数字微镜器件制造精度误差对紫外光调制特性的影响

数字微镜器件（DMD）的能量利用率对于提高无掩膜激光直写系统的效率十分重要。对DMD在相干光照明下的相位调制特性进行数值和实验分析,发现同种型号DMD在出射0级光垂直于微镜表面角度入射情况下的衍射图样,其光能量分布各不相同,有0级光强占总光强27.2%的情况,也有零0级光强占总光强13.1%的情况,理论计算表明,DMD的微镜偏转角存在1的误差可以使DMD衍射0级的衍射效率在极大和极小之间变化。这一结论对于选择高能量利用效率的DMD有重要参考价值。     

Experimental research on the longitudinal field generated by a tightly focused beam

The longitudinal optical field is a peculiar physical phenomenon that is always involved with the domain of near-field optics. Due to its extraordinary properties, it has recently attracted increasing attention in research and application. In this work, the longitudinal fields generated by the evanescent illumination of tightly focused, different polarized hollow beams are investigated. The focused light fields are numerically simulated according to vector diffraction theory, and their vector analysis is also carried out. The longitudinal fields on the focal plane are demonstrated experimentally using tip-enhanced scanning near-field microscopy. The simulation and experimental results show that the tightly focused radially polarized beam is suited to generating a stronger and purer longitudinal optical field at the focus.     

Analysis of a partially coherent optical correlator in the presence of phase defects at the input plane

The effects of phase defects at the input plane of an optical correlator on the performance of the system under partially coherent illumination is investigated. The correlation signal-to-noise ratio (SNR) is evaluated as the criterion for the performance of the optical system. We study the effects of both spatially and temporally partially coherent illumination on the distorted correlation signal. It is shown that the output SNR can be increased by relaxing the coherence requirements of the system. The SNR dependence on noise variation is also investigated. It is found that the correlator becomes less sensitive to noise variations under partially coherent illumination.     

Field enhancement analysis of an apertureless near field scanning optical microscope probe with finite element method

Plasmonic field enhancement in a fully coated dielectric near field scanning optical microscope (NSOM)probe under radial polarization illumination is analyzed using an axially symmetric three-dimensional (3D)finite element method (FEM) model. The enhancement factor strongly depends on the illumination spot size, taper angle of the probe, and the metal film thickness. The tolerance of the alignment angle is investigated. Probe designs with different metal coatings and their enhancement performance are studied as well. The nanometric spot size at the tip apex and high field enhancement of the apertureless NSOM probe have important potential application in semiconductor metrology.     

基于叠层衍射成像的二元光学元件检测研究

本文提出了一种基于叠层衍射成像(ptychography)的二元光学元件的检测方法,该方法可实现对二元光学元件表面微观轮廓的检测以及特征尺寸的标定.相比于传统的二元光学元件检测方法,其使用无透镜成像技术,简化了系统结构并可适用于特殊环境下的检测.该方法可直接通过采集多幅衍射图,利用叠层衍射成像迭代算法可精确地复原大尺寸待测元件的表面微观轮廓,提高大尺寸器件的检测效率.本文模拟仿真了台阶高度与噪声大小对纯相位台阶板复原结果的影响,并在光学实验中选取计算全息板为样品,复原样品的表面微观轮廓信息以及得到台阶高度.以白光干涉仪检测结果为标准,该方法在精度要求不太高的前提下,可获得令人满意的成像质量.     

Optical diffraction tomography microscopy with transport of intensity equation using a light-emitting diode array

Optical diffraction tomography (ODT) is an effective label-free technique for quantitatively refractive index imaging, which enables long-term monitoring of the internal three-dimensional (3D) structures and molecular composition of biological cells with minimal perturbation. However, existing optical tomographic methods generally rely on interferometric configuration for phase measurement and sophisticated mechanical systems for sample rotation or beam scanning. Thereby, the measurement is suspect to phase error coming from the coherent speckle, environmental vibrations, and mechanical error during data acquisition process. To overcome these limitations, we present a new ODT technique based on non-interferometric phase retrieval and programmable illumination emitting from a light-emitting diode (LED) array. The experimental system is built based on a traditional bright field microscope, with the light source replaced by a programmable LED array, which provides angle-variable quasi-monochromatic illumination with an angular coverage of ±37 degrees in both x and y directions (corresponding to an illumination numerical aperture of ∼0.6). Transport of intensity equation (TIE) is utilized to recover the phase at different illumination angles, and the refractive index distribution is reconstructed based on the ODT framework under first Rytov approximation. The missing-cone problem in ODT is addressed by using the iterative non-negative constraint algorithm, and the misalignment of the LED array is further numerically corrected to improve the accuracy of refractive index quantification. Experiments on polystyrene beads and thick biological specimens show that the proposed approach allows accurate refractive index reconstruction while greatly reduced the system complexity and environmental sensitivity compared to conventional interferometric ODT approaches.     

Creation of a three-dimensional optical chain for controllable particle delivery

We propose a design for producing a conveyable quasi-periodic optical chain that can stably trap and deliver multiple individual particles in three dimensions at different planes near the focus. A diffractive optical element (DOE) is designed to spatially modulate the phase of an incoming radially polarized beam. For a tighly focused beam, a three-dimensional (3D) optical chain can be formed because of the difference in the Gouy phase shift from two concentric regions of the DOE. A desired number of particles can be stably tweezed one by one with individual 3D volumes in this trapping structure. By controlling the phase modulation of the incident beam, one can manipulate the interference pattern to accelerate and transport trapped particles along the optical axis in a prescribed way.     

激光主动照明光学系统设计

为提高跟踪测量系统对暗弱目标的探测能力,设计一套自动化激光主动照明光学系统,对跟踪测量视场范围进行主动辅助照明。该系统在0.2~5 km距离处的照明直径均为10 m,计算出其在-20℃及+45℃的温度调焦量,照明仿真结果表明系统照明不均匀性15%。通过研究系统像差对照明均匀性的影响,以及对设计的调光组进行分析,得到调光组移动量与照明距离之间的理论关系,表明自动调节调光组位置即可实现不同照明距离处的均匀照明。设计和分析结果表明,该主动照明系统能够自动调节调光组位置,实现跟踪测量视场内的均匀照明,有利于跟踪测量系统对于暗弱目标的探测。     

Spatial Fourier-decomposition optical fluorescen tomography-theoretical investigation

A new three-dimensional (3D) optical fluorescent tomographic imaging scheme is proposed with structured illumination and spatial Fourierdomain decomposition methods for the first time. In this spatial Fourier-decomposition optical fluorescence tomography (SF-OFT), the intensity of focused excitation light from an objective lens is modulated to be a cosine function along the optical axis of the system. For a given position in a two-dimensional (2D) raster scanning process, the spatial frequency of the cosine function along the optical axis sweeps in a proper range while a series of fluorescence intensity are detected accordingly. By making an inverse discrete cosine transformation of these recorded intensity profiles, the distribution of fluorescent markers along the optical axis of a focused laser beam is obtained. A 3D optical fluorescent tomography can be achieved with this proposed SF-OFT technique with a simple 2D raster scanning process.     

Using diffractograms to evaluate optical systems with coherent illumination

A new approach to measuring aberrations of an optical system with coherent illumination is introduced. The optical system is evaluated by use of a so-called weak phase object and by digital image recording and processing. Based on the contrast transfer function theory for coherent systems, the main aberrations of the optical system can be determined. This is a convenient approach to evaluating and measuring complex optical systems with numerous optical elements after assembly and can serve as a simple performance test of an optical instrument in the field.     

相干点源照明时消球差光学系统的像场结构

利用矢量傅里叶变换和稳相法获得了相干点源位于光轴上任意位置时，消球差光学系统像场结构的积分表达式，详细研究了使用线偏振光照明时像平面上大物方孔径角对像场结构的影响.模拟计算表明，在像空间垂直于光轴的平面上，如果物方孔径角较大，磁场分布绕光轴旋转90°后不再与电场分布相同，电场能量密度、磁能量密度和玻印亭矢量分布的等高线始终近似为椭圆，并且物方孔径角是导致玻印亭矢量分布失去圆对称性的主要因素.同时当使用小像方孔径角时，电场能量密度分布形状的长轴方向垂直于物空间电场的振动方向；随着像方孔径角逐渐增大，电场能量密度分布形状的长轴方向将逐渐变为与物空间电场的振动方向相同.这些结论完全不同于以前理论所预测的结果. 关键词： 成像系统 像场结构 矢量傅里叶变换 稳相法     

基于白光数字莫尔的三维数字成像系统

提出一种基于数字莫尔的三维光学数字成像系统,此系统采用了非相干光投影和空间相移算法以及混合模板相位复原技术来重构连续位相分布图。给出一种光学几何灵敏度的确定方法并由此区得空间自由表面的三维数字图像。文中还给出由该光学数字化系统得以的真实人体面部的三维数字图像的实验结果。     

High resolution digital holographic microscopy for the study of aggregated natural cellulose nanowhisker fibers

In this paper, digital holographic (DH) microscopy demonstrates its ability to perform a full characterization of nanofibers. The high resolution and magnification of the presented method to study the nanofibers are tested using standard MIL-STD-150A 1951 USAF resolution test target. In this investigation, aggregated natural cellulose nanowhisker fibers are positioned in the front of the microscopic objective using a 3D translation stage in the object arm of DH setup. The recorded off-axis holograms are refocused using the angular spectrum method. The reconstructed complex field is used to calculate optical phase and intensity distributions of the object at different reconstruction depths. A simple algorithm is used to define the focused image with suitable accuracy. The dimensions and orientation of the fibers can be evaluated from the optical field at different depths. Then, the shape and textures along the aggregated natural cellulose nanowhisker fiber can be presented in a 3D space.     

基于光克尔效应的径向光束匀滑新方案

针对惯性约束聚变装置中提高靶面辐照均匀性的要求, 提出了一种基于光克尔效应的径向光束匀滑方案, 其基本原理是利用光克尔介质和周期性高斯脉冲光束相互作用实现对激光束透射波前附加周期性的球面位相调制, 以周期性地改变激光束远场焦斑尺寸, 进而引起远场焦斑内部散斑的快速径向扫动, 从而在积分时间内抹平靶面焦斑的强度调制, 实现径向方向的光束匀滑. 通过建立基于光克尔效应的径向光束匀滑的理论模型, 分析了焦斑形态及其径向匀滑特性, 并讨论了光克尔介质的选取和径向扫动特性. 结果表明, 基于光克尔效应的径向光束匀滑方案可以有效地实现远场焦斑内部散斑的周期性径向扫动, 从而在积分时间内快速改善靶面辐照均匀性.     

基于可调谐复振幅滤波器的超长焦深矢量光场

根据矢量光场衍射积分理论和离散复振幅光瞳滤波原理, 通过一种由双λ/2波片和离散复振幅滤波器组成的可调谐复振幅滤波器, 研究了大数值孔径下超长焦深聚焦矢量光场的构建与调控. 给出了一个六环带区的离散复振幅滤波器, 对入射光场的偏振态、振幅滤波和相位滤波三者进行同步优化, 获得了焦深接近10λ的三维平顶光场; 通过调控双λ/2波片夹角来改变聚焦光场的矢量化结构, 使之在光针场、平顶光场、光管场及中间结构光场之间交替变化. 研究结果揭示了入射光场矢量化结构演化与聚焦光场矢量化结构变换之间的关系, 解决了获取动态的、可调控的超长焦深聚焦光场的问题. 两种基本的聚焦光场光针场、光管场的独自使用或三维平顶光场的调和使用, 将会在光学显微、光学微纳操控以及光学精细加工领域获得重要应用.     

同时实现多角度非垂轴面均匀照明的衍射光学器件

本文利用长焦深器件设计思路,提出了通过设计衍射光学器件相位分布使得在三个垂轴面上满足均匀照明要求来间接实现非垂轴面均匀照明的设计方法,并完成了同时实现多种角度非垂轴面均匀照明的衍射光学器件设计.基于爬山法和模拟退火法相结合的混合算法,设计了器件的相位分布,在30°、45°、55°非垂轴面上光斑不均匀性分别为5.91%、4.00%、3.38%.该方法可推广至二维情形,实现任意曲面均匀照明的要求.     

基于DMD的大视场长出瞳距星模拟器光学系统设计

为满足高动态星模拟器的使用要求,设计了一套适用于DMD的投影光学系统和照明光学系统。投影系统采用二次成像方式,解决了大视场长出瞳距情况下长后工作距和系统像差校正难的问题,采用复眼透镜阵列设计了相应的照明系统,利用全反射棱镜实现照明系统和投影系统的同向排列。设计结果表明:系统出瞳为60 mm,视场为28.6°,畸变小于0.045%,80%的能量集中在直径为8 μm的圆内,照明系统的照明均匀度大于94%,满足设计指标要求,适用于大视场长出瞳距DMD型动态星模拟器的光学系统。     

多角度耦合分幅相机光学系统设计

为实现高速相机的分幅功能,本文提出一种采用多角度耦合分幅方式的高速相机光学系统。该系统分幅结构采用多组相同的光学系统,在平行于物面的圆周上均匀分布,分别从不同角度拍摄同一物面,在保证各组系统的物方视场相同的情况下,每组光学系统的光轴与物平面的夹角均相同,通过优化设计得到全视场的最佳成像。根据需求,使用光学设计软件设计了多角度耦合四分幅成像中长焦光学系统并绘制三维立体仿真模型,分析了每组像面像质、照度以及畸变等相关参数,调制传递函数MTF在频率为50 lp/mm处不低于0.5,F数为2,畸变小于0.4%,相较于常用的棱镜和反射棱锥分光方式,无需额外分光结构,像面照度提高4倍以上。结果表明成像质量理想,分幅相机系统各像面所成像一致性高。     

宽光谱超高速八分幅相机的光学系统设计

为满足数字超高速成像需求,提高相机的时间分辨率,设计了一种工作于350 nm~800 nm宽波段的八分幅相机光学系统。该系统采用光阑外置的会聚光分光结构,可同时获得同一物面的八幅相同图像,针对光学系统后截距、像方数值孔径等重要光学参数对像面照度差的影响、宽光谱成像的色差校正等问题进行了分析。在Code V中对中继镜头进行设计优化,像面大小可达26 mm,像方MTF在40 lp/mm时对比度达0.5以上,畸变小于1%,分幅后系统像面照度差在±10%以内。模拟结果表明:八分幅相机光学系统各幅图像一致性较高。