曝光分布进行设计，然后，利用光致抗蚀剂显影过程中的阈值特性，对微透镜的面形实行控制。当抗蚀剂显影速率接近0时，即可获得设计的微透镜面形。该方法不仅大大提高了微透镜阵列矢高的加工范围，而且还减小了光刻材料显影特性对微透镜面形的影响，提高了微透镜阵列的面形控制精度，在实验中获得了矢高达114μm的微透镜阵列。最终实现了大浮雕深度、大数值孔径、非球面微列阵光学元件的面形控制。     

Depth of focus estimation based on exposure dose distribution

A defocusing exposure dose distribution model is established with the integral effect of light intensity on time taken into account for laser direct writing on a thin photoresist with total reflection substrate. Exposure dose distribution curves are established using the established model for different photoresist depths. A side slope angle is established for each defocusing amount in accordance with the exposure dose distribution curves, and so depth of focus can be estimated by simply checking to see if the maximum side slope angle with the horizontal is in the range of 80-100°. Simulation results indicate that when laser direct writing is done on a thin photoresist with total reflection substrate using a laser with wavelength equal to 442 nm and a lens with numerical aperture equal to 0.5, the depth of focus estimated using the proposed method is 1 μm, which is just 1/3 of the depth of focus estimated using the method based on intensity distribution. It is therefore concluded that it is the integral effect of light intensity on time that causes the depth of focus estimation error, and the proposed method can be used to achieve a more accurate depth of focus estimation compared to the intensity distribution based method.     

Field emission from patterned SnO2 nanostructures

A simple and reliable method has been developed for synthesizing finely patterned tin dioxide (SnO₂) nanostructure arrays on silicon substrates. A patterned Au catalyst film was prepared on the silicon wafer by radio frequency (RF) magnetron sputtering and photolithographic patterning processes. The patterned SnO₂ nanostructures arrays, a unit area is of ∼500 μm × 200 μm, were synthesized via vapor phase transport method. The surface morphology and composition of the as-synthesized SnO₂ nanostructures were characterized by means of scanning electron microscopy (SEM) and X-ray diffraction (XRD). The mechanism of formation of SnO₂ nanostructures was also discussed. The measurement of field emission (FE) revealed that the as-synthesized SnO₂ nanorods, nanowires and nanoparticles arrays have a lower turn-on field of 2.6, 3.2 and 3.9 V/μm, respectively, at the current density of 0.1 μA/cm². This approach must have a wide variety of applications such as fabrications of micro-optical components and micropatterned oxide thin films used in FE-based flat panel displays, sensor arrays and so on.     

Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices

Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4 μm wide) separated from the large electrode (20 μm wide) by 20 μm and 6 μm gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (∼100 °C) due to low T_g of polymeric material. The fluidic velocity measurement shows a maximum of about 450 μm/s in a 150 μm channel width of organic micro-fluidic devices after plasma surface modification.     

Roughness measurement of metals using a modified binary speckle image and adaptive optics

This paper proposes an integrated roughness measurement system that is based on adaptive optics (AO) and binary analysis of speckle pattern images. The aim of this study was to demonstrate the necessity for AO compensation in regions containing both heat and fluid flow turbulences. A speckle image was obtained by projecting a laser beam onto the specimen surface, and the laser pattern image reflected from the surface was binarized to experimentally correlate the intensity with the surface roughness. In the absence of the AO correction scheme, induced turbulences can severely increase the residual rms error from 0.14 to 1.4 μm. After a real-time closed-loop AO correction, we can reduce the wavefront root mean square (rms) error to 0.12 μm, which not only compensates for the aberration error from induced disturbances but also improves the overall performance of the optical system. In addition, an AO system having different gains was investigated, and a threshold gain value was found to be able to steadily compensate for the wavefront errors in less than 2 s. Measurement results of five steel samples having roughness ranging from 0.2 to 3.125 μm (0.3λ and 5λ, where λ is the diode laser wavelength) demonstrate an excellent correlation between the intensity distribution of binary images and average roughness with a correlation coefficient of 0.9982. Furthermore, the proposed AO-assisted system is in good agreement with the stylus method and less than 9.73% error values can be consistently obtained.     

dc-Hydrogen plasma induced defects in bulk n-Ge

Bulk antimony doped germanium (n-Ge) has been exposed to a dc–hydrogen plasma. Capacitance–voltage depth profiles revealed extensive near surface passivation of the shallow donors as evidenced by ∼a 1.5 orders of magnitude reduction in the free carrier concentration up to depth of ∼3.2 μm. DLTS and Laplace-DLTS revealed a prominent electron trap 0.30 eV below the conduction (E_C –0.30 eV). The concentration of this trap increased with plasma exposure time. The depth profile for this defect suggested a uniform distribution up to 1.2 μm. Annealing studies show that this trap, attributed to a hydrogen-related complex, is stable up to 200 °C. Hole traps, or vacancy-antimony centers, common in this material after high energy particle irradiation, were not observed after plasma exposure, an indication that this process does not create Frenkel (V–I) pairs.     

Theoretical study of the electro-optic effect of aperiodically poled lithium niobate in a Q-switched dual-wavelength laser

The electro-optic effect of aperiodically poled lithium niobate (APLN) has been theoretically investigated and proposed to use as a Q-switch in a simultaneous dual-wavelength laser. Our analysis shows that the polarization planes of the z-polarized (or y-polarized) dual-wavelength beams can be simultaneously rotated by 90° through a well-constructed APLN with an external electric field applied along the y-axis, which enables Q-switch function in a dual-wavelength laser cavity. Using a Nd:YVO₄ laser operating at 1.0643 μm and 1.3419 μm as an example, we present a design method of APLN by using the so-called simulated annealing algorithm. The influence of the domain errors in fabricating an APLN device is also studied. The results show that the device is not susceptible to the fabrication errors.     

Design of a wavelength demultiplexer based on a parabolically tapered multimode interference coupler

A compact wavelength demultiplexer is designed for the operation at 1.30 and 1.55 μm wavelengths using the three-dimensional semi-vectorial beam propagation method. The parabolically tapered multimode interference (MMI) coupler based on the deep-etched SiO₂/SiON rib waveguide is introduced into the present demultiplexer for reducing the length. The numerical results show that a MMI section of 330.0 μm in length, which is only 76% length of a straight MMI coupler, is achieved with the contrasts of 42.3 and 39.2 dB in quasi-TE mode, and 38.4 and 37.8 dB in quasi-TM mode at wavelengths 1.30 and 1.55 μm, respectively and the insertion losses below 0.2 dB. The modified finite difference scheme is applied to approximate the resulting equations along the transverse directions, in which the discontinuities of the derivatives of magnetic field components H_y and H_x along the vertical and horizontal interfaces, respectively, are involved.     

Characterization of spherical particles using high-order neural networks and scanning flow cytometry

We retrieve the radius R, real n and imaginary k parts of the refractive index of homogeneous spherical particles using angular distribution of the light-scattering intensity. To solve the inverse light-scattering problem we use a high-order neural-network technique. The effect of network parameters on optimization is examined. The technique is evaluated for noise-corrupted input data at 0.6 μm<R<10.6 μm, 1.02<n<1.38, and 0<k<0.03. The errors of retrieval for nonabsorbing particles do not exceed 0.05 μm for radius and 0.015 for refractive index. The experimental verification is fulfilled by experimental data retrieved by means of a scanning flow cytometer. The light-scattering profiles of polystyrene beads and spherized red blood cells are processed with the high-order neural networks and a non-linear regression at Mie theory. The parameters retrieved by the high-order neural networks correlate well with the parameters retrieved by the least-square method.     

Design and fabrication of long focal length microlens arrays

In this paper, we present microlens arrays (MLA) with long focal length (in millimeter range) based on thermal reflow process. The focal length of microlens is usually in the same order of lens diameter or several hundred microns. To extend focal length, we made a photoresist (SU-8) MLA covered by a Polydimethylsiloxane (PDMS) film on a glass substrate. Because the refractive index difference between PDMS and photoresist interface is lower than that of air and MLA interface, light is less bended when passing through MLA and is focused at longer distance. Microlenses of diameters from 50 μm to 240 μm were successfully fabricated. The longest focal length was 2.1 mm from the microlens of 240 μm diameter. The numerical aperture (NA) was reduced 0.06, which is much lower than the smallest NA (~ 0.15) by regular thermal reflow processes. Cured PDMS has high transmittance and becomes parts of MLA without too much optical power loss. Besides, other focal lengths can be realized by modifying the refractive index different between two adjacent materials as described in this paper.     

Surface characterization of Pd/Ag23 wt% membranes after different thermal treatments

Hydrogen permeation measurements of 1.5-10 μm thick Pd/Ag23 wt% membranes before and after thermal treatments at 300 °C in air (both sides) or in the temperature range 300-450 °C in N₂ (feed side) and Ar (permeate side) were performed. Accompanying changes in surface topography and chemical composition were subsequently investigated by atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) depth profiling. For a 2 μm thick membrane, the surface roughness increased for all annealing temperatures applied, while a temperature of 450 °C was required for an increase in roughness of both membrane surfaces to occur for the 5 μm membrane. The thickest membrane, of 10 μm, showed changed surface roughness on one side of the membrane only and a slight decrease in hydrogen permeance after all heat treatments in N₂/Ar. X-ray photoelectron spectroscopy investigations performed after treatment and subsequent permeation measurements revealed segregation of silver to the membrane surfaces for all annealing temperatures applied. In comparison, heat treatment at 300 °C in air resulted in significantly increased hydrogen permeance accompanied by increasing surface roughness. Upon exposure to oxygen, Pd segregates to the surface to form a 2-3 nm thick oxide layer (PdO), with more complex segregation behavior after subsequent reduction and permeance measurements in pure hydrogen. The available permeance data for the Pd/Ag23 wt% membranes after heat treatment in air at 300 °C is found to depend linearly on the inverse membrane thickness, implying bulk limited hydrogen permeation for thicknesses down to 1.5-2.0 μm.     

Ceramic membrane by tape casting and sol-gel coating for microfiltration and ultrafiltration application

Alumina membrane filters in the form of thin (0.3-0.8 mm) discs of 25-30 mm diameter suitable for microfiltration application have been fabricated by tape-casting technique. Further using this microfiltration membrane as substrate, boehmite sol coating was applied on it and ultrafiltration membrane with very small thickness was formed. The pore size of the microfiltration membrane could be varied in the range of 0.1-0.7 μm through optimisation of experimental parameter. In addition, each membrane shows a very narrow pore size distribution. The most important factor, which determines the pore size of the membrane, is the initial particle size and its distribution of the ceramic powder. The top thin ultrafiltration, boehmite layer was prepared by sol-gel method, with a thickness of 0.5 μm. Particle size of the sol was approximately 30-40 nm. The structure and formation of the layer was analysed through TEM. At 550 °C formation of the top layer was completed. The pore size of the ultrafiltration membrane measured from TEM micrograph was almost 10 nm. Results of microbial (Escherichia coli—smallest-sized water-borne bacteria) test confirm the possibility of separation through this membrane     

High power room-temperature design of terahertz quantum cascade laser based on difference frequency generation

Terahertz (THz) quantum cascade lasers (QCLs) are key elements for high-power terahertz beam generation for integrated applications. In this study, we design a highly nonlinear THz-QCL active region in order to increase the output power of the device especially at lower THz frequencies based on difference frequency generation (DFG) process. It has been shown that the output power increases for a 3.2 THz structure up to 1.2 μW at room temperature in comparison with the reported power of P = 0.3 μW in [1]. The mid-IR wavelengths associated with this laser are λ₁ = 12.12 μm and λ₂ = 13.93 μm, which are mixed in a medium with high second-order nonlinearity. A similar approach has been used to design an active region with THz frequency of 1.8 THz. The output power of this structure reaches to 1 μW at room temperature where the mid-IR wavelengths are λ₁ = 12.05 μm, λ₂ = 12.99 μm.     

Surface micro-texturing of metallic cylindrical surface with proximity rolling-exposure lithography and electrochemical micromachining

In this paper, a new method is developed for fabricating large-scale three-dimensional (3D) microstructures for cylindrical objects with proximity rolling-exposure lithography (PREL) and electrochemical micromachining (EMM). This method is capable of patterning a wide variety of shapes, including shapes that are impossible to fashion with conventional methods over a large area. A cylindrical rod covered with photoresist is subarea-exposed with a collimated ultraviolet source through a mask by rotating the rod through a definite angle to expose each area. To ensure the shape accuracy of the microstructures, a 2D exposure model is built to predict and optimise such parameters as the rod radius, exposure angle and effective light intensity. The experimental results show that the ideal exposure time for a cylindrical layer is three to four times longer than that for a planar layer with the same thickness. The relative errors of the microstructures decrease as the exposure angle decreases or as the microstructures increase in size. Furthermore, EMM is extended to non-planar surfaces and ordered microstructures with feature sizes down to 40 μm are obtained over large areas on the cylinder.     

Three-dimensional profile stitching based on the fiducial markers for microfluidic devices

Profile acquisition of microfluidic devices is a challenging task due to the competing requirements of both large field of view (FOV) and high-resolution. One strategy for obtaining such measurement is linking or stitching high-resolution profiles, possibly from multiple instruments, into a large FOV profile. As opposed to current stitching techniques relying on precise control and measurement of the translation of the sample stage, our approach presented in this paper takes advantage of the overlapping of fiducial markers, to align and stitch the separately measured profiles of a device. This method allows three-dimensional profiles transformed in six degrees of freedom, so that the pitch, roll and yaw among measurements are compensated, and stitching can be processed in both in-plane and out-of plane directions. Measurements of microfluidic channels recorded by an atomic force microscope and a white-light interferometer are stitched with accuracies evaluated to be 0.086 μm and 0.094 μm, respectively. Stitching experiments for large-scale profile gets an accuracy of 0.047 μm. Special form of stitching for profiles acquired by different tools, i.e. key parts of a device profile measured by a small FOV high-resolution instrument are stitched into a large FOV low-resolution profile by another instrument, is also carried out with an accuracy of 0.224 μm.     

Microstructural studies of nanocrystalline α-alumina powder produced from Al13-cluster

Nanocrystalline alumina powder was produced from calcinations of Al₁₃-oxalate precipitates at 1100 °C. A nearly normal distribution of agglomerated alumina powder was obtained with an average particle size of about 1 μm. XRD measurement confirmed that the alumina produced was of high purity and crystalline α-phase. Microstructural features of both the precipitates and alumina obtained were studied using the small angle neutron scattering (SANS) technique. SANS examinations show the formation of microstructures in the alumina powder of mass fractals type with dimension of ∼2.8 indicative of low intra-granular porosity.     

Analysis of 2-D motion tracking in ultrasound with dual transducers

We study displacement and strain measurement error of dual transducers (two linear arrays, aligned orthogonally and coplanar). Displacements along the beam of each transducer are used to obtain measurements in two-dimensions. Simulations (5 MHz) and experiments (10 MHz) are compared to measurements with a single linear array, with and without angular compounding. Translation simulations demonstrate factors of 1.07 larger and 8.0 smaller biases in the axial and lateral directions respectively, for dual transducers compared to angular compounding. As the angle between dual transducers decreases from 90° to 40°, for 1% compression simulations, the lateral RMS error ranges from 2.1 to 3.9 μm compared to 9 μm with angular compounding. Simulation of dual transducer misalignment of 1 mm and 2° result in errors of less than 9 μm. Experiments demonstrate factors of 3.0 and 5.2 lower biases for dual transducers in the axial and lateral directions respectively compared to angular compounding.     

Simultaneous measurement of strain and temperature based on a fiber Bragg grating combined with a high-birefringence fiber loop mirror

We present an all-fiber sensor for simultaneous measurement of temperature and strain. The sensing head is formed by introducing a fiber Bragg grating into a high-birefringence fiber loop mirror that acts as a Mach-Zehnder interferometer for temperature and strain discrimination. A sensing resolution of ±1 °C in temperature and ±21 με in strain has been experimentally achieved over a temperature range of 60 °C and strain range of 600 με.     

High sensitivity long-period grating-based temperature monitoring using a wide wavelength range to 2.2 μm

Temperature effects on the various cladding modes of a long-period grating (LPG) fabricated in B-Ge co-doped fibre have been investigated to create a high sensitivity measurement device. The temperature sensitivities of the attenuation bands of the LPG over the wavelength region 1.2-2.2 μm, for a grating with a 330 μm period, were obtained by monitoring the wavelength shift of each attenuation band, with a temperature increment of 20 °C, over the range from 23 °C to 140 °C. The attenuation band appearing over the 1.8-2.0 μm wavelength range has shown a nearly five times higher temperature sensitivity than that of lower order modes, and thus it shows significant promise for fibre optic temperature sensor applications.