绿色二氧化碳超临界清洗设备

半导体IC清洗技术由于水溶液的表面张力大而无法进入硅片上器件的狭缝与电路线条间隙中进行清洗,同时不易干燥,且干燥时会造成二次污染,从而使得整个工艺耗水量大且清洗效果不佳.以超临界流体为媒体的清洗技术是克服以上缺点的最佳途径.提出并研制了一种绿色二氧化碳超临界清洗设备,它利用超流体二氧化碳来进行硅片的清洗和无张力的超临界干燥,而且该设备还可以对微细结构进行无粘连的牺牲层释放.设备的成本低,二氧化碳使用量少,并且可以循环使用,属于绿色无污染的新型半导体清洗设备.     

绿色二氧化碳超临界清洗设备

半导体IC清洗技术由于水溶液的表面张力大而无法进入硅片上器件的狭缝与电路线条间隙中进行清洗,同时不易干燥,且干燥时会造成二次污染,从而使得整个工艺耗水量大且清洗效果不佳.以超临界流体为媒体的清洗技术是克服以上缺点的最佳途径.提出并研制了一种绿色二氧化碳超临界清洗设备,它利用超流体二氧化碳来进行硅片的清洗和无张力的超临界干燥,而且该设备还可以对微细结构进行无粘连的牺牲层释放.设备的成本低,二氧化碳使用量少,并且可以循环使用,属于绿色无污染的新型半导体清洗设备.     

超临界二氧化碳(SCCO_2)无损伤清洗

简要回顾了传统RCA清洗工艺的历史背景和清洗原理,介绍了RCA清洗随着工艺节点减小存在的局限性。在此基础上,阐述了以超临界二氧化碳(SCCO2)为媒质的新型清洗工艺,该工艺流程可以同时实现超临界流体清洗和干燥。结合自主研发的绿色环保二氧化碳超临界半导体清洗设备,论述了利用SCCO2对Si片进行无损伤清洗的工艺原理和工艺流程。分析了近年来国内外对SCCO2清洗的研究进展,展示了其在清洗方面的巨大潜力以及在微电子行业应用中的有效性和优越性,其研究成果有利于推动下一代清洗工艺的发展。     

二氧化碳雪清洗技术

本文要解答的问题是：1，二氧化碳雪清洗剂是怎样形成的?它与其它二氧化碳清洗剂有何不同?2，二氧化碳雪的清洗机理是怎样的?3，二氧化碳雪清洗剂有那些实际应用?4，使用二氧化碳雪清洗剂时应该注意那些问题?     

超临界流体在微电子器件清洗中的应用

本文介绍了超临界流体及其特性、超，临界流体清洗工艺及特点。结合现有的研究结果，论述了在微电子加工中应用超临界流体的可行性和有效性。并以硅片的清洗和干燥为例，说明了超临界CO2的应用优势，指出了超临界流体在微电子技术中尚需要解决的技术问题及其广阔的应用前景。     

半导体晶圆自动清洗设备

主要介绍了半导体晶圆RCA清洗工艺以及半导体晶圆自动清洗设备在生产中的结构设计和应用情况。在工艺模块和伺服机械传送方面体现了湿法化学的独创性和实用性。解决了晶圆清洗技术中晶圆清洗效果的一致性,在半导体IC、材料、器件领域的清洗工艺中得到广泛使用,具有极大的社会经济效益。     

IC业带动半导体清洗设备市场增长

有数据表明，2003年，全球清洗设备的总体市场为10亿美元，今年有望达到14亿美元，明年将会达到20亿美元以上。而我国集成电路产业的飞速发展，无疑为IC清洗设备提供商带来巨大的市场。     

模块化设计在半导体湿法清洗设备中的应用

论述了半导体湿法清洗设备的特点及模块化设计方法在半导体湿法清洗设备中的应用方式,阐明了模块化设计方法在半导体湿法清洗设备中应用的特点及注意事项。     

盛美半导体清洗设备打入韩国市场

日前,盛美半导体设备(上海)有限公司宣布第一台Ultra C 12英寸单片兆声波清洗设备已经销售给韩国存储器制造巨头,这是本土的半导体设备厂商首次打入国际主流半导体厂商的供应链。Ultra C采用盛美的空间交变相     

太阳能电池全自动清洗制绒设备

该太阳能电池片制绒设备应用于磷扩散前的去除表面损伤层、制备“金字塔”绒面、酸洗的湿法步骤。利用了液晶清洗的风刀技术,整个清洗制绒过程全程自动化控制。机台具有药液自动补液和自动循环功能,可以保证工艺过程中药液浓度和温度的稳定性、均一性。     

Micro-Electrode with Fast Mass Transport for Enhancing Selectivity of Carbonaceous Products in Electrochemical CO2 Reduction

During electrochemical carbon dioxide (CO₂) reduction on copper electrodes in an aqueous electrolyte, one of the key challenges is the competition between hydrogen evolution and CO₂ reduction, especially under large current density. Here, micro-electrodes are designed with a copper wire as the substrate, which shows improved mass transport compared to the planar electrode. The Faradaic efficiency for C₂₊ products reaches 79% with a partial geometric current density − 77.7 mA cm⁻² on Cu₂O nanowire/micro-electrode, which is 3.7 times higher than Cu₂O nanowire/planar-electrode. The authors also designed CuO and metallic Cu with micro-electrode as substrate and observed enhanced selectivity for carbonaceous products, proving the universality of the concept. The improved activity is attributed to the fast mass transport of CO₂ to the catalytic interface and thus the suppression of hydrogen production.     

轴快流CO2激光脱漆的研究

采用轴快流CO2激光对金属表面的油漆进行清洗实验,研究了激光功率密度、扫描速度及扫描道间搭接量对脱漆效果的影响。结果表明：脱漆时,激光功率密度存在着起始清洗阈值、完全清洗阈值和基体损伤阈值;增加激光功率,可获得更高的扫描速度和更好的清洗效果;扫描道间搭接量大于40％时,可实现漆板的大面积清洗。选取合适的工艺参数,能完全清除漆板表面的油漆而不损伤基体,并可获得高的清洗效率和好的清洗效果。     

Supercritical CO2: A Clean and Low Temperature Approach to Blending PDLLA and PEG

The unique combination of the gas like viscosity and liquid like density of supercritical CO₂ (scCO₂) is exploited to blend poly(D,L‐lactic acid) (P_DLLA) and poly(ethylene glycol) (PEG) at near ambient temperatures. This novel process lowers the polymer blend viscosity and also permits incorporation of thermally and solvent labile protein based drugs. A series of blends are prepared with agitation in scCO₂. Differential scanning calorimetry (DSC) data shows that miscible blends can be produced at moderate temperatures. A surprising region of miscibility is revealed between 8 and 25%w/w PEG. The properties of this miscible region are probed with high pressure parallel plate rheological studies, showing that the viscosity in scCO₂ is directly related to the miscibility. Using the particles from gas saturated solutions (PGSS) method, microparticles of these P_DLLA/PEG blends are produced using scCO₂ and it is determined that the yields obtained are proportional to the miscibility of the polymers. Thus scCO₂ provides a unique route to low temperature, solvent free processing that accesses a window of miscibility that has not previously been observed. Finally, DSC analyses of these sprayed microparticles confirm the presence of the same high miscibility region observed in the bulk samples prepared under supercritical conditions.     

大功率CO2激光器脉冲电源研究

本文论述了直流高压与高频脉冲电源相叠加，构成高频、高压脉冲电源，并使其对CO2激光器进行放电实验，研究了同条件下的放电参数与功率。     

紫外预电离TEA CO2激光器的实验研究

介绍了采用火花针紫外预电离高重复频率TEA CO2激光器系统的结构及其实验研究结果.该激光器的脉冲放电行为由旋转火花开关和高压脉冲触发器进行控制,并通过自动翻转电路实现对称张氏电极之间的均匀辉光放电.通过改变激光器工作气体气压、充气配比及注入能量,测量单脉冲输出能量.实验结果表明,激光器的输出能量及电光转换效率随CO2或N2充气压改变存在最佳点,最佳点与注入能量有关.输出能量及电光转换效率与总充气压呈线性关系.该激光器在单脉冲放电条件下比在高重复频率时能够注入更多的能量和充入更高的气压,脉冲能量最大输出可达53J以上,经过进一步地参数优化,该激光器最高的电光转换效率达到17%以上.     

轴快流CO2激光脱漆的实验研究

为了获得工艺参数对激光清洗金属表面油漆层效果的影响,采用波长为10.6μm的轴快流CO2激光去除铝板表面的油漆层,研究了激光功率密度、扫描速度及扫描道间搭接量与油漆去除效果之间的关系.结果表明,脱漆时,激光功率密度存在着起始清洗阈值、完全清洗阈值和基体损伤阈值;增加激光功率,可获得更高的扫描速度和更好的清洗效果;扫描道间搭接量大于40％时,可实现漆板的大面积清洗.     

Highly Tunable Syngas Product Ratios Enabled by Novel Nanoscale Hybrid Electrolytes Designed for Combined CO2 Capture and Electrochemical Conversion

Coupling renewable energy with the electrochemical conversion of CO₂ to chemicals and fuels has been proposed as a strategy to achieve a new circular carbon economy and help mitigate the effects of anthropogenic CO₂ emissions. Liquid-like Nanoparticle Organic Hybrid Materials (NOHMs) are composed of polymers tethered to nanoparticles and are previously explored as CO₂ capture materials and electrolyte additives. In this study, two types of aqueous NOHM-based electrolytes are prepared to explore the effect of CO₂ binding energy (i.e., chemisorption versus physisorption) on CO₂ electroreduction over a silver nanoparticle catalyst for syngas production. Poly(ethylenimine) (PEI) and Jeffamine M2070 (HPE) are ionically tethered to SiO₂ nanoparticles to form the amine-containing NOHM-I-PEI and ether-containing NOHM-I-HPE, respectively. At less negative cathode potentials, PEI and NOHM-I-PEI-based electrolytes produce CO at higher rates than 0.1 molal. KHCO₃ due to favorable catalyst-electrolyte interactions. Whereas at more negative potentials, H₂ production is favored because of the carbamate electrochemical inactivity. Conversely, HPE and NOHM-I-HPE-based electrolytes display poor CO₂ reduction performance at less negative potentials. At more negative potentials, their performance approached that of 0.1 molal. KHCO₃, highlighting how the polymer functional groups of NOHMs can be strategically selected to produce value-added products from CO₂ with highly tunable compositions.