刻蚀AlN缓冲层对硅衬底N极性n-GaN表面粗化的影响

研究了等离子体刻蚀AlN缓冲层对硅衬底N极性n-GaN表面粗化行为的影响. 实验结果表明, 表面AlN缓冲层的状态对N极性n-GaN的粗化行为影响很大, 采用等离子体刻蚀去除一部分表面AlN缓冲层即可以有效提高N极性n-GaN在KOH溶液中的粗化效果, AlN缓冲层未经任何刻蚀处理的样品粗化速度过慢, 被刻蚀完全去除AlN缓冲层的样品容易出现粗化过头的现象. 经X射线光电子能谱分析可知, 等离子体刻蚀能够提高样品表面AlN缓冲层Al 2p的电子结合能, 使得样品表面费米能级向导带底靠近, 原子含量测试表明样品表面产生了大量的N空位, N空位提供电子, 使得材料表面费米能级升高, 这降低了KOH溶液和样品表面之间的肖特基势垒, 从而有利于表面粗化的进行. 通过等离子体刻蚀掉表面部分AlN缓冲层, 改善了N极性n-GaN在KOH溶液中的粗化效果, 明显提升了对应发光二级管器件的出光功率.     

980 nm 垂直腔面发射激光器低欧姆接触电阻制备

研究了980 nm的垂直腔面发射激光器(VCSEL)欧姆接触技术.降低VCSEL的欧姆接触电阻,可有效地提高VCSEL的输出功率和延长其可靠性.P面采用高掺杂的P-GaAs/Ti/Pt/Au系统,N面采用N-GaAs/Ge/Au/Ni/Au系统,通过优化合金温度,得到了最佳优化合金温度为440 ℃,最低欧姆接触电阻值为0.04 Ω,同时对比了440 ℃和450 ℃器件的输出功率和转换效率之间的对比关系.测试结果表明,440 ℃器件的欧姆接触电阻0.04 Ω,峰值波长980.1 nm,光谱的半高宽0.8 nm,平行发散角θ_‖ 15.2°,垂直发散角θ_⊥ 13.5°,输出功率1.4 W,转换效率最大值为14.4%,而450℃的器件欧姆接触电阻为0.049 Ω,输出功率为1.3 W,转换效率为12.8%.通过优化合金温度能有效地降低980 nm的VCSEL欧姆接触电阻.     

等离子体表面处理对硅衬底GaN基蓝光发光二极管内置n型欧姆接触的影响

硅衬底GaN基发光二极管(LED)的内置n型欧姆接触在晶圆键合时的高温过程中常常退化,严重影响LED的工作电压等器件性能.本文深入研究了内置n电极蒸镀前对n-GaN表面的等离子体处理工艺对硅衬底GaN基发光二极管n型欧姆接触特性的影响.实验结果表明,1.1 mm×1.1 mm的LED芯片在350 m A电流下,n-GaN表面未做等离子体处理时,n电极为高反射率Cr/Al的芯片正向电压为3.43 V,比n电极为Cr的芯片正向电压高0.28 V.n-GaN表面经O2等离子体表面处理后,Cr/Al和Cr电极芯片的正向电压均有所降低,但Cr/Al电极芯片的正向电压仍比Cr电极芯片高0.14 V.n-GaN表面经Ar等离子体处理后,Cr/Al电极芯片正向电压降至Cr电极芯片的正向电压,均为2.92 V.利用X射线光电子能谱对Ar等离子体处理前后的n-GaN表面进行分析发现,Ar等离子体处理增加了n-GaN表面的N空位(施主)浓度,更多的N空位可以提高n型欧姆接触的热稳定性,缓解晶圆键合的高温过程对n型欧姆接触特性的破坏.同时还发现,经过Ar等离子体处理并用HCl清洗后,n-GaN表面的O原子含量略有增加,但其存在形式由以介电材料GaO_x为主转变为导电材料GaO_xN_(1-x)和介电材料GaO_x含量相当的状态,这会使得接触电阻进一步降低.上述两方面的变化均有利于降低LED芯片的正向电压.     

感应耦合等离子体刻蚀p-GaN的表面特性

研究了p-GaN材料经感应耦合等离子体(ICP)刻蚀后的表面特性,并用不同的方法对刻蚀表面进行处理.利用原子力显微镜(AFM)和X射线光电子能谱(XPS)对刻蚀样品进行分析,并在样品表面制作Ni/Au电极,进行欧姆接触特性的测试.实验结果表明了NaOH溶液处理表面对改善材料表面和欧姆接触特性是比较有效的. 关键词： GaN 感应耦合等离子刻蚀 表面处理 欧姆接触     

高功率InGaAs量子阱垂直腔面发射激光器的研制

采用AlAs氧化物限制工艺实验制备了衬底出光的高功率大出光窗口（直径为300 μm）InGaAs/GaAs量子阱垂直腔面发射半导体激光器,实现了器件室温准连续工作（脉冲宽度为50 μs,重复频率为1000 Hz）,并对器件的伏安特性、光输出特性、发射光谱,以及器件的远场发射特性等进行了实验测试.器件阈值电流为460mA,器件的最大光输出功率为100mW,发射波长为978.6nm, 光谱半功率全宽度为1.0 nm,远场发散角小于10°,垂直方向的发散角θ_⊥为8°,水平方向的发散角θ_∥为9°,基本为圆形对称光束.     

感应耦合等离子体刻蚀p-GaN的表面特性

研究了p-GaN材料经感应耦合等离子体(ICP)刻蚀后的表面特性，并用不同的方法对刻蚀表面进行处理.利用原子力显微镜(AFM)和X射线光电子能谱(XPS)对刻蚀样品进行分析，并在样品表面制作Ni/Au电极，进行欧姆接触特性的测试.实验结果表明了NaOH溶液处理表面对改善材料表面和欧姆接触特性是比较有效的.     

硅衬底GaN基LED N极性n型欧姆接触研究

在Si衬底GaN基垂直结构LED的N极性n型面上,利用电子束蒸发的方法制作了Ti/Al电极,通过了I-V曲线研究了有无AlN缓冲层对这种芯片欧姆接触的影响.结果显示,去除AlN缓冲层后的N极性n型面与Ti/Al电极在500到600 ℃范围内退火才能形成欧姆接触.而保留AlN缓冲层的N极性n型面与Ti/Al电极未退火时就表现为较好的欧姆接触,比接触电阻率为2×10^-5 Ω·cm²,即使退火温度升高至600 ℃,也始终保持着欧姆接触特性.因此,AlN缓冲层的存在是Si衬底GaN基垂直结构LED获得高热稳定性n型欧姆接触的关键. 关键词： 硅衬底 N极性 AlN缓冲层 欧姆接触     

具有石墨烯/铟锑氧化物复合透明电极的GaN发光二极管

近年来,石墨烯材料由于优异的光电性能获得了广泛关注,并应用于发光二极管的透明电极以取代昂贵的铟锑氧化物(indium tin oxide, ITO)透明电极,但由于石墨烯与p-GaN功函数不匹配,二者很难形成好的欧姆接触,因而造成器件电流扩展差和电压高等问题.本文将ITO薄层作为石墨烯透明电极与p-Ga N间的插入层,以改善石墨烯与p-Ga N层的欧姆接触.所制备的石墨烯透明电极的方块电阻为252.6?/□,石墨烯/ITO复合透明电极的方块电阻为70.1?/□;石墨烯透明电极与p-Ga N层的比接触电阻率为1.92×10~(–2) ?cm~2,ITO插入之后,其比接触电阻率降低为1.01×10~(–4) ?cm~2;基于石墨烯透明电极的发光二极管(light emitting diode, LED),在20 m A注入电流下,正向电压为4.84 V,而石墨烯/ITO复合透明电极LED正向电压降低至2.80 V,且光输出功率得到提高.这归因于石墨烯/ITO复合透明电极与p-Ga N界面处势垒高度的降低,进而改善了欧姆接触;另外,方块电阻的降低,使得电流扩展均匀性也得到了提高.所采用的复合透明电极减少了ITO的用量,得到了良好的欧姆接触,为LED透明电极提供了一种可行方案.     

穿透型V形坑对GaN基p-i-n结构紫外探测器反向漏电的影响

研究了GaN基p-i-n（p-AlGaN/i-GaN/n-GaN）结构紫外探测器的漏电机理．实验发现,在位错密度几乎相同的情况下,基于表面有较高密度的V形坑缺陷材料制备的器件表现出较高的反向漏电．进一步的SEM测试发现,这种V形坑穿透到有源区i-GaN、甚至n-GaN层．在制备p-AlGaN电极时,许多金属会落在V形坑中,从而与i-GaN形成了肖特基接触,有些甚至直接和n-GaN形成欧姆接触．正是由于并联的肖特基接触和欧姆接触的存在导致了漏电的增加． 关键词： GaN 紫外探测器 V形坑 反向漏电     

低反向漏电自支撑衬底AlGaN/GaN肖特基二极管

氮化镓材料具有大的禁带宽度(3.4 eV)、高的击穿场强(3.3 MV/cm),在高温、高压等方面有良好的应用前景.尤其是对于铝镓氮/氮化镓异质结构材料而言,由极化效应产生的高面密度和高迁移率二维电子气在降低器件导通电阻、提高器件工作效率方面具有极大的优势.由于缺乏高质量、大尺寸的氮化镓单晶衬底,常规氮化镓材料均是在蓝宝石、硅和碳化硅等异质衬底上外延而成.较大的晶格失配和热失配导致异质外延过程中产生密度高达10~7—10¹⁰ cm^–2的穿透位错,使器件性能难以进一步提升.本文采用基于自支撑氮化镓衬底的铝镓氮/氮化镓异质结构材料制备凹槽阳极结构肖特基势垒二极管,通过对欧姆接触区域铝镓氮势垒层刻蚀深度的精确控制,依托单步自对准凹槽欧姆接触技术解决了低位错密度自支撑氮化镓材料的低阻欧姆接触技术难题,实现了接触电阻仅为0.37Ω·mm的低阻欧姆接触;通过采用慢速低损伤刻蚀技术制备阳极凹槽区域,使器件阳极金属与氮化镓导电沟道直接接触,实现了高达3×107开关比的高性能器件,且器件开启电压仅为0.67 V, 425 K高温下,器件反向漏电仅为1.6×10...     

Current diffusion and efficiency droop in vertical light emitting diodes

Current diffusion is an old issue, nevertheless, the relationship between the current diffusion and the efficiency of light emitting diodes(LEDs) needs to be further quantitatively clarified. By incorporating current crowding effect(CCE) into the conventional ABC model, we have theoretically and directly correlated the current diffusion and the internal quantum efficiency(IQE), light extraction efficiency(LEE), and external quantum efficiency(EQE) droop of the lateral LEDs.However, questions still exist for the vertical LEDs(V-LEDs). Here firstly the current diffusion length L_s(I) and L_s(II) have been clarified. Based on this, the influence of CCE on the EQE, IQE, and LEE of V-LEDs were investigated. Specifically to our V-LEDs with moderate series resistivity, L_s(III) was developed by combining L_s(I) and L_s(II), and the CCE effect on the performance of V-LEDs was investigated. The wall-plug efficiency(WPE) of V-LEDs ware investigated finally. Our works provide a deep understanding of the current diffusion status and the correlated efficiency droop in V-LEDs, thus would benefit the V-LEDs' chip design and further efficiency improvement.     

Study of light extraction efficiency of GaN-based light emitting diodes by using top micro/nanorod hybrid arrays

Recently a new kind of hybrid micro/nanorod top array has become a promising structure to improve the light extraction efficiency (LEE) of GaN-based light emitting diodes, but simulation of the hybrid structure is extremely difficult owing to the various limitations of different simulation methods. In this study, a novel approach was explored to calculate the LEE by combining the Finite difference time domain method and the ray tracing method through the gradient refractive index layers. In this novel method, the LEE enhancement mechanism of the hybrid structure was investigated. In addition, we further sought the optimal parameters of the hybrid micro/nanorod structure, and an optimized structure with an enhancement factor of greater than 95 % was achieved.     

Numerical study on the wavelength-dependence of light extraction efficiency in AlGaN-based ultraviolet light-emitting diodes

Wavelength-dependence of light extraction efficiency (LEE) in AlGaN-based ultraviolet (UV) light-emitting diode (LED) structures is numerically studied based on three-dimensional finite-difference time-domain methods. Due to strong UV light absorption in the p-GaN contact layer, LEE of the UV vertical LED structures remains to be only 6–7 % for the transverse-electric mode and 2–3 % for the transverse-magnetic mode, respectively. The effective LEE of UV LEDs is calculated by considering the optical polarization-dependent LEE, and is found to increase from 4 to 5.5 % as the wavelength increases from 260 to 360 nm. It is shown that the wavelength-dependence of LEE can partially explain the decrease in external quantum efficiency with decreasing wavelengths in AlGaN-based UV LEDs.     

感应耦合等离子体刻蚀InP/InGaAsP二维光子晶体结构的研究

为实现基于InP/InGaAsP材料的二维光子晶体结构低损伤、高各向异性的干法刻蚀，研究了对InP材料基于Cl₂/BCl₃气体的感应耦合等离子体刻蚀. 从等离子体轰击使衬底升温的角度分析了刻蚀机理，发现离子轰击加热引起的侧蚀与物理溅射在侧壁再沉积之间处于平衡时可以得到高各向异性刻蚀，平衡点将随ICP功率增高而向偏压减小方向移动，从而在近203 V偏压下得到陡直的侧壁. 在优化气体组分后，成功实现了光子晶体结构高各向异性的低偏压刻蚀. 关键词： 光子晶体 InP/InGaAsP 感应耦合等离子体 2/BCl₃')" href="#">Cl₂/BCl₃ 低偏压刻蚀     

Enhanced light extraction with silicon nanoantenna arrays for white light LED applications

High conversion efficiency and quantum efficiency is essential for the phosphor in an efficient phosphor-based white light LEDs. Here, based on the coherent harmonic and the random independent emitter model, we demonstrate theoretically that the silicon nanoantenna array can dramatically enhance the output power of emitters in a phosphor layer by investigating the far-field radiation enhancement of an electric dipole assisted by silicon nanopillars in a waveguide structure. Compared with the plasmonic silver nanoantenna array, the silicon nanoantenna array can increase the enhancement factor of light extraction efficiency (LEE) over 50% for the dipole source at the wavelength of 620 nm, thus showing potential applications in white light LEDs. The enhanced LEE is ascribed to the low-loss directional light scattering of silicon nanoantennas and the strong guided mode resonances caused by their array. The calculation results also indicate that the far-field radiation can be tailored significantly by changing the aspect ratio of silicon nanopillars while presenting a good directivity. Our research is expected to give more insights into the design and optimization of the solid-state lighting, gaining and lasing systems by integrating silicon-based nanoantennas.     

Improving the optical performance of InGaN light-emitting diodes by altering light reflection and refraction with triangular air prism arrays

The effect of triangular air prism (TAP) arrays with different distance-to-width (d/w) ratios on the enhancement of light extraction efficiency (LEE) of InGaN light-emitting diodes (LEDs) is investigated. The TAP arrays embedded at the sapphire/GaN interface act as light reflectors and refractors, and thereby improve the light output power due to the redirection of light into escape cones on both the front and back sides of the LED. Enhancement in radiometric power as high as 117% and far-field angle as low as 129° are realized with a compact arrangement of TAP arrays compared with that of a conventional LED made without TAP arrays under an injection current of 20 mA.     

Wettability alteration of sandstones by silica nanoparticle dispersions in light and heavy crude oil

Unlike conventional oil production methods, enhanced oil recovery (EOR) processes can recover most oil products from the reservoir. One method, known as wettability alteration, changes the hydrophilicity of the reservoir rock via decreased surface interactions with crude oils. The mitigation of these attractive forces enhances petroleum extraction and increases the accessibility of previously inaccessible rock deposits. In this work, silica nanoparticles (NPs) have been used to alter the wettability of two sandstone surfaces, Berea and Boise. Changes in wettability were assessed by measuring the contact angle and interfacial tension of different systems. The silica NPs were suspended in brine and a combined solution of brine and the Tween®20 nonionic surfactant at concentrations of 0, 0.001, and 0.01 wt% NP with both light and heavy crude oil. The stability of the different nanofluids was characterized by the size, zeta potential, and sedimentation of the particles in suspension. Unlike the NPs, the surfactant had a greater effect on the interfacial tension by influencing the liquid-liquid interactions. The introduction of the surfactant decreased the interfacial tension by 57 and 43% for light and heavy crude oil samples, respectively. Imaging and measurements of the contact angle were used to assess the surface-liquid interactions and to characterize the wettability of the different systems. The images reflect that the contact angle increased with the addition of NPs for both sandstone and oil types. The contact angle in the light crude oil sample was most affected by the addition of 0.001 wt% NP, which altered both sandstones’ wettability. Increases in contact angle approached 101.6% between 0 and 0.001 wt% NPs with light oil on the Berea sandstone. The contact angle however remained relatively unaffected by addition of higher NP concentrations, thus indicating that low NP concentrations can effectively be used for enhancing crude oil recovery. While the contact angle of the light crude oil plateaued, the heavy crude oil continued to increase with an increase in NP concentration; therefore indicating that a maximum contact angle in heavy crude oil was not yet achieved. The introduction of NPs in light and heavy crude oil samples altered both the Berea and Boise sandstone systems’ wettability, which in turn indicated the efficacy of the silica NPs and surfactants in generating a more water-wet reservoir. Consequently, silica NPs and surfactants are most promising for EOR across the range of oil types.     

Enhancement of the light extraction of GaN-based green light emitting diodes via nanohybrid structures

Improvement in the light extraction efficiency (LEE) of GaN-based green light emitting diodes (LEDs) with ZnO nanostructures synthesized by a hydrothermal method is reported. Formation of ZnO nanorods, hemispheres, and cones was controlled by varying the pH of the aqueous synthesis solution. The shape of the ZnO nanostructures integrated onto the LEDs shows a strong relationship with the LEE characteristics of GaN-based green LEDs. The electroluminescence (EL) intensity of LEDs covered by ZnO nanostructures increased compared to conventional LEDs. In terms of LEE, LEDs with surface-textured ZnO hemispheres showed the highest EL intensity, which can be attributed to an increase in the effective critical angle, the escape cone, and multiple scattering. Finite difference time domain (FDTD) simulation was conducted to theoretically confirm the experimental results.     

Point defect generation in pulsed impure solids

Abstract

The effect of beam incidence on dry etching damage in n- and p-type silicon has been studied with Schottky barriers fabricated on samples etched with 0.5 keV and 1.0 keV Ar. The electrical properties of Schottky barriers are extremely sensitive to surface damage, and it is found that there is a steep dependence of the effective Schottky barrier height on the angle of incidence. Evaluation of the current-voltage and capacitance-voltage characteristics of the diodes shows that the barrier modification peaks at an angle of incidence of about 45°.     

纳米银增强聚合物太阳能电池光吸收的研究

基于共轭聚合物给体材料P3HT和富勒烯衍生物受体材料PCBM共混的体异质结结构 的聚合物太阳能电池因其空穴载流子迁移率低而限制了P3HT:PCBM功能层厚度, 从而影响了器件对入射光的吸收. 在聚合物功能层内引入金属纳米颗粒可以利用金属表面等离子体效应增强器件内电场并改善器件的光吸收. 本文基于时域有限差分法(finite difference time domain, FDTD)方法模拟得到了聚合物功能层内包含了直径为50 nm纳米银球并且球间距为50 nm的聚合物太阳能 电池器件在波长分别为400 nm和500 nm照射时的二维光电场分布以及入射角分别为15°, 45°, 60°时包覆纳米银聚合物功能层横截面内的光电场强度分布; 计算得到了银纳米颗粒尺寸分别为10 nm, 20 nm和50 nm时以及分布在空穴传输层PEDOT:PSS的纳米银器件的光吸收; 并计算了斜入射时包覆纳米银的聚合物功能层光吸收. 理论分析表明: 聚合物功能层加入纳米银球后, 因为纳米银球的表面等离子体效应使入射光在功能层内散射增强而使器件内的光电场重新分布; 直径较大的纳米银颗粒能产生大角度的光散射, 更有利于聚合物功能层对光的吸收. 这里, 基于有机银盐还原法制备了纳米银颗粒并制备了银等离子体增强的聚合物太阳能电池, 其结构为: glass/ITO (～100 nm)/PEDOT:PSS (40 nm)/P3HT:PCBM (～100 nm)(nano-Ag)/LiF (1 nm)/Al (120 nm). 该器件与平板器件的性能对比实验证实: 通过在聚合物功能层内上引入纳米银颗粒可以有 效增加器件光吸收并改善器件电学性能, 器件外量子效率在520 nm处最大增加了17.9%. 关键词： 纳米银 表面等离子体共振 时域有限差分 聚合物太阳能电池