Thin layer laser bonding using spin-on-glass materials

We developed and characterized a new laser bonding process with a nano adhesive layer for transparent materials. The adhesive is spin-coated on a glass substrate and cured locally with a focused laser beam. The minimum viscosity of the adhesive is very low, so that a thin layer only a few hundred nanometers thick can be coated on a cover substrate. Laser irradiation from a Nd:YAG laser system with a wavelength of 1064 nm is employed as the curing source for the localized nano layer bonding process. The measured thickness of the bonding layer is in the range of 400 nm to 3 μm. This process can be applied to the nano or micro bonding of various transparent systems such as flat panel displays, biochips, and heat-sensitive microelectronics. We present experimental results and discuss the process characteristics.     

Large scale ordered topographical and chemical nano-features from anodic alumina templates

We have used ordered anodic alumina membranes as masks to create large scale ordered arrays of either holes or chemical islands on silica. Regularly spaced holes were obtained by direct etching of silica/silicon or glass substrates through the membranes used as etching masks. To create an array of chemically functional islands, the membrane is first glued on the substrate using a soft polymer and subsequently the polymer is etched gently though the mask. Finally organo-silane molecules are deposited through the alumina/polymer hybrid mask and the mask is removed chemically leaving nanoislands on the substrate. We anticipate that this technique will be useful in future biological and biomedical applications.     

Formation and Characteristics of Through Holes with Picosecond-Laser Helical Drilling on Alloy Material

Precision drilling can improve the microhole quality by yielding a reduced recast layer thickness and no heat-affected zone. We evaluate the quality of the helical drilled holes, e.g., the recast layer, microcracks, and circularity by scanning electron microscopy. We investigate the overlap rate of the laser beam and find its influence on the efficiency of through-hole machining. The microhole entrance, exit, and side walls are smooth, without an accumulation of spattering material and the formation of a recast layer and microcracks. Optimum parameters for drilling through holes on alloy material GH2132 are a thickness of 500 μm, a laser fluence of 3.06 · 10^?2 J/mm², a pulse repetition rate of 100 kHz, and a helical speed of 60 rev/s. The tapering phenomenon can be avoided by using a helical system with a rotating stage, and the hole circularity is fairly good. Picosecond laser helical drilling can be effective for manufacturing microholes with a high quality. The development of high-power picosecond laser would promote picosecond laser drilling with future industrial relevance.     

绝缘层LiF/Al电极对提高P-PPV发光器件发光性能的研究

为了提高聚合物电致发光器件中Ba（Ca）／Al阴极的稳定性,在该阴极与聚合物发光材料poly（2-（4-ethylexyl）phenyl-1,4-phenylene vinylene）（P-PPV）层之间插入一层7nm的LiF绝缘层,发光器件的发光性能在多项参数（发光器件的电压．电流特性、发光强度及外量子效率,以及电流效率等发光性能指标）上能够与工作性能优良但稳定性较差的Ba（Ca）／Al电极结构PLEDs器件的发光特性具有可比性。这对于研制高效率、高稳定的聚合物电致发光器件并最终将其用于商业目的,具有重大现实意义。     

Patterning of polypyrrole using a fluoropolymer as an adsorption-protecting molecule

Patterning of the conducting polymer polypyrrole (PPy) was achieved using perfluoropolyether (PFPE) as a mask material. The fluoropolymer PFPE has both hydrophobic and oleophobic properties that allowed the generation of passivated patterns against PPy deposition. We exploited these properties to achieve the selective micropattern deposition of PPy, by simple chemical oxidation in an aqueous solution. Using a microcontact printing method, circle patterns with exposed carboxyl groups were prepared, while other region was protected by PFPE. Chemical oxidation of PPy on the patterned substrate resulted in selective deposition of PPy onto only the carboxylate-terminated regions, with little deposition on the PFPE layer. Cross-sectional analysis of the pattern revealed that the PFPE layer would form a hole-like structure around the carboxylate-terminated surfaces, with PPy deposition only in the holes. The PFPE layer had little influence on surface smoothness, compared to other self-assembled monolayers. These results suggest that PFPE can be used as a protective material for the surface modification and patterning of various materials.     

平面光波导用于实时测试生化反应新方法的研究

在分析经典消逝波光波导生化传感器的基础上,为寻找性能更佳的传感器,探讨用更为直观的截止特性来进行生化传感。分别对三层及四层平板波导进行了研究,指出了作为基于截止特性的生化传感器三层波导结构存在的局限性。在理论上研究了可以在四层波导中使用变折射率材料来进行基于截止特性的生化传感,并给出了由空气隙、极化聚合物、高折射率薄膜、待测物组成的传感器结构示意图。用数值分析的方法绘出了此装置的灵敏度与高折射率薄膜厚度的关系曲线,并将它同经典消逝波光波导生化传感器灵敏度与薄膜厚度关系图进行了比较。结果表明,这种新型传感器理论上可以在较厚的薄膜结构中达到很高的灵敏度。     

Transfer bonding technology for batch fabrication of SMA microactuators

Currently, the broad market introduction of shape memory alloy (SMA) microactuators and sensors is hampered by technological barriers, since batch fabrication methods common to electronics industry are not available. The present study intends to overcome these barriers by introducing a wafer scale transfer process that allows the selective transfer of heat-treated and micromachined shape memory alloy (SMA) film or foil microactuators to randomly selected receiving sites on a target substrate. The technology relies on a temporary adhesive bonding layer between SMA film/foil and an auxiliary substrate, which can be removed by laser ablation. The transfer technology was tested for microactuators of a cold-rolled NiTi foil of 20 μm thickness, which were heat-treated in free-standing condition, then micromachined on an auxiliary substrate of glass, and finally selectively transferred to different target substrates of a polymer. For demonstration, the new technology was used for batch-fabrication of SMA-actuated polymer microvalves.     

基于InP/ZnS核壳结构量子点的色转换层设计及制作

提出了采用环境友好型InP/ZnS核壳结构量子点材料制备匹配蓝光Micro-LED阵列的量子点色转换层以实现Micro-LED阵列器件全彩化的技术方案。通过采用倒置式量子点色转换层方案,实现了InP/ZnS量子点材料和Micro-LED阵列的非直接接触,从而可以缓解LED中热量聚集导致的量子点材料发光主波长偏移、半峰宽展宽以及发光效率衰减等问题。量子点色转换层中内嵌PDMS聚合物柔性膜层,可以消除咖啡环效应,同时,色转换层中内嵌飞秒激光图案化处理的500 nm长波通滤光膜层,可以抑制蓝光从非蓝色像素单元出射。最后,实验制备了像素单元中心间距90μm的16×16 InP/ZnS量子点色转换层。该设计可以实现基于蓝光Micro-LED阵列的全彩色Micro-LED显示器件的制备,并且该制备方法可以降低全彩色Micro-LED阵列显示器件的制备成本。     

脉冲激光原位辐照对InAs/GaAs(001)量子点生长的影响

在InAs/GaAs(001)量子点生长过程中, 当InAs沉积量为0.9 ML时, 利用紫外纳秒脉冲激光辐照浸润层表面, 由于高温下In原子的不稳定性, 激光诱导的原子脱附效应被放大, 样品表面出现了原子层移除和纳米孔. 原子力显微镜测试表明纳米孔呈现以[110]方向为长轴(尺寸: 20-50 nm)、[110]方向为短轴(尺寸: 15-40 nm)的表面椭圆开口形状, 孔的深度为0.5-3 nm. 纳米孔的密度与脉冲激光的能量密度正相关. 脉冲激光的辐照对量子点生长产生了显著的影响: 一方面由于纳米孔的表面自由能低, 沉积的InAs优先迁移到孔内, 纳米孔成为量子点优先成核的位置; 另一方面, 孔外的区域因为In原子的脱附, 量子点的成核被抑制. 由于带有纳米孔的浸润层表面具有类似于传统微纳加工技术制备的图形衬底对量子点选择性生长的功能, 该研究为量子点的可控生长提供了一种新的思路.     

一种简单高效的制备硅纳米孔阵结构的方法

本文介绍了一种简单高效的制备硅纳米孔阵结构的方法. 利用激光干涉光刻技术, 结合干法和湿法刻蚀工艺, 直接将光刻胶点阵刻蚀为硅纳米孔阵结构, 省去了图形反转工艺中的金属蒸镀和光刻胶剥离等必要步骤, 在2英寸的硅 (001) 衬底上制备了高度有序的二维纳米孔阵结构. 利用干法刻蚀产生的氟碳有机聚合物作为湿法刻蚀的掩膜, 以及在干法刻蚀时对样品进行轻微的过刻蚀, 使SiO₂点阵图形下形成一层很薄的硅台面, 是本方法的两个关键工艺步骤. 扫描电子显微镜图片结果表明制备的孔阵图形大小均匀, 尺寸可控, 孔阵周期为450 nm, 方孔大小为200–280 nm. 关键词： 激光干涉光刻 纳米阵列 刻蚀 氟碳有机聚合物     

悬浮二维晶体材料反射光谱和光致发光光谱的周期性振荡现象

研究了在二氧化硅/硅衬底上制备的悬浮石墨烯以及二硫化钼的反射光谱以及悬浮二硫化钼的光致发光光谱.研究发现:悬浮多层石墨烯的反射光谱表现出明显的振荡现象,并且该振荡具有一定的周期性;振荡周期的大小不依赖于悬浮多层石墨烯的层数,而是随着衬底上沉孔深度(空气层厚度)的增加而减小.利用多重光学干涉模型可以解释这种振荡现象以及振荡周期随沉孔深度改变的变化趋势.该模型计算结果表明,只有当沉孔深度达到微米量级时这种振荡现象才会显著出现;并且可由振荡周期定量地确定出沉孔深度.对于悬浮的二硫化钼样品,其反射光谱和光致发光光谱也出现了类似的振荡现象.这表明这种振荡现象是在各种衬底上悬浮二维材料反射光谱和光致发光光谱的一种普遍性结果,也预示悬浮二维材料器件的电致发光光谱也会出现类似的振荡现象,对悬浮二维晶体材料的物理性质和器件性能研究具有一定的参考价值.     

Laser diode beam shaping by optical interference

We recently proposed a novel beam shaping technique that employs Lloyd’s mirror interference. In this study, we apply this technique to three commercial laser diodes: laser diodes used for optical pumping of solid-state lasers, for laser beam printers, and for laser displays. The elliptical output beams from these laser diodes could be transformed into nearly circular beams by inserting a mirror-polished GaAs substrate below the active layer of each laser diode and adjusting its height. The experimentally observed far-field patterns were predicted fairly well by numerical calculations based on Huygens’ integral. We confirmed that our beam shaping technique is applicable to laser diodes with various wavelengths and vertical beam divergence angles. We also describe the monolithic configuration of the beam shaping system, which can be fabricated by dry etching.     

Excimer laser patterned dielectric masks for the fabrication of diffractive optical elements by laser ablation

Masks for laser processing are generated by laser ablation patterning of dielectric layer systems. The application of these masks for the rapid fabrication of diffractive optical elements (DOEs) is presented. The diffractive optical elements are designed as phase-only elements, assuming an illumination with a plane wave. A continuous phase function is calculated using an iterative Fourier transform algorithm (IFTA). This continuous phase function is reduced to two or four levels by an iterative Fourier quantisation algorithm (IFQA) that is able to include focal power. The fabrication of the DOE is performed in a two-step process. First, a binary amplitude mask (or a set of masks for multi-level DOEs) is made by structured ablation of a highly reflective dielectric coating (HR 248 nm) from a fused silica substrate. This is accomplished by using an ArF excimer laser emitting at 193 nm, a wavelength that is sufficiently absorbed in the HfO₂/SiO₂-dielectric layer system, leading to precisely ablated mask structures. In the second step, this mask is used in a 4:1 projection configuration to generate a surface profile in a polymer substrate by ablation at 248 nm. The depth modulation can be defined by adjusting laser fluence and pulse number. Examples of DOEs ablated in polycarbonate are shown and their performance is characterised.     

激光烧蚀制备分布反馈式有机激光器件

采用激光烧蚀的方法结合激光全息技术,直接在高分子聚合物MEH-PPV薄膜表面烧蚀光栅结构,制备了分布反馈式有机激光器。这一方法具有工艺简单、光栅参数的可控性和重复性好等优点。器件MEH-PPV的膜厚是400 nm。利用波长为355 nm的Nd-YAG纳秒激光器进行单脉冲烧蚀,获得的光栅周期和光栅高度分别为370 nm和 100 nm。利用飞秒激光放大器作为泵浦源激射DFB激光器件,得到激射阈值约为182 μJ·cm^-2·pulse^-1,光谱的波峰约在609 nm处,半高宽为4.2 nm。通过改变两光束的夹角获得了周期为360, 370, 380, 390 nm的光栅,它们对应的激光波峰分别为602.91, 609.24, 613.26, 619.01 nm。     

Analysis of materials modifications caused by UV laser micro drilling of via holes in AlGaN/GaN transistors on SiC

Pulsed UV laser drilling can be applied to fabricate vertical electrical interconnects (vias) for AlGaN/GaN high electron mobility transistor devices on single-crystalline silicon carbide (SiC) substrate. Through-wafer micro holes with a diameter of 50-100 μm were formed in 400 μm thick bulk 4H-SiC by a frequency-tripled solid-state laser (355 nm) with a pulse width of ≤30 ns and a focal spot size of ∼15 μm. The impact of laser machining on the material system in the vicinity of micro holes was investigated by means of micro-Raman spectroscopy and transmission electron microscopy. After removing the loosely deposited debris by etching in buffered hydrofluoric acid, a layer of <4 μm resolidified material remains at the side walls of the holes. The thickness of the resolidified layer depends on the vertical distance to the hole entry as observed by scanning electron microscopy. Micro-Raman spectra indicate a change of internal strain due to laser drilling and evidence the formation of nanocrystalline silicon (Si). Microstructure analysis of the vias’ side walls using cross sectional TEM reveals altered degree of crystallinity in SiC. Layers of heavily disturbed SiC, and nanocrystalline Si are formed by laser irradiation. The layers are separated by 50-100 nm thick interface regions. No evidence of extended defects, micro cracking or crystal damage was found beneath the resolidified layer. The precision of UV laser micro ablation of SiC using nanosecond pulses is not limited by laser-induced extended crystal defects.     

Fabrication of a random convex-lens-shaped microstructure using a laser ablation

A convex-lens-shaped microstructure with a diameter of 50 μm on a metallic mold substrate was fabricated in this paper. A laser ablation process, in which the laser beam was focused and irradiated on the metallic mold substrate in order to remove a part of the substrate, was used for that. The convex-lens-shaped microstructure has not been reported in any studies of microstructure using the laser ablation process. It was proposed that the unbalanced ablation and re-adherence of the melted particles was the processing mechanism of the convex lens shape. The convex-lens-shaped microstructure fabricated in this study is smaller than the focused spot. It was expected that the same convex-lens-shaped microstructure can be fabricated even if the focused spot size is increased, so long as the fluence of the laser can be maintained. Therefore, the method proposed in this paper will improve the low processing speed, which has been the problem of a laser ablation process. The fabricated convex-lens-shaped microstructure on the metallic substrate can be used as the mold for the micro lens.     

Coulomb binding of electrons to multiply charged GaSb/GaAs self-assembled quantum dots

We explore the Coulomb binding of electrons to holes confined to type-II GaSb self-assembled quantum dots. We demonstrate that at low laser power electrons are more weakly bound to holes trapped by the dots than to holes in the wetting layer. On the other hand, at high laser power the hydrogenic binding energy of dot excitons increases by more than a factor of two, and so exceeds that of wetting layer excitons. We attribute this to the strong binding of ‘core’ electrons to dots that are highly charged with holes by optical pumping.     

Investigation of the structure and the physical properties of nickel-phosphorus ultra-black surfaces

Ultra-black materials with low reflectivity can be applied in many fields of science and technology. We deposited nickel-phosphorus alloys (Ni-P) on copper substrate with the electroless plating method and etched the electroless plating with nitric acid in order to build ultra-black surface. On the one hand, the components of the Ni-P ultra-black surface layer were investigated by XRF and XPS. SEM represented that there are innumerable conical holes with the different diameters on the surface. XRD showed that the whole surface has become amorphous. On the other hand, compared to electroless blackening film by oxidation and black chromium plating materials, the Ni-P ultra-black surface showed lower wavelength dependence and lower reflectance in the range of 380–780 nm. In addition, the temperature of the sample with the Ni-P ultra-black surface increased more highly and quickly compared to the black chromium plating film after exposure in an IR laser for about half an hour. PACS 68.55.-a; 82.80.Kq; 78.68.+m     

Shadowgraphy investigation of laser-induced forward transfer: Front side and back side ablation of the triazene polymer sacrificial layer

Thin films of a photodecomposible triazene polymer are used as sacrificial layer for the micro-deposition of sensitive materials by laser-induced forward transfer. To understand the ablation process of this sacrificial layer, the ultraviolet laser ablation of triazene films was investigated by time-resolved shadowgraphy. Irradiation from the film side shows a complete decomposition into gaseous fragments, while ablation through the substrate causes ejection of a solid flyer of polymer. The occurence of the flyer depends on the film thickness as well as on the applied fluence, and a compact flyer is obtaind when these two parameters are optimized.     

Experimental study on laser cleaning of paint layer on white marble surface北大核心CSCD

In order to effectively remove the surface paint of the cultural relic of white marble, the area extrapolation method and laser-induced plasma spectroscopy (LIPS) method were used to obtain the ablation threshold power of the gold, silver paint layer and white marble surface. On the basis of this, the optimal laser power for removing paint without damaging the white marble substrate was determined. The image processing method was used to study the cleaning degree and variation trend of cleaning rate of the gold and silver paint on the surface of 10 mm×10 mm white marble by laser cleaning, and the optimal laser spot overlap rate and the optimal cleaning times were obtained. Finally, the image processing method was used to evaluate the cleaning effect of laser cleaning of paint layer on the white marble surface. More than 93% of the cleaning degree shows that the synergistic use of the area extrapolation method, LIPS method and image processing method can effectively improve the laser cleaning efficiency of the paint layer on white marble surface. Copyright ©2022 Journal of Applied Optics. All rights reserved.