An alternative approach for microlithography light source

A hybrid master oscillator–power amplifier (hybrid MOPA) scheme is proposed as a microlithography light source. The seed pulses are generated in the visible spectral range—where the necessary spectral purity is more easily achieved—and after frequency conversion are amplified in an excimer amplifier. The new concept enables us to decrease the bandwidth considerably, approaching the theoretical limit posed by the uncertainty relation. The feasibility of the new approach is demonstrated by a dye/excimer MOPA system, generating deep ultraviolet DUV (248-nm) pulses of 0.2-pm bandwidth.     

Efficient generation of 200 mJ nanosecond pulses at 100 Hz repetition rate from a cryogenic cooled Yb:YAG MOPA system

A diode-pumped Master Oscillator Power Amplifier (MOPA) laser system based on cryogenic cooled Yb:YAG has been designed, developed and its output performance characterised. The laser system consists of a fibre oscillator, an active mirror regenerative amplifier and a four pass main amplifier. 2.4 mJ, 10 ns, 100 Hz seed pulses from the fibre oscillator/regenerative amplifier arrangement were amplified up to pulse energies of over 200 mJ by using the four pass main amplifier arrangement. As a further study we have obtained an increased slope efficiency of 40% and an optical-to-optical efficiency of 30% using a pinhole vacuum spatial filter/image relay for laser mode control. With 1.8 mJ input seed pulses, output pulse energies of around 150 mJ were achieved.     

Tunable Ti: Sapphire regenerative amplifier for femtosecond Chirped-Pulse Amplification

We describe a tunable Ti:Sapphire regenerative amplifier which is used to amplify 120 fs pulses from a self-mode-locked Ti:Sapphire laser to energies in the range of 7–12 mJ from 760 nm to 855 nm. We have used three sets of cavity mirrors in the regenerative amplifier to vary the output wavelength of the laser.On leave from Institute of Laser Engineering, Osaka University, 2-6, Yamada-oka, Osaka 565, Japan (Fax: +81-6/877-4799)     

Highly efficient synchronous amplification of a picosecond dye laser at a kHz repetition rate

A short pulse, high energy, high repetition rate dye amplifier with superior conversion efficiency is reported. The dye amplifier is composed of three single-pass dye cells, longitudinally pumped by a frequency doubled 1 kHz Nd: YLF regenerative amplifier. The dye amplifier yields 3.5 ps, 150 J pulses at 595 nm, corresponding to a 12% conversion efficiency. The ASE is 1% or less, and the transverse mode quality is near-Gaussian.In absentia from the Department of Chemistry, Princeton University, Princeton, NJ 08544, USA     

13-W picosecond Nd:GdVO4 regenerative amplifier with 200-kHz repetition rate

We report a diode-pumped picosecond Nd:GdVO₄ regenerative amplifier system designed for micro-machining applications. Nd:GdVO₄ was chosen as gain material because it offers – in comparison to the commonly used Nd:YVO₄ – improved thermal properties and a larger gain bandwidth. At the maximum repetition rate of 200 kHz, the system generated 6.8-ps-long pulses with a pulse energy of 65 μJ, which corresponds to an average output power of 13 W. At 100 kHz, the pulse energy increased to 123 μJ, whereas the average power of 12.3 W remained almost identical. The broadening of the pulses due to gain narrowing was investigated in dependence on the number of cavity round trips and on the repetition rate. At 200 kHz, the injected 5.3-ps-long pulses broadened slightly to about 6.8 ps.     

Generation of 17-TW 23-fs Pulses with a Two-Stage Ti：Sapphire Amplifier at Repetition Rate 10 Hz

We have developed a two-stage Ti：sapphire amplifier system which can produce 17- TW/23-fs pulses at a repetition rate 10Hz. A birefringent plate is used in the regenerative amplifier to alleviate gain narrowing, while an all- reflective cylindrical-mirror-based pulse stretcher and an acousto-optic programmable dispersive filter （AOPDF） are used to compensate for the higher order dispersion of the system.     

用于飞秒脉冲放大器的马丁内兹展宽器与欧浮纳展宽器性能比较

用解析法针对多通和再生两种放大器，分别研究啁啾脉冲放大技术中马丁内兹展宽器和欧浮纳展宽器的特性和适用范围.我们认为在多通放大器和再生放大器中，马丁内兹展宽器均可以很好地补偿色散；如果使用再生放大器时需要将脉冲宽度展得更宽，可采用紧凑型欧浮纳展宽器. 关键词： 啁啾脉冲放大技术 马丁内兹展宽器 欧浮纳展宽器     

Highly Stable, Diode-Pumped Nd：YLF Regenerative Amplifier

We present the design and experimental results for a diode pumped Nd：YLF regenerative amplifier applied to amplify a nanosecond laser pulse. Numerical simulation shows that the maximum output energy and the best stability can be obtained when the regenerative amplifier operates in a saturated mode for all pulse duration and temporal profiles. Using extra post-pulse is a good method to decrease the square-pulse distortion caused by gain saturation effect. The amplifier shows output energy of 4.2mJ with a total energy gain of more than 10^7 and output energy stability of better than 1% rms. When extra post-pulse is added, square-pulse distortion is decreased from 1.33 to 1.17 for the amplifier that is seeded with an optical pulse of 3ns.     

Diode-pumped Cr:LiCAF fs regenerative amplifier system seeded by an Er-doped mode-locked fiber laser

A fs regenerative amplifier based on Cr:LiCAF is demonstrated for the first time. With direct diode pumping, 8 μJ of pulse energy are obtained directly from the amplifier. When seeded by an Er-doped fiber laser, the amplified seed pulses are compressed down to 252 fs, limited by residual net third-order dispersion of the compression gratings and intracavity elements. Pulse broadening due to second- and third-order dispersion is theoretically investigated and compared to experimental results. Dispersion generated by the geometrical cavity arrangement is measured experimentally. Received: 19 November 2001 / Revised version: 28 January 2002 / Published online: 14 March 2002     

Seven-terawatt Ti:sapphire laser system operating at 50 Hz with high beam quality for laser Compton femtosecond X-ray generation

We present a 7-TW Ti:sapphire laser system operating at 50 Hz for laser Compton femtosecond X-ray generation. This laser system delivers 8.4 W of average output power at a repetition rate of 50 Hz with a pulse width of 24 fs. It demonstrates successful management using a dynamically stable resonator in the regenerative amplifier and compensation for thermal lensing by a convex mirror in a ring-type four-pass power amplifier. We also present the results of closed-loop corrections for distorted wavefronts of amplified and compressed laser pulses, using an adaptive optical system consisting of a Shack–Hartmann-type wavefront sensor and a deformable mirror. This closed-loop correction results in dramatic improvements, reducing wavefront distortions below 0.05 λ rms. Received: 31 October 2002 / Revised version: 3 March 2003 / Published online: 5 May 2003 RID="*" ID="*"Corresponding author. Fax: +81-298/61-3349, E-mail: ito@festa.or.jp     

Highly Efficient and Stable Ring Regenerative Amplifier for Chirped-Pulse Amplification at Repetition Rate 1 kHz

A highly efficient and stable ring-cavity regenerative amplifier for chirped-pulse amplification at a 1 kHz repetition rate, with slope efficiency up to 40% and output pulse-to-pulse energy-jitter less than 1.25%, is demonstrated. The pulse energy as high as 2.4mJ is obtained.     

Birefringent plate design for broadband spectral shaping in a Ti:sapphire regenerative amplifier

A method to design a birefringent plate (BP) for broadening spectrum in a regenerative amplifier is presented. Using this method, we design a quartz BP with thickness of 761μm inserted into a Ti:sapphire regenerative amplifier. The gain narrowing effect is reduced efficiently, and the experimental results agree with the calculation well. The bandwidth is broadened from 28 to 62 nm using the designed quartz BP and the pulses are compressed to ～ 23 fs.     

Dependence of spectrum on pump-signal angle in BBO-I noncollinear optical-parametric chirped-pulse amplification

A BBO-I noncollinear optical-parametric chirped-pulse amplifier pumped by a Q-switched and frequency-doubled Nd:YAG laser has been demonstrated. At an optimal pump-signal angle, the temporally stretched chirped signal pulses with bandwidth of 36 nm (FWHM) were amplified without any distortion in spectrum. The gain bandwidth was very sensitive to the pump-signal angle. Variation of this angle by about 1.5 mrad may significantly reduce the amplified bandwidth and result in a significant distortion in the amplified spectrum. Received: 5 October 2000 / Revised version: 13 June 2001 / Published online: 19 September 2001     

All-solid-state diode-pumped Cr:LiSAF femtosecond oscillator and regenerative amplifier

3+ :LiSrAlF₆ (Cr:LiSAF) regenerative amplifier, seeded by a diode-pumped Cr:LiSAF femtosecond oscillator. The amplifier produced pulses of less than 200 fs duration and greater than 1 μJ energy at repetition rates of up to 25 kHz. Received: 27 February 1997/Revised version: 16 April 1997     

Femtosecond thin-disk Yb:KYW regenerative amplifier

We report a compact thin-disk Yb:KYW regenerative amplifier system. Two different concepts are investigated to obtain either subpicosecond pulses with up to 160 μJ or a pulse energy of 20 μJ with a pulse width of about 300 fs. The first concept uses intra-cavity group-velocity dispersion compensation with Gires–Tournois interferometer mirrors to avoid pulse stretching during amplification. The onset of nonlinear effects in this concept inhibits the generation of shorter pulse durations at this energy level. Shorter pulses can be achieved with the second concept, which is based on dispersive pulse stretching during amplification and uses pulse compression after amplification with a grating compressor. Repetition rates up to 45 kHz are demonstrated.This revised version was published online in May 2005. The Article Category was removed.This revised version was published online in August 2005 with a corrected cover date.     

Femtosecond regenerative amplification in Cr:forsterite at 5–10 kHz

We developed a high-power oscillator–regenerative amplifier femtosecond laser system. Based on chromium-doped forsterite. The system is operating near 1.25 μm at a 5–10 kHz repetition rate. Chirped-pulse amplification produced 0.86 W (0.75 W) of average power, or 465 mW (400 mW) after compression at 5 kHz (10 kHz). Nearly bandwidth-limited pulses of duration 135 fs (shortest) and 150 fs (typical) are available with an energy of 93 μJ and 40 μJ at 5 and 10 kHz, respectively. Received: 7 June 2002 / Published online: 15 November 2002 RID="*" ID="*"Corresponding author. Fax: +49-30/63921289, E-mail: petrov@mbi-berlin.de     

Theoretical analysis of a Brillouin switch for amplifier decoupling and prepulse suppression in short-pulse high-power laser systems

A switch suited for high-power amplifier chains emitting nanosecond pulses is theoretically investigated. It is based on a two-step Brillouin backscattering process. Gases like N₂ or SF₆ at high pressure are used as the scattering medium. The transmission efficiency is about 50%. The limitation is mainly due to gas breakdown. The capability for amplifier decoupling and prepulse suppression is excellent. Strong pulse steepening favors the generation of ultra-short laser pulses.     

Tunable, high-power, narrow-band picosecond IR radiation by optical parametric amplification in KTP

We report on an optical parametric amplifier (OPA) based on two potassium titanyl phosphate (KTP) crystals in a walk-off compensating geometry. An Nd:YLF regenerative amplifier at a 1-kHz repetition rate serves as the pump source. The seed beam is delivered by a synchronously pumped frequency-stabilized optical parametric oscillator (OPO) based on periodically poled lithium niobate (PPLN). At pump intensities of about 7 GW/cm² large amplification factors of more than 10⁴ were achieved, resulting in pulse energies of more than 450 μJ and 350 μJ for the signal and idler pulses, respectively, at a 1-kHz repetition rate. In the saturation regime the time–bandwidth product increases from two to three times the Fourier limit, with a pulse duration of 105 ps and a bandwidth of 12.7 GHz at the highest intensities employed. Received: 2 November 2001 / Published online: 14 March 2002     

Demonstration of a compact 100 Hz, 0.1 J, diode-pumped picosecond laser

We have demonstrated an all-diode-pumped Yb:YAG chirped pulse amplification laser that produces 100 mJ pulses of 5 ps duration at 100 Hz repetition rate. The compact laser system combines a room-temperature Yb:YAG regenerative amplifier for increased bandwidth and a cryogenically cooled Yb:YAG four-pass amplifier for improved heat dissipation and increased efficiency. The optical efficiency of this amplifier is higher than that of other diode-pumped systems of comparable energy.     

Compact directly diode-pumped femtosecond Nd:glass chirped-pulse-amplification laser system

An all-solid-state longitudinally diode-pumped Nd:glass chirped-pulse-amplification laser system producing pulses of 50-MW peak power has been developed. The diode-pumped Nd:glass regenerative amplifier produces pulses with energies as great as 56microJ at a 1-kHz repetition rate and pulse durations as short as 450 fs after compression in a compact single holographic-transmission-grating stretcher-compressor arrangement. Further, spectral gain shaping was shown to extend the bandwidth that was supported in the low-gain amplifier. To the best of our knowledge, this system provides the highest peak and average power obtained from a directly diode-pumped femtosecond laser.