Enhancement of resolution and quality of nano-hole structure on GaN substrates using the second-harmonic beam of near-infrared femtosecond laser

By using a second harmonic of near infrared femtosecond (fs) laser (λ=387 nm, 150 fs) with high NA objective lens, fabrication resolution has been greatly improved in nano-fabrication of wide band-gap semiconductor gallium nitride (GaN). We have carried out a wet-chemical-assisted fs laser ablation method, in which the laser beam is focused onto a single-crystal GaN substrate immersed in a concentrated hydrochloric (HCl) acid solution. A two-step processing involving irradiation with a fs laser beam in air followed by wet chemical treatment is also performed for comparison. In the wet-chemical-assisted ablation, theoretical diameters of ablation craters are calculated as a function of pulse energy by assuming that the reaction is based on two-photon absorption. In lower energy, the calculated curve is close to the experimental value, while the actual measured diameters in the region of higher energy are larger than calculated values. In the condition of the highest fabrication resolution, we obtained ablation craters smaller than 200 nm at full width at half maximum. We have also demonstrated the fabrication of two-dimensional (2D) periodic nanostructures on surface of a GaN substrate using the second harmonic single fs-laser pulse. Uniform ablation craters with the size as small as 410 nm in diameter are arranged with a periodicity of 1 μm. Such structures are applicable to 2D photonic crystals which improve the light extraction efficiency for blue LEDs in the near future.     

铒激光脉冲消融泌尿结石和胆结石比较研究

利用光学弱相干显微成像系统对脉冲激光消融硬生物组织后形成的凹坑二维和三维形貌进行了扫描,分析了Erbium∶YAG激光脉冲消融生物硬组织特性.结果表明：相同激光参量条件下,消融胆结石比消融泌尿结石具有更高的消融效率|消融胆结石或消融泌尿结石时,脉冲能量越大,消融效率越高|消融效率提高主要体现在凹坑表面直径更宽、高度更深、体积更大|光学弱相干显微成像技术比光学弱相干光层析成像技术测量准确度提高约一个量级,更适合于测量脉冲激光消融生物硬组织后形成的凹坑形貌.     

Fabrication of microchannels in single-crystal GaN by wet-chemical-assisted femtosecond-laser ablation

We investigated micro- and nano-fabrication of wide band-gap semiconductor gallium nitride (GaN) using a femtosecond (fs) laser. Nanoscale craters were successfully formed by wet-chemical-assisted fs-laser ablation, in which the laser beam is focused onto a single-crystal GaN substrate in a hydrochloric acid (HCl) solution. This allows efficient removal of ablation debris produced by chemical reactions during ablation, resulting in high-quality ablation. However, a two-step processing method involving irradiation by a fs-laser beam in air followed by wet etching, distorts the shape of the crater because of residual debris. The threshold fluence for wet-chemical-assisted fs-laser ablation is lower than that for fs-laser ablation in air, which is advantageous for improving fabrication resolution since it reduces thermal effects. We have fabricated craters as small as 510 nm by using a high numerical aperture (NA) objective lens with an NA of 0.73. Furthermore, we have formed three-dimensional hollow microchannels in GaN by fs-laser direct-writing in HCl solution.     

Femtosecond laser ablation from dielectric materials: Comparison to arc discharge erosion

After explosive ablation from sapphire crystals by linearly polarised laser pulses, regular structures are observed on the bottom of the ablation pit. These structures do not comply with conventional ripple patterns. Instead, they more nearly resemble wickerwork, aligned perpendicular to the laser beam polarisation. A similar morphology is obtained by arc discharge erosion at AgCdO electrodes, suggesting that an explosive laser ablation may be characterised by high electric field effects and self organisation in the ablation craters.     

Effect of pulse repetition rate and number of pulses in the analysis of polypropylene and high density polyethylene by nanosecond infrared laser induced breakdown spectroscopy

Pulse repetition rates and the number of laser pulses are among the most important parameters that do affect the analysis of solid materials by laser induced breakdown spectroscopy, and the knowledge of their effects is of fundamental importance for suggesting analytical strategies when dealing with laser ablation processes of polymers. In this contribution, the influence of these parameters in the ablated mass and in the features of craters was evaluated in polypropylene and high density polyethylene plates containing pigment-based PbCrO₄. Surface characterization and craters profile were carried out by perfilometry and scanning electron microscopy. Area, volume and profile of craters were obtained using Taylor Map software. A laser induced breakdown spectroscopy system consisted of a Q-Switched Nd:YAG laser (1064 nm, 5 ns) and an Echelle spectrometer equipped with ICCD detector were used. The evaluated operating conditions consisted of 10, 25 and 50 laser pulses at 1, 5 and 10 Hz, 250 mJ/pulse (85 J cm⁻²), 2 μs delay time and 6 μs integration time gate. Differences in the topographical features among craters of both polymers were observed. The decrease in the repetition rate resulted in irregular craters and formation of edges, especially in polypropylene sample. The differences in the topographical features and ablated masses were attributed to the influence of the degree of crystallinity, crystalline melting temperature and glass transition temperature in the ablation process of the high density polyethylene and polypropylene. It was also observed that the intensities of chromium and lead emission signals obtained at 10 Hz were two times higher than at 5 Hz by keeping the number of laser pulses constant.     

Enhancement of pulsed laser ablation assisted with continuous wave laser irradiation

Continuous wave(CW) laser irradiation is employed to enhance the pulsed laser ablation of silicon and stainless steel(316 L)samples. Different surface temperatures generated by the CW laser irradiation are set as the initial working circumstance for the pulsed laser ablation. The diameter and depth of laser-ablated craters are measured to study threshold fluence, pulse incubation coefficient and ablation rate under different surface temperatures. Numerical simulation employing Heat Transfer in Solid and Deformed Geometry Interface modules in COMSOL is performed to estimate ablation rate theoretically based on Hertz-Knudsen equation. The realized crater-related data are analyzed to further obtain their dependences on surface temperature. The parametric and morphological studies indicate that the weakened plasma shielding effect and thermal diffusion in the ablated region induced by the CW laser irradiation lead to the enhanced pulsed laser ablation significantly.     

Background gas collisional effects on expanding fs and ns laser ablation plumes

The collisional effects of a background gas on expanding ultrafast and short pulse laser ablation plumes were investigated by varying background pressure from vacuum to atmospheric pressure levels. For producing Cu ablation plumes, either 40 fs, 800 nm pulses from a Ti: Sapphire laser or 6 ns, 1,064 nm pulses from a Nd:YAG laser were used. The role of background pressure on plume hydrodynamics, spectral emission features, absolute line intensities, signal to background ratios and ablation craters was studied. Though the signal intensities were found to be maximum near to atmospheric pressure levels, the optimum signal to background ratios are observed ~20–50 Torr for both ns and fs laser ablation plumes. The differences in laser–target and laser–plasma couplings between ns and fs lasers were found to be more engraved in the crater morphologies and plasma hydrodynamic expansion features.     

Soft picosecond X-ray laser nanomodification of gold and aluminum surfaces

Experimental and theoretical investigations of aluminum (Al) and gold (Au) surface modification by soft X-ray laser pulse are presented. Well-polished samples of Al and Au are irradiated by ps-duration pulse with wavelength of 13.9 nm at the energy range of 24–72 nJ. Differences in the melting and the ablation processes for those materials are observed. It is shown that at low laser pulse energy, the nanoscale ripples on the surface may be induced by melting without following ablation. In that case, the nanoscale changes in the surface are caused by splash of molten metal under gradient of fluence. At higher laser pulse energy, the ablation process occurs and craters are formed on the surface. However, the melting determines the size of the modified surface at all ranges of the laser energies. For interpretation of experimental results, the atomistic simulations of melting and ablation processes in Al and Au are provided. The calculated threshold fluencies for melting and ablation are well consistent with measured ones.     

A detailed study through the focal region of near-threshold single-shot femtosecond laser ablation nano-holes in borosilicate glass

A detailed study of the morphology of nano-craters drilled in borosilicate glass by single shot femtosecond laser ablation near the ablation threshold has been performed by scanning electron microscopy, atomic force microscopy and scanning electron microscopy imaging after focused ion beam sectioning. The influence of the numerical aperture (NA = 0.4 and 0.8), the pulse energy (16 nJ < E_p < 600 nJ) and the position of the specimen surface into the focal region were systematically investigated, leading to nanometric or micrometric scales in every spatial dimension. The nanocrater’s size is not restricted by the diffraction limit but determined by the laser pulse stability and the material properties. If the beam is focused inside the glass, two craters are drilled, shaping very distinct morphologies. Their dimensions have been studied in details and different relationships have been proposed for the evolutions of the depths and of the various diameters of these craters as functions of the pulse energy, the numerical aperture and the position of specimen surface in the beam-material interaction region. It is suggested that the long, thin conical profile with very high aspect ratio of the secondary craters is due to a spontaneous reshaping of the beam which transforms the incoming Gaussian pulse into a Gaussian-Bessel pulse. As proposed in the developed model the geometry of the second craters seems to be connected with the one of the main craters.     

Self-organized structure formation on the bottom of femtosecond laser ablation craters in glass

Using femtosecond laser pulses (150 fs duration at λ=400 nm) for ablation experiments on glass samples with and without enclosed silver nanoparticles, characteristic sub-micrometer surface topologies are observed on the flat bottom of the ablation craters produced. The structures show increasing order towards periodic ripple-like features with an increasing number of successive pulses applied. Depending on sample and experimental conditions, the spatial periodicity varies between 340 nm and 1900 nm, despite a constant laser wavelength and incidence angle. An analysis based on electron and atomic force microscopy of the structures indicates that the formation of the ripples in this work is due to instabilities and self-organization of the surface relaxation after ablation. PACS 81.16.Rf; 42.70.-a     

Femtosecond laser ablation characteristics of nickel-based superalloy C263

Femtosecond laser (180 fs, 775 nm, 1 kHz) ablation characteristics of the nickel-based superalloy C263 are investigated. The single pulse ablation threshold is measured to be 0.26±0.03 J/cm² and the incubation parameter ξ=0.72±0.03 by also measuring the dependence of ablation threshold on the number of laser pulses. The ablation rate exhibits two logarithmic dependencies on fluence corresponding to ablation determined by the optical penetration depth at fluences below ∼5 J/cm² (for single pulse) and by the electron thermal diffusion length above that fluence. The central surface morphology of ablated craters (dimples) with laser fluence and number of laser pulses shows the development of several kinds of periodic structures (ripples) with different periodicities as well as the formation of resolidified material and holes at the centre of the ablated crater at high fluences. The debris produced during ablation consists of crystalline C263 oxidized nanoparticles with diameters of ∼2–20 nm (for F=9.6 J/cm²). The mechanisms involved in femtosecond laser microprocessing of the superalloy C263 as well as in the synthesis of C263 nanoparticles are elucidated and discussed in terms of the properties of the material.     

A method for rapid measurement of laser ablation rate of hard dental tissue

The aim of the study reported here is the development of a new method which allows rapid and accurate in-vitro measurements of three-dimensional (3D) shape of laser ablated craters in hard dental tissues and the determination of crater volume, ablation rate and speed. The method is based on the optical triangulation principle. A laser sheet projector illuminates the surface of a tooth, mounted on a linear translation stage. As the tooth is moved by the translation stage a fast digital video camera captures series of images of the illuminated surface. The images are analyzed to determine a 3D model of the surface. Custom software is employed to analyze the 3D model and to determine the volume of the ablated craters. Key characteristics of the method are discussed as well as some practical aspects pertinent to its use. The method has been employed in an in-vitro study to examine the ablation rates and speeds of the two main laser types currently employed in dentistry, Er:YAG and Er,Cr:YSGG. Ten samples of extracted human molar teeth were irradiated with laser pulse energies from 80 mJ to the maximum available energy (970 mJ with the Er:YAG, and 260 mJ with the Er,Cr:YSGG). About 2000 images of each ablated tooth surface have been acquired along a translation range of 10 mm, taking about 10 s and providing close to 1 million surface measurement points. Volumes of 170 ablated craters (half of them in dentine and the other half in enamel) were determined from this data and used to examine the ablated volume per pulse energy and ablation speed. The results show that, under the same conditions, the ablated volume per pulse energy achieved by the Er:YAG laser exceeds that of the Er,Cr:YSGG laser in almost all regimes for dentine and enamel. The maximum Er:YAG laser ablation speeds (1.2 mm³/s in dentine and 0.7 mm³/s in enamel) exceed those obtained by the Er,Cr:YSGG laser (0.39 mm³/s in dentine and 0.12 mm³/s in enamel). Since the presented method proves to be easy to use and allows quite rapid measurements it may become a valuable tool to study the influence of various laser parameters on the outcome of laser ablation of dental tissues.     

Wavelength dependence of soft tissue ablation by using pulsed lasers

Pulsed laser ablation of soft biological tissue was studied at 10.6-, 2.94-, and 2.08-μm wavelengths. The ablation effects were assessed by means of optical microscope, the ablation crater depths were measured with reading microscope. It was shown that Er:YAG laser produced the highest quality ablation with clear,sharp cuts following closely the patial contour of the incident beam and the lowest fluence threshold. The pulsed CO2 laser presented the moderate quality ablation with the highest ablation efficiency. The craters drilled with Ho:YAG laser were generally larger than the incident laser beam spot, irregular in shape, and clearly dependent on the local morphology of biotissue. The blation characteristics, including fluence threshold and ablation efficiency, varied substantially with wavelength. It is not evident that water is the only dominant chromophore in tissue.     

Pulsed laser ablation of solids: transition from normal vaporization to phase explosion

We present experimental data on mass removal during 1064-nm pulsed laser ablation of graphite, niobium and YBa₂Cu₃O_7-δ superconductor. Evidence for the transition from normal vaporization to phase explosion has been obtained for these materials, showing a dramatic increase in the ablation rate at the threshold fluences of 22, 15 and 17.5 J/cm², respectively. A numerical model is used to evaluate the ablation rate and temperature distribution within the targets under near-threshold ablation conditions. The results are analyzed from the viewpoint of the vaporized matter approaching the critical point with increasing laser fluence. A possible means of the estimating the thermodynamic critical temperature from the data for nanosecond laser ablation is discussed. It is suggested that the critical temperature of refractory metals is higher than that estimated with the traditional methods due to plasma effects. An analogy with the boiling crisis (the transition from nucleate to film boiling) is drawn to explain the formation of ablation craters with spallated edges. Received: 18 May 2000 / Accepted: 14 July 2000 / Published online: 22 November 2000     

Laser-induced ablation and crater formation at high laser flux

Laser ablation and crater formation have been studied on a copper target using a 10 Hz Nd:YAG laser system delivering pulses up to 100 mJ in 40 ps with a flux on target F?≤?5000 J/cm². Crater dimensions were measured using optical microscope or scanning electron microscope. In order to understand the process of crater formation, we considered various theoretical models present in the literature and revised them taking into account the occurrence of plasma phenomena, which are important at the intensities used in this experiment. We also compared our experimental results with other results obtained at the PALS laboratory, using a 0.44 μm wavelength laser and much higher laser intensities. Finally, we explore the possibility of extending the information derived from laser-produced craters to other types of craters.     

Crater geometry characterization of Al targets irradiated by single pulse and pulse trains of Nd:YAG laser in ambient air and water

High intensities laser pulses are capable to generate a crater when irradiating metal targets. In such condition, after each irradiation significant ablation occurs on the target surface and as a result a crater is formed. The crater characterization is very important specifically for some applications such as micromachining. In this paper, the crater formation in metal targets was studied experimentally. The planar aluminum 5052 targets were irradiated by frequency doubled (532 nm), Q-switched Nd:YAG (∼6 ns) laser beam in ambient air and distilled water. A crater was produced after each irradiation and it was characterized by an optical microscope. Different laser intensities as well as pulse trains were applied for crater formation. The effects of laser characteristics in crater geometry were examined. The depth of the craters was measured by optical microscope and the diameter (width) was characterized by processing of the crater image. The results were explained in terms of ablation threshold and plasma shielding. The results show that the crater geometry extremely depends on the laser pulse intensity, the number of laser pulses, and ambient.     

Single-pulse drilling study on Au,Al and Ti alloy by using a picosecond laser

Picosecond laser single pulse ablation of Au, Al and Ti alloy (Ti6Al4V) was experimentally investigated with a laser pulse width of 10 ps at a wavelength of 1064 nm for potential industrial micromachining applications. The diameters, depths and morphologies of the drilled craters were studied. Two novel phenomena were found: as hole diameters decreased with fluence, a change of slope of the trend line indicated a change in ablation mechanism for Al and Ti alloy, metallic materials with short electron-phonon coupling times (<10 ps), while Au showed no such transition: an isolated island structure was also observed on Au due to significant melt expulsion. A one-dimensional two-temperature model has been used to discriminate different ablation phenomena. It is shown that metallic materials with different electron–phonon coupling constant have different ablation characteristics in the ps regime. This study could be very helpful for metallic material micromachining with high repetition rate ps lasers pulses which indicates that high throughput may be achieved as well as good machining quality.     

Ultrashort-pulse laser ablation of indium phosphide in air

Ablation of indium phosphide wafers in air was performed with low repetition rate ultrashort laser pulses (130 fs, 10 Hz) of 800 nm wavelength. The relationships between the dimensions of the craters and the ablation parameters were analyzed. The ablation threshold fluence depends on the number of pulses applied to the same spot. The single-pulse ablation threshold value was estimated to be φ_th(1)=0.16 J/cm². The dependence of the threshold fluence on the number of laser pulses indicates an incubation effect. Morphological and chemical changes of the ablated regions were characterized by means of scanning electron microscopy and Auger electron spectroscopy. Received: 30 May 2000 / Accepted: 31 May 2000 / Published online: 23 August 2000     

Enhancement of ablation rate and production of colloidal nanoparticles by irradiation of metals with nanosecond pulsed laser in presence of external electric field

This paper presents the results of experimental study on the effect of electric field on the ablation rate during the nanosecond pulsed laser ablation of aluminum and copper in deionized water. The effect of electric field strength on the material removal rate and its mechanisms were investigated both in the electric field parallel and perpendicular to the laser beam path schemes. The ablation rate was estimated by measuring the dimensions of craters on the target induced by laser. The crater dimensions and optical properties of the produced colloidal nanoparticles were characterized by means of optical microscopy and UV–Vis absorption spectroscopy, respectively. The results indicate that pulsed laser ablation in the presence of an electric field significantly leads to higher material removal rate. The experimental results also confirm that the crater geometry extremely depends on the direction of the electric field with respect to the laser beam direction. The UV–Vis spectra show that the nanoparticles production efficiency increases with increasing the electric field strength.     

Bubble creation and collapse during excimer laser ablation of weak absorbing polymers

We present evidence suggesting that XeCl laser ablation of a weakly absorbing poly-methyl-methacrylate (PMMA) polymer, done by chemical, thermal bond breaking of the polymer chain or optical breakdown of the material, which involves plasma generation, creates a cloud of small asymmetric near the surface bubbles, which subsequently expand and aggregate during the same laser pulse duration or in subsequent pulses depending on the laser pulse energy. When a critical volume is reached each bubble collapses in a high pressure and temperature central point and rebounds ejecting a hot jet of material on the non-irradiated area of the polymer and creating craters on the surface. A characteristic bipolar pressure wave corresponding to the bubble collapse, explosion and rebound is observed. The number density of the craters on the surface is a function of the laser pulse sequence number and the laser pulse energy density.