共查询到20条相似文献,搜索用时 309 毫秒
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Yoshiaki Yasuno Tobias Wiesendanger Aiko Ruprecht Toyohiko Yatagai Hans J. Tiziani 《Optical Review》2003,10(4):318-320
We propose a high-speed and parallel method to determine lens aberrations from its confocal axial response. This method analyzes the intensity confocal response including the aberration information of the objective lens by means of neural network algorithm. This method is designed to work parallely for many microlenses, and simultaneously determines aberrations of each element of a microlens array. A prototype system can determine spherical aberration coefficients of a microlens in the range from −0.7λ to 0.3λ with less than 1% RMS error. 相似文献
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Yi Li Xinjian Yi Liping Cai 《International Journal of Infrared and Millimeter Waves》2000,21(9):1417-1425
Diffractive microlens arrays can completely collect the light at the focal plane and concentrate it into a smaller spot size on the detector plane, the photodetector area can be substantially reduced. Increased gamma radiation hardening and noise reduction result from the decrease in photodetector sensitive area. The diffractive microlens arrays have been designed by considering the correlative optical and processing parameters for PtSi focal plane array. They have been fabricated on the backside of PtSi focal plane array chip by successive photolithography and Ar+ ion-beam-etching technique. The alignment of microlens array with PtSi focal plane array was completed by a backside aligner with IR light source. The practical processes and fabrication method are discussed. The performance parameters of PtSi FPA with diffractive microlens array are presented. 相似文献
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为了提升高功率固体激光器中激光二极管(LD)面阵抽运场性能,采用几何光学和数理统计分析的方法,建立了基于微透镜阵列匀束的LD面阵抽运耦合系统的数学与物理模型,对微透镜阵列参数与最终耦合输出抽运场参数之间的关系进行分析,明确了微透镜单元F数、微透镜通光单元数以及微透镜阵列空间周期参数的设计原则.经实验测试,优化设计完成的LD面阵抽运耦合系统光场不均匀度为7.9%,耦合效率为90.7%. 相似文献
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This paper presents a facile and effective method to fabricate microlens array in polydimethylsiloxane (PDMS). The microlens array model is fabricated in photoresist via digital maskless grayscale lithography technique and the replica molding technique is used to fabricate PDMS microlens array. A convex PDMS microlens array with rectangular aperture and concave PDMS microlens array with hexagonal aperture are fabricated. The morphological characteristics of the microlens arrays are measured by microscope and 3D profiler. The results indicate that the profiles of the PDMS microlens arrays are clear and distinct. This method provides a simple and low-cost approach to prepare large area, concave or convex with arbitrary shape microlens array, which has potential application in many optoelectronic devices. 相似文献
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Imaging or beam-steering systems employing a periodic array of microlenses or micromirrors suffer from diffraction problems resulting from the destructive interference of the beam segments produced by the array. Simple formulas are derived for beam steering with segmented apertures that do not suffer from diffraction problems because of the introduction of a moving linear phase shifter such as a prescan lens before the periodic structure. The technique substantially increases the resolution of imaging systems that employ microlens arrays or micromirror arrays. Theoretical, numerical, and experimental results demonstrating the high-resolution imaging concept using microlens arrays are presented. 相似文献
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Theoretical analysis for integral imaging performance based on microscanning of a microlens array 总被引:1,自引:0,他引:1
An integral imaging method based on microscanning of a microlens array is proposed. The effects of microscanning on the depth resolution and the product of depth of focus and lateral resolution squared (PDLRS) of an integral imaging system are quantitatively analyzed. Calculation results show that microscanning can improve not only the depth resolution, but the PDLRS can be increased. The amount of improvement of different microscanning modes to the performance of integral imaging is closely related to the fill factor of the detector and the diffraction factor of the microlens. 相似文献
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A novel real-time gray-scale photolithography technique for the fabrication of continuous microstructures that uses a LCD panel as a real-time gray-scale mask is presented. The principle of design of the technique is explained, and computer simulation results based on partially coherent imaging theory are given for the patterning of a microlens array and a zigzag grating. An experiment is set up, and a microlens array and a zigzag grating on panchromatic silver halide sensitized gelatin with trypsinase etching are obtained. 相似文献
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为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。 相似文献
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Shih-Wei Yang Chern-Sheng Lin Shu-Hsien Fu Mau-Shiun Yeh Chingfu Tsou Teng-Hsien Lai 《Optics Communications》2012,285(6):1066-1074
This study attempted to develop a detection system for lens sag of the microlens array in real time using an optical automatic inspection framework to link with the computer through a camera. An image processing technique was applied to detect the spherical microlens array, and then, the results were compared.The system light source used laser light and applied CCD to collocate with the microscope array to form an automatic optical detection system for an optical interferometric microscope. It applied the principle of the Fizeau interferometer, illuminated the surface of microlens array, and formed the phase difference required by the interference of two lights through the laser light reflected by the reference plane and the surface of the microlens array, thus, forming an interference fringe.When the sag of the microlens was much longer than the wave length of the detection light source, the fringe would be densely distributed, thus, only a few central fringes were clear in the microscopic image. An image processing method was used to search the center of the interference fringe and a creative algorithm was utilized to obtain the lens sag of the microlens. As proved by the experiment, lens sag of 4 microlens arrays were detected in real time, with a minimum detection error of 0.08 μm, and a maximum detection error of 4 μm (error value 1 ~ 9%), according to different sample processes. This system featured a simple structure and is applicable to non-contact detection and detection of different-sized microlens arrays. 相似文献
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L. Liu J. Qu Z. Lin L. Wang Z. Fu B. Guo H. Niu 《Applied physics. B, Lasers and optics》2006,84(3):379-383
We present a novel multifocal multiphoton microscope that is based on a sampling imaging technique using a microlens array, a prism for two-dimensionalspectral dispersion, and a specially designed streak camera to provide simultaneous time- and spectrum-resolved fluorescence microscopy. We split the near-infrared light of a mode-locked titanium:sapphire femtosecond laser into an array of beams that are transformed into an array of high-aperture foci at the sample. A time- and spectrum-resolved image of 3×3 foci on the sample can be obtained with a snapshot. By translating the sample stage laterally and axially and implementing a dedicated image reconstruction algorithm in the control system of the instrument, we demonstrate the acquisition of a five-dimensional data set combining lifetime and spectral resolutions in biological fluorescence imaging. PACS 87.64.-t; 87.64.Vv; 42.62.Be 相似文献
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精确的波前探测是反射镜面型检测及光束波前畸变测量的重要依据,论文根据Shark-Hartmann理论对波前探测技术进行了模拟和实验研究。将平行光经过球面透镜/柱面透镜后形成的球面波/柱面波作为探测波前。实验采用商用的微透镜阵列和CCD搭建Shark-Hartmann传感器,利用实际光束作为参考光,避免了参考光的不准直性对实验的影响。模拟计算结果表明平均曲率误差为13.423 mm,实验结果实现了对球面/柱面/倾斜波的探测及复原。 相似文献
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利用电场改变液滴透镜的面形得到非球面,并实时检测其面形和焦斑图像,在适当的时候用紫外光固化液滴制作具有良好光学性能的非球面微透镜.比较了非球面液滴微透镜在固化前后面形、焦斑的变化和对透镜性能的影响,讨论了液滴透镜在固化过程中变形的机理和相应的解决方法.用分辨率50 nm的光斑探针扫描仪精确测量了固化后的非球面微透镜的聚焦光斑,测得了光斑轴向分布曲线和均方根直径3.384μm的聚焦光斑,经图像处理计算了透镜的点扩散函数和光学传递函数,评价了所制作的非球面微透镜的聚光和成像能力,并给出了透镜的实际成像图像,对于完善高品质非球面微透镜及其阵列的制作工艺具有重要意义. 相似文献
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用于红外焦平面的正方形孔径球面微透镜阵列研究 总被引:1,自引:0,他引:1
针对目前红外焦平面光敏阵列中存在的占空比小、光能利用率低的实际问题,展开了正方形孔径球面微透镜阵列制作及其与红外焦平面阵列集成应用的研究.本文从红外焦平面光敏阵列特点入手,对比分析了正方形孔径相比于传统圆形孔径微透镜阵列在光能利用上的优势.提出正方形孔径微透镜阵列激光直写变剂量曝光制作技术,建立光刻胶曝光数学模型和正方形球面微透镜面型函数,以此为基础,编制直写设备变剂量曝光控制软件;利用长春理工大的学复合坐标激光直写系统和等离子刻蚀机进行相关工艺实验,制作了阵列256×256、单元尺寸40×40μm2、球面半径60μm、单元间距1μm的红外石英微透镜阵列;并将其与相应阵列的碲-镉-汞红外光敏阵列进行集成.结果表明:微透镜的占空比达到95%,红外焦平面光能利用率从原来的60%提高到90%以上.由此得出结论:变剂量曝光制作微透镜技术是可行的,正方形孔径球面微透镜阵列代替圆形孔径微透镜阵列,对于提高红外探测器的灵敏度、信噪比、分辨率等性能具备明显优势. 相似文献
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针对目前红外焦平面光敏阵列中存在的占空比小、光能利用率低的实际问题,展开了正方形孔径球面微透镜阵列制作及其与红外焦平面阵列集成应用的研究.本文从红外焦平面光敏阵列特点入手,对比分析了正方形孔径相比于传统圆形孔径微透镜阵列在光能利用上的优势.提出正方形孔径微透镜阵列激光直写变剂量曝光制作技术,建立光刻胶曝光数学模型和正方形球面微透镜面型函数,以此为基础,编制直写设备变剂量曝光控制软件;利用长春理工大的学复合坐标激光直写系统和等离子刻蚀机进行相关工艺实验,制作了阵列256×256、单元尺寸40×40 μm2、球面半径60 μm、单元间距1 μm的红外石英微透镜阵列;并将其与相应阵列的碲-镉-汞红外光敏阵列进行集成.结果表明:微透镜的占空比达到95%,红外焦平面光能利用率从原来的60%提高到90% 以上.由此得出结论:变剂量曝光制作微透镜技术是可行的,正方形孔径球面微透镜阵列代替圆形孔径微透镜阵列,对于提高红外探测器的灵敏度、信噪比、分辨率等性能具备明显优势. 相似文献
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Jinjin Jin Xiaohu Zhang Ping Gao Jun Luo Zuojun Zhang Xiong Li Xiaoliang Ma Mingbo Pu Xiangang Luo 《Annalen der Physik》2018,530(2)
Ascribing to the properties of two dimensional parallel focusing and imaging, low propagation loss, integration and miniaturization, microlens array has been widely used in imaging, optical communication, organic light emitting devices, adaptive optics, photolithography, biomedical and other applications. However, the existing traditional microlens array suffers from difficulty in fabrication, large‐thickness, curved surface, non‐uniformity of light spots, or requirement of additional discrete components to control the microlens. Herein, a planar microlens array is experimentally demonstrated based on the geometric metasurface. The single microlens is composed of space‐variant subwavelength metallic gratings with high polarization conversion efficiency and thus exhibits gradient phase distribution. The focused spot diameter of 22.5 μm with radius of 350 μm, focal length of 1 cm and the light spots intensity uniformity of 0.9885 (standard deviation 0.0115) at the focal plane are obtained. Moreover, the broadband property of microlens array is also confirmed. The novel design strategy for microlens array would facilitate the miniaturization of optical devices and be easily integrated in the optical interconnected devices. 相似文献