A 33-ns 64-Mb DRAM

A 64-Mb CMOS dynamic RAM (DRAM) measuring 176.4 mm² has been fabricated using a 0.4-μm N-substrate triple-well CMOS, double-poly, double-polycide, double-metal process technology. The asymmetrical stacked-trench capacitor (AST) cells, 0.9 μm×1.7 μm each, are laid out in a PMOS centered interdigitated twisted bit-line (PCITBL) scheme that achieves both low noise and high packing density. Three circuit techniques were developed to meet high-speed requirements. Using the preboosted word-line drive-line technique, a bypassed sense-amplifier drive-line scheme, and a quasi-static data transfer technique, a typical RAS access time of 33 ns and a typical column address access time of 15 ns have been achieved     

A 29-ns 64-Mb DRAM with hierarchical array architecture

A 29-ns (RAS access time), 64-Mb DRAM with hierarchical array architecture has been developed. For consistent high yields and high speed, a CMOS segment driver circuit is used as a hierarchical word line scheme. To achieve high speed, precharge signal (PC) drivers for equalizing the bit lines pairs, and shared sense amplifier signal (SHR) drivers are distributed in the array. To enhance sense amplifiers speed in low array voltage, an over driven sense amplifier is adopted. A hierarchical I/O scheme with semidirect sensing switch is introduced for high speed data transfer in the I/O paths. By combining these proposed circuit techniques and 0.25-μm CMOS process technologies with phase-shift optical lithography, an experimental 64-Mb DRAM has been designed and fabricated. The memory cell size is 0.71×1.20 μm ², and the chip size is 15.91×9.06 mm². A typical access time under 3.3 V power supply voltage is 29 ns     

A 40-ns 64-Mb DRAM with 64-b parallel data bus architecture

The authors describe circuit techniques for wide input/output (I/O) data path and high-speed 64-Mb dynamic RAMs (DRAMs). A hierarchical data bus structure using double-level metallization has been developed to form 64-b parallel data bus lines without increasing the chip size. A current-sensing data bus amplifier, developed to sense the 64-b data bus signal in parallel, has made the wide I/O data path structure possible. A direct-sensing type column gate circuit with the READ/WRITE separated select line scheme achieves 40-ns RAS access. A shielded bit-line three-dimensional stacked-capacitor cell with a double-fin storage capacitor stores sufficient charge while the bit-line capacitance shows a reasonable value for sensing the data     

An experimental 1.5-V 64-Mb DRAM

Low-voltage circuit technologies for higher-density dynamic RAMs (DRAMs) and their application to an experimental 64-Mb DRAM with a 1.5-V internal operating voltage are presented. A complementary current sensing scheme is proposed to reduce data transmission delay. A speed improvement of 20 ns was achieved when utilizing a 1.5-V power supply. An accurate and speed-enhanced half-V_CC voltage generator with a current-mirror amplifier and tri-state buffer is proposed. With it, a response time reduction of about 1.5 decades was realized. A word-line driver with a charge-pump circuit was developed to achieve a high boost ratio. A ratio of about 1.8 was obtained from a power supply voltage as low as 1.0 V. A 1.28 μm² crown-shaped stacked-capacitor (CROWN) cell was also made to ensure a sufficient storage charge and to minimize data-line interference noise. An experimental 1.5 V 64 Mb DRAM was designed and fabricated with these technologies and 0.3 μm electron-beam lithography. A typical access time of 70 ns was obtained, and a further reduction of 50 ns is expected based on simulation results. Thus, a high-speed performance, comparable to that of 16-Mb DRAMs, can be achieved with a typical power dissipation of 44 mW, one tenth that of 16-Mb DRAMs. This indicates that a low-voltage battery operation is a promising target for future DRAMs     

A 30-ns 64-Mb DRAM with built-in self-test and self-repair function

A 64-Mb dynamic random access memory (DRAM) with a 30-ns access time and 19.48-mm×9.55-mm die size has been developed. For reducing inter-bit-line coupling noise, the DRAM features a latched-sense, shared-sense circuit with open bit-line readout and folded bit-line rewrite operations. To reduce test costs and increase chip reliability, it has been equipped with built-in self-test and self-repair (BIST and BISR) circuits that use spare SRAM cells     

A 45-ns 64-Mb DRAM with a merged match-line test architecture

A single 3.3-V 64-Mb dynamic RAM (DRAM) with a chip size of 233.8 mm² has been fabricated using 0.4-μm CMOS technology with double-level metallization. The dual-cell-plate (DCP) cell structure is applied with a cell size of 1.7 μm², and 30-fF cell capacitance has been achieved using an oxynitride layer (t_eff=5 nm) as the gate insulator. The RAM implements a new data-line architecture called the merged match-line test (MMT) to achieve faster access time and shorter test time with the least chip-area penalty. The MMT architecture makes it possible to get a RAS access time of 45 ns and reduces test time by 1/16000. A parallel MMT technique, which is an extended mode of MMT, leads to the further test-time reduction of 1/64000. Therefore, all 64 Mb are tested in only 1024 cycles, and the test time is only 150 μs with 150-ns cycle time     

Word-line architecture for highly reliable 64-Mb DRAM

A unique word-line voltage control method for the 64-Mb DRAM and beyond is proposed. It realizes a constant lifetime for a thin gate oxide. This method controls word-line voltage and compensates reliability degradation in the thin gate oxide for cell-transfer transistors. It keeps the time-dependent dielectric breakdown (TDDB) lifetime constant under any conditions of gate oxide thickness fluctuation, temperature variation, and supply voltage variation. This method was successfully implemented in a 64-Mb DRAM to realize high reliability. This chip achieved a 10⁵ times reliability improvement and a 0.3~1.8-V larger word-line voltage margin to write ONE data into the cell     

A 14-ns 14-Mb CMOS DRAM with 300-mW active power

A 4-Mb high-speed DRAM (HSDRAM) has been developed and fabricated by using 0.7-μm L_eff CMOS technology with PMOS arrays inside n-type wells and p-type substrate plate trench cells. The 13.18-mm×6.38-mm chip, organized as either 512 K word×8 b or 1 M word×4 b, achieves a nominal random-access time of 14 ns and a nominal column-access time of 7 ns, with a 3.6-V V_cc and provision of address multiplexing. The high level of performance is achieved by using a short-signal-path architecture with center bonding pads and a pulsed sensing scheme with a limited bit-line swing. A fast word-line boosting scheme and a two-stage word-line delay monitor provide fast word-line transition and detection. A new data output circuit, which interfaces a 3.6-V V_cc to a 5-V bus with an NMOS-only driver, also contributes to the fast access speed by means of a preconditioning scheme and boosting scheme. Limiting the bit-line voltage swing for bit-line sensing results in a low power dissipation of 300 mW for a 60-ns cycle time     

A 4-Mb low-temperature DRAM

The authors present the characterization of the first dynamic RAM (DRAM) fabricated in a technology specifically optimized for cryogenic operation. With the power supply adjusted to assure hot-electron reliability, the 25-ns 4-Mb low-temperature (LT) chips operated 3 times faster than conventional chips. The LT-optimized chips functioned properly with cycle times as fast as 45 ns, and with a toggle-mode data rate of 667 Mb/s. Wide operating margins and a very large process window for data retention were demonstrated. At a temperature of 85 K the storage retention time of the trench-capacitor memory cells exceeded 8 h. This study shows that the performance leverage offered by low temperature applies equally well to DRAM and to logic. There is no limitation inherent to memory     

0.13-μm 32-Mb/64-Mb embedded DRAM core with high efficientredundancy and enhanced testability

This paper describes the 32-Mb and the 64-Mb embedded DRAM core with high efficient redundancy, which is fabricated using 0.13-μm triple-well 4-level Cu embedded DRAM technology. Core size of 18.9 mm ² and cell efficiency of 51.3% for the 32-Mb capacity, and core size of 33.4 mm² and cell efficiency of 58.1% for the 64-Mb capacity are realized. This core can achieve 230-MHz burst access at 1.0-V power-supply condition by adopting a new data bus architecture: merged shift column redundancy. We implemented four test functions to improve the testability of the embedded DRAM core. It realizes the DRAM core test in a logic test environment     

Circuit techniques for 1.5-3.6-V battery-operated 64-Mb DRAM

Circuit techniques for battery-operated DRAMs which cover supply voltages from 1.5 to 3.6 V (universal V_cc), as well as their applications to an experimental 64-Mb DRAM, are presented. The universal-V_cc DRAM concept features a low-voltage (1.5 V) DRAM core and an on-chip power supply unit optimized for the operation of the DRAM. A circuit technique for oxide-stress relaxation is proposed to improve high-voltage sustaining characteristics while only scaled MOSFETs are used in the entire chip. This technique increases sustaining voltage by about 1.5 V compared with conventional circuits and allows scaled MOSFETs to be used for the circuits, which can be operated from an external V_cc of up to 4 V. A two-way power supply scheme is proposed to suppress the internal voltage fluctuation within 10% when the DRAM is operated from external power supply voltages ranging from 1.5 to 3.6 V. An experimental 1.5-3.6-V 64-Mb DRAM is designed based on these techniques and fabricated by using 0.3-μm electron-beam lithography. An almost constant access time of 70 ns is obtained. This indicates that battery operation is a promising target for future DRAMs     

A 17-ns 4-Mb CMOS DRAM

A 17-ns nonaddress-multiplexed 4-Mb dynamic RAM (DRAM) fabricated with a pure CMOS process is described. The speed limitations of the conventional DRAM sensing technique are discussed, and the advantages of using the direct bit-line sensing technique are explained. A direct bit-line sensing technique with a two-stage amplifier is described. One readout amplifier is composed of a two-stage current-mirror amplifier and a selected readout amplifier is activated by a column decoder output before the selected word line rises. The amplifier then detects a small bit-line signal appearing on a bit-line pair immediately after the word-line rise. This two-stage amplification scheme is essential to improving access time, especially in the case of a CMOS process. The high sensitivity of the readout amplifier is discussed, and the electrical features and characteristics of the fabricated DRAM are reported     

A 23-ns 1-Mb BiCMOS DRAM

A 1-Mb BiCMOS DRAM having a 23-ns access time is described. The DRAM uses a direct sensing technique and a nonaddress-multiplexing configuration. This technique combines the NMOS differential circuit on each pair of data lines with a common highly sensitive bipolar circuit. The resulting chip has been verified to have high-speed characteristics while maintaining a wide operating margin and a relatively small chip size of 62.2 mm², in spite of a 1.3-μm lithography level     

Optimized redundancy selection based on failure-related yield modelfor 64-Mb DRAM and beyond

An optimized redundancy scheme for 64-Mb dynamic RAM (DRAM) and beyond that is based on a failure-related yield model is described. This model accounts for three-dimensional memory cell structures and individual design rules used in individual sections of the chip. Failure-mode parameters for the model are determined by performing a trial fuse-blowing test on 4-Mb DRAMs. The test employs a memory tester without requiring complicated visual inspections. The dependence of the yield on block division and the number of spare elements for a 64-Mb DRAM are investigated. In the estimation as a redundancy scheme for the 64-Mb DRAM, more than two spare rows and two spare columns in 1-Mb or less subblocks are shown to be necessary     

A 34-ns 16-Mb DRAM with controllable voltage down-converter

A high-speed 16-Mb DRAM with high reliability is reported. A multidivided column address decoding scheme and a fully embedded sense-amplifier driving scheme were used to meet the requirements for high speed. A low-power hybrid internal power supply voltage converter with an accelerated life-test function is also proposed and was demonstrated. A novel substrate engineering technology, a retrograded well structure formed by a megaelectronvolt ion-implantation process, provides a simple process sequence and high reliability in terms of soft error and latch-up immunity.<>     

A 32-bank 256-Mb DRAM with cache and TAG

A 125 megabyte/s synchronous 32-bank 256-Mb DRAM has been developed by a bank-interleaving oriented multibank architecture including a shared-sense amplifier cache with an overlapped bank control for hidden precharge, phase-aligned timing pulse transmission, and voltage controlled negative conductance (VCNC) data-bus current sense amplifier     

A 100-MHz 4-Mb cache DRAM with fast copy-back scheme

A 4-Mb cache dynamic random access memory (CDRAM), which integrates 16-kb SRAM as a cache memory and 4-Mb DRAM into a monolithic circuit, is described. This CDRAM has a 100-MHz operating cache, newly proposed fast copy-back (FCB) scheme that realizes a three times faster miss access time over with the conventional copy-back method, and maximized mapping flexibility. The process technology is a quad-polysilicon double-metal 0.7-μm CMOS process, which is the same as used in a conventional 4-Mb DRAM. The chip size of 82.9 mm² is only a 7% increase over the conventional 4-Mb DRAM. The simulated system performance indicated better performance than a conventional cache system with eight times the cache capacity     

A 150-MHz graphics rendering processor with 256-Mb embedded DRAM

A 150-MHz graphics rendering processor with an integrated 256-Mb embedded DRAM, delivering a rendering rate of 75 M polygons/s, is presented, 287.5 M transistors are integrated on a 21.3×21.7 mm ² die in a 0.18-μm embedded DRAM CMOS process with six layers of metal. Design methodologies for hierarchical electrical and physical design of this very large-scale IC, including power distribution, fully hierarchical timing design, and verification utilizing a newly developed nonlinear model, clock design, propagation delay, and crosstalk noise management in multi-millimeter RC transmission lines, are presented     

A 30-ns 256-Mb DRAM with a multidivided array structure

A 256-Mb DRAM with a multidivided array structure has been developed and fabricated with 0.25-μm CMOS technology. It features 30-ns access time, 16-b I/Os, and a 35-mA operating current at a 60-ns cycle time. Three key circuit technologies were used in its design: a partial cell array activation scheme for reducing power-line voltage bounce and operating current, a selective pull-up data-line architecture to increase I/O width and reduce power dissipation, and a time-sharing refresh scheme to maintain the conventional refresh period without reducing operational margin. Memory cell size was 0.72 μm². Use of the trench isolated cell transistor and the HSG cylindrical stacked capacitor cells helped reduce chip size to 333 mm²     

An experimental 256-Mb DRAM with boosted sense-ground scheme

In developing the 256-Mb DRAM, the data retention characteristics must inevitably be improved. In order for DRAM's to remain the semiconductor device with the largest production volume in the 256-Mb era, we must develop a cost effective device with a small chip size and a large process tolerance. In this paper, we propose the BSG (boosted sense-ground) scheme for data retention and FOGOS (folded global and open segment bit-line) structure for chip size reduction. We have fabricated an experimental 256-Mb DRAM with these technologies and obtained a chip size of 304 mm² and a performance of 34 ns access time