小孔干涉仪滤波孔的研究

用惠更斯-基尔霍夫公式对小孔干涉仪的滤波孔进行计算及分析后指出:尽管滤波孔小于爱里斑,滤波孔的位置对参考波的质量仍有影响。在接收面上参考波位相有较大偏移处,往往伴有较大的光强变化(变弱)。给出实验结果,并进行了讨论。     

Interferometric phase microscopy using slightly-off-axis reflective point diffraction interferometer

An interferometric phase microscopy (IPM) is proposed using slightly-off-axis reflective point diffraction interferometry for quantitative phase imaging. A retro-reflector consisting two mirrors is used to generate an angle between the object beam and reference beam, and a 45° tilted polarizing beam splitter is used to split the horizontal and vertical components of the both beams. Two carrier interferograms with π/2 phase-shift can be acquired in one shot, and the phase distribution of a thin specimen can be retrieved using a fast reconstruction method. The new IPM without loss in the utilization of the input-plane field of view combines the real time and optimizing detector bandwidth measurement benefit associated with slightly-off-axis method, high stability associated with common path geometry, and simplicity in terms of procedure and setup. Experiments are carried out on both static and dynamic specimens to demonstrate the validity and stability of the proposed method.     

用于相移点衍射干涉仪的加权最小二乘相位提取算法

针对现有的相位提取算法只对某些特定的误差不敏感,不能满足高精度光学检测的要求,本文引入一种等间隔多步移相算法—权重待定的加权最小二乘算法。通过在最小二乘算法中添加待定的权重,分析移相点衍射干涉仪中多种误差源对算法的影响,获得多组约束方程,从而确定权重和新算法。对新算法和标准四步算法、Hariharan五步算法进行比对分析,验证了新算法对PZT线性和二阶非线性移相不准、光强的一阶二阶波动和光源频率一阶二阶波动等误差抑制能力远远优于标准四步算法和Hariharan五步算法;新算法对CCD的量化误差、光强噪声、频率噪声的抑制能力也具有一定优势,且对CCD的二阶响应非线性完全不敏感。     

基于光学设计软件的相移点衍射干涉仪建模

为了模拟用于球面面形高精度检测的相移点衍射干涉仪的测试过程,介绍了点衍射干涉仪的基本工作原理,分析了相移点衍射干涉仪的测量误差。利用光学设计软件和自行编制的软件建立了点衍射干涉仪的检测模型,利用该模型分别推导了参考光束和测试光束在干涉场的复振幅分布,模拟了测量过程。根据光的相干理论,通过改变被测镜的位置,实现移相,得到移相干涉图。最后对一设定的被检镜进行实验模拟,生成了两组对称倾斜的13步移相干涉图,对干涉图处理后计算得到了被检镜的检测面形。结果表明,在不引入硬件误差时,由相位提取和波面反演造成的检测面形与设定面形偏差为RMS值0.0783nm,PV值0.5656nm。     

Modified polarization point diffraction interferometer with extended measurable NA for spherical surface testing

The small pinhole of point diffraction interferometer based on pinhole-point diffraction places ultra-high requirement on both the adjustment of testing system and performance of CCD camera. Besides, poor fringe contrast due to the low reflectivity of test spherical surface would limit the measurement precision in the processing of fringe pattern. A modified polarization point diffraction interferometer with extended measurable numerical aperture (NA) is presented for testing the spherical surfaces with low reflectivity. Measurement error factors as well as the corresponding calibration procedure are introduced in detail. Comparing with the results of Zygo interferometer, measurement accuracy with root-mean-square (RMS) value about 0.0026λ and peak-to-valley (PV) 0.0134λ is achieved. The system has good measurement repeatability, and the standard deviation of measurement results RMS better than 0.0010λ is obtained. The proposed interferometer reduces the difficulty in the adjustment of the system and provides a feasible way for testing the surfaces with low reflectivity and high NA.     

点衍射干涉仪波面参考源误差及公差分析

为了保留光纤点衍射干涉仪容易对准以及衍射光束易于控制的优点,同时又能实现大数值孔径（NA）光学系统的检测,设计了一种新型的波面参考源（WRS）,它保留了光纤点衍射和微孔点衍射的优点,可满足大NA极紫外光刻物镜系统波像差检测的要求。本文在分析各种误差的基础上,搭建了WRS原理光路并对WRS的系统误差标定算法进行详细的研究,得到WRS标定时旋转平台的角度公差为0.5°,跳径时偏离系数为0.5%。这一新型WRS误差分析及标定对于实现高精度的检测具有十分重要的意义,最终为实现WRS系统误差标定提供理论基础。     

Design of a grating by a joint optimization method for a phase-shifting point diffraction interferometer

A grating is an important element of a phase-shifting point diffraction interferometer, and the grating constant and duty cycle have a great impact on the interferometer, so the design of a grating becomes significant. In order to measure the projection objective with a numerical aperture of 0.2, we present a joint optimization method of a pinhole and grating based on scalar diffraction and the finite difference time domain method. The grating constant and the film thickness are selected, and the duty cycle of the grating is optimized. The results show that in the grating processing the material chromium is adopted, the thickness is 200 nm, and the grating constant is 15 μm. When the duty cycle is 55%, the interference fringe contrast is the greatest. The feasibility of the design result is further verified by experiment.     

Interference and diffraction effects in folding mirror schlieren diffraction interferometer

Experimental investigations on interference and diffraction phenomenon occurring in a folding mirror schlieren diffraction interferometer have been presented. It is shown that the well-known Lloyd mirror interferometer can easily be converted into a folding mirror schlieren diffraction interferometer. Various intermediate stages occur as the basic two-beam interference pattern in Lloyd mirror interferometer is transformed into a schlieren diffraction pattern. Study of these intermediate stages gives a good insight in understanding the transition behaviour between the fundamental phenomenon of interference and diffraction taking place as the mirror-edge approaches the Airy disk.     

谱衍射干涉的计算模拟

本文提出谱衍射干涉的计算模拟方法.着重讨论了谱为几何图案时的干涉现象,得到干涉场强正比于物体沿图案路径的线积分.根据实验观察用二次位相函数来近似模拟酒精灯火焰的位相延迟,相应计算了几种特殊谱分布的衍射干涉强度分布,得到与实验相一致的结果.本文还讨论了几种特殊谱衍射干涉的特点,得到了一些结论.     

Test of a diffraction grating neutron interferometer

A practical diffraction grating neutron interferometer has been tested and used to obtain the interference pattern for neutrons with a maximum wavelength of λ = 3.15 Å. Implementation of this principle for very low energy ultra-cold neutrons, permits a substantial expansion of the range of problems which can be solved by neutron interferometry.     

Effect of Airy disk on schlieren diffraction interferometer

Schlieren is among the oldest and widely used optical techniques for detection of change in refractive index in transparent media. Present work demonstrates the effect of the position of schlieren element in the Airy pattern on the schlieren interferogram. It has been shown that the amplitude of the diffracted wave, starting from schlieren element and serving as an inbuilt reference beam for the schlieren diffraction interferometer, becomes maximum when schlieren element diffracts light from the Airy disk. Effect of F-number of the optical system on schlieren pattern is also demonstrated via observations on the amplitude of diffracted light.     

Improved phase-shifting diffraction interferometer for microsphere topography measurements

In this study, an improved phase-shifting diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate apparatus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer's specification value.     

Formation of quasi-regular diffraction patterns in the nonlinear photorefractive Fabry-Perot interferometer

Formation of optical inhomogeneities under self-action of light fields in photorefractive Fabry-Perot interferometers has been experimentally investigated using the samples of Y — and Z-cut lithium niobate. For the interferometer with the Z-cut sample, it is demonstrated that spiral-shaped inhomogeneities and two-dimensional quasi-regular diffraction patterns are formed under the effect of the Gaussian beam about 1mm in diameter and the light field with a homogeneous intensity distribution.     

基于子孔径拼接的衍射干涉靶丸形貌检测技术

为实现惯性约束聚变实验中核心部件球形靶丸表面形貌的高精度、高效率、无遗漏检测,建立了基于子孔径拼接和衍射干涉技术相结合的靶丸形貌测量装置,给出了测量的基本原理及系统单孔径横向分辨率的计算方法,并对靶丸旋转扫描时子孔径的排布进行了划分。针对点云数据横向间隔过大导致匹配算法迭代收敛速度缓慢,甚至不收敛的问题,提出以虚拟的极小半径代替实际曲率半径,将点云进行横向压缩的方法,在保持形貌特征不变的同时提高算法的匹配速度和准确性。最后,对直径1 mm的镀金球靶进行了实际测量,得到拼接后相对形貌误差峰谷值和均方根值分别为1.332和0.479的检测结果,可以同时获得表面形貌的整体起伏特征,以及局部的形貌细节。     

衍射式光栅干涉测量系统发展现状及趋势

在车间条件下操作时,光栅干涉仪在测量精度方面优于He-Ne激光干涉仪.基于光栅干涉测量系统有一些特别的优点,导致其在高精密测量中用途不断增加.阐述了衍射式光栅干涉测量系统的工作原理和特点,同时详细总结了国际上生产和研究衍射光栅干涉测量系统的厂家和研究机构及他们的产品.并指出该系统的发展趋势和存在的问题,为衍射式光栅测量...     

基于子孔径拼接的衍射干涉靶丸形貌检测技术

为实现惯性约束聚变实验中核心部件球形靶丸表面形貌的高精度、高效率、无遗漏检测,建立了基于子孔径拼接和衍射干涉技术相结合的靶丸形貌测量装置,给出了测量的基本原理及系统单孔径横向分辨率的计算方法,并对靶丸旋转扫描时子孔径的排布进行了划分。针对点云数据横向间隔过大导致匹配算法迭代收敛速度缓慢,甚至不收敛的问题,提出以虚拟的极小半径代替实际曲率半径,将点云进行横向压缩的方法,在保持形貌特征不变的同时提高算法的匹配速度和准确性。最后,对直径1 mm的镀金球靶进行了实际测量,得到拼接后相对形貌误差峰谷值和均方根值分别为1.332和0.479的检测结果,可以同时获得表面形貌的整体起伏特征,以及局部的形貌细节。     

Features of the interference field in a diffraction interferometer for surface testing

The interference field in an interferometer with a zone plate set at the center of curvature of a tested mirror has been investigated. The conditions for testing spherical and parabolic surfaces have been determined. It has been shown that the zero-fringe tracing method allows imperfections in the mirror shape to be distinguished from the instrumental error of the interferometer. The results of testing a parabolic surface are compared with measurements by the Ritchey method. The deviations between the mean asphericity values did not exceed λ/20.