共查询到20条相似文献,搜索用时 9 毫秒
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多层膜闪耀光栅衍射的运动学研究 总被引:1,自引:0,他引:1
用 X射线运动学理论对软 X射线多层膜闪耀光栅的衍射特性进行了详细的研究 ,得到了衍射规律的一般表达式 ,讨论了产生衍射极大值的条件、光谱特性 ,不同于光栅和多层膜的色散特性。以及用作软 X射线单色器的一般性问题。发现只要选择合适的光栅参数 ,便可以将衍射光的大部分能量集中到某一个非零衍射级上。 相似文献
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传统光栅的基础研究和应用研究进展一直备受关注。然而,高阶衍射污染使传统光栅获得的光谱纯度受到严重影响。为了抑制高阶衍射贡献,人们提出了许多单级或准单级光栅的设计方案,但它们对高阶衍射的抑制效果不可避免地受到加工精度的限制。提出了一种准周期矩形孔阵列光栅,通过优化矩形孔的概率密度分布函数,获得了比以往设计更大的加工误差宽容度。对这种光栅的衍射特性进行了分析研究。理论计算表明,即使孔径相对误差超过20%,光栅也可以完全抑制二阶、三阶和四阶衍射,五阶衍射效率与一阶衍射效率之比小于0.01%,大大降低了对加工精度的要求。 相似文献
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本文中设计了一种利用软X射线双频光栅作为剪切干涉元件的剪切系统, 使剪切干涉法在软X射线波段得到了应用. 介绍了软X射线双频光栅的结构及衍射特性, 在同步辐射光束线对双频光栅的效率分布进行了测试实验, 两个剪切级次的效率比值高于75%, 干扰级次效率低于5%. 利用软X射线双频光栅为剪切干涉光学元件, 对待测靶进行了静态检测, 得到了对比度高, 稳定的干涉条纹, 验证了该方法在软X射线等离子体密度诊断中的可行性.
关键词:
双频光栅
剪切干涉仪
软X射线
等离子体诊断 相似文献
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基于严格的矢量耦合波理论,优化设计了用于13.4nm软X射线干涉光刻的透射型双光栅掩模版. 采用电子束光刻技术,在国内首次成功制作了周期为100nm的大面积金属型透射光栅.光栅面积为1.5mm ×1.5mm,Cr浮雕厚度为50nm,Gap/period为0.6,衬底Si3N4厚度为100nm. 此光栅将用于上海光源软X射线干涉光刻实验站.利用其1级衍射光和2级衍射光将可以经济高效地制作周期为50和25nm的大面积周期结构.最后,测量了该光栅对波长为13.4nm 同步辐射光的衍射光强度,并且推算得出该光栅的1级和2级衍射效率分别为4.41%和0.49%,与理论设计值比较符合.实验结果与理论模拟结果的对比表明该光栅侧壁陡直,Gap/period的控制也与设计值符合.
关键词:
软X射线金属型透射光栅
严格耦合波方法
衍射效率
软X射线干涉光刻 相似文献
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分析了基于锥面衍射的双光栅光谱合成系统的可行性,设计了激光入射角为Littrow角附近的双多层介质膜(MLD)光栅光谱合成系统,开展了两路合成实验。当入射极角等于自准直入射角,入射方位角为6°时,光栅衍射效率近似等于光束自准直入射时的衍射效率。基于锥面衍射原理,对中心波长为1050.24 nm和1064.33 nm的两束光纤激光子束进行合成,入射极角为43.99°,测得合成效率为92.9%,较基于非锥面衍射的双光栅光谱合成系统的合成效率提高了8.8%;测得合成光斑光束质量Mx2=1.204,My2=1.467,与基于非锥面衍射的双光栅光谱合成系统输出光斑光束质量基本一致。 相似文献
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Polarization‐independent absorption enhancement in a graphene square array with a cascaded grating structure 下载免费PDF全文
Jun Wu 《Journal of synchrotron radiation》2018,25(2):419-424
The polarization‐independent enhanced absorption effect of graphene in the near‐infrared range is investigated. This is achieved by placing a graphene square array on top of a dielectric square array backed by a two‐dimensional multilayer grating. Total optical absorption in graphene can be attributed to critical coupling, which is achieved through the combined effect of guided‐mode resonance with the dielectric square array and the photonic band gap with the two‐dimensional multilayer grating. To reveal the physical origin of such a phenomenon, the electromagnetic field distributions for both polarizations are illustrated. The designed graphene absorber exhibits near‐unity polarization‐independent absorption at resonance with an ultra‐narrow spectrum. Moreover, the polarization‐independent absorption can be tuned simply by changing the geometric parameters. The results may have promising potential for the design of graphene‐based optoelectronic devices. 相似文献
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Calibration of a compact XUV soft X‐ray monochromator with a digital autocollimator in situ 下载免费PDF全文
Jih-Young Yuh Shang-Wei Lin Liang-Jen Huang Long-Life Lee 《Journal of synchrotron radiation》2016,23(5):1232-1236
A digital autocollimator of resolution 0.1 µrad (0.02 arcsec) serves as a handy correction tool for calibrating the angular uncertainty during angular and lateral movements of gratings inside a monochromator chamber under ultra‐high vacuum. The photon energy dispersed from the extreme ultraviolet (XUV) to the soft X‐ray region of the synchrotron beamline at the Taiwan Light Source was monitored using molecular ionization spectra at high resolution as energy references that correlate with the fine angular steps during grating rotation. The angular resolution of the scanning mechanism was <0.3 µrad, which results in an energy shift of 80 meV at 867 eV. The angular uncertainties caused by the lateral movement during a grating exchange were decreased from 2.2 µrad to 0.1 µrad after correction. The proposed method provides a simple solution for on‐site beamline diagnostics of highly precise multi‐axis optical manipulating instruments at synchrotron facilities and in‐house laboratories. 相似文献
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具有超高亮度、超短脉冲、全相干特性的X射线自由电子激光(X-ray Free Electron Lasers,XFELs)的出现为超快时间研究与超微结构探索带来新的机遇,使得获取单分子、单颗粒原子分辨率图像及电影成为可能。随着德国FLASH、意大利FERMI、美国LCLS以及日本SACLA等装置的建成与投入使用,X射线自由电子激光已经进入了快速发展的阶段,一系列物理、化学、生物、材料科学领域的前沿研究成果不断涌现。为突破实验技术、工程设备及软件算法上的技术壁垒,相关科研机构通过国际合作,拟实现纳米颗粒、细菌、细胞、病毒、团簇及生物学大分子等单颗粒的原子分辨率成像。文章将聚焦单颗粒成像的发展历史、科学意义、研究背景、研究目标、研究规划、研究现状及世界各国的布局,并展望单颗粒成像未来的发展。 相似文献
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Here, we present new diamond anvils with a spherical support designed for applications in diamond anvil cell (DAC) technique. The main feature of the anvils is the diamond crown of a spherical shape. The assembly of the spherical diamond fixed within a spherical support of a seat made of tungsten carbide or hard metals provides enhanced stability, simple alignment, and large optical and X-ray aperture that makes it very useful for broad applications in DAC technique, particularly for single crystal X-ray and powder neutron diffraction. The anvils were tested in various experiments conducted in a wide pressure–temperature range and showed a very good performance. 相似文献
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纳秒量级激光驱动的类氖锗软X射线激光具有出光稳定和输出强度大等优点,在诸多领域拥有很好的应用价值. 研究了通过在光路中增加一块多层膜反射镜实现双程放大对出光特性的影响. 通过估算和实验,证实了增加反射镜双程放大确实能够提高类氖锗软X射线激光的输出强度,对于24mm的双程放大长度,总输出强度会增加约2.3倍. 但同时这种模式也带来了光束质量的下降,对应用研究并非完全有益.
关键词:
软X射线激光
反射镜双程放大
增益饱和 相似文献
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交叉型波荡器是一种实现软X射线自由电子激光极化控制的有效方式。以自放大自发辐射自由光电子激光为例,采用统计的方法系统地分析了交叉型波荡器软X射线自由电子激光极化控制的影响因素。通过对光场相干长度、光脉冲两分量之间相对滑移长度和光场分量平均功率差异等的分析,给出了优化交叉型波荡器极化控制方案遵循的原则,即:辐射场相干时间尽可能长,光场分量相对滑移长度尽可能短,辐射场分量功率差异尽可能小等。该原则为交叉型波荡器软X射线自由电子激光极化控制方案的优化提供了依据。 相似文献
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S. Loridant G. LucazeauT. Le Bihan 《Journal of Physics and Chemistry of Solids》2002,63(11):1983-1992
A high-pressure structural study of SrCeO3 has been performed at room temperature by Raman spectroscopy and X-ray diffraction up to 32 and 45 GPa, respectively. A first-order reversible phase transition is observed at about 12 GPa in both techniques. A second weak structural change, taking place between 18 and 25 GPa, can be suspected from Raman data. The increase in the number of Raman bands and diffraction lines is an indication that the symmetry is lowered and the compound does not evolve towards the ideal cubic perovskite structure. A Rietveld analysis of X-ray data was performed for the low-pressure phase and the atomic positions and the cell lattice parameters variations are reported in this paper. The volume compressibility derived from Raman modes (5.6×10−12 Pa−1), involving mainly bond-stretching for each type of polyhedron, is found to be close to the one obtained from volume cell variations measured by X-ray diffraction (7.9×10−12 Pa−1). 相似文献
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Three different carbon/carbon (C/C) composites based on needle-punched felt made of layered T700 carbon fiber cloth were fabricated by chemical vapor infiltration and were studied using transmission electron microscopy (TEM) and X-ray diffraction (XRD). The TEM observations show that one of the composites contains only low-textured pyrocarbon. The other two contain both low-textured and high-textured pyrocarbon, one with predominantly low-textured and the other with mainly high-textured pyrocarbon. High-resolution TEM images show that the high-textured pyrocarbon in the two composites has the same microstructure as local areas with the graphite structure. XRD measurements show that the interlayer spacing and crystallite size of pyrocarbon are not only affected by the poorly graphitized carbon fiber phase, but also by the amounts of the different types of pyrocarbon and the orientation of crystallites. Comparison of the TEM observations and the XRD measurements reveals that structural parameters, such as the interlayer spacing and crystallite size, of pyrocarbon in C/C composites as determined by XRD are not accurate. Therefore, XRD profiles of C/C composites should be interpreted with caution. TEM observations for detailed microstructure analysis of C/C composites are thus important. 相似文献
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D.P. Field K.R. Magid I.N. Mastorakos J.N. Florando D.H. Lassila J.W. Morris Jr. 《哲学杂志》2013,93(11):1451-1464
Mapping of residual stresses at the mesoscale is increasingly practical thanks to technological developments in electron backscatter diffraction (EBSD) and X-ray microdiffraction using high brilliance synchrotron sources. An analysis is presented of a Cu single crystal deformed in compression to about 10% macroscopic strain. Local orientation measurements were made on sectioned and polished specimens using EBSD and X-ray microdiffraction. In broad strokes, the results are similar to each other with orientations being observed that are on the order of 5° misoriented from that of the original crystallite. At the fine scale it is apparent that the X-ray technique can distinguish features in the structure that are much finer in detail than those observed using EBSD even though the spatial resolution of EBSD is superior to that of X-ray diffraction by approximately two orders of magnitude. The results are explained by the sensitivity of the EBSD technique to the specimen surface condition. Dislocation dynamics simulations show that there is a relaxation of the dislocation structure near the free surface of the specimen that extends approximately 650 Å into the specimen. The high spatial resolution of the EBSD technique is detrimental in this respect as the information volume extends only 200 Å or so into the specimen. The X-rays probe a volume on the order of 2 µm in diameter, thus measuring the structure that is relatively unaffected by the near-surface relaxation. 相似文献
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The head field distribution for hard/soft magnetic composite pillar array media (CPA media) is significantly different from that of the conventional patterned media. The head field distribution for a CPA media-single-pole-type (SPT) head system which assumes 1 Tbits/in2 recording is calculated by the three dimensional finite elements method. One of the features of the system is that a magnetic flux concentrates in a hard magnetic unit. The system is found to yield 80% of the field strength of SPT head and continuous SUL media system. 相似文献